GB1232878A - - Google Patents

Info

Publication number
GB1232878A
GB1232878A GB1232878DA GB1232878A GB 1232878 A GB1232878 A GB 1232878A GB 1232878D A GB1232878D A GB 1232878DA GB 1232878 A GB1232878 A GB 1232878A
Authority
GB
United Kingdom
Prior art keywords
diaphragms
specimen
cooled
polepiece
detectors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1232878A publication Critical patent/GB1232878A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H01J2237/24415—X-ray
    • H01J2237/2442—Energy-dispersive (Si-Li type) spectrometer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
GB1232878D 1967-09-01 1968-08-28 Expired GB1232878A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19671614595 DE1614595B2 (de) 1967-09-01 1967-09-01 Korpuskularstrahlgeraet zur abbildung eines praeparates mittels kokeln insbesondere elektronenmikroskop

Publications (1)

Publication Number Publication Date
GB1232878A true GB1232878A (enrdf_load_stackoverflow) 1971-05-19

Family

ID=5682002

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1232878D Expired GB1232878A (enrdf_load_stackoverflow) 1967-09-01 1968-08-28

Country Status (2)

Country Link
DE (1) DE1614595B2 (enrdf_load_stackoverflow)
GB (1) GB1232878A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2008042A (en) * 2010-12-27 2012-06-28 Zeiss Carl Nts Gmbh Particle beam microscope.
CN105789004A (zh) * 2016-04-20 2016-07-20 兰州大学 一种全温区热电两场扫描电镜原位物性测量台
EP3279921A1 (en) * 2016-07-31 2018-02-07 FEI Company Electron microscope with multipe types of integrated x-ray detectors arranged in an array

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2008042A (en) * 2010-12-27 2012-06-28 Zeiss Carl Nts Gmbh Particle beam microscope.
CN105789004A (zh) * 2016-04-20 2016-07-20 兰州大学 一种全温区热电两场扫描电镜原位物性测量台
CN105789004B (zh) * 2016-04-20 2018-01-23 兰州大学 一种全温区热电两场扫描电镜原位物性测量台及测量方法
EP3279921A1 (en) * 2016-07-31 2018-02-07 FEI Company Electron microscope with multipe types of integrated x-ray detectors arranged in an array
US9972474B2 (en) 2016-07-31 2018-05-15 Fei Company Electron microscope with multiple types of integrated x-ray detectors arranged in an array

Also Published As

Publication number Publication date
DE1614595A1 (de) 1970-10-29
DE1614595B2 (de) 1972-03-30

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee