DE1519827B1 - Vorrichtung zum Ziehen duenner Staebe mit unterschiedlichem Durchmesser aus Halbleitermaterial - Google Patents

Vorrichtung zum Ziehen duenner Staebe mit unterschiedlichem Durchmesser aus Halbleitermaterial

Info

Publication number
DE1519827B1
DE1519827B1 DE19641519827 DE1519827A DE1519827B1 DE 1519827 B1 DE1519827 B1 DE 1519827B1 DE 19641519827 DE19641519827 DE 19641519827 DE 1519827 A DE1519827 A DE 1519827A DE 1519827 B1 DE1519827 B1 DE 1519827B1
Authority
DE
Germany
Prior art keywords
apparatus
semiconductor material
different diameters
forming thin
thin rods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE19641519827
Other languages
English (en)
Inventor
Harry Milton Stevens
William Francis Tucker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Monsanto Co
Original Assignee
Monsanto Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US277613A priority Critical patent/US3259468A/en
Application filed by Monsanto Co filed Critical Monsanto Co
Publication of DE1519827B1 publication Critical patent/DE1519827B1/de
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/005Growth of whiskers or needles
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/32Mechanisms for moving either the charge or the heater
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30Mechanisms for rotating or moving either the melt or the crystal
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/32Seed holders, e.g. chucks
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/106Seed pulling including sealing means details
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1072Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
DE19641519827 1963-05-02 1964-04-30 Vorrichtung zum Ziehen duenner Staebe mit unterschiedlichem Durchmesser aus Halbleitermaterial Pending DE1519827B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US277613A US3259468A (en) 1963-05-02 1963-05-02 Slim crystalline rod pullers with centering means

Publications (1)

Publication Number Publication Date
DE1519827B1 true DE1519827B1 (de) 1970-02-12

Family

ID=23061633

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19641519827 Pending DE1519827B1 (de) 1963-05-02 1964-04-30 Vorrichtung zum Ziehen duenner Staebe mit unterschiedlichem Durchmesser aus Halbleitermaterial

Country Status (4)

Country Link
US (1) US3259468A (de)
DE (1) DE1519827B1 (de)
GB (1) GB1063024A (de)
NL (1) NL6404878A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2461030A1 (fr) * 1979-03-12 1981-01-30 Mobil Tyco Solar Energy Corp Mecanisme de tirage de cristaux a courroie et a rouleaux

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3494742A (en) * 1968-12-23 1970-02-10 Western Electric Co Apparatus for float zone melting fusible material
US3901996A (en) * 1972-10-11 1975-08-26 Nat Inst Res Process for preparing a chalcogenide glass having silicon containing layer and product
US4078897A (en) * 1975-04-11 1978-03-14 Leybold-Heraeus Gmbh & Co. Kg Apparatus for producing monocrystals
US4186173A (en) * 1975-04-11 1980-01-29 Leybold-Heraeus Gmbh & Co. Kg Apparatus for producing monocrystals
US4317799A (en) * 1979-03-12 1982-03-02 Mobil Tyco Solar Energy Corporation Belt-roller crystal pulling mechanism

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB158958A (en) * 1918-07-31 1921-02-07 George Baehr Improvements relating to rolling mills
DE426062C (de) * 1924-03-18 1926-03-01 Heinrich Stueting Walzwerk
US1893290A (en) * 1929-10-05 1933-01-03 Farrel Birmingham Co Inc Rolling mill
US2189399A (en) * 1937-02-06 1940-02-06 Linde Air Prod Co Electric welding apparatus
US2873968A (en) * 1957-04-08 1959-02-17 Samuel M Langston Co Hydraulically loaded feed rolls for corrugated paper stock
US2975036A (en) * 1956-10-05 1961-03-14 Motorola Inc Crystal pulling apparatus
US2990259A (en) * 1959-09-03 1961-06-27 Paul L Moody Syringe-type single-crystal furnace
US3002821A (en) * 1956-10-22 1961-10-03 Texas Instruments Inc Means for continuous fabrication of graded junction transistors
DE1141255B (de) * 1958-03-05 1962-12-20 Siemens Ag Verfahren zum Herstellen hochgereinigter einkristalliner Halbleiterstaebe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2768914A (en) * 1951-06-29 1956-10-30 Bell Telephone Labor Inc Process for producing semiconductive crystals of uniform resistivity
DE1061527B (de) * 1953-02-14 1959-07-16 Siemens Ag Verfahren zum zonenweisen Umschmelzen von Staeben und anderen langgestreckten Werkstuecken
DE1017795B (de) * 1954-05-25 1957-10-17 Siemens Ag Verfahren zur Herstellung reinster kristalliner Substanzen, vorzugsweise Halbleitersubstanzen
US2909341A (en) * 1957-05-27 1959-10-20 Lewis A Kingsley Wire aligning and tensioning mechanism
US3036892A (en) * 1958-03-05 1962-05-29 Siemens Ag Production of hyper-pure monocrystal-line rods in continuous operation
US3119778A (en) * 1959-01-20 1964-01-28 Clevite Corp Method and apparatus for crystal growth
US3094006A (en) * 1960-06-15 1963-06-18 Clevite Corp Pull and rotation mechanism for crystal growing apparatus
US3144308A (en) * 1961-07-03 1964-08-11 Carl M Tarter Multiple crystal growing head
US3147901A (en) * 1962-07-09 1964-09-08 Burroughs Corp Tape drive assembly
US3148819A (en) * 1962-09-04 1964-09-15 Ampex Pinch roller actuating mechanism

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB158958A (en) * 1918-07-31 1921-02-07 George Baehr Improvements relating to rolling mills
DE426062C (de) * 1924-03-18 1926-03-01 Heinrich Stueting Walzwerk
US1893290A (en) * 1929-10-05 1933-01-03 Farrel Birmingham Co Inc Rolling mill
US2189399A (en) * 1937-02-06 1940-02-06 Linde Air Prod Co Electric welding apparatus
US2975036A (en) * 1956-10-05 1961-03-14 Motorola Inc Crystal pulling apparatus
US3002821A (en) * 1956-10-22 1961-10-03 Texas Instruments Inc Means for continuous fabrication of graded junction transistors
US2873968A (en) * 1957-04-08 1959-02-17 Samuel M Langston Co Hydraulically loaded feed rolls for corrugated paper stock
DE1141255B (de) * 1958-03-05 1962-12-20 Siemens Ag Verfahren zum Herstellen hochgereinigter einkristalliner Halbleiterstaebe
US2990259A (en) * 1959-09-03 1961-06-27 Paul L Moody Syringe-type single-crystal furnace

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2461030A1 (fr) * 1979-03-12 1981-01-30 Mobil Tyco Solar Energy Corp Mecanisme de tirage de cristaux a courroie et a rouleaux

Also Published As

Publication number Publication date
US3259468A (en) 1966-07-05
NL6404878A (de) 1964-11-03
GB1063024A (en) 1967-03-22

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