JPH06173003A - Vapor-deposition device - Google Patents

Abstract

PURPOSE:To eliminate the electro static charge of a vapor-deposition film and to increase the working rate by carrying the vapor-deposited tape by suspending on a roll coated with polytetrafluoroethylene. CONSTITUTION:A base film 10a is suspended on a cooling can 2 and carried at a velocity V (0.25r/V<20 where (r) is the radius in mm of a roll), a vapor deposition material 3 is deposited on the film when the film passes through the opening 8a of a shield plate 8, and a ferromagnetic layer 10b is formed. A laminated body 10 of the ferromagnetic layers 10b and base film 10a is negatively charged by a part of the electrons constituting an electron beam 5. The laminated body 10 is suspended on a destaticizer roll 20 set close to the cooling can 2. When the laminated body 10 is released from the roll 20, an electrostatic charge is generated between the laminated body and the polytetrafluoroethylene in the surface layer 22 of the roll 20, and hence the destaticized laminate 10 which is electrically neutral is not entangled to a winding roll 7, etc.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vapor deposition apparatus for vapor-depositing a magnetic material on a belt-shaped substrate member, and more particularly to a vapor deposition apparatus for reducing electrification of a substrate member on which a magnetic material is vapor-deposited.

[0002]

2. Description of the Related Art A vapor deposition apparatus for producing a magnetic recording medium by depositing a magnetic material on a substrate member such as a belt-shaped film or tape made of a polymer material has been known. This device
In the substrate member along the peripheral wall of the cylindrical cooling can,
Evaporation tape suitable for high-density recording with a large saturation magnetization by depositing a magnetic material made of a ferromagnetic metal such as iron, cobalt, nickel, etc. or an alloy thereof that has been heated and evaporated by heating means such as resistance heating or dielectric heating. Can be manufactured.

In recent years, a device using an electron beam has appeared as a heating means of this vapor deposition device. According to this, since the scanning of the electron beam can be easily controlled by a deflection coil or the like, the beam is heated. There is a usefulness that the temperature distribution of the magnetic material can be controlled to improve the uniformity of the thickness of the magnetic layer deposited on the substrate member.

However, in the vapor deposition apparatus using the electron beam as a heating means, some electrons of the electron beam are reflected by the magnetic material and accumulated in the vapor deposition tape obtained by vaporizing the magnetic material on the substrate member. However, it is charged with a negative charge (hereinafter, simply charged to be negative). The negatively charged vapor deposition tape is detached from the cooling can and is transported to the next step such as a winding means via a suspension roll for transport, but the vapor deposition tape is detached from the cooling can by electrification. There is a problem that the tape is entangled in the vicinity of the detached position and the suspension roll, and wrinkles are generated on the tape, which causes the apparatus to be stopped, which lowers the operation rate of the apparatus.

Therefore, there has been proposed a device which makes it possible to remove electricity from the charged tape. For example, there is known a method in which a tape deposited on the circumference of the cooling can can be subjected to glow treatment immediately after vapor deposition to eliminate static electricity from the tape. Particularly, high-frequency glow treatment effectively eliminates static electricity. be able to.

[0006]

By the way, the above-mentioned conventional glow processing apparatus for performing static elimination has a very high cost, and the shape of the electrode and the positional relationship between the electrode and the vapor deposition tape are tried variously to obtain the optimum static elimination. The drawback is that you have to set the conditions.

The object of the present invention is made in view of the above circumstances, and it is possible to remove the electrostatic charge of the vapor deposition tape, improve the operation rate of the apparatus, and improve the yield rate of the vapor deposition tape. It is to provide a vapor deposition device.

[0008]

According to a first vapor deposition apparatus of the present invention, a strip-shaped substrate member conveyed along a peripheral wall of a cooling can is vapor-deposited with a magnetic material heated and evaporated by an electron beam, A vapor deposition apparatus provided with a cylindrical roll that is provided near a position where the substrate separates from the cooling can and is suspended to guide the substrate member separated from the cooling can to, for example, a tape take-up roll. Of at least the portion in contact with the substrate member is covered with polytetrafluoroethylene, and the ratio of the radius r of this roll to the speed v of the substrate member leaving the roll satisfies the following conditional expression (1): It is a thing.

0.25 <r / v <20.0 (1) where, r is the radius of the roll (mm), v is the speed of the substrate member leaving the roll (m / min), and the second vapor deposition apparatus of the present invention is In the first vapor deposition apparatus, the substrate member is made of either polyethylene terephthalate or polyethylene naphthalate.

