US2885997A - Vacuum coating - Google Patents

Vacuum coating Download PDF

Info

Publication number
US2885997A
US2885997A US563742A US56374256A US2885997A US 2885997 A US2885997 A US 2885997A US 563742 A US563742 A US 563742A US 56374256 A US56374256 A US 56374256A US 2885997 A US2885997 A US 2885997A
Authority
US
United States
Prior art keywords
coating
vacuum
coating material
processing chamber
articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US563742A
Inventor
Schwindt Johannes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
Original Assignee
WC Heraus GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
Priority to US563742A priority Critical patent/US2885997A/en
Application granted granted Critical
Publication of US2885997A publication Critical patent/US2885997A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Definitions

  • This invention relates to apparatus for coating articles with thin layers of a material vaporized in a vacuum.
  • the apparatus of this invention is adapted for vacuum coating of articles with a material which is vaporized by any one of the several well known methods, such as, ordinary evaporation, cathode sputtering, or the thermal decomposition of the gaseous compounds by use of glow discharge plates to produce a desirable coating material.
  • the material to be evaporatedand deposited on the article by the apparatus of this invention may be any of the usual. and well known metallic, dielectric, organic or inorganic materials.
  • the coating. material not only deposits on the article to be coated, but also finds its way into undesired parts of the vacuum apparatus.
  • the coating material sometimes is carried into the vacuum pumping system and impairs the efficiency of the pumps, notably diffusion pumps which are particularly sensitive to impurities.
  • Attempts have been made prior to thiseinvention to prevent the unwanted diffusing of the coating material by installing plates between the source of coating material vapor and the elements in the apparatus to be protected from unwanted coating.
  • the prior elements used to prevent the unwanted spread of the coating material have been cumbersome and awkward, particularly in systems in which the articles to be coated are supported on a rotatable r'ack.
  • the present invention provides coating apparatus in which the coating material is prevented from spreading .to unwanted parts of the coating apparatus and particularly is excluded from the sensitive parts of the vacuum system.
  • the vacuum coating apparatus of this invention includes a vacuum-tight outer vessel adapted to be evacuated. Means are provided for evaporating a coating material, and a substantially enclosed processing chamber is disposed within the outer vessel and adapted to contain the articles to be coated, the coating material, and the means for evaporating the coating material.
  • the processing chamber is drum-like in its cross-section, and is adapted to be rotated coaxially "ice within the outer vessel and about the evaporating source of coating material.
  • the interior of the processing chamber is adapted to hold the articles to be coated so that substantially all of the vaporized coating material is deposited on an article to be coated, and is not lost in some undesired portion of the vacuum system.
  • Fig. l is a schematic vertical section of the presently I preferred embodiment of the invention.
  • Fig. 2 is a view taken on line 22 of Fig. 1.
  • the vacuum coating apparatus comprises an outer vessel 10 which includes a horizontal cylindrical case 12 having an outwardly turned flange 14 at each end.
  • the rear end of the outer vessel is closed by a circular rear plate 16 secured by bolts 18 to the flange on the rear end of case 12.
  • a conduit 19 attached to the rear plate is adapted to be connected to a vacuum system (not shown) and provides means for evacuating the outer vessel.
  • the forward end of the case 12 is closed by a circular front plate 20 secured by bolts 22 to the flange at the front end of the case.
  • a hollow rotatable shaft 24 is journaled through the center of the rear plate and is driven by a motor 26.
  • a processing chamber 28 is coaxially disposed within the outer chamber.
  • the processing chamber is a sixsided polygon in cross-section, and its sides are rectangular plates 30 placed edge to edge along their longer sides.
  • the rear end of the processing chamber is closed by a circular plate 32 secured to the rear edges of the plates 39 by any suitable means such as welding or screws (not shown).
  • the inner end of the shaft 24 is rigidly attached by any suitable conventional means to the rear surface of the plate 32 so that the processing vessel is rotatable about its longitudinal axis within the outer: vessel.
