DE1947413A1 - Getterpumpe zur Erzeugung und Aufrechterhaltung eines Vakuums in geschlossenen Gefaessen - Google Patents
Getterpumpe zur Erzeugung und Aufrechterhaltung eines Vakuums in geschlossenen GefaessenInfo
- Publication number
- DE1947413A1 DE1947413A1 DE19691947413 DE1947413A DE1947413A1 DE 1947413 A1 DE1947413 A1 DE 1947413A1 DE 19691947413 DE19691947413 DE 19691947413 DE 1947413 A DE1947413 A DE 1947413A DE 1947413 A1 DE1947413 A1 DE 1947413A1
- Authority
- DE
- Germany
- Prior art keywords
- getter
- getter pump
- strip
- pump according
- getter material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 31
- 238000010438 heat treatment Methods 0.000 claims description 7
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910000986 non-evaporable getter Inorganic materials 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 229910052845 zircon Inorganic materials 0.000 claims description 3
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 claims description 3
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical group [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 229910000838 Al alloy Inorganic materials 0.000 claims 1
- DNXNYEBMOSARMM-UHFFFAOYSA-N alumane;zirconium Chemical compound [AlH3].[Zr] DNXNYEBMOSARMM-UHFFFAOYSA-N 0.000 claims 1
- 238000012423 maintenance Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 12
- 238000010521 absorption reaction Methods 0.000 description 7
- 239000000843 powder Substances 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 239000002250 absorbent Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 108010083687 Ion Pumps Proteins 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 241000251730 Chondrichthyes Species 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 102000006391 Ion Pumps Human genes 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910021536 Zeolite Inorganic materials 0.000 description 1
- 229910001093 Zr alloy Inorganic materials 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010457 zeolite Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT2303768 | 1968-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1947413A1 true DE1947413A1 (de) | 1970-04-30 |
Family
ID=11203134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19691947413 Pending DE1947413A1 (de) | 1968-10-28 | 1969-09-19 | Getterpumpe zur Erzeugung und Aufrechterhaltung eines Vakuums in geschlossenen Gefaessen |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3609062A (enExample) |
| JP (1) | JPS4917764B1 (enExample) |
| DE (1) | DE1947413A1 (enExample) |
| FR (1) | FR2021693B1 (enExample) |
| GB (1) | GB1281227A (enExample) |
| NL (1) | NL163055C (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3870917A (en) * | 1971-05-10 | 1975-03-11 | Itt | Discharge device including channel type electron multiplier having ion adsorptive layer |
| NL149629B (nl) * | 1972-10-18 | 1976-05-17 | Hazemeijer Bv | Vacuuemschakelaar met vangstofelement. |
| IT998681B (it) * | 1973-10-01 | 1976-02-20 | Getters Spa | Pompa getter |
| US4137012A (en) * | 1976-11-03 | 1979-01-30 | S.A.E.S. Getters S.P.A. | Modular getter pumps |
| DE3332660A1 (de) * | 1983-09-09 | 1985-03-28 | Siemens AG, 1000 Berlin und 8000 München | Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen |
| DE3332647A1 (de) * | 1983-09-09 | 1985-03-28 | Siemens AG, 1000 Berlin und 8000 München | Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen |
| US5161955A (en) * | 1991-08-20 | 1992-11-10 | Danielson Associates, Inc. | High vacuum pump using bulk getter material |
| US5154582A (en) * | 1991-08-20 | 1992-10-13 | Danielson Associates, Inc. | Rough vacuum pump using bulk getter material |
| AU2001283301A1 (en) * | 2000-08-10 | 2002-02-25 | Indigo Energy, Inc. | Long-life vacuum system for energy storage flywheels |
| US20110155125A1 (en) * | 2008-06-11 | 2011-06-30 | Cristoforo Benvenuti | Evecuated solar panel with a non evaporable getter pump |
| JP6133821B2 (ja) * | 2014-08-08 | 2017-05-24 | 有限会社真空実験室 | 非蒸発型ゲッター及び非蒸発型ゲッターポンプ |
| US11508564B2 (en) * | 2014-11-19 | 2022-11-22 | Hamilton Sundstrand Corporation | Ion pumps and ion pump elements |
| WO2025209901A1 (en) * | 2024-04-04 | 2025-10-09 | Saes Getters S.P.A. | High-performance getter pump |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2149658A (en) * | 1936-03-12 | 1939-03-07 | Tungsten Electrodeposit Corp | Thermionic tube |
| NL61150C (enExample) * | 1942-05-02 | |||
| US2491284A (en) * | 1946-12-13 | 1949-12-13 | Bell Telephone Labor Inc | Electrode for electron discharge devices and method of making the same |
| US3100274A (en) * | 1959-12-17 | 1963-08-06 | Raytheon Co | Electron tube with electrode having titanium surface serving as getter |
-
1969
- 1969-09-19 DE DE19691947413 patent/DE1947413A1/de active Pending
- 1969-10-03 GB GB48647/69A patent/GB1281227A/en not_active Expired
- 1969-10-07 NL NL6915137.A patent/NL163055C/xx not_active IP Right Cessation
- 1969-10-14 US US866336A patent/US3609062A/en not_active Expired - Lifetime
- 1969-10-23 FR FR696936383A patent/FR2021693B1/fr not_active Expired
- 1969-10-27 JP JP44085328A patent/JPS4917764B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4917764B1 (enExample) | 1974-05-04 |
| NL6915137A (enExample) | 1970-05-01 |
| GB1281227A (en) | 1972-07-12 |
| NL163055C (nl) | 1980-07-15 |
| FR2021693B1 (enExample) | 1973-03-16 |
| US3609062A (en) | 1971-09-28 |
| FR2021693A1 (enExample) | 1970-07-24 |
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