US3579917A - Polishing machine - Google Patents

Polishing machine Download PDF

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Publication number
US3579917A
US3579917A US776023A US3579917DA US3579917A US 3579917 A US3579917 A US 3579917A US 776023 A US776023 A US 776023A US 3579917D A US3579917D A US 3579917DA US 3579917 A US3579917 A US 3579917A
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United States
Prior art keywords
chamber
central opening
load plate
fluid
plate unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US776023A
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English (en)
Inventor
Stephen A Boettcher
Louis F Simonetti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam Corp
Original Assignee
Speedfam Corp
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Publication date
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Application granted granted Critical
Publication of US3579917A publication Critical patent/US3579917A/en
Assigned to SPEEDFAM CORPORATION, AN IL CORP. reassignment SPEEDFAM CORPORATION, AN IL CORP. RELEASED BY SECURED PARTY (SEE DOCUMENT FOR DETAILS). Assignors: BOETTCHER, STEPHEN A.
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/102—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being able to rotate freely due to a frictional contact with the lapping tool

Definitions

  • the load plate unit is provided with a central upwardly directed opening, and with passageway means communicating with the opening to accommodate circulation of a fluid coolant interiorly of the unit.
  • the spindle assembly is provided with fluid transmission means for separately directing to the opening fluid coolant and receiving from the opening coolant which has absorbed heat. In this manner, the load plate unit is cooled to compensate for heat developed therein during the polishing operation.
  • the load plate unit is detachable from the spindle assembly; and, at a location remote from the polishing machine, a fluid of suitable temperature may be circulated through the load plate unit for selectively heating or cooling the same to effect softening or solidification of the mounting medium as may be required while the workpieces are being affixed to or removed from the load plate unit. In this manner, mounting of workpieces to, and removal of the same from, the load plate unit are greatly facilitated.
  • FIG. 1 is an elevational view, with portions being broken away and shown in section, of a polishing machine incorporating the principles of the present invention
  • FIG. 2 is a horizontal view, taken substantially along the line 22 in FIG. 1, looking in the direction indicated by the arrows;
  • FIG. 4 is a horizontal view, taken substantially along the line 4-4 in FIG. 3, looking in the direction indicated by the arrows;
  • FIG. 5 is a horizontal view on a reduced scale, taken substantially along the line 5-5 in FIG. 3, looking in the direction indicated by the arrows;
  • FIG. 6 is a foreshortened front elevational view, with portions being broken away and shown in section, of a workpiecemounting device
  • FIG. 7 is a side elevational view, on a reduced scale, of the workpiece-mounting device of FIG. 6;
  • the polishing machine 10 comprises a framework including a substantially cylindrical housing 12 supported by a base ring 14. Suitably secured to the opposite sides of the housing 12 are the lower ends of vertical columns 16. Extending between the upper ends of the columns 16 is a horizontal bridge member 18 provided with opposed pairs of lateral arms 20. Mounted at the outer end of each of the four arms 20 is a vertical pneumatic piston and cylinder assembly 22 which includes a cylinder 24, a stabilizer sleeve 26 and a piston rod 28.
  • a cylindrical collar 30 is mounted at the upper end of the housing 12 by means of an annular inclined wall 32. Also mounted in the housing 12 is a main drive motor 34 operatively connected to a conventional speed reducer unit 36 supported in the collar 30. The output shaft of the speed reducer 36, in a known manner, is connected to, and serves to effect rotation of, a generally horizontal polishing wheel assembly 38 shown in FIGS. 2 and 3.
  • the polishing wheel assembly 38 is comprised of an annular backing wheel 40 and a polishing cloth 42 extending across the upper face thereof.
  • the backing wheel 40 is preferably formed of a metal, such as brass, having a high heat conductivity.
  • the polishing cloth 42 which may for example be either sail cloth or a synthetic nonwoven cloth, is retained in position by means of a ring or hoop member 44 suitably clamped about the outer periphery of the backing wheel 40. In place of cloth, a felt material may be either clamped to the backing wheel 40 or glued thereon.
  • the polishing wheel assembly 38 is surrounded by an annular thin-walled shroud or shield 46 which is normally maintained in the position shown in FIGS. 1 and 2 to accommodate loading and unloading of the polishing machine, and is adapted to be raised to the position shown in FIG. 3 during polishing operations.
  • a freely flowing polishing slurry is adapted to be fed to the polishing wheel assembly 38 by tubes or spouts 48 extending downwardly from the bridge member 18 as shown in FIG. I.
  • the slurry is delivered to the spouts 48 through tubing 50 connected to a sump pump unit 52 located in the lower portion of the housing 12.
  • the polishing slurry flowing from the polishing wheel assembly 38 is collected by the inclined wall 32, which serves as a drip pan, and is directed to a drain.
  • the polishing slurry may, by way of example, comprise a polishing compoundsuch as one having an abrasive base of iron oxide, cerium oxide or zirconium oxidesuspended or mixed in water.
  • each of the piston rods 28 Secured in the lower end of each of the piston rods 28 is a vertical spindle assembly 54 comprised of a spindle 56.
  • Each spindle 56 is provided with a first axial passageway 58 and a second axial passageway 60.
  • the first passageway 58 at its lower end is open and at its upper end communicates with a radial inlet 62 which is adapted to be connected to a source of fluid under pressure.
  • the second passageway-60 at its lower end is closed by a plug 64, intermediate of its ends opens outwardly of the spindle 56 through a radial aperture 66, and at its upper end communicates with a radial outlet 68 which is adapted to be connected to a fluid reservoir or drain.
  • each of the spindles 56 Connected to each of the spindles 56 intermediate 0f the ends thereof is a generally horizontal annular pressure cup 70 having engagement means in the form of an annular ridge 72 at the lower surface thereof.
  • a floating or swivel connection in the form of a universal ball bearing assembly 74'.
  • the bearing assembly 74 is maintained in assembled position by a snapring 76 engaged in the spindle 56,-and by a snapring 78 engaged in the pressure cup 70.
  • a collar assembly 80 Suitably secured to the spindle 56 immediately above the pressure cup 70 is a collar assembly 80 which serves to shield the bearing assembly 74 from polishing mixture and other foreign material
  • a generally horizontal circular load plate unit 82 Associated with each pressure cup 70 is a generally horizontal circular load plate unit 82 which, as shown in FIGS.
  • the upper plate section 84 is formed with a central opening 90, a plurality of radial channels 92 which together with the lower plate section 86 define first radial port means, a plurality of inclined radial ports 94 which define second radial port means, and an annular recess 96 which together with an annular recess 97 formed in the lower plate section 86 defines an annular chamber.
