CH401632A - Apparatus for vaporizing a substance and producing a deposit by condensation of the vapor produced - Google Patents

Apparatus for vaporizing a substance and producing a deposit by condensation of the vapor produced

Info

Publication number
CH401632A
CH401632A CH646663A CH646663A CH401632A CH 401632 A CH401632 A CH 401632A CH 646663 A CH646663 A CH 646663A CH 646663 A CH646663 A CH 646663A CH 401632 A CH401632 A CH 401632A
Authority
CH
Switzerland
Prior art keywords
vaporizing
condensation
deposit
substance
producing
Prior art date
Application number
CH646663A
Other languages
French (fr)
Inventor
Roscoe Jr Smith Hugh
Original Assignee
Temescal Metallurgical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Temescal Metallurgical Corp filed Critical Temescal Metallurgical Corp
Publication of CH401632A publication Critical patent/CH401632A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005—Separation of the coating from the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S164/00—Metal founding
    • Y10S164/05—Electron beam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S65/00—Glass manufacturing
    • Y10S65/05—Foil glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/30—Foil or other thin sheet-metal making or treating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH646663A 1962-06-05 1963-05-24 Apparatus for vaporizing a substance and producing a deposit by condensation of the vapor produced CH401632A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US200157A US3183563A (en) 1962-06-05 1962-06-05 Apparatus for continuous foil production by vapor deposition

Publications (1)

Publication Number Publication Date
CH401632A true CH401632A (en) 1965-10-31

Family

ID=22740569

Family Applications (1)

Application Number Title Priority Date Filing Date
CH646663A CH401632A (en) 1962-06-05 1963-05-24 Apparatus for vaporizing a substance and producing a deposit by condensation of the vapor produced

Country Status (10)

Country Link
US (1) US3183563A (en)
AT (1) AT261347B (en)
CH (1) CH401632A (en)
DE (1) DE1521520B1 (en)
DK (1) DK116836B (en)
FR (1) FR1364210A (en)
GB (1) GB1014245A (en)
LU (1) LU43818A1 (en)
NL (2) NL139566B (en)
SE (1) SE309351B (en)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL293028A (en) * 1962-06-05
DE1199097B (en) * 1962-09-25 1965-08-19 Heraeus Gmbh W C Device for vacuum evaporation of wide strips, especially with metals, by heating the material to be evaporated by means of electron beams
US3347701A (en) * 1963-02-05 1967-10-17 Fujitsu Ltd Method and apparatus for vapor deposition employing an electron beam
US3322577A (en) * 1963-05-03 1967-05-30 Temescal Metallurgical Corp Method and apparatus for the continuous production of oxide coatings
US3406040A (en) * 1964-06-24 1968-10-15 Ibm Vapor deposition method for forming thin polymeric films
US3351126A (en) * 1964-09-25 1967-11-07 Western Electric Co Casting wheel apparatus
FR1445684A (en) * 1965-06-03 1966-07-15 Commissariat Energie Atomique Device for continuous casting of refractory materials
US3420978A (en) * 1965-06-30 1969-01-07 Nasa Pretreatment method for antiwettable materials
US3381739A (en) * 1965-08-20 1968-05-07 Phelps Dodge Corp Method and apparatus for processing materials into foil and strip form
US3414655A (en) * 1966-01-26 1968-12-03 Nat Res Corp Apparatus for evaporation of low temperature semiconductor material by electron beam impingement on the material and comprising means for draining electric charge from the material
US3440390A (en) * 1966-04-20 1969-04-22 Little Inc A Method and apparatus for treating continuous strip material under vacuum
BE705239A (en) * 1966-06-15 1968-03-01
US3476525A (en) * 1966-09-26 1969-11-04 Nat Res Corp Production of boron carbide flakes
US3394679A (en) * 1966-12-05 1968-07-30 Dresser Ind Vacuum coating apparatus
US3414251A (en) * 1968-01-19 1968-12-03 United States Steel Corp Metal vaporization crucible with upstanding walls for confining and condensing vapor
US3535489A (en) * 1968-05-03 1970-10-20 Smith Corp A O Electron beam welding apparatus
US3511212A (en) * 1968-05-16 1970-05-12 Du Pont Vapor deposition apparatus including a polyimide containing mask
US3956031A (en) * 1969-12-24 1976-05-11 Texas Instruments Incorporated Magnetic materials and the formation thereof
US3608615A (en) * 1970-08-20 1971-09-28 Phelps Dodge Corp Foil production
US3989862A (en) * 1970-10-13 1976-11-02 Jones & Laughlin Steel Corporation Method and apparatus for vapor-depositing coatings on substrates
US4076866A (en) * 1975-03-30 1978-02-28 Massachusetts Institute Of Technology Method of growing films by flash vaporization
DE2848480C2 (en) * 1978-11-08 1984-11-08 Siemens AG, 1000 Berlin und 8000 München Device for applying layers to substrates under vacuum
DE2900772C2 (en) * 1979-01-10 1984-08-30 Siemens AG, 1000 Berlin und 8000 München Process for the production of layers on a tape-shaped carrier film
US4301765A (en) * 1979-01-10 1981-11-24 Siemens Aktiengesellschaft Apparatus for generating layers on a carrier foil
KR920003591B1 (en) * 1988-04-11 1992-05-04 미쯔비시주우고오교오 가부시기가이샤 Continuous vacuum vapor deposition device
DE69012667T2 (en) * 1989-06-19 1995-05-04 Matsushita Electric Ind Co Ltd Process for supplying vacuum evaporation material and device for carrying it out.
US5411075A (en) * 1993-08-31 1995-05-02 Aluminum Company Of America Roll for use in casting metal products and an associated method
US8323408B2 (en) * 2007-12-10 2012-12-04 Solopower, Inc. Methods and apparatus to provide group VIA materials to reactors for group IBIIIAVIA film formation
WO2010051311A1 (en) * 2008-10-28 2010-05-06 Solopower, Inc. Improved drum design for web processing
TWI477646B (en) * 2010-08-09 2015-03-21 Hon Hai Prec Ind Co Ltd Chemical vapor deposition device
JP2013087297A (en) * 2011-10-13 2013-05-13 Sumitomo Electric Ind Ltd Method for producing metal film
CN113906598A (en) * 2019-04-17 2022-01-07 2555663安大略有限公司 Lithium metal anode assembly and apparatus and method for making same
EP4200461A4 (en) * 2020-08-21 2024-09-18 Applied Materials Inc Processing system for processing a flexible substrate and method of measuring at least one of a property of a flexible substrate and a property of one or more coatings on the flexible substrate

