DE1564822B2 - Verfahren zur Herstellung von elektrischen Kondensatoren mit Halbleiterschicht - Google Patents
Verfahren zur Herstellung von elektrischen Kondensatoren mit HalbleiterschichtInfo
- Publication number
- DE1564822B2 DE1564822B2 DE19661564822 DE1564822A DE1564822B2 DE 1564822 B2 DE1564822 B2 DE 1564822B2 DE 19661564822 DE19661564822 DE 19661564822 DE 1564822 A DE1564822 A DE 1564822A DE 1564822 B2 DE1564822 B2 DE 1564822B2
- Authority
- DE
- Germany
- Prior art keywords
- layer
- semiconductor layer
- capacitor
- valve metal
- electrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000003990 capacitor Substances 0.000 title claims description 23
- 238000000034 method Methods 0.000 title claims description 23
- 239000004065 semiconductor Substances 0.000 title claims description 22
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 42
- 239000002184 metal Substances 0.000 claims description 42
- 239000000155 melt Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 229910052758 niobium Inorganic materials 0.000 claims description 4
- 239000010955 niobium Substances 0.000 claims description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- YADSGOSSYOOKMP-UHFFFAOYSA-N dioxolead Chemical compound O=[Pb]=O YADSGOSSYOOKMP-UHFFFAOYSA-N 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 101100400378 Mus musculus Marveld2 gene Proteins 0.000 description 1
- 241000158147 Sator Species 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010407 anodic oxide Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 150000002697 manganese compounds Chemical class 0.000 description 1
- MIVBAHRSNUNMPP-UHFFFAOYSA-N manganese(2+);dinitrate Chemical compound [Mn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MIVBAHRSNUNMPP-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/15—Solid electrolytic capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/004—Details
- H01G9/04—Electrodes or formation of dielectric layers thereon
- H01G9/042—Electrodes or formation of dielectric layers thereon characterised by the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/004—Details
- H01G9/04—Electrodes or formation of dielectric layers thereon
- H01G9/042—Electrodes or formation of dielectric layers thereon characterised by the material
- H01G9/0425—Electrodes or formation of dielectric layers thereon characterised by the material specially adapted for cathode
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S205/00—Electrolysis: processes, compositions used therein, and methods of preparing the compositions
- Y10S205/917—Treatment of workpiece between coating steps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEST026122 | 1966-11-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE1564822A1 DE1564822A1 (de) | 1970-07-16 |
| DE1564822B2 true DE1564822B2 (de) | 1970-11-19 |
Family
ID=7460860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19661564822 Withdrawn DE1564822B2 (de) | 1966-11-16 | 1966-11-16 | Verfahren zur Herstellung von elektrischen Kondensatoren mit Halbleiterschicht |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US3495311A (enExample) |
| BE (1) | BE706560A (enExample) |
| CH (1) | CH474825A (enExample) |
| DE (1) | DE1564822B2 (enExample) |
| DK (1) | DK123676B (enExample) |
| FI (1) | FI44818C (enExample) |
| FR (1) | FR1552085A (enExample) |
| GB (1) | GB1199048A (enExample) |
| LU (1) | LU54856A1 (enExample) |
| NL (1) | NL6715486A (enExample) |
| NO (1) | NO119650B (enExample) |
| SE (1) | SE331855B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2929308A1 (de) * | 1978-07-28 | 1980-02-07 | Lignes Telegraph Telephon | Verfahren zur herstellung von tantal-festelektrolytkondensatoren |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3801479A (en) * | 1971-03-11 | 1974-04-02 | Matsushita Electric Industrial Co Ltd | Method of manufacturing solid electrolytic capacitors |
| FR2335028A1 (fr) * | 1975-12-12 | 1977-07-08 | Lignes Telegraph Telephon | Condensateurs a electrolyte solide |
| CN107068398B (zh) * | 2017-03-13 | 2019-01-18 | 苏州海凌达电子科技有限公司 | 一种石墨烯-银复合电极的制备方法及其应用 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2731706A (en) * | 1950-12-13 | 1956-01-24 | Hunt Capacitors Ltd A | Manufacture of capacitors |
| DE1105991B (de) * | 1952-12-24 | 1961-05-04 | Standard Elektrik Lorenz Ag | Verfahren zur Herstellung von poroesen Sinterelektroden |
| US3073943A (en) * | 1954-05-11 | 1963-01-15 | Int Standard Electric Corp | Manufacture of electrical capacitors |
| GB1054613A (enExample) * | 1963-05-31 | 1900-01-01 | ||
| US3292053A (en) * | 1963-06-21 | 1966-12-13 | Gen Instrument Corp | Anodized-film dielectric capacitor having colloidal graphite coating on the film |
| BE658144A (enExample) * | 1964-01-10 | |||
| US3337429A (en) * | 1964-05-28 | 1967-08-22 | Union Carbide Corp | Solid electrolytic capacitor and process therefor |
| US3305914A (en) * | 1964-08-28 | 1967-02-28 | Westinghouse Electric Corp | Manufacturing process for electronic capacitors |
| US3345543A (en) * | 1965-03-11 | 1967-10-03 | Sato Toshio | Solid electrolytic capacitor with anodized aluminum electrode and method of making |
-
1966
- 1966-11-16 DE DE19661564822 patent/DE1564822B2/de not_active Withdrawn
-
1967
- 1967-11-07 FI FI673011A patent/FI44818C/fi active
- 1967-11-09 GB GB51072/67A patent/GB1199048A/en not_active Expired
- 1967-11-09 US US681638A patent/US3495311A/en not_active Expired - Lifetime
- 1967-11-13 LU LU54856D patent/LU54856A1/xx unknown
- 1967-11-15 NL NL6715486A patent/NL6715486A/xx unknown
- 1967-11-15 SE SE15669/67A patent/SE331855B/xx unknown
- 1967-11-15 CH CH1596967A patent/CH474825A/de not_active IP Right Cessation
- 1967-11-16 NO NO170553A patent/NO119650B/no unknown
- 1967-11-16 FR FR1552085D patent/FR1552085A/fr not_active Expired
- 1967-11-16 BE BE706560D patent/BE706560A/xx unknown
- 1967-11-16 DK DK572667AA patent/DK123676B/da unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2929308A1 (de) * | 1978-07-28 | 1980-02-07 | Lignes Telegraph Telephon | Verfahren zur herstellung von tantal-festelektrolytkondensatoren |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1199048A (en) | 1970-07-15 |
| FI44818B (enExample) | 1971-09-30 |
| CH474825A (de) | 1969-06-30 |
| FI44818C (fi) | 1972-01-10 |
| US3495311A (en) | 1970-02-17 |
| BE706560A (enExample) | 1968-04-01 |
| FR1552085A (enExample) | 1969-01-03 |
| SE331855B (enExample) | 1971-01-18 |
| DE1564822A1 (de) | 1970-07-16 |
| LU54856A1 (enExample) | 1968-02-05 |
| NL6715486A (enExample) | 1968-05-17 |
| DK123676B (da) | 1972-07-17 |
| NO119650B (enExample) | 1970-06-15 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| E77 | Valid patent as to the heymanns-index 1977 | ||
| EHJ | Ceased/non-payment of the annual fee |