  • the ports 92 and 94 and the chamber 96 together define passageway means in the load plate unit 82.
  • annular baffle panel 98 Mounted within the chamber 96 for dividing the same into upper and lower sections in communication at their outer peripheries is an annular baffle panel 98.
  • a plurality of upwardly and downwardly projecting dimples 100 are formed in the panel 98 and serve to center the panel within the chamber 96.
  • Each seal assembly 102 comprises an outer body portion 104, and a flexible inner lip portion 106 which is biased radially inwardly by a garter spring 108.
  • the lower end section of the spindle 56 is adapted to be received in the central opening 90 of the load plate unit 82. in this cooperative position, the first passageway 58 in the spindle 56 communicates with the bottom portion of the central opening 90 and the radial ports 92, while the aperture 66 in the spindle 56 communicates with the central opening 90 and the radial ports 94 intermediate of the seal assemblies 102.
  • the mounting device 120 includes a generally horizontal housing 122, and an upstanding rectangular frame 124 supported thereon. Secured to the lower leg of the frame 124 is a circular support assembly 126 having a central upstanding nose portion 128.
  • the plate assembly 126 is formed with first passageway means 130 which at one end opens at the upper end of the nose portion 128 and at the other end communicates with an inlet opening 132 adapted to be connected to a source of fluid under pressure.
  • the plate assembly 126 is also provided with second passageway means 134 which at one end opens at the side of the nose portion 128 and at the other end communicates with an outlet opening 136 adapted to be connected to a fluid reservoir or drain.
  • the nose portion 128 is of substantially the same size as the lower end sections of the spindle 56, and is adapted to be received in the central opening 90 of a load plate unit 82.
  • Mounted on the upper leg of the frame 124 is a vertical pneumatic piston and cylinder assembly 138 which includes a cylinder 140 and a piston rod 142 on the lower end of which is mounted a pressure plate 144.
  • a load plate unit 82 is positioned on the support plate assembly 126 of the workpiecemounting device 120 as shown in FIGS. 6 and 7.
  • a hot fluid medium such as water or steam is then directed through the inlet opening 132, the first passageway means 130, the passageway means of the load plate unit 82, the second passageway means 134, and the outlet opening 136.
  • a thin layer of paraffin, or other suitable mounting substance is then directed through the inlet opening 132, the first passageway means 130, the passageway means of the load plate unit 82, the second passageway means 134, and the outlet opening 136.
  • the polishing wheel assembly 38 is rotated and polishing material is delivered from the spouts 48 to the surface thereof.
  • a fluid coolant such as cold water is admitted under pressure into the spindle inlet 62, and is transmitted by the first passageway 58 to the bottom portion of the central opening 90 in the load plate unit 82. From the opening 90, the coolant passes through the radial ports 92, around the baffle panel 98 within the chamber 96, through the radial ports 94, and is returned to the central opening 90 intermediate of the seal assemblies 102. From this point, the fluid is transmitted through the spindle aperture 66 and the second passageway 60, and is discharged at the spindle outlet 68.
  • the coolant absorbs heat by conduction from the load plate unit 82, and the load plate unit is thereby cooled to offset the heat developed therein during the polishing operation.
  • the spindles 56 and pressure cups 70 serve to center the load plate units 82, and the bearing assemblies 74 and the seal assemblies 102 accommodate free rotation and floating or swiveling of the load plate units 82.
  • each load plate unit 82 may be substantially the same as, less than, or greater than, the radial width of the annular surface of the backing wheel 40. Also, it will be appreciated that in the drawings certain elements-for example, the cloth 42 and workpieces 112-have been exaggerated from the true scale for sake of clarity of illustration.
  • a polishing machine having framework, a polishing wheel assembly mounted on the framework on a vertical axis, means for rotating the polishing wheel assembly, at least one vertical spindle assembly supported from the framework above the polishing wheel assembly, a generally horizontal circular load plate unit adapted to have workpieces affixed to the lower surface thereof for engagement with the polishing wheel assembly, and means for selectively establishing interengagement between the spindle assembly and the load plate unit, the improvement which comprises said load plate unit having a central opening, said load plate unit having passageway means communicating with said opening to accommodate circulation of fluid interiorly of said unit for effecting cooling thereof, and said spindle assembly having fluid transmission means for separately directing fluid to and receiving fluid from said opening, said passageway means comprising an annular chamber, first radial port means intermediate said centralopening and said annular chamber for directing fluid to said chamber, and second radial port means intermediate said annular chamber and said central opening for receiving fluid from said chamber.
  • said fluid transmission means comprises first passageway means in said spindle assembly which is adapted to be connected to a source of fluid under pressure and communicates with said central opening adjacent said first radial port means, and said fluid transmission means further comprises second passageway means in said spindle assembly which communicates with said central opening adjacent said second radial port means and is adapted to be connected to a fluid reservoir.
  • interengagement means is comprised of swivel connection means, and including axially apaced seal means in said opening between said lower section of said spindle assembly and said load plate unit on opposite sides of said second radial port means.
  • a circular load plate unit having a central axial opening at one side of said unit, and having passageway means communicating with said opening to accommodate circulation of fluid interiorly of said unit, said passageway means comprising an annular chamber, first radial port means intermediate said central opening and said annular chamber for directing fluid to said chamber, and second radial port means intermediate said annular chamber and said central opening for receiving fluid from said chamber.
  • the load plate unit of claim 5 including means dividing said chamber into upper and lower sections in communication at their outer peripheries; and wherein said first radial port means extends between said central opening and the inner periphery of said lower chamber section, and said second radial port means extends between the inner periphery of said upper chamber section and said central opening.
  • the load plate unit of claim 6 including axially spaced flexible seal means in said opening on opposite sides of said second radial port means.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Jigs For Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
US776023A 1968-11-15 1968-11-15 Polishing machine Expired - Lifetime US3579917A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US77602368A 1968-11-15 1968-11-15