  • the front end of the processing chamber ispartially closed by an annula'rfring 34 having a central opening 36.
  • An elongated rectangular boat 38 is attached tothe inside surface of thefront' plate 20 andextendscoaXially into the processing chamber.
  • the boat 38 is adapted to contain the coating material to be evaporated, as well as cathode sputtering devices, or glow discharge plates as may be required for any desired coating operation. These elements may be conventional, and since they are well known, are not illustrated.
  • a heating element 39 is sealed through front plate 20 and disposed in intimate thermal contact with the boat so that the boat and material to be evaporated can be heated by the application of electrical power from a source (not shown) connected to the heating element.
  • a diaphragm 40 having a central opening of the same shape and slightly larger than the cross-section of the boat 38, is secured to the inner face of the front plates 20 by brackets 42 to reduce the tendency of the coating material to escape from within the processing chamber.
  • the articles 44 to be coated are attached to the inside surface of the processing chamber walls by brackets 46.
  • An electric heating coil 48 is wound around the outside surface of the processing chamber and is carried out of the vacuum apparatus through a vacuum-tight seal in the opening 50 in the hollow shaft 24.
  • the terminals (not shown) of the heating element are supplied electric current from a conventional source (not shown) by the use of conventional commutators (not shown) which permit the shaft and processing chamber to rotate while current is supplied to the electric heating coil.
  • the apparatus is operated as follows.
  • the articles to be coated are secured within the processing chamber to the brackets 46, and the end plate 20 is fastened to the front of the case 12.
  • the heating element is turned on and the apparatus is evacuated through conduit 19.
  • the heating element aids the degasing of the apparatus and articles to be coated.
  • the heating element is turned off, and heat is supplied to the boat 38 to evaporate the coating material.
  • the motor 26' is turned on to rotate the processing chamber so that all articles within the processing chamber receive a uniform coating. After the articles are coated to the required density, the heat is cut off.
  • the boat 33 and the apparatus is allowed to cool to a temperature safe for admitting atmospheric pressure without endangering the equipment and the coated articles within the apparatus.
  • the substantially enclosed processing chamber virtually eliminates the escape of any coating material to parts of the coating apparatus where the coating material would be wasted or cause harm.
  • This apparatus is particularly important for selenium coating because prior to this invention large and awkward screening devices had to be used to prevent the selenium from diffusing excessively.
  • the elimination of these large and awkward screens permits selenium coating apparatus in accordance with this invention to be much simpler in its construction.
  • a further advantage of the arrangement is the close contact between the article to be coated and the walls of the processing chamber since this makes possible a rapid and uniform heat transfer between the articles and the walls of the processing chamber.
  • Apparatus for coating articles with a vaporizable coating material in a vacuum which apparatus comprises a vacuum-tight outer vessel, means including conduit means connected to the vessel for evacuating the vessel, a substantially enclosed rotatable processing chamber disposed within the outer vessel, a source holder for the coating material disposed within the rotatable chamber, means for supporting the articles to be coated in the interior of the chamber, and means for vaporizing the coating material, the chamber being in fluid communicaass-5,99?
  • Apparatus for coating articles with a vaporizable coating material in a vacuum which apparatus comprises a vacuum-tight outer vessel, a pair of spaced parallel end plates disposed within the vessel, means connected between the outer peripheries of the end plates to form a processing chamber, the end plates and the means connected between the end plates being rotatably mounted within the vessel, one of the end plates having at least one aperture therein to provide fluid communication between the interiors of the vessel and the chamber, the
  • An apparatus for coating articles with a vaporizable coating material in a vacuum as defined in claim 2 including an elongated boat for supporting the coating material,