[0010]

According to the vapor deposition apparatus of the present invention, the tape after vapor deposition, in which electrons reflected by the vapor deposition material are accumulated and is negatively charged,
Immediately after the tape is released from the cooling can, it is suspended on a roll coated with polytetrafluoroethylene and conveyed, and when the tape is released from this roll, the polytetrafluoroethylene coated on the roll surface is removed. Peeling electrification generated between the tape and the substrate member of the tape causes positive electrification of the substrate member, and the negative electrification which is tinged when the tape is detached from the cooling can is eliminated by the positive electrification by the exfoliation. It

The magnitude of the positive charge generated on the substrate member due to the peeling charging determines the speed v at which the vapor-deposited tape separates from the roll, and the distance of the electric field formed by the tape and the roll at the time of separation. When the ratio r / v is 0.25 or less or 20.0 or more, the static elimination effect is small, and in order to obtain a further static elimination effect, the ratio r / v exceeds 0.5 and 10.0. It is desirable to set the range below.

The substrate member made of PET (polyethylene terephthalate) has excellent surface properties of the tape after vapor deposition, and PEN (polyethylene naphthalate).
The one consisting of has the advantage that the cost is very cheap.

[0013]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic view showing the structure of a vapor deposition apparatus according to the present invention, and FIG. 2 is an enlarged view of a broken line portion A in FIG.

A strip-shaped base film 10a made of PET (polyethylene terephthalate) wound around an unwinding roll 6 is cooled to about -30 to -10 ° C.
And it is taken up by the take-up roll 7 via the static eliminating roll 20 having a radius r provided in the vicinity of the cooling can 2. In this charge-eliminating roll 20, the surface of a support 21 made of aluminum is covered with a surface layer 22 made of polytetrafluoroethylene. Further, a crucible 9 containing a material 3 for vapor deposition is provided below the cooling can 2, and an electron beam source 4 for emitting an electron beam 5 for heating and vaporizing the vapor deposition material 3 in the crucible 9 is provided. Thus, each of the above components is housed in the chamber 11. As the vapor deposition material 3, for example, a Co80Ni20 alloy or the like is used.

Next, the operation of the vapor deposition device 1 of this embodiment will be described.

The inside of the chamber 11 is evacuated to about 0.5 μmmHg by a vacuum pump (not shown). The electron beam 5 emitted from the electron beam source 4 is accommodated in the crucible 9 by a beam scanning means (not shown).
And the vapor deposition material 3 is heated to evaporate. The evaporated vapor deposition material 3 passes through the opening 8a of the shielding plate 8, is suspended on the peripheral wall of the cooling can 2 rotating in the direction of the arrow, and is transported at a speed v (0.25 <r / v <20). Deposited on the base film 10a to form a ferromagnetic layer 10b (see FIG. 2).

On the other hand, some of the electrons forming the electron beam 5 are reflected by the vapor deposition material 3 and the opening 8a of the shielding plate 8 is formed.
And is accumulated on the base film 10a, whereby the stack 10 including the ferromagnetic layer 10b and the base film 10a is electrically negatively charged.

The negatively charged laminate 10 as described above is further conveyed along the peripheral wall of the cooling can 2 and suspended on the charge eliminating roll 20 provided in the vicinity of the cooling can 2. The base film 10a of the layered product 10 suspended on the charge removal roll 20 causes peeling charge between the layered product 10 and the surface layer 22 of the charge removal roll 20 when the layered product 10 separates from the charge removal roll 20.
Due to this peel-off charging, the base film 10a is electrically positively charged due to the relationship of the charging sequence with polytetrafluoroethylene, and the base film 10a electrically negatively charged is discharged.

The laminated body 10 which has been neutralized by the above-mentioned operation is in an electrically neutral state, so that the cooling can 2 and the winding roll 7 are provided.
It is possible to prevent entanglement with the above, and to prevent wrinkles from being generated in the laminated body 10 itself, and to reduce the operation rate of this vapor deposition device.

Further, since the vapor deposition apparatus 1 of this embodiment uses an inexpensive static eliminator made of aluminum and polytetrafluoroethylene, it can be constructed at a low cost.

In addition to the aluminum of the above-mentioned embodiment, Sus or the like can be used as the support 21 of the charge eliminating roll 20, and the base film 10a is more positive in the charging sequence than polytetrafluoroethylene such as PET and PEN. It is possible to use a material composed of a substance that is easily charged.

