DE1546032C3 - - Google Patents

Info

Publication number
DE1546032C3
DE1546032C3 DE1546032A DE1546032A DE1546032C3 DE 1546032 C3 DE1546032 C3 DE 1546032C3 DE 1546032 A DE1546032 A DE 1546032A DE 1546032 A DE1546032 A DE 1546032A DE 1546032 C3 DE1546032 C3 DE 1546032C3
Authority
DE
Germany
Prior art keywords
tetramethylammonium hydroxide
aluminum
layer
semiconductor
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE1546032A
Other languages
German (de)
English (en)
Other versions
DE1546032A1 (de
DE1546032B2 (de
Inventor
Ludwig Dr. Voecklabruck Bertsch (Oesterreich)
Hans-Peter 7100 Heilbronn Eberhardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Telefunken Patentverwertungs GmbH
Original Assignee
Telefunken Patentverwertungs GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Telefunken Patentverwertungs GmbH filed Critical Telefunken Patentverwertungs GmbH
Priority to DE19511546032 priority Critical patent/DE1546032B2/de
Publication of DE1546032A1 publication Critical patent/DE1546032A1/de
Publication of DE1546032B2 publication Critical patent/DE1546032B2/de
Application granted granted Critical
Publication of DE1546032C3 publication Critical patent/DE1546032C3/de
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body (electrodes)
    • H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body (electrodes) consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/10—Etching compositions
    • C23F1/14—Aqueous compositions
    • C23F1/32—Alkaline compositions
    • C23F1/36—Alkaline compositions for etching aluminium or alloys thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
DE19511546032 1951-01-28 1951-01-28 Waessrige basische aetzloesung zur herstellung von getrennten halbleiterkontakten Granted DE1546032B2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE19511546032 DE1546032B2 (de) 1951-01-28 1951-01-28 Waessrige basische aetzloesung zur herstellung von getrennten halbleiterkontakten

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19511546032 DE1546032B2 (de) 1951-01-28 1951-01-28 Waessrige basische aetzloesung zur herstellung von getrennten halbleiterkontakten
DET0027950 1965-02-06

Publications (3)

Publication Number Publication Date
DE1546032A1 DE1546032A1 (de) 1970-03-05
DE1546032B2 DE1546032B2 (de) 1973-08-23
DE1546032C3 true DE1546032C3 (en:Method) 1974-05-02

Family

ID=25752871

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19511546032 Granted DE1546032B2 (de) 1951-01-28 1951-01-28 Waessrige basische aetzloesung zur herstellung von getrennten halbleiterkontakten

Country Status (1)

Country Link
DE (1) DE1546032B2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4339340A (en) 1975-11-26 1982-07-13 Tokyo Shibaura Electric Co., Ltd. Surface-treating agent adapted for intermediate products of a semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1573206A (en) * 1975-11-26 1980-08-20 Tokyo Shibaura Electric Co Method of trating surfaces of intermediate products obtained in the manufacture of semiconductor devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4339340A (en) 1975-11-26 1982-07-13 Tokyo Shibaura Electric Co., Ltd. Surface-treating agent adapted for intermediate products of a semiconductor device

Also Published As

Publication number Publication date
DE1546032A1 (de) 1970-03-05
DE1546032B2 (de) 1973-08-23

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Legal Events

Date Code Title Description
C3 Grant after two publication steps (3rd publication)
E77 Valid patent as to the heymanns-index 1977
EHJ Ceased/non-payment of the annual fee