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Description

May 12, 1959 J. SCHWINDT VACUUM COATING Filed Feb. e, 1956 IN VEN TOR. JOHANNES SCHW/NDT kwn Q E Q ATTORNEYS United States Patent VACUUM COATING Johannes 'Schwindt, Langendiebach, Kreis, Hanan, Germany, assignor to W. C. Heraeus, G.m.b.H., Hanan, Germany, a German company Application February 6, 1956, Serial No. 563,742
3 Claims. (Cl. 118-49) This invention relates to apparatus for coating articles with thin layers of a material vaporized in a vacuum.
The apparatus of this invention is adapted for vacuum coating of articles with a material which is vaporized by any one of the several well known methods, such as, ordinary evaporation, cathode sputtering, or the thermal decomposition of the gaseous compounds by use of glow discharge plates to produce a desirable coating material. The material to be evaporatedand deposited on the article by the apparatus of this invention may be any of the usual. and well known metallic, dielectric, organic or inorganic materials.
In conventional apparatus for vacuum coating, the coating. material not only deposits on the article to be coated, but also finds its way into undesired parts of the vacuum apparatus. For example, the coating material sometimes is carried into the vacuum pumping system and impairs the efficiency of the pumps, notably diffusion pumps which are particularly sensitive to impurities. Attempts have been made prior to thiseinvention to prevent the unwanted diffusing of the coating material by installing plates between the source of coating material vapor and the elements in the apparatus to be protected from unwanted coating. The prior elements used to prevent the unwanted spread of the coating material have been cumbersome and awkward, particularly in systems in which the articles to be coated are supported on a rotatable r'ack. bb l, Unwanted diffusing of the coating materialha's' been especially troublesome in apparatus adapted for the production of selenium-coated, light-sensitive semi-conductors due to the tendency of the selenium to diffuse extensively. For example, in past operations, articles have been coated with selenium by fastening the articles to the outside of a rotatable drum located above a source of selenium vapor. The disadvantage of this prior ap-. paratus is that a great amount of selenium deposits on the walls of the apparatus and finds its way into the connections for the vacuum pumps. Selenium is very injurious to the latter, and impairs the efiiciency of the coating apparatus. In addition to the lost time for repairs of the prior apparatus, a large amount of selenium is lost and wasted, resulting in increased costs of operation.
The present invention provides coating apparatus in which the coating material is prevented from spreading .to unwanted parts of the coating apparatus and particularly is excluded from the sensitive parts of the vacuum system.
Briefly, the vacuum coating apparatus of this invention includes a vacuum-tight outer vessel adapted to be evacuated. Means are provided for evaporating a coating material, and a substantially enclosed processing chamber is disposed within the outer vessel and adapted to contain the articles to be coated, the coating material, and the means for evaporating the coating material.
Preferably the processing chamber is drum-like in its cross-section, and is adapted to be rotated coaxially "ice within the outer vessel and about the evaporating source of coating material. The interior of the processing chamber is adapted to hold the articles to be coated so that substantially all of the vaporized coating material is deposited on an article to be coated, and is not lost in some undesired portion of the vacuum system.
These and other aspects of the invention will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawing in which,
Fig. l is a schematic vertical section of the presently I preferred embodiment of the invention, and
Fig. 2 is a view taken on line 22 of Fig. 1.
The vacuum coating apparatus comprises an outer vessel 10 which includes a horizontal cylindrical case 12 having an outwardly turned flange 14 at each end.
The rear end of the outer vessel is closed by a circular rear plate 16 secured by bolts 18 to the flange on the rear end of case 12. A conduit 19 attached to the rear plate is adapted to be connected to a vacuum system (not shown) and provides means for evacuating the outer vessel.
The forward end of the case 12 is closed by a circular front plate 20 secured by bolts 22 to the flange at the front end of the case. A hollow rotatable shaft 24 is journaled through the center of the rear plate and is driven by a motor 26.
A processing chamber 28 is coaxially disposed within the outer chamber. The processing chamber is a sixsided polygon in cross-section, and its sides are rectangular plates 30 placed edge to edge along their longer sides. The rear end of the processing chamber is closed by a circular plate 32 secured to the rear edges of the plates 39 by any suitable means such as welding or screws (not shown).
The inner end of the shaft 24 is rigidly attached by any suitable conventional means to the rear surface of the plate 32 so that the processing vessel is rotatable about its longitudinal axis within the outer: vessel.
The front end of the processing chamber ispartially closed by an annula'rfring 34 having a central opening 36. An elongated rectangular boat 38 is attached tothe inside surface of thefront' plate 20 andextendscoaXially into the processing chamber. The boat 38 is adapted to contain the coating material to be evaporated, as well as cathode sputtering devices, or glow discharge plates as may be required for any desired coating operation. These elements may be conventional, and since they are well known, are not illustrated. A heating element 39 is sealed through front plate 20 and disposed in intimate thermal contact with the boat so that the boat and material to be evaporated can be heated by the application of electrical power from a source (not shown) connected to the heating element.