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE501014C (en) * 1927-07-08 1930-09-16 Aeg Method for producing an insulating body or capacitor consisting of alternating conductive layers
CH236117A (en) * 1941-08-16 1945-01-15 Bosch Gmbh Robert Process for the production of metallized strips from insulating material.
US2384500A (en) * 1942-07-08 1945-09-11 Crown Cork & Seal Co Apparatus and method of coating
US2864137A (en) * 1952-10-25 1958-12-16 Helen E Brennan Apparatus and method for producing metal strip
CH334330A (en) * 1953-09-29 1958-11-30 Siemens Ag Apparatus with high vacuum space and continuously usable vacuum lock for ribbons and wires
DE1741856U (en) * 1956-02-16 1957-03-21 Siemens Schukkertwerke Ag DEVICE FOR CONTINUOUS EVAPORATION OF FILMS.
DE1078402B (en) * 1956-12-06 1960-03-24 Heraeus Gmbh W C Device for vacuum deposition of tapes
US3043728A (en) * 1958-03-17 1962-07-10 Nat Res Corp Apparatus and process for metallic vapor coating
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3040702A (en) * 1958-06-19 1962-06-26 Nat Res Corp Vacuum coating apparatus having sealing means formed of membranes and fibers
US2996037A (en) * 1959-01-26 1961-08-15 Nat Res Corp Vacuum coating apparatus
NL293028A (en) * 1962-06-05

Also Published As

Publication number Publication date
FR1364210A (en) 1964-06-19
AT261347B (en) 1968-04-25
SE309351B (en) 1969-03-17
GB1014245A (en) 1965-12-22
DK116836B (en) 1970-02-16
NL139566B (en) 1973-08-15
NL293028A (en)
LU43818A1 (en) 1964-05-27
DE1521520B1 (en) 1970-09-03
US3183563A (en) 1965-05-18

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