Publications (1)

Publication Number Publication Date
US3579917A true US3579917A (en) 1971-05-25

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Family Applications (1)

Application Number Title Priority Date Filing Date
US776023A Expired - Lifetime US3579917A (en) 1968-11-15 1968-11-15 Polishing machine

Country Status (6)

Country Link
US (1) US3579917A (enrdf_load_stackoverflow)
JP (1) JPS4814234B1 (enrdf_load_stackoverflow)
DE (1) DE1957286A1 (enrdf_load_stackoverflow)
FR (1) FR2023433A1 (enrdf_load_stackoverflow)
GB (1) GB1236864A (enrdf_load_stackoverflow)
NL (1) NL6917238A (enrdf_load_stackoverflow)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3977130A (en) * 1975-05-12 1976-08-31 Semimetals, Inc. Removal-compensating polishing apparatus
US4897966A (en) * 1986-08-19 1990-02-06 Japan Silicon Co., Ltd. Polishing apparatus
US5607341A (en) * 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5791978A (en) * 1996-11-14 1998-08-11 Speedfam Corporation Bearing assembly for wafer planarization carrier
US6019671A (en) * 1993-12-27 2000-02-01 Applied Materials, Inc. Carrier head for a chemical/mechanical polishing apparatus and method of polishing
US6095910A (en) * 1997-11-10 2000-08-01 3M Innovative Properties Company Surface treatment article having a quick release fastener
US6142858A (en) * 1997-11-10 2000-11-07 3M Innovative Properties Company Backup pad for abrasive articles
US20060019585A1 (en) * 2004-07-26 2006-01-26 Zayat Charles D Device for circular grinding, sanding and stripping tools to attach to any power drive
CN104907896A (zh) * 2015-06-07 2015-09-16 安徽格楠机械有限公司 一种适用于深井采油钻头研磨抛光机
CN107363703A (zh) * 2017-08-25 2017-11-21 嘉兴洁尘环保科技有限公司温州分公司 打磨抛光除尘一体机
CN110962138A (zh) * 2019-11-13 2020-04-07 广东博智林机器人有限公司 浮动打磨执行装置及打磨机器人
US11692421B2 (en) * 2018-10-15 2023-07-04 Eog Resources, Inc. Systems and methods for connecting and disconnecting pumping equipment