A diaphragm 40, having a central opening of the same shape and slightly larger than the cross-section of the boat 38, is secured to the inner face of the front plates 20 by brackets 42 to reduce the tendency of the coating material to escape from within the processing chamber.
The articles 44 to be coated are attached to the inside surface of the processing chamber walls by brackets 46. An electric heating coil 48 is wound around the outside surface of the processing chamber and is carried out of the vacuum apparatus through a vacuum-tight seal in the opening 50 in the hollow shaft 24. The terminals (not shown) of the heating element are supplied electric current from a conventional source (not shown) by the use of conventional commutators (not shown) which permit the shaft and processing chamber to rotate while current is supplied to the electric heating coil.
The apparatus is operated as follows. The articles to be coated are secured within the processing chamber to the brackets 46, and the end plate 20 is fastened to the front of the case 12. The heating element is turned on and the apparatus is evacuated through conduit 19. The heating element aids the degasing of the apparatus and articles to be coated. After the proper vacuum is reached, the heating element is turned off, and heat is supplied to the boat 38 to evaporate the coating material. The motor 26' is turned on to rotate the processing chamber so that all articles within the processing chamber receive a uniform coating. After the articles are coated to the required density, the heat is cut off. The boat 33 and the apparatus is allowed to cool to a temperature safe for admitting atmospheric pressure without endangering the equipment and the coated articles within the apparatus.
The substantially enclosed processing chamber virtually eliminates the escape of any coating material to parts of the coating apparatus where the coating material would be wasted or cause harm.
This apparatus is particularly important for selenium coating because prior to this invention large and awkward screening devices had to be used to prevent the selenium from diffusing excessively. The elimination of these large and awkward screens permits selenium coating apparatus in accordance with this invention to be much simpler in its construction. A further advantage of the arrangement is the close contact between the article to be coated and the walls of the processing chamber since this makes possible a rapid and uniform heat transfer between the articles and the walls of the processing chamber.
It will. be apparent that the usual devices necessary for control and observation can be installed wherever required and in accordance with technique which is well known to those skilled in the art of vacuum coating.
I'claim: v p
1. Apparatus for coating articles with a vaporizable coating material in a vacuum which apparatus comprises a vacuum-tight outer vessel, means including conduit means connected to the vessel for evacuating the vessel, a substantially enclosed rotatable processing chamber disposed within the outer vessel, a source holder for the coating material disposed within the rotatable chamber, means for supporting the articles to be coated in the interior of the chamber, and means for vaporizing the coating material, the chamber being in fluid communicaass-5,99?
tion with the interior of the vessel only at a portion of the vessel remote from the conduit means to prevent the vaporized coating material from entering the conduit means and contaminating the means for evacuating the vessel.
2. Apparatus for coating articles with a vaporizable coating material in a vacuum which apparatus comprises a vacuum-tight outer vessel, a pair of spaced parallel end plates disposed within the vessel, means connected between the outer peripheries of the end plates to form a processing chamber, the end plates and the means connected between the end plates being rotatably mounted within the vessel, one of the end plates having at least one aperture therein to provide fluid communication between the interiors of the vessel and the chamber, the
other end plate and the means connected between the end plates being impermeable so that only said one end plate is in fluid communication with the interior of the vessel, a source holder for the coating material disposed within the chamber, means for supporting the articles to be coated in the interior of the chamber, means for vaporizing the coating material and a source of vacuumconnected to the vessel in an area adjacent said other end plate to prevent the vaporized coating material from entering the vacuum source.
3. An apparatus for coating articles with a vaporizable coating material in a vacuum as defined in claim 2 including an elongated boat for supporting the coating material,
the boat being attached at one end to one of the end walls of the outer vessel and extending into the processing chamber, and a heating element secured to the outside surface of the means connected between the end plates for varying the temperature within the processing chamber. References Cited in the file of this patent UNITED STATES PATENTS 1,551,850 Schmidmer et al Sept. 1, 1925 2,241,228 Weinhart May 6, 1941 2,322,613- Alexander June 22, 1943, 2,339,613 Becker et all Jan. 18, 1944 2,354,521 Hewlett July 25, 1944 2,469,929 Osterberg. et al. May 10, 1949' 2,540,623 Law Feb. 6, 1951 2,610,606 Weber et al. Sept. 16, 1952 2,768,098 Hoppe Oct. 23, 1956
US563742A 1956-02-06 1956-02-06 Vacuum coating Expired - Lifetime US2885997A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US563742A US2885997A (en) 1956-02-06 1956-02-06 Vacuum coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US563742A US2885997A (en) 1956-02-06 1956-02-06 Vacuum coating

