DE1775015A1 - Vakuumventil - Google Patents

Vakuumventil

Info

Publication number
DE1775015A1
DE1775015A1 DE19681775015 DE1775015A DE1775015A1 DE 1775015 A1 DE1775015 A1 DE 1775015A1 DE 19681775015 DE19681775015 DE 19681775015 DE 1775015 A DE1775015 A DE 1775015A DE 1775015 A1 DE1775015 A1 DE 1775015A1
Authority
DE
Germany
Prior art keywords
valve
baffle plate
plate arrangement
closure body
vacuum valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19681775015
Other languages
German (de)
English (en)
Inventor
Otto Dr Winkler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of DE1775015A1 publication Critical patent/DE1775015A1/de
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Details Of Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE19681775015 1967-08-04 1968-06-26 Vakuumventil Pending DE1775015A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1112667A CH456834A (de) 1967-08-04 1967-08-04 Vakuumventil

Publications (1)

Publication Number Publication Date
DE1775015A1 true DE1775015A1 (de) 1971-05-13

Family

ID=4370332

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19681775015 Pending DE1775015A1 (de) 1967-08-04 1968-06-26 Vakuumventil

Country Status (5)

Country Link
CH (1) CH456834A (enExample)
DE (1) DE1775015A1 (enExample)
FR (1) FR1575110A (enExample)
GB (1) GB1225866A (enExample)
NL (1) NL6712739A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3216591A1 (de) * 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe mit jalousieartigem baffle

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1313506A (en) * 1969-05-07 1973-04-11 Edwards High Vacuum Int Ltd Vapour vacuum pumps

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3216591A1 (de) * 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe mit jalousieartigem baffle

Also Published As

Publication number Publication date
NL6712739A (enExample) 1969-02-06
GB1225866A (enExample) 1971-03-24
FR1575110A (enExample) 1969-07-18
CH456834A (de) 1968-05-31

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