JPH0718442A - Vacuum deposition device - Google Patents

Abstract

PURPOSE:To prolong the service life of a heater insulator and to improve the quality of a deposited film by forming the insulator of a heater for vaporizing a material to be vaporized by radiant heating into a cylinder. CONSTITUTION:A material (b) is vaporized from a vaporization source 4 by radiant heating and deposited on a web (a) such as a film transported by a cooling roll 2 in a vacuum tank. In this vacuum deposition device, a crucible 8 contg. the material (b) in a heater tube 5 is arranged in the source 4 and externally heated by a vaporization source heater 6. The insulator 7 of the heater 6 is formed into a cylinder, and plural insulators are arranged around the heater tube 5. Consequently, the mechanical strength of the insulator 7 is increased, the insulator is highly resistant to the heat-contraction strain, and the service life of the insulator is prolonged. Further, the breakage of the insulator 7 is sharply reduced, the vapor-deposited film defect is prevented.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum vapor deposition apparatus for producing vapor deposited films for film capacitors and packaging.

[0002]

2. Description of the Related Art As a vaporization source of a conventional vacuum vapor deposition apparatus, a system is used in which a heater and a heater insulator are arranged around a heater tube to heat and vaporize an object to be vaporized by radiant heating by far infrared rays.

FIG. 5 shows a conventional radiant heating type evaporation source. In FIG. 5, b is an evaporated material such as zinc, which is housed in a crucible 8. Reference numeral 6 denotes an evaporation source heater. A plurality of evaporation source heaters 6 are arranged on a heater insulator 9 having a complicated shape as a set, and the radiant heat of the evaporation source heater 6 causes the crucible 8 to be heated.
The material b to be evaporated therein is melted and is vapor-deposited on a film (not shown) or the like.

[0004]

However, in the evaporation source of this type of vacuum vapor deposition apparatus, the heater insulator arranged on the outer circumference of the heater tube is easily damaged at a thin portion having a particularly weak mechanical strength, and the heater insulator is damaged. Due to the contact between the evaporation source heater and the heater tube or the like, an electrical short circuit occurs, the evaporation source heater is disconnected, and the evaporation target cannot be heated sufficiently, causing a splash or defective deposition film thickness. Further, since this conventional heater insulator is arranged on the outer periphery of the cylindrical heater tube 5, it has a complicated shape and causes an increase in equipment cost.

An object of the present invention is to solve the above problems, prolong the life of the heater insulator, and improve the vapor deposition quality of the vapor deposited film.

[0006]

In order to achieve this object, the vacuum vapor deposition apparatus of the present invention has a heater insulator having a cylindrical shape, and at least one evaporation source including at least the heater insulator and the evaporation source heater is arranged. It has a set configuration.

[0007]

According to this structure, by making the shape of the heater insulator cylindrical, the mechanical strength of the heater insulator is increased, and the structure is resistant to heat shrinkage distortion, and the life of the heater insulator can be greatly extended. Become. In addition, the chance of disconnection of the evaporation source heater is reduced due to the drastic reduction of the destruction of the heater insulator, and the splash of the evaporation target and the deposition thickness defect are reduced, and the deposition quality is improved.

[0008]

【Example】

(Embodiment 1) An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a structural diagram of an evaporation source 4 in which the heater insulator shape of the present invention is changed to a cylindrical shape. The evaporation source heater 6 and the heater insulator 7 are arranged on the outer circumference of the heater tube 5. Inside the heater tube 5, a substance b to be evaporated and a crucible 8 which is a container thereof are arranged. The evaporation source 4 mainly heats far infrared rays in order to vacuum-deposit metal such as zinc, and has a structure in which several evaporation source heaters 6 and heater insulators 7 can be installed according to the evaporation temperature.

FIG. 2 is a sectional view of the present evaporation source. FIG. 3 shows an embodiment in which the evaporation source of the present invention is installed in a vacuum vapor deposition machine. The web a such as a film attached to the unwinding unit 1 is continuously conveyed to the cooling roll 2 by the conveying roll. A radiant heating type evaporation source 4 is installed below the cooling roll 2 and has a structure in which an object b to be evaporated is vapor-deposited on the surface of a film or the like and then wound into a roll shape by a winding unit 3.

In the present invention, by improving the shape of the heater insulator from the conventional complicated shape to the cylindrical shape, it is possible to improve the mechanical strength of the heater insulator and prevent damage to the heater insulator and disconnection of the evaporation source heater due to the damage. .

(Embodiment 2) FIG. 4 shows an embodiment in which two radiant heating type evaporation sources 4 of the present invention are mounted in order to evaporate substances to be evaporated on both front and back surfaces of a film or the like.

[0013]

As described above, according to the present invention, the life of the heater insulator can be greatly extended by forming the heater insulator into a cylindrical shape having a simple and strong mechanical strength, and the evaporation quality can be improved and an inexpensive evaporation source can be provided. You can get it.

[Brief description of drawings]

FIG. 1 is a detailed view of a radiation heating type evaporation source in one embodiment of the present invention.

FIG. 2 is a sectional view of a radiant heating type evaporation source in one embodiment of the present invention.

FIG. 3 is an internal structure diagram of a vacuum vapor deposition apparatus in the first embodiment of the present invention.

FIG. 4 is an internal structure diagram of a double-sided vacuum vapor deposition apparatus in a second embodiment of the present invention.

FIG. 5 is a detailed view of a conventional radiant heating type evaporation source.

[Explanation of symbols]

 a web of film or the like b evaporation object 1 unwinding section 2 cooling roll 3 winding section 4 evaporation source 5 heater tube 6 evaporation source heater 7 heater insulator 8 crucible 9 conventional heater insulator

Claims (3)

[Claims] 1. In a device for evaporating a substance to be evaporated by a radiant heating method in a vacuum chamber to deposit the substance to be evaporated on a film or the like, the heater insulator shape of the evaporation source heater used in the radiant heating method is a cylindrical shape. Vacuum deposition equipment characterized by 2. The vacuum vapor deposition apparatus according to claim 1, wherein one or more evaporation source heaters and heater insulators are provided for vacuum vapor deposition on a film or the like. 3. The vacuum vapor deposition apparatus according to claim 1, wherein at least one vaporization source including at least the vaporization source heater and the heater insulator is provided in order to perform vacuum vapor deposition on both front and back surfaces or one surface of a film or the like.