GB1014245A - Improvements in or relating to apparatus for vapor deposition - Google Patents

Improvements in or relating to apparatus for vapor deposition

Info

Publication number
GB1014245A
GB1014245A GB20951/63A GB2095163A GB1014245A GB 1014245 A GB1014245 A GB 1014245A GB 20951/63 A GB20951/63 A GB 20951/63A GB 2095163 A GB2095163 A GB 2095163A GB 1014245 A GB1014245 A GB 1014245A
Authority
GB
United Kingdom
Prior art keywords
drum
chamber
web
sheet
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB20951/63A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Temescal Metallurgical Corp
Original Assignee
Temescal Metallurgical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Temescal Metallurgical Corp filed Critical Temescal Metallurgical Corp
Publication of GB1014245A publication Critical patent/GB1014245A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005—Separation of the coating from the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S164/00—Metal founding
    • Y10S164/05—Electron beam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/05—Foil glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/30—Foil or other thin sheet-metal making or treating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

<PICT:1014245/C6-C7/1> Apparatus for the continuous manufacture of thin foil by vapour deposition includes a housing defining a main vacuum chamber, evacuating means therefor and a crucible within the chamber for receiving material to be vaporized by electron beam heating means (see Division H1), a rotatable drum mounted in the housing so that its periphery forms a portion of the wall of the chamber and a plurality of vacuum sealing chambers disposed about the periphery of the drum immediately outside the main vacuum chamber. As shown in Fig. 1, the main chamber 11 is provided with vaporizable material through vacuum lock 28 to a crucible 27 where it is melted and volatile impurities are removed. It then flows by launder 26 to crucible 17. Drum 41 rotates between walls 51-54 which form sealing chambers 56-58 which are separately evacuated by pumps 61-63. The main chamber is evacuated by pumps 13 and backing pump 14. Heat for melting the material to be vapour deposited. for vaporizing the material and for heating the drum surface in advance of the point of condensation, is provided by electron beams from sources 31, 19 and 77 respectively. The interior of the drum is provided with cooling tube 44. The deposited film e.g. of copper is stripped from the drum periphery, which may be of stainless steel, by a stripping knife 72, and is wound on take-up reel 74. In a modification, Fig. 4 (not shown), the film is formed on the surface of a web or sheet passing through the main chamber round the surface of a drum and being fed from a take-off reel to a take-up reel. The drum is situated wholly within the chamber and the web or sheet enters and leaves the chamber in contact with a second drum about whose periphery the vacuum sealing chambers are disposed. In a further modification, Fig. 5 (not shown), separate entry and exit drums are provided for the web or sheet, each drum having its associated plurality of vacuum sealing chambers, and an endless stencil sheet passes through the main chamber in contact with the web or sheet to be coated so as to produce a coating in a desired pattern. The production of films or coatings of titanium and tantalum is also referred to.
GB20951/63A 1962-06-05 1963-05-24 Improvements in or relating to apparatus for vapor deposition Expired GB1014245A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US200157A US3183563A (en) 1962-06-05 1962-06-05 Apparatus for continuous foil production by vapor deposition

Publications (1)

Publication Number Publication Date
GB1014245A true GB1014245A (en) 1965-12-22

Family

ID=22740569

Family Applications (1)

Application Number Title Priority Date Filing Date
GB20951/63A Expired GB1014245A (en) 1962-06-05 1963-05-24 Improvements in or relating to apparatus for vapor deposition

Country Status (10)

