DE1521520B1 - Vorrichtung zur kontinuierlichen Herstellung einer duennen Folie,insbesondere aus Metall,durch Vakuumaufdampfen - Google Patents
Vorrichtung zur kontinuierlichen Herstellung einer duennen Folie,insbesondere aus Metall,durch VakuumaufdampfenInfo
- Publication number
- DE1521520B1 DE1521520B1 DE19631521520 DE1521520A DE1521520B1 DE 1521520 B1 DE1521520 B1 DE 1521520B1 DE 19631521520 DE19631521520 DE 19631521520 DE 1521520 A DE1521520 A DE 1521520A DE 1521520 B1 DE1521520 B1 DE 1521520B1
- Authority
- DE
- Germany
- Prior art keywords
- drum
- crucible
- vacuum
- vacuum chamber
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 title claims description 14
- 229910052751 metal Inorganic materials 0.000 title claims description 10
- 239000002184 metal Substances 0.000 title claims description 10
- 239000010409 thin film Substances 0.000 title claims description 6
- 238000010924 continuous production Methods 0.000 title claims description 5
- 239000000463 material Substances 0.000 claims description 47
- 238000001704 evaporation Methods 0.000 claims description 22
- 230000008020 evaporation Effects 0.000 claims description 21
- 238000010894 electron beam technology Methods 0.000 claims description 18
- 239000011888 foil Substances 0.000 claims description 17
- 238000002844 melting Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 34
- 238000004519 manufacturing process Methods 0.000 description 26
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 20
- 229910052802 copper Inorganic materials 0.000 description 16
- 239000010949 copper Substances 0.000 description 16
- 238000000576 coating method Methods 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 6
- 239000011889 copper foil Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000001133 acceleration Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000012768 molten material Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 238000005019 vapor deposition process Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- -1 copper Chemical class 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0005—Separation of the coating from the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S164/00—Metal founding
- Y10S164/05—Electron beam
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S65/00—Glass manufacturing
- Y10S65/05—Foil glass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/30—Foil or other thin sheet-metal making or treating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US200157A US3183563A (en) | 1962-06-05 | 1962-06-05 | Apparatus for continuous foil production by vapor deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1521520B1 true DE1521520B1 (de) | 1970-09-03 |
Family
ID=22740569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19631521520 Pending DE1521520B1 (de) | 1962-06-05 | 1963-05-29 | Vorrichtung zur kontinuierlichen Herstellung einer duennen Folie,insbesondere aus Metall,durch Vakuumaufdampfen |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3183563A (da) |
| AT (1) | AT261347B (da) |
| CH (1) | CH401632A (da) |
| DE (1) | DE1521520B1 (da) |
| DK (1) | DK116836B (da) |
| FR (1) | FR1364210A (da) |
| GB (1) | GB1014245A (da) |
| LU (1) | LU43818A1 (da) |
| NL (2) | NL139566B (da) |
| SE (1) | SE309351B (da) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL293028A (da) * | 1962-06-05 | |||
| DE1199097B (de) * | 1962-09-25 | 1965-08-19 | Heraeus Gmbh W C | Vorrichtung zum Vakuumbedampfen breiter Baender, insbesondere mit Metallen, durch Erhitzen des Verdampfungsgutes mittels Elektronenstrahlen |
| US3347701A (en) * | 1963-02-05 | 1967-10-17 | Fujitsu Ltd | Method and apparatus for vapor deposition employing an electron beam |
| US3322577A (en) * | 1963-05-03 | 1967-05-30 | Temescal Metallurgical Corp | Method and apparatus for the continuous production of oxide coatings |
