DE1614595B2 - Korpuskularstrahlgeraet zur abbildung eines praeparates mittels kokeln insbesondere elektronenmikroskop - Google Patents
Korpuskularstrahlgeraet zur abbildung eines praeparates mittels kokeln insbesondere elektronenmikroskopInfo
- Publication number
- DE1614595B2 DE1614595B2 DE19671614595 DE1614595A DE1614595B2 DE 1614595 B2 DE1614595 B2 DE 1614595B2 DE 19671614595 DE19671614595 DE 19671614595 DE 1614595 A DE1614595 A DE 1614595A DE 1614595 B2 DE1614595 B2 DE 1614595B2
- Authority
- DE
- Germany
- Prior art keywords
- preparation
- cooling
- corpuscular
- corpuscular beam
- frozen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000002360 preparation method Methods 0.000 title claims description 29
- 238000003384 imaging method Methods 0.000 title claims description 4
- 238000010411 cooking Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 claims description 30
- 238000001816 cooling Methods 0.000 claims description 22
- 230000005855 radiation Effects 0.000 claims description 11
- 238000004611 spectroscopical analysis Methods 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 4
- 238000011109 contamination Methods 0.000 claims description 3
- 230000005669 field effect Effects 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 2
- 238000010276 construction Methods 0.000 claims 2
- 238000005422 blasting Methods 0.000 claims 1
- 239000002826 coolant Substances 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000002003 electron diffraction Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 101150107341 RERE gene Proteins 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2441—Semiconductor detectors, e.g. diodes
- H01J2237/24415—X-ray
- H01J2237/2442—Energy-dispersive (Si-Li type) spectrometer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/2446—Position sensitive detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24571—Measurements of non-electric or non-magnetic variables
- H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19671614595 DE1614595B2 (de) | 1967-09-01 | 1967-09-01 | Korpuskularstrahlgeraet zur abbildung eines praeparates mittels kokeln insbesondere elektronenmikroskop |
| GB1232878D GB1232878A (enrdf_load_stackoverflow) | 1967-09-01 | 1968-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19671614595 DE1614595B2 (de) | 1967-09-01 | 1967-09-01 | Korpuskularstrahlgeraet zur abbildung eines praeparates mittels kokeln insbesondere elektronenmikroskop |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1614595A1 DE1614595A1 (de) | 1970-10-29 |
| DE1614595B2 true DE1614595B2 (de) | 1972-03-30 |
Family
ID=5682002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19671614595 Withdrawn DE1614595B2 (de) | 1967-09-01 | 1967-09-01 | Korpuskularstrahlgeraet zur abbildung eines praeparates mittels kokeln insbesondere elektronenmikroskop |
Country Status (2)
| Country | Link |
|---|---|
| DE (1) | DE1614595B2 (enrdf_load_stackoverflow) |
| GB (1) | GB1232878A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102010056321B9 (de) * | 2010-12-27 | 2018-03-22 | Carl Zeiss Microscopy Gmbh | Partikelstrahlmikroskop |
| CN105789004B (zh) * | 2016-04-20 | 2018-01-23 | 兰州大学 | 一种全温区热电两场扫描电镜原位物性测量台及测量方法 |
| US9972474B2 (en) | 2016-07-31 | 2018-05-15 | Fei Company | Electron microscope with multiple types of integrated x-ray detectors arranged in an array |
-
1967
- 1967-09-01 DE DE19671614595 patent/DE1614595B2/de not_active Withdrawn
-
1968
- 1968-08-28 GB GB1232878D patent/GB1232878A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1614595A1 (de) | 1970-10-29 |
| GB1232878A (enrdf_load_stackoverflow) | 1971-05-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| SH | Request for examination between 03.10.1968 and 22.04.1971 | ||
| E77 | Valid patent as to the heymanns-index 1977 | ||
| EHJ | Ceased/non-payment of the annual fee |