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2523892A1 (fr) * 1982-03-26 1983-09-30 Procedes Equip Sciences Ind Perfectionnements aux machines de polissage a plateau tournant
CN101780657B (zh) * 2010-03-25 2011-05-11 南京航空航天大学 能使加载载荷均匀布置在承载器表面的抛光加载装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US698126A (en) * 1901-06-01 1902-04-22 Misko Cutlery Company Grinding or polishing metals.
US2998680A (en) * 1958-07-21 1961-09-05 Morton S Lipkins Lapping machines
US3110988A (en) * 1960-10-06 1963-11-19 Speedlap Corp Lapping machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US698126A (en) * 1901-06-01 1902-04-22 Misko Cutlery Company Grinding or polishing metals.
US2998680A (en) * 1958-07-21 1961-09-05 Morton S Lipkins Lapping machines
US3110988A (en) * 1960-10-06 1963-11-19 Speedlap Corp Lapping machine

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3977130A (en) * 1975-05-12 1976-08-31 Semimetals, Inc. Removal-compensating polishing apparatus
US4897966A (en) * 1986-08-19 1990-02-06 Japan Silicon Co., Ltd. Polishing apparatus
US6267656B1 (en) 1993-12-27 2001-07-31 Applied Materials, Inc. Carrier head for a chemical mechanical polishing apparatus
US6019671A (en) * 1993-12-27 2000-02-01 Applied Materials, Inc. Carrier head for a chemical/mechanical polishing apparatus and method of polishing
US6503134B2 (en) 1993-12-27 2003-01-07 Applied Materials, Inc. Carrier head for a chemical mechanical polishing apparatus
US5607341A (en) * 1994-08-08 1997-03-04 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5702290A (en) * 1994-08-08 1997-12-30 Leach; Michael A. Block for polishing a wafer during manufacture of integrated circuits
US5836807A (en) * 1994-08-08 1998-11-17 Leach; Michael A. Method and structure for polishing a wafer during manufacture of integrated circuits
US5791978A (en) * 1996-11-14 1998-08-11 Speedfam Corporation Bearing assembly for wafer planarization carrier
US6142858A (en) * 1997-11-10 2000-11-07 3M Innovative Properties Company Backup pad for abrasive articles
US6371837B1 (en) 1997-11-10 2002-04-16 3M Innovative Properties Company Method of refining a surface
US6095910A (en) * 1997-11-10 2000-08-01 3M Innovative Properties Company Surface treatment article having a quick release fastener
US20060019585A1 (en) * 2004-07-26 2006-01-26 Zayat Charles D Device for circular grinding, sanding and stripping tools to attach to any power drive
CN104907896A (zh) * 2015-06-07 2015-09-16 安徽格楠机械有限公司 一种适用于深井采油钻头研磨抛光机
CN107363703A (zh) * 2017-08-25 2017-11-21 嘉兴洁尘环保科技有限公司温州分公司 打磨抛光除尘一体机
US11692421B2 (en) * 2018-10-15 2023-07-04 Eog Resources, Inc. Systems and methods for connecting and disconnecting pumping equipment
CN110962138A (zh) * 2019-11-13 2020-04-07 广东博智林机器人有限公司 浮动打磨执行装置及打磨机器人

Also Published As

Publication number Publication date
JPS4814234B1 (enrdf_load_stackoverflow) 1973-05-04
GB1236864A (en) 1971-06-23
DE1957286A1 (de) 1970-07-30
FR2023433A1 (enrdf_load_stackoverflow) 1970-08-21
NL6917238A (enrdf_load_stackoverflow) 1970-05-20

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Legal Events

Date Code Title Description
AS Assignment

Owner name: SPEEDFAM CORPORATION, 509 NORTH THIRD AVE., DES PL

Free format text: RELEASED BY SECURED PARTY;ASSIGNOR:BOETTCHER, STEPHEN A.;REEL/FRAME:003932/0923

Effective date: 19811105