AT261347B - Device for the continuous production of thin metal foils - Google Patents
Device for the continuous production of thin metal foilsInfo
- Publication number
- AT261347B AT261347B AT448363A AT448363A AT261347B AT 261347 B AT261347 B AT 261347B AT 448363 A AT448363 A AT 448363A AT 448363 A AT448363 A AT 448363A AT 261347 B AT261347 B AT 261347B
- Authority
- AT
- Austria
- Prior art keywords
- thin metal
- continuous production
- metal foils
- foils
- continuous
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0005—Separation of the coating from the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S164/00—Metal founding
- Y10S164/05—Electron beam
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S65/00—Glass manufacturing
- Y10S65/05—Foil glass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/30—Foil or other thin sheet-metal making or treating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US200157A US3183563A (en) | 1962-06-05 | 1962-06-05 | Apparatus for continuous foil production by vapor deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AT261347B true AT261347B (en) | 1968-04-25 |
Family
ID=22740569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT448363A AT261347B (en) | 1962-06-05 | 1963-06-04 | Device for the continuous production of thin metal foils |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3183563A (en) |
| AT (1) | AT261347B (en) |
| CH (1) | CH401632A (en) |
| DE (1) | DE1521520B1 (en) |
| DK (1) | DK116836B (en) |
| FR (1) | FR1364210A (en) |
| GB (1) | GB1014245A (en) |
| LU (1) | LU43818A1 (en) |
| NL (2) | NL139566B (en) |
| SE (1) | SE309351B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1521520B1 (en) * | 1962-06-05 | 1970-09-03 | Air Reduction | Device for the continuous production of a thin film, in particular made of metal, by vacuum vapor deposition |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1199097B (en) * | 1962-09-25 | 1965-08-19 | Heraeus Gmbh W C | Device for vacuum evaporation of wide strips, especially with metals, by heating the material to be evaporated by means of electron beams |
| US3347701A (en) * | 1963-02-05 | 1967-10-17 | Fujitsu Ltd | Method and apparatus for vapor deposition employing an electron beam |
| US3322577A (en) * | 1963-05-03 | 1967-05-30 | Temescal Metallurgical Corp | Method and apparatus for the continuous production of oxide coatings |
| US3406040A (en) * | 1964-06-24 | 1968-10-15 | Ibm | Vapor deposition method for forming thin polymeric films |
| US3351126A (en) * | 1964-09-25 | 1967-11-07 | Western Electric Co | Casting wheel apparatus |
| FR1445684A (en) * | 1965-06-03 | 1966-07-15 | Commissariat Energie Atomique | Device for continuous casting of refractory materials |
| US3420978A (en) * | 1965-06-30 | 1969-01-07 | Nasa | Pretreatment method for antiwettable materials |
| US3381739A (en) * | 1965-08-20 | 1968-05-07 | Phelps Dodge Corp | Method and apparatus for processing materials into foil and strip form |
| US3414655A (en) * | 1966-01-26 | 1968-12-03 | Nat Res Corp | Apparatus for evaporation of low temperature semiconductor material by electron beam impingement on the material and comprising means for draining electric charge from the material |
| US3440390A (en) * | 1966-04-20 | 1969-04-22 | Little Inc A | Method and apparatus for treating continuous strip material under vacuum |
| FR1534681A (en) * | 1966-06-15 | 1968-08-02 | Michel A Braguier | Continuous zinc metallization process of a strip of dielectric material |
| US3476525A (en) * | 1966-09-26 | 1969-11-04 | Nat Res Corp | Production of boron carbide flakes |
| US3394679A (en) * | 1966-12-05 | 1968-07-30 | Dresser Ind | Vacuum coating apparatus |
| US3414251A (en) * | 1968-01-19 | 1968-12-03 | United States Steel Corp | Metal vaporization crucible with upstanding walls for confining and condensing vapor |
| US3535489A (en) * | 1968-05-03 | 1970-10-20 | Smith Corp A O | Electron beam welding apparatus |
| US3511212A (en) * | 1968-05-16 | 1970-05-12 | Du Pont | Vapor deposition apparatus including a polyimide containing mask |
| US3956031A (en) * | 1969-12-24 | 1976-05-11 | Texas Instruments Incorporated | Magnetic materials and the formation thereof |
| US3608615A (en) * | 1970-08-20 | 1971-09-28 | Phelps Dodge Corp | Foil production |
| US3989862A (en) * | 1970-10-13 | 1976-11-02 | Jones & Laughlin Steel Corporation | Method and apparatus for vapor-depositing coatings on substrates |
| US4076866A (en) * | 1975-03-30 | 1978-02-28 | Massachusetts Institute Of Technology | Method of growing films by flash vaporization |
