JPS5681672A - Vacuum vapor coating apparatus - Google Patents
Vacuum vapor coating apparatusInfo
- Publication number
- JPS5681672A JPS5681672A JP15832479A JP15832479A JPS5681672A JP S5681672 A JPS5681672 A JP S5681672A JP 15832479 A JP15832479 A JP 15832479A JP 15832479 A JP15832479 A JP 15832479A JP S5681672 A JPS5681672 A JP S5681672A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- temp
- pipe
- kept
- cooling pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To make it possible to control substrate temp. easily and precisely, by providing cooling pipe airtightly at a part of the internal wall of an airtight chamber in order to cool the substrate to be vapor coated. CONSTITUTION:An airtight chamber is equipped with a cooling pipe 9 at the internal wall surface and is continued to the outside with a pipe 9'. After a substrate is mounted to a substrate holder 2, the chamber is evacuated to about >=10<-6>Torr by a vacuum pump 7. During the evacuation, the substrate is heated by a substrate heater 8 to 100 deg.C, and the temp. is kept at an equilibrium by passing water through the pipe 10 attached to the external wall surface of a bell jar 1. After the bell jar is kept at the temp. for about 1hr, the material in an accommodating vessel 5 for evaporating material is heated by an electric power source 6 so as to be degassed with a shutter 4 closed as it is. Then film is formed on the substrate by opening the shutter 4. When the temp. of the substrate begins rising, temp. rise is prevented by cooling with the cooling pipe 9 by turning the heater 8 off. Hereby the substrate temp. is kept constant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15832479A JPS5681672A (en) | 1979-12-06 | 1979-12-06 | Vacuum vapor coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15832479A JPS5681672A (en) | 1979-12-06 | 1979-12-06 | Vacuum vapor coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5681672A true JPS5681672A (en) | 1981-07-03 |
Family
ID=15669144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15832479A Pending JPS5681672A (en) | 1979-12-06 | 1979-12-06 | Vacuum vapor coating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5681672A (en) |
-
1979
- 1979-12-06 JP JP15832479A patent/JPS5681672A/en active Pending
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