DE1293479B - Verfahren zum schichtweisen Abbau der Oberflaechen fester Stoffe fuer die Untersuchung des Gefueges - Google Patents
Verfahren zum schichtweisen Abbau der Oberflaechen fester Stoffe fuer die Untersuchung des GefuegesInfo
- Publication number
- DE1293479B DE1293479B DE1960G0030804 DEG0030804A DE1293479B DE 1293479 B DE1293479 B DE 1293479B DE 1960G0030804 DE1960G0030804 DE 1960G0030804 DE G0030804 A DEG0030804 A DE G0030804A DE 1293479 B DE1293479 B DE 1293479B
- Authority
- DE
- Germany
- Prior art keywords
- layer
- substance
- gas
- activated
- gases
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 title claims description 21
- 238000000034 method Methods 0.000 title claims description 16
- 239000007787 solid Substances 0.000 title claims description 6
- 230000008569 process Effects 0.000 title claims description 5
- 230000015556 catabolic process Effects 0.000 title description 6
- 238000006731 degradation reaction Methods 0.000 title description 5
- 238000011835 investigation Methods 0.000 title 1
- 239000007789 gas Substances 0.000 claims description 22
- 230000004913 activation Effects 0.000 claims description 6
- 239000007795 chemical reaction product Substances 0.000 claims description 3
- 239000011343 solid material Substances 0.000 claims description 3
- 230000009471 action Effects 0.000 claims description 2
- 239000004744 fabric Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 12
- 238000002360 preparation method Methods 0.000 description 9
- 238000001994 activation Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 125000000524 functional group Chemical group 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910001410 inorganic ion Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/32—Polishing; Etching
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- ing And Chemical Polishing (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT777159A AT222385B (de) | 1959-10-28 | 1959-10-28 | Verfahren zum Schichtabbau fester Stoffe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1293479B true DE1293479B (de) | 1969-04-24 |
Family
ID=3599312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE1960G0030804 Pending DE1293479B (de) | 1959-10-28 | 1960-10-27 | Verfahren zum schichtweisen Abbau der Oberflaechen fester Stoffe fuer die Untersuchung des Gefueges |
Country Status (5)
| Country | Link |
|---|---|
| AT (1) | AT222385B (en, 2012) |
| CH (1) | CH416158A (en, 2012) |
| DE (1) | DE1293479B (en, 2012) |
| GB (1) | GB972774A (en, 2012) |
| SE (1) | SE303203B (en, 2012) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU56573A1 (ru) * | А.Л. Чижевский | Способ интенсификации химических реакций | ||
| US2715075A (en) * | 1952-11-29 | 1955-08-09 | Du Pont | Process for treating polyethylene structures and articles resulting therefrom |
| US2829070A (en) * | 1955-04-27 | 1958-04-01 | Du Pont | Treatment of synthetic linear polyester structures and product |
-
1959
- 1959-10-28 AT AT777159A patent/AT222385B/de active
-
1960
- 1960-10-26 SE SE1029060A patent/SE303203B/xx unknown
- 1960-10-27 DE DE1960G0030804 patent/DE1293479B/de active Pending
- 1960-10-27 CH CH1242560A patent/CH416158A/de unknown
- 1960-10-28 GB GB3707860A patent/GB972774A/en not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU56573A1 (ru) * | А.Л. Чижевский | Способ интенсификации химических реакций | ||
| US2715075A (en) * | 1952-11-29 | 1955-08-09 | Du Pont | Process for treating polyethylene structures and articles resulting therefrom |
| US2829070A (en) * | 1955-04-27 | 1958-04-01 | Du Pont | Treatment of synthetic linear polyester structures and product |
Also Published As
| Publication number | Publication date |
|---|---|
| GB972774A (en) | 1964-10-14 |
| SE303203B (en, 2012) | 1968-08-19 |
| AT222385B (de) | 1962-07-25 |
| CH416158A (de) | 1966-06-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3877085T2 (de) | Entfernen von resistschichten. | |
| DE69625855T2 (de) | Gerät zur Erzielung einer gleichmässigen Dosis beim Ionenimplantationsverfahren mit Plasma-Dotierung (PLAD) | |
| DE69401248T2 (de) | Zerstörungsfreie Untersuchung der Eigenschaften eines Plasmabehandlungsprozesses | |
| DE69507169T2 (de) | Vernichtung von Verunreinigungen mittels eines niederenergetischen Elektronenstrahls | |
| DE3031220A1 (de) | Verfahren und einrichtung zum gravieren integrierter schaltungen | |
| DE3118785A1 (de) | Verfahren und vorrichtung zum dotieren von halbleitermaterial | |
| DE3913463A1 (de) | Verfahren und vorrichtung zur plasmabehandlung | |
| DE3414539C2 (en, 2012) | ||
| EP3590125B1 (de) | Vorrichtung zum erzeugen beschleunigter elektronen | |
| DE3331136A1 (de) | Verfahren zur aufnahme von ionen-zyklotron-resonanz-spektren und vorrichtung zur durchfuehrung des verfahrens | |
| DE3039561A1 (de) | Elektret und verfahren zu dessen herstellung sowie verwendung desselben | |
| EP3642861B1 (de) | Vorrichtung zum erzeugen beschleunigter elektronen | |
| DE4217836C2 (de) | Photolackentfernungsverfahren | |
| DE19713637C2 (de) | Teilchenmanipulierung | |
| DE3339493A1 (de) | Verfahren zur vorbehandlung einer maskierschicht auf einem substrat | |
| WO2001069644A1 (de) | Verfahren und vorrichtung zur plasmagestützten oberflächenbehandlung und verwendung des verfahrens | |
| DE1293479B (de) | Verfahren zum schichtweisen Abbau der Oberflaechen fester Stoffe fuer die Untersuchung des Gefueges | |
| DE69207616T2 (de) | Schnelle Atomstrahlquelle | |
| DE3046629C2 (de) | Verfahren zur Herstellung von Isolatoroberflächen | |
| DE2011306A1 (de) | Verfahren zum Umhüllen oder Einkapseln von pulverförmigen Materialien | |
| DE1920183C3 (de) | Verfahren zum Beschluß eines elektrisch isolierenden Materials mit Ionen zur Zerstäubung, Dotierung oder Analyse des Materials | |
| DE2363581C2 (de) | Verfahren zur zerstörungsfreien chemischen Analyse | |
| DE19728321A1 (de) | Verfahren und Vorrichtung zur Herstellung von stabilen endohedralen Fullerenen der Struktur ZaC¶x¶ mit x >= 60 | |
| DE10056564A1 (de) | Verfahren und Vorrichtung zur plasmagestützten Oberflächenbehandlung und Verwendung des Verfahrens | |
| DE2556217C3 (de) | Verfahren und Vorrichtung zur Messung der Diffusion von Teilchen eines oder mehrerer Materialien durch ein anderes, in fester Form vorliegendes Material |