| US3406040A (en) * | 1964-06-24 | 1968-10-15 | Ibm | Vapor deposition method for forming thin polymeric films |
| US3351126A (en) * | 1964-09-25 | 1967-11-07 | Western Electric Co | Casting wheel apparatus |
| FR1445684A (fr) * | 1965-06-03 | 1966-07-15 | Commissariat Energie Atomique | Dispositif de coulée continue de matériaux réfractaires |
| US3420978A (en) * | 1965-06-30 | 1969-01-07 | Nasa | Pretreatment method for antiwettable materials |
| US3381739A (en) * | 1965-08-20 | 1968-05-07 | Phelps Dodge Corp | Method and apparatus for processing materials into foil and strip form |
| US3414655A (en) * | 1966-01-26 | 1968-12-03 | Nat Res Corp | Apparatus for evaporation of low temperature semiconductor material by electron beam impingement on the material and comprising means for draining electric charge from the material |
| US3440390A (en) * | 1966-04-20 | 1969-04-22 | Little Inc A | Method and apparatus for treating continuous strip material under vacuum |
| BE705239A (da) * | 1966-06-15 | 1968-03-01 | ||
| US3476525A (en) * | 1966-09-26 | 1969-11-04 | Nat Res Corp | Production of boron carbide flakes |
| US3394679A (en) * | 1966-12-05 | 1968-07-30 | Dresser Ind | Vacuum coating apparatus |
| US3414251A (en) * | 1968-01-19 | 1968-12-03 | United States Steel Corp | Metal vaporization crucible with upstanding walls for confining and condensing vapor |
| US3535489A (en) * | 1968-05-03 | 1970-10-20 | Smith Corp A O | Electron beam welding apparatus |
| US3511212A (en) * | 1968-05-16 | 1970-05-12 | Du Pont | Vapor deposition apparatus including a polyimide containing mask |
| US3956031A (en) * | 1969-12-24 | 1976-05-11 | Texas Instruments Incorporated | Magnetic materials and the formation thereof |
| US3608615A (en) * | 1970-08-20 | 1971-09-28 | Phelps Dodge Corp | Foil production |
| US3989862A (en) * | 1970-10-13 | 1976-11-02 | Jones & Laughlin Steel Corporation | Method and apparatus for vapor-depositing coatings on substrates |
| US4076866A (en) * | 1975-03-30 | 1978-02-28 | Massachusetts Institute Of Technology | Method of growing films by flash vaporization |
| DE2848480C2 (de) * | 1978-11-08 | 1984-11-08 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum Aufbringen von Schichten auf Träger unter Vakuum |
| DE2900772C2 (de) * | 1979-01-10 | 1984-08-30 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur Erzeugung von Schichten auf einer bandförmigen Trägerfolie |
| US4301765A (en) * | 1979-01-10 | 1981-11-24 | Siemens Aktiengesellschaft | Apparatus for generating layers on a carrier foil |
| KR920003591B1 (ko) * | 1988-04-11 | 1992-05-04 | 미쯔비시주우고오교오 가부시기가이샤 | 연속진공증착장치 |
| DE69012667T2 (de) * | 1989-06-19 | 1995-05-04 | Matsushita Electric Ind Co Ltd | Verfahren zum Zuleiten von Vakuumverdampfungsgut und Vorrichtung zu dessen Durchführung. |
| US5411075A (en) * | 1993-08-31 | 1995-05-02 | Aluminum Company Of America | Roll for use in casting metal products and an associated method |
| US8323408B2 (en) * | 2007-12-10 | 2012-12-04 | Solopower, Inc. | Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation |
| US20100147677A1 (en) * | 2008-10-28 | 2010-06-17 | Mustafa Pinarbasi | Drum design for web processing |
| TWI477646B (zh) * | 2010-08-09 | 2015-03-21 | Hon Hai Prec Ind Co Ltd | 化學氣相沉積設備 |
| JP2013087297A (ja) * | 2011-10-13 | 2013-05-13 | Sumitomo Electric Ind Ltd | 金属膜の製造方法 |
| EP3956937A4 (en) * | 2019-04-17 | 2024-02-28 | 2555663 Ontario Limited | LITHIUM METAL ANODE ARRANGEMENTS AND DEVICE AND METHOD FOR PRODUCING THEM |