Publications (1)

Publication Number Publication Date
US2885997A true US2885997A (en) 1959-05-12

Family

ID=24251714

Family Applications (1)

Application Number Title Priority Date Filing Date
US563742A Expired - Lifetime US2885997A (en) 1956-02-06 1956-02-06 Vacuum coating

Country Status (1)

Country Link
US (1) US2885997A (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3074811A (en) * 1957-04-22 1963-01-22 Radiation Res Corp Method for preparing sources of ionizing radiation
US3129315A (en) * 1961-12-26 1964-04-14 Lear Siegler Inc Vacuum vaporizing fixture
US3503368A (en) * 1965-10-07 1970-03-31 Western Electric Co Apparatus for sequentially vacuum depositing metal film on substrates
US3659552A (en) * 1966-12-15 1972-05-02 Western Electric Co Vapor deposition apparatus
US3699298A (en) * 1971-12-23 1972-10-17 Western Electric Co Methods and apparatus for heating and/or coating articles
US3699917A (en) * 1970-10-02 1972-10-24 Cogar Corp Vapor deposition apparatus
US4187800A (en) * 1976-05-18 1980-02-12 Olympus Optical Co., Ltd. Device for manufacturing photosensitive screen
US5445973A (en) * 1991-04-24 1995-08-29 Im Institute For Mikroelektronik Method for manufacturing solar cells
US6096998A (en) * 1996-09-17 2000-08-01 Micron Technology, Inc. Method and apparatus for performing thermal reflow operations under high gravity conditions
US6157003A (en) * 1998-08-06 2000-12-05 Persys Technology, Ltd. Furnace for processing semiconductor wafers
US20140193939A1 (en) * 2013-01-04 2014-07-10 Tsmc Solar Ltd. Method and system for forming absorber layer on metal coated glass for photovoltaic devices

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1551850A (en) * 1924-08-29 1925-09-01 Georg E Schmidmer Device for metallizing textile fabrics and the like by means of disintegration of cathodes
US2241228A (en) * 1939-03-03 1941-05-06 Bell Telephone Labor Inc Coating machine
US2322613A (en) * 1938-03-02 1943-06-22 Alexander Paul Apparatus for deposition of metals by thermal evaporation in vacuum
US2339613A (en) * 1942-02-27 1944-01-18 Bell Telephone Labor Inc Selenium rectifier and method of making it
US2354521A (en) * 1943-01-07 1944-07-25 Gen Electric Evaporator for treating surfaces
US2469929A (en) * 1943-09-24 1949-05-10 American Optical Corp Apparatus for coating articles
US2540623A (en) * 1947-03-12 1951-02-06 Rca Corp Method of forming dielectric coatings
US2610606A (en) * 1946-09-26 1952-09-16 Polytechnic Inst Brooklyn Apparatus for the formation of metallic films by thermal evaporation
US2768098A (en) * 1950-09-12 1956-10-23 Siemens Ag Method and apparatus for precipitating metal from the vaporous state onto plates, particularly for the production of selenium coated rectifier plates

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1551850A (en) * 1924-08-29 1925-09-01 Georg E Schmidmer Device for metallizing textile fabrics and the like by means of disintegration of cathodes
US2322613A (en) * 1938-03-02 1943-06-22 Alexander Paul Apparatus for deposition of metals by thermal evaporation in vacuum
US2241228A (en) * 1939-03-03 1941-05-06 Bell Telephone Labor Inc Coating machine
US2339613A (en) * 1942-02-27 1944-01-18 Bell Telephone Labor Inc Selenium rectifier and method of making it
US2354521A (en) * 1943-01-07 1944-07-25 Gen Electric Evaporator for treating surfaces
US2469929A (en) * 1943-09-24 1949-05-10 American Optical Corp Apparatus for coating articles
US2610606A (en) * 1946-09-26 1952-09-16 Polytechnic Inst Brooklyn Apparatus for the formation of metallic films by thermal evaporation
US2540623A (en) * 1947-03-12 1951-02-06 Rca Corp Method of forming dielectric coatings
US2768098A (en) * 1950-09-12 1956-10-23 Siemens Ag Method and apparatus for precipitating metal from the vaporous state onto plates, particularly for the production of selenium coated rectifier plates

