DE1798125A1 - Verfahren und Vorrichtung zur Roentgenfluoreszenzmessung eines gewaehlten Elementes hoeherer Atomzahl in einem UEberzug auf einer Unterlage - Google Patents
Verfahren und Vorrichtung zur Roentgenfluoreszenzmessung eines gewaehlten Elementes hoeherer Atomzahl in einem UEberzug auf einer UnterlageInfo
- Publication number
- DE1798125A1 DE1798125A1 DE19681798125 DE1798125A DE1798125A1 DE 1798125 A1 DE1798125 A1 DE 1798125A1 DE 19681798125 DE19681798125 DE 19681798125 DE 1798125 A DE1798125 A DE 1798125A DE 1798125 A1 DE1798125 A1 DE 1798125A1
- Authority
- DE
- Germany
- Prior art keywords
- radiation
- coating
- filter
- characteristic
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 title claims description 193
- 238000000576 coating method Methods 0.000 title claims description 193
- 238000000034 method Methods 0.000 title claims description 12
- 238000009681 x-ray fluorescence measurement Methods 0.000 title description 6
- 230000005855 radiation Effects 0.000 claims description 219
- 238000010521 absorption reaction Methods 0.000 claims description 95
- 230000005284 excitation Effects 0.000 claims description 39
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical group [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 31
- 229910052725 zinc Inorganic materials 0.000 claims description 31
- 239000011701 zinc Substances 0.000 claims description 31
- 239000000463 material Substances 0.000 claims description 18
- 239000011573 trace mineral Substances 0.000 claims description 17
- 235000013619 trace mineral Nutrition 0.000 claims description 17
- 238000004876 x-ray fluorescence Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 11
- 238000012546 transfer Methods 0.000 claims description 7
- 239000011230 binding agent Substances 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 5
- 239000011737 fluorine Substances 0.000 claims description 4
- 229910052731 fluorine Inorganic materials 0.000 claims description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 9
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000004332 silver Substances 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000037007 arousal Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002221 fluorine Chemical class 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 235000000396 iron Nutrition 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- GOLXNESZZPUPJE-UHFFFAOYSA-N spiromesifen Chemical compound CC1=CC(C)=CC(C)=C1C(C(O1)=O)=C(OC(=O)CC(C)(C)C)C11CCCC1 GOLXNESZZPUPJE-UHFFFAOYSA-N 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US505479A US3417243A (en) | 1965-10-28 | 1965-10-28 | Method and apparatus for x-ray fluorescence gauging of a higher atomic number selected element in a coating on a base |
| GB40962/68A GB1239797A (en) | 1965-10-28 | 1968-08-27 | Method and apparatus for x-ray fluorescence gauging of a higher atomic number selected element in a coating on a base. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1798125A1 true DE1798125A1 (de) | 1972-01-20 |
Family
ID=26264550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19681798125 Pending DE1798125A1 (de) | 1965-10-28 | 1968-08-27 | Verfahren und Vorrichtung zur Roentgenfluoreszenzmessung eines gewaehlten Elementes hoeherer Atomzahl in einem UEberzug auf einer Unterlage |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3417243A (enExample) |
| AU (1) | AU408547B2 (enExample) |
| BE (1) | BE719998A (enExample) |
| DE (1) | DE1798125A1 (enExample) |
| GB (1) | GB1239797A (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3525863A (en) * | 1967-12-28 | 1970-08-25 | Minnesota Mining & Mfg | Differential emission x-ray gauging apparatus and method using two monochromatic x-ray beams of balanced intensity |
| JPS5847659B2 (ja) * | 1975-08-12 | 1983-10-24 | 日新製鋼株式会社 | ゴウキンカアエンテツバンノ ゴウキンカドノ ソクテイホウホウ |
| US4085329A (en) * | 1976-05-03 | 1978-04-18 | Hughes Aircraft Company | Hard X-ray and fluorescent X-ray detection of alignment marks for precision mask alignment |
| FI59489C (fi) * | 1978-11-21 | 1981-08-10 | Enso Gutzeit Oy | Foerfarande foer maetning av belaeggningsmaengder |
| DE10034747A1 (de) * | 2000-07-18 | 2002-02-07 | Manfred Liphardt | Verfahren und Vorrichtung zur Feststellung der Dicke eines Beschichtungswerkstoffs auf einem Trägerwerkstoff |
| US7963695B2 (en) | 2002-07-23 | 2011-06-21 | Rapiscan Systems, Inc. | Rotatable boom cargo scanning system |
| CN100593116C (zh) * | 2006-04-10 | 2010-03-03 | 上海爱斯特电子有限公司 | X荧光多元素分析仪 |
| US8724774B2 (en) | 2009-08-04 | 2014-05-13 | Rapiscan Systems, Inc. | Method and system for extracting spectroscopic information from images and waveforms |
| US9218933B2 (en) | 2011-06-09 | 2015-12-22 | Rapidscan Systems, Inc. | Low-dose radiographic imaging system |
| WO2012170914A1 (en) | 2011-06-09 | 2012-12-13 | Rapiscan Systems, Inc. | System and method for x-ray source weight reduction |
| CN108508052B (zh) * | 2018-06-11 | 2023-10-20 | 西北核技术研究所 | 基于参考元素的x射线荧光薄层质量厚度测量系统及方法 |
| US11079222B2 (en) * | 2019-01-30 | 2021-08-03 | Ndc Technologies Inc. | Radiation-based thickness gauge |
| WO2021246998A1 (en) * | 2020-06-01 | 2021-12-09 | American Science And Engineering, Inc. | Systems and methods for controlling image contrast in an x-ray system |
| US11193898B1 (en) | 2020-06-01 | 2021-12-07 | American Science And Engineering, Inc. | Systems and methods for controlling image contrast in an X-ray system |
| GB2635043A (en) | 2022-07-26 | 2025-04-30 | Rapiscan Holdings Inc | Methods and systems for performing on-the-fly automatic calibration adjustments of X-ray inspection systems |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2926257A (en) * | 1955-05-16 | 1960-02-23 | Friedman Herbert | Method of measuring the thickness of thin coatings |
-
1965
- 1965-10-28 US US505479A patent/US3417243A/en not_active Expired - Lifetime
-
1968
- 1968-08-21 AU AU42375/68A patent/AU408547B2/en not_active Expired
- 1968-08-27 GB GB40962/68A patent/GB1239797A/en not_active Expired
- 1968-08-27 BE BE719998D patent/BE719998A/xx unknown
- 1968-08-27 DE DE19681798125 patent/DE1798125A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1239797A (en) | 1971-07-21 |
| AU4237568A (en) | 1970-02-26 |
| US3417243A (en) | 1968-12-17 |
| BE719998A (enExample) | 1969-02-27 |
| AU408547B2 (en) | 1970-11-27 |
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