DE1521571A1 - Tiegel fuer die Verdampfung von Metall - Google Patents

Tiegel fuer die Verdampfung von Metall

Info

Publication number
DE1521571A1
DE1521571A1 DE19661521571 DE1521571A DE1521571A1 DE 1521571 A1 DE1521571 A1 DE 1521571A1 DE 19661521571 DE19661521571 DE 19661521571 DE 1521571 A DE1521571 A DE 1521571A DE 1521571 A1 DE1521571 A1 DE 1521571A1
Authority
DE
Germany
Prior art keywords
crucible
metal
dipl
ing
munich
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19661521571
Other languages
German (de)
English (en)
Inventor
Waldo Rall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
United States Steel Corp
Original Assignee
United States Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United States Steel Corp filed Critical United States Steel Corp
Publication of DE1521571A1 publication Critical patent/DE1521571A1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
DE19661521571 1965-08-24 1966-08-24 Tiegel fuer die Verdampfung von Metall Pending DE1521571A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US48219365A 1965-08-24 1965-08-24

Publications (1)

Publication Number Publication Date
DE1521571A1 true DE1521571A1 (de) 1969-09-11

Family

ID=23915090

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19661521571 Pending DE1521571A1 (de) 1965-08-24 1966-08-24 Tiegel fuer die Verdampfung von Metall

Country Status (4)

Country Link
BE (1) BE685577A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE1521571A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1106576A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL6610937A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3590269C2 (de) * 1984-06-12 1988-01-14 Ki Politekhn I Im 50 Letijavel Verdampfer zum Aufbringen von D}nnschichten durch Vakuumaufdampfen
WO1993009264A1 (en) * 1991-10-29 1993-05-13 Applied Vacuum Technologies 1 Ab Crucible and method for its use

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3590269C2 (de) * 1984-06-12 1988-01-14 Ki Politekhn I Im 50 Letijavel Verdampfer zum Aufbringen von D}nnschichten durch Vakuumaufdampfen
US5494499A (en) * 1991-01-29 1996-02-27 Applied Vacuum Technologies 1 Ab Crucible and method for its use
WO1993009264A1 (en) * 1991-10-29 1993-05-13 Applied Vacuum Technologies 1 Ab Crucible and method for its use

Also Published As

Publication number Publication date
BE685577A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1967-02-16
GB1106576A (en) 1968-03-20
NL6610937A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1967-02-27

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