Country Link
US (1) US3183563A (en)
AT (1) AT261347B (en)
CH (1) CH401632A (en)
DE (1) DE1521520B1 (en)
DK (1) DK116836B (en)
FR (1) FR1364210A (en)
GB (1) GB1014245A (en)
LU (1) LU43818A1 (en)
NL (2) NL139566B (en)
SE (1) SE309351B (en)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL293028A (en) * 1962-06-05
DE1199097B (en) * 1962-09-25 1965-08-19 Heraeus Gmbh W C Device for vacuum evaporation of wide strips, especially with metals, by heating the material to be evaporated by means of electron beams
US3347701A (en) * 1963-02-05 1967-10-17 Fujitsu Ltd Method and apparatus for vapor deposition employing an electron beam
US3322577A (en) * 1963-05-03 1967-05-30 Temescal Metallurgical Corp Method and apparatus for the continuous production of oxide coatings
US3406040A (en) * 1964-06-24 1968-10-15 Ibm Vapor deposition method for forming thin polymeric films
US3351126A (en) * 1964-09-25 1967-11-07 Western Electric Co Casting wheel apparatus
FR1445684A (en) * 1965-06-03 1966-07-15 Commissariat Energie Atomique Device for continuous casting of refractory materials
US3420978A (en) * 1965-06-30 1969-01-07 Nasa Pretreatment method for antiwettable materials
US3381739A (en) * 1965-08-20 1968-05-07 Phelps Dodge Corp Method and apparatus for processing materials into foil and strip form
US3414655A (en) * 1966-01-26 1968-12-03 Nat Res Corp Apparatus for evaporation of low temperature semiconductor material by electron beam impingement on the material and comprising means for draining electric charge from the material
US3440390A (en) * 1966-04-20 1969-04-22 Little Inc A Method and apparatus for treating continuous strip material under vacuum
BE705239A (en) * 1966-06-15 1968-03-01
US3476525A (en) * 1966-09-26 1969-11-04 Nat Res Corp Production of boron carbide flakes
US3394679A (en) * 1966-12-05 1968-07-30 Dresser Ind Vacuum coating apparatus
US3414251A (en) * 1968-01-19 1968-12-03 United States Steel Corp Metal vaporization crucible with upstanding walls for confining and condensing vapor
US3535489A (en) * 1968-05-03 1970-10-20 Smith Corp A O Electron beam welding apparatus
US3511212A (en) * 1968-05-16 1970-05-12 Du Pont Vapor deposition apparatus including a polyimide containing mask
US3956031A (en) * 1969-12-24 1976-05-11 Texas Instruments Incorporated Magnetic materials and the formation thereof
US3608615A (en) * 1970-08-20 1971-09-28 Phelps Dodge Corp Foil production
US3989862A (en) * 1970-10-13 1976-11-02 Jones & Laughlin Steel Corporation Method and apparatus for vapor-depositing coatings on substrates
US4076866A (en) * 1975-03-30 1978-02-28 Massachusetts Institute Of Technology Method of growing films by flash vaporization
DE2848480C2 (en) * 1978-11-08 1984-11-08 Siemens AG, 1000 Berlin und 8000 München Device for applying layers to substrates under vacuum
DE2900772C2 (en) * 1979-01-10 1984-08-30 Siemens AG, 1000 Berlin und 8000 München Process for the production of layers on a tape-shaped carrier film
US4301765A (en) * 1979-01-10 1981-11-24 Siemens Aktiengesellschaft Apparatus for generating layers on a carrier foil
KR920003591B1 (en) * 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 Continuous vacuum vapor deposition device
EP0403987B1 (en) * 1989-06-19 1994-09-21 Matsushita Electric Industrial Co., Ltd. Method for supplying vacuum evaporation material and apparatus therefor
US5411075A (en) * 1993-08-31 1995-05-02 Aluminum Company Of America Roll for use in casting metal products and an associated method
US8323408B2 (en) * 2007-12-10 2012-12-04 Solopower, Inc. Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation
EP2355920A4 (en) * 2008-10-28 2012-11-14 Solopower Inc Improved drum design for web processing
TWI477646B (en) * 2010-08-09 2015-03-21 Hon Hai Prec Ind Co Ltd Chemical vapor deposition device
JP2013087297A (en) * 2011-10-13 2013-05-13 Sumitomo Electric Ind Ltd Method for producing metal film
US20220216482A1 (en) * 2019-04-17 2022-07-07 2555663 Ontario Limited Lithium metal anode assemblies and an apparatus and method of making same
US20230137506A1 (en) * 2020-08-21 2023-05-04 Applied Materials, Inc. Processing system for processing a flexible substrate and method of measuring at least one of a property of a flexible substrate and a property of one or more coatings on the flexible substrate

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE501014C (en) * 1927-07-08 1930-09-16 Aeg Method for producing an insulating body or capacitor consisting of alternating conductive layers
CH236117A (en) * 1941-08-16 1945-01-15 Bosch Gmbh Robert Process for the production of metallized strips from insulating material.
US2384500A (en) * 1942-07-08 1945-09-11 Crown Cork & Seal Co Apparatus and method of coating
US2864137A (en) * 1952-10-25 1958-12-16 Helen E Brennan Apparatus and method for producing metal strip
CH334330A (en) * 1953-09-29 1958-11-30 Siemens Ag Apparatus with high vacuum space and continuously usable vacuum lock for ribbons and wires
DE1741856U (en) * 1956-02-16 1957-03-21 Siemens Schukkertwerke Ag DEVICE FOR CONTINUOUS EVAPORATION OF FILMS.
DE1078402B (en) * 1956-12-06 1960-03-24 Heraeus Gmbh W C Device for vacuum deposition of tapes
US3043728A (en) * 1958-03-17 1962-07-10 Nat Res Corp Apparatus and process for metallic vapor coating
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3040702A (en) * 1958-06-19 1962-06-26 Nat Res Corp Vacuum coating apparatus having sealing means formed of membranes and fibers
US2996037A (en) * 1959-01-26 1961-08-15 Nat Res Corp Vacuum coating apparatus
NL293028A (en) * 1962-06-05

Also Published As

Publication number Publication date
LU43818A1 (en) 1964-05-27
NL293028A (en)
AT261347B (en) 1968-04-25
DK116836B (en) 1970-02-16
US3183563A (en) 1965-05-18
DE1521520B1 (en) 1970-09-03
NL139566B (en) 1973-08-15
SE309351B (en) 1969-03-17
CH401632A (en) 1965-10-31
FR1364210A (en) 1964-06-19

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