| US20230137506A1 (en) * | 2020-08-21 | 2023-05-04 | Applied Materials, Inc. | Processing system for processing a flexible substrate and method of measuring at least one of a property of a flexible substrate and a property of one or more coatings on the flexible substrate |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE501014C (de) * | 1927-07-08 | 1930-09-16 | Aeg | Verfahren zum Herstellen eines abwechselnd aus leitenden Schichten bestehenden Isolierkoerpers oder Kondensators |
| CH236117A (de) * | 1941-08-16 | 1945-01-15 | Bosch Gmbh Robert | Verfahren zur Herstellung von metallisierten Bändern aus Isolierstoff. |
| US2384500A (en) * | 1942-07-08 | 1945-09-11 | Crown Cork & Seal Co | Apparatus and method of coating |
| DE1741856U (de) * | 1956-02-16 | 1957-03-21 | Siemens Schukkertwerke Ag | Einrichtung zur kontinuierlichen bedampfung von folien. |
| CH334330A (de) * | 1953-09-29 | 1958-11-30 | Siemens Ag | Apparatur mit Hochvakuumraum und kontinuierlich benutzbarer Vakuumschleuse für Bänder und Drähte |
| DE1078402B (de) * | 1956-12-06 | 1960-03-24 | Heraeus Gmbh W C | Vorrichtung zum Vakuumbedampfen von Baendern |
| AT261347B (de) * | 1962-06-05 | 1968-04-25 | Air Reduction | Vorrichtung zur kontinuierlichen Herstellung von dünnen Metallfolien |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2864137A (en) * | 1952-10-25 | 1958-12-16 | Helen E Brennan | Apparatus and method for producing metal strip |
| US3043728A (en) * | 1958-03-17 | 1962-07-10 | Nat Res Corp | Apparatus and process for metallic vapor coating |
| US3046936A (en) * | 1958-06-04 | 1962-07-31 | Nat Res Corp | Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof |
| US3040702A (en) * | 1958-06-19 | 1962-06-26 | Nat Res Corp | Vacuum coating apparatus having sealing means formed of membranes and fibers |
| US2996037A (en) * | 1959-01-26 | 1961-08-15 | Nat Res Corp | Vacuum coating apparatus |
-
0
- NL NL293028D patent/NL293028A/xx unknown
-
1962
- 1962-06-05 US US200157A patent/US3183563A/en not_active Expired - Lifetime
-
1963
- 1963-05-21 NL NL63293028A patent/NL139566B/xx unknown
- 1963-05-24 CH CH646663A patent/CH401632A/fr unknown
- 1963-05-24 GB GB20951/63A patent/GB1014245A/en not_active Expired
- 1963-05-27 FR FR936145A patent/FR1364210A/fr not_active Expired
- 1963-05-27 LU LU43818D patent/LU43818A1/xx unknown
- 1963-05-29 DE DE19631521520 patent/DE1521520B1/de active Pending
- 1963-06-04 DK DK264163AA patent/DK116836B/da unknown
- 1963-06-04 AT AT448363A patent/AT261347B/de active
- 1963-06-05 SE SE6205/63A patent/SE309351B/xx unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE501014C (de) * | 1927-07-08 | 1930-09-16 | Aeg | Verfahren zum Herstellen eines abwechselnd aus leitenden Schichten bestehenden Isolierkoerpers oder Kondensators |
| CH236117A (de) * | 1941-08-16 | 1945-01-15 | Bosch Gmbh Robert | Verfahren zur Herstellung von metallisierten Bändern aus Isolierstoff. |
| US2384500A (en) * | 1942-07-08 | 1945-09-11 | Crown Cork & Seal Co | Apparatus and method of coating |
| CH334330A (de) * | 1953-09-29 | 1958-11-30 | Siemens Ag | Apparatur mit Hochvakuumraum und kontinuierlich benutzbarer Vakuumschleuse für Bänder und Drähte |
| DE1741856U (de) * | 1956-02-16 | 1957-03-21 | Siemens Schukkertwerke Ag | Einrichtung zur kontinuierlichen bedampfung von folien. |
| DE1078402B (de) * | 1956-12-06 | 1960-03-24 | Heraeus Gmbh W C | Vorrichtung zum Vakuumbedampfen von Baendern |
| AT261347B (de) * | 1962-06-05 | 1968-04-25 | Air Reduction | Vorrichtung zur kontinuierlichen Herstellung von dünnen Metallfolien |
Also Published As
| Publication number | Publication date |
|---|---|
| GB1014245A (en) | 1965-12-22 |
| US3183563A (en) | 1965-05-18 |
| NL293028A (da) | |
| SE309351B (da) | 1969-03-17 |
| DK116836B (da) | 1970-02-16 |
| AT261347B (de) | 1968-04-25 |
| NL139566B (nl) | 1973-08-15 |
| CH401632A (fr) | 1965-10-31 |
| LU43818A1 (da) | 1964-05-27 |
| FR1364210A (fr) | 1964-06-19 |
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