DE1572805B1 - Verfahren zur Bildvervielfachung - Google Patents

Verfahren zur Bildvervielfachung

Info

Publication number
DE1572805B1
DE1572805B1 DE19671572805 DE1572805A DE1572805B1 DE 1572805 B1 DE1572805 B1 DE 1572805B1 DE 19671572805 DE19671572805 DE 19671572805 DE 1572805 A DE1572805 A DE 1572805A DE 1572805 B1 DE1572805 B1 DE 1572805B1
Authority
DE
Germany
Prior art keywords
hologram
image
following
reference wave
images
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE19671572805
Other languages
German (de)
English (en)
Inventor
Dipl-Phys Dr Gunther Groh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Original Assignee
Philips Patentverwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH filed Critical Philips Patentverwaltung GmbH
Priority to DE19671572805 priority Critical patent/DE1572805B1/de
Priority to NL6810976A priority patent/NL6810976A/xx
Priority to AT754468A priority patent/AT293058B/de
Priority to CH1160368A priority patent/CH509609A/de
Priority to GB1227151D priority patent/GB1227151A/en
Priority to BE719091D priority patent/BE719091A/xx
Priority to FR1579159D priority patent/FR1579159A/fr
Publication of DE1572805B1 publication Critical patent/DE1572805B1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/88—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters
    • G06V10/89—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters using frequency domain filters, e.g. Fourier masks implemented on spatial light modulators
    • G06V10/893—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters using frequency domain filters, e.g. Fourier masks implemented on spatial light modulators characterised by the kind of filter
    • G06V10/895—Image or video recognition using optical means, e.g. reference filters, holographic masks, frequency domain filters or spatial domain filters using frequency domain filters, e.g. Fourier masks implemented on spatial light modulators characterised by the kind of filter the filter being related to phase processing, e.g. phase-only filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H01L21/0275—Photolithographic processes using lasers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Multimedia (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Holo Graphy (AREA)
DE19671572805 1967-08-05 1967-08-05 Verfahren zur Bildvervielfachung Withdrawn DE1572805B1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE19671572805 DE1572805B1 (de) 1967-08-05 1967-08-05 Verfahren zur Bildvervielfachung
NL6810976A NL6810976A (US20100056889A1-20100304-C00004.png) 1967-08-05 1968-08-01
AT754468A AT293058B (de) 1967-08-05 1968-08-02 Verfahren zur Bildvervielfachung
CH1160368A CH509609A (de) 1967-08-05 1968-08-02 Verfahren zur Mehrfachabbildung eines beleuchteten oder selbstleuchtenden Gegenstandes
GB1227151D GB1227151A (US20100056889A1-20100304-C00004.png) 1967-08-05 1968-08-02
BE719091D BE719091A (US20100056889A1-20100304-C00004.png) 1967-08-05 1968-08-05
FR1579159D FR1579159A (US20100056889A1-20100304-C00004.png) 1967-08-05 1968-08-05

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DEP0042772 1967-08-05
DE19671572805 DE1572805B1 (de) 1967-08-05 1967-08-05 Verfahren zur Bildvervielfachung

Publications (1)

Publication Number Publication Date
DE1572805B1 true DE1572805B1 (de) 1970-08-27

Family

ID=25753128

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19671572805 Withdrawn DE1572805B1 (de) 1967-08-05 1967-08-05 Verfahren zur Bildvervielfachung

Country Status (7)

Country Link
AT (1) AT293058B (US20100056889A1-20100304-C00004.png)
BE (1) BE719091A (US20100056889A1-20100304-C00004.png)
CH (1) CH509609A (US20100056889A1-20100304-C00004.png)
DE (1) DE1572805B1 (US20100056889A1-20100304-C00004.png)
FR (1) FR1579159A (US20100056889A1-20100304-C00004.png)
GB (1) GB1227151A (US20100056889A1-20100304-C00004.png)
NL (1) NL6810976A (US20100056889A1-20100304-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0266120A2 (en) * 1986-10-31 1988-05-04 AT&T Corp. Generating an array of light spots having uniform intensity

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0536586A (ja) * 1991-08-02 1993-02-12 Canon Inc 像投影方法及び該方法を用いた半導体デバイスの製造方法
JP3194155B2 (ja) * 1992-01-31 2001-07-30 キヤノン株式会社 半導体デバイスの製造方法及びそれを用いた投影露光装置
JP3210123B2 (ja) * 1992-03-27 2001-09-17 キヤノン株式会社 結像方法及び該方法を用いたデバイス製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0266120A2 (en) * 1986-10-31 1988-05-04 AT&T Corp. Generating an array of light spots having uniform intensity
EP0266120A3 (en) * 1986-10-31 1990-07-11 AT&T Corp. Generating an array of light spots having uniform intensity

Also Published As

Publication number Publication date
CH509609A (de) 1971-06-30
FR1579159A (US20100056889A1-20100304-C00004.png) 1969-08-22
BE719091A (US20100056889A1-20100304-C00004.png) 1969-02-05
GB1227151A (US20100056889A1-20100304-C00004.png) 1971-04-07
NL6810976A (US20100056889A1-20100304-C00004.png) 1969-02-03
AT293058B (de) 1971-09-27

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Legal Events

Date Code Title Description
E77 Valid patent as to the heymanns-index 1977
8339 Ceased/non-payment of the annual fee