| GB1604654A (en) | 1977-05-27 | 1981-12-16 | Steigerwald Strahltech | Sealing system for a vacuum chamber of a charged particle beam machine |
| DE2848480C2 (en) * | 1978-11-08 | 1984-11-08 | Siemens AG, 1000 Berlin und 8000 München | Device for applying layers to substrates under vacuum |
| US4301765A (en) * | 1979-01-10 | 1981-11-24 | Siemens Aktiengesellschaft | Apparatus for generating layers on a carrier foil |
| DE2900772C2 (en) * | 1979-01-10 | 1984-08-30 | Siemens AG, 1000 Berlin und 8000 München | Process for the production of layers on a tape-shaped carrier film |
| KR920003591B1 (en) * | 1988-04-11 | 1992-05-04 | 미쯔비시주우고오교오 가부시기가이샤 | Continuous vacuum vapor deposition device |
| DE69012667T2 (en) * | 1989-06-19 | 1995-05-04 | Matsushita Electric Ind Co Ltd | Process for supplying vacuum evaporation material and device for carrying it out. |
| US5411075A (en) * | 1993-08-31 | 1995-05-02 | Aluminum Company Of America | Roll for use in casting metal products and an associated method |
| US8323408B2 (en) * | 2007-12-10 | 2012-12-04 | Solopower, Inc. | Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation |
| EP2355920A4 (en) * | 2008-10-28 | 2012-11-14 | Solopower Inc | ENHANCED DRUM DESIGN FOR BAND PROCESSING |
| TWI477646B (en) * | 2010-08-09 | 2015-03-21 | Hon Hai Prec Ind Co Ltd | Chemical vapor deposition device |
| JP2013087297A (en) * | 2011-10-13 | 2013-05-13 | Sumitomo Electric Ind Ltd | Method for producing metal film |
| CA3136848A1 (en) * | 2019-04-17 | 2020-10-22 | 2555663 Ontario Limited | Lithium metal anode assemblies and an apparatus and method of making same |
| EP4200461A4 (en) * | 2020-08-21 | 2024-09-18 | Applied Materials, Inc. | PROCESSING SYSTEM FOR TREATING A FLEXIBLE SUBSTRATE AND METHOD FOR MEASURING AT LEAST ONE OF A PROPERTY OF A FLEXIBLE SUBSTRATE AND A PROPERTY OF ONE OR MORE COATINGS ON THE FLEXIBLE SUBSTRATE |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE501014C (en) * | 1927-07-08 | 1930-09-16 | Aeg | Method for producing an insulating body or capacitor consisting of alternating conductive layers |
| CH236117A (en) * | 1941-08-16 | 1945-01-15 | Bosch Gmbh Robert | Process for the production of metallized strips from insulating material. |
| US2384500A (en) * | 1942-07-08 | 1945-09-11 | Crown Cork & Seal Co | Apparatus and method of coating |
| US2864137A (en) * | 1952-10-25 | 1958-12-16 | Helen E Brennan | Apparatus and method for producing metal strip |
| CH334330A (en) * | 1953-09-29 | 1958-11-30 | Siemens Ag | Apparatus with high vacuum space and continuously usable vacuum lock for ribbons and wires |
| DE1741856U (en) * | 1956-02-16 | 1957-03-21 | Siemens Schukkertwerke Ag | DEVICE FOR CONTINUOUS EVAPORATION OF FILMS. |
| DE1078402B (en) * | 1956-12-06 | 1960-03-24 | Heraeus Gmbh W C | Device for vacuum deposition of tapes |
| US3043728A (en) * | 1958-03-17 | 1962-07-10 | Nat Res Corp | Apparatus and process for metallic vapor coating |
| US3046936A (en) * | 1958-06-04 | 1962-07-31 | Nat Res Corp | Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof |
| US3040702A (en) * | 1958-06-19 | 1962-06-26 | Nat Res Corp | Vacuum coating apparatus having sealing means formed of membranes and fibers |
| US2996037A (en) * | 1959-01-26 | 1961-08-15 | Nat Res Corp | Vacuum coating apparatus |
| NL293028A (en) * | 1962-06-05 |
-
0
- NL NL293028D patent/NL293028A/xx unknown
-
1962
- 1962-06-05 US US200157A patent/US3183563A/en not_active Expired - Lifetime
-
1963
- 1963-05-21 NL NL63293028A patent/NL139566B/en unknown
- 1963-05-24 GB GB20951/63A patent/GB1014245A/en not_active Expired
- 1963-05-24 CH CH646663A patent/CH401632A/en unknown
- 1963-05-27 LU LU43818D patent/LU43818A1/xx unknown
- 1963-05-27 FR FR936145A patent/FR1364210A/en not_active Expired
- 1963-05-29 DE DE19631521520 patent/DE1521520B1/en active Pending
- 1963-06-04 DK DK264163AA patent/DK116836B/en unknown
- 1963-06-04 AT AT448363A patent/AT261347B/en active
- 1963-06-05 SE SE6205/63A patent/SE309351B/xx unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1521520B1 (en) * | 1962-06-05 | 1970-09-03 | Air Reduction | Device for the continuous production of a thin film, in particular made of metal, by vacuum vapor deposition |
Also Published As
| Publication number | Publication date |
|---|---|
| DK116836B (en) | 1970-02-16 |
| US3183563A (en) | 1965-05-18 |
| DE1521520B1 (en) | 1970-09-03 |
| LU43818A1 (en) | 1964-05-27 |
| NL139566B (en) | 1973-08-15 |
| CH401632A (en) | 1965-10-31 |
| GB1014245A (en) | 1965-12-22 |
| FR1364210A (en) | 1964-06-19 |
| SE309351B (en) | 1969-03-17 |
| NL293028A (en) |
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