The tension of the laminate 10 is 8 to 25 from the viewpoint of preventing thermal deterioration due to radiant heat from the vapor deposition material 3.
(kgf / width 500mm) is desirable.

A more specific experiment of the vapor deposition apparatus of the present invention will be shown below. In this experiment, a base film having a width of 500 mm was conveyed at a conveying speed of 60 m / min along the peripheral wall of the cooling can, and the ratio r of the conveying speed v and the radius r of the static elimination roll was r
/ V was variously changed, and the static elimination roll was coated or not coated. As the vapor deposition material, an alloy of Co80Ni20 was used. The vapor deposition material was placed in a ceramic crucible having a width of 750 mm, and an electron beam with an output of 100 kW was scanned.

The evaluation of this experiment was carried out by installing a charge meter in the vacuum chamber and measuring the charge level.

Table 1 shows the experimental results.

[0027]

[Table 1]

As described above, the charge eliminating roll is coated with polytetrafluoroethylene, and the ratio r / v between the radius r of the charge eliminating roll and the conveying speed v of the base film is expressed by the above formula.
The effect of removing static electricity from the charged base film was shown by setting so as to satisfy (1).

[0029]

According to the vapor deposition apparatus of the present invention, the electrically negative charge accumulated on the substrate member during vapor deposition can be effectively eliminated at low cost. And since the neutralized substrate member is electrically neutral, it is possible to prevent entanglement with a roll or the like installed for transportation, and to prevent wrinkles from being generated on the substrate member. Thus, it is possible to prevent a decrease in operating rate such as repairing by stopping the vapor deposition device.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing the configuration of a vapor deposition device according to the present invention.

FIG. 2 is an enlarged view of a broken line portion A of the vapor deposition device shown in FIG.

[Explanation of symbols] 1 vapor deposition device 2 cooling can 3 vapor deposition material 4 electron beam source 5 electron beam 6 unwinding roll 7 winding roll 8 shielding plate 9 crucible 10 laminated body 10a base film 10b ferromagnetic layer 20 static elimination roll 21 support 22 Surface layer made of polytetrafluoroethylene r Radius of static eliminator roll v Transfer speed of laminate

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] January 6, 1993

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0017

[Correction method] Change

[Correction content]

The inside of the chamber 11 is brought to a vacuum state of 1.0 × 10 ⁻⁴ Torr or less by a vacuum pump (not shown). The electron beam 5 emitted from the electron beam source 4 is scanned by the beam scanning means (not shown) on the vapor deposition material 3 contained in the crucible 9, and the vapor deposition material 3 is heated and evaporated.
The evaporated vapor deposition material 3 passes through the opening 8a of the shielding plate 8, is suspended on the peripheral wall of the cooling can 2 rotating in the direction of the arrow, and is transported at a speed v (0.25 <r / v <20). Deposited on the base film 10a to form a ferromagnetic layer 10b (see FIG. 2).

[Procedure Amendment 2]

[Document name to be amended] Statement

[Name of item to be corrected] 0024

[Correction method] Change

[Correction content]

A more specific experiment of the vapor deposition apparatus of the present invention will be shown below. In this experiment, a base film having a width of 500 mm was conveyed at a conveying speed of 60 m / min along the peripheral wall of the cooling can, and the ratio r of the conveying speed v and the radius r of the static elimination roll was r
/ V was variously changed, and the static elimination roll was coated or not coated. An alloy of Co80Ni20 was used as the vapor deposition material, and the vapor deposition material was housed in a ceramic crucible having a width of 750 mm and scanned with an electron beam having an output of 90 to 100 kW.

[Procedure 3]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 1

[Correction method] Change

[Correction content]

[Figure 1]

Claims (2)

[Claims] 1. A cylindrical cooling can, a crucible containing a material for vapor deposition, an electron beam source for emitting an electron beam to heat the material contained in the crucible, and a peripheral wall of the cooling can. A vapor deposition apparatus provided with a cylindrical roll for suspending the substrate member, wherein the belt-like substrate member to be conveyed is provided in the vicinity of a position where it is separated from the cooling can, and at least a portion of the roll that is in contact with the substrate member. Is coated with polytetrafluoroethylene, and the ratio of the radius of the roll and the speed of the substrate member leaving the roll satisfies the following conditional expression (1). 0.25 <r / v <20.0 (1) where r: roll radius (mm) v: speed of substrate member leaving roll (m / min) 2. The vapor deposition apparatus according to claim 1, wherein the substrate member is made of one of polyethylene terephthalate and polyethylene naphthalate.