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3074811A (en) * 1957-04-22 1963-01-22 Radiation Res Corp Method for preparing sources of ionizing radiation
US3129315A (en) * 1961-12-26 1964-04-14 Lear Siegler Inc Vacuum vaporizing fixture
US3503368A (en) * 1965-10-07 1970-03-31 Western Electric Co Apparatus for sequentially vacuum depositing metal film on substrates
US3659552A (en) * 1966-12-15 1972-05-02 Western Electric Co Vapor deposition apparatus
US3699917A (en) * 1970-10-02 1972-10-24 Cogar Corp Vapor deposition apparatus
US3699298A (en) * 1971-12-23 1972-10-17 Western Electric Co Methods and apparatus for heating and/or coating articles
US4187800A (en) * 1976-05-18 1980-02-12 Olympus Optical Co., Ltd. Device for manufacturing photosensitive screen
US5445973A (en) * 1991-04-24 1995-08-29 Im Institute For Mikroelektronik Method for manufacturing solar cells
US6096998A (en) * 1996-09-17 2000-08-01 Micron Technology, Inc. Method and apparatus for performing thermal reflow operations under high gravity conditions
US6174761B1 (en) 1996-09-17 2001-01-16 Micron Technology, Inc. Method and apparatus for performing thermal reflow operations under high gravity conditions
US6288367B1 (en) 1996-09-17 2001-09-11 Micron Technology, Inc. Method and apparatus for performing thermal reflow operations under high gravity conditions
US6414275B2 (en) 1996-09-17 2002-07-02 Micron Technology, Inc. Method and apparatus for performing thermal reflow operations under high gravity conditions
US6573478B2 (en) 1996-09-17 2003-06-03 Micron Technology, Inc. Systems for performing thermal reflow operations under high gravity conditions
US6747249B2 (en) * 1996-09-17 2004-06-08 Micron Technology, Inc. System for performing thermal reflow operations under high gravity conditions
US6157003A (en) * 1998-08-06 2000-12-05 Persys Technology, Ltd. Furnace for processing semiconductor wafers
US20140193939A1 (en) * 2013-01-04 2014-07-10 Tsmc Solar Ltd. Method and system for forming absorber layer on metal coated glass for photovoltaic devices
US9029737B2 (en) * 2013-01-04 2015-05-12 Tsmc Solar Ltd. Method and system for forming absorber layer on metal coated glass for photovoltaic devices
US9929304B2 (en) * 2013-01-04 2018-03-27 Taiwan Semiconductor Manufacturing Co., Ltd. Method and system for forming absorber layer on metal coated glass for photovoltaic devices

Similar Documents

Publication Publication Date Title
US2885997A (en) Vacuum coating
US4867859A (en) Apparatus for forming a thin film
US4224897A (en) Methods of depositing materials on substrates
US4204942A (en) Apparatus for multilayer thin film deposition
US3976555A (en) Method and apparatus for supplying background gas in a sputtering chamber
GB1014245A (en) Improvements in or relating to apparatus for vapor deposition
US3663265A (en) Deposition of polymeric coatings utilizing electrical excitation
US4298444A (en) Method for multilayer thin film deposition
US3756847A (en) Method for controlling the composition of a deposited film
US3024965A (en) Apparatus for vacuum deposition of metals
US5895531A (en) Apparatus and polymerization gun for coating objects by vacuum deposit
US2967012A (en) Getter-ion pump
US4966669A (en) Vacuum-film-forming apparatus and method
US3487000A (en) Sputtering apparatus
US3288700A (en) Sputtering apparatus including a folded flexible conveyor
JPS57155369A (en) High vacuum ion plating method and apparatus
US3239134A (en) Residual gas removing means for vacuum pumps
JPH0445580B2 (en)
JPS63238266A (en) sputtering equipment
CN208632632U (en) An apparatus for dielectric deposition by physical vapor deposition
SU910837A1 (en) Apparatus for thermal evaporation of materials in vacuum
JPS5597467A (en) Ion plating equipment
RU2553745C2 (en) Apparatus for hydrogen absorption of thin-film composites in hydrogen plasma and method for hydrogen absorption of thin-film composites in hydrogen plasma using same
JPH01246747A (en) Ion source
JPS5681672A (en) Vacuum vapor coating apparatus