DE1258850B - Verfahren zur Herstellung von reinem Siliciumcarbid - Google Patents
Verfahren zur Herstellung von reinem SiliciumcarbidInfo
- Publication number
- DE1258850B DE1258850B DEL53528A DEL0053528A DE1258850B DE 1258850 B DE1258850 B DE 1258850B DE L53528 A DEL53528 A DE L53528A DE L0053528 A DEL0053528 A DE L0053528A DE 1258850 B DE1258850 B DE 1258850B
- Authority
- DE
- Germany
- Prior art keywords
- gas
- carbide
- reaction
- silicon
- compounds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 31
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 31
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000007789 gas Substances 0.000 claims description 75
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 37
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 22
- 229910052799 carbon Inorganic materials 0.000 claims description 21
- 238000006243 chemical reaction Methods 0.000 claims description 20
- 239000000203 mixture Substances 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 12
- 239000000376 reactant Substances 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 8
- 229910018557 Si O Inorganic materials 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 239000006227 byproduct Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 239000002019 doping agent Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- 239000013078 crystal Substances 0.000 description 9
- 229910052681 coesite Inorganic materials 0.000 description 8
- 229910052906 cristobalite Inorganic materials 0.000 description 8
- 229910052682 stishovite Inorganic materials 0.000 description 8
- 229910052905 tridymite Inorganic materials 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 239000007787 solid Substances 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- 241001591005 Siga Species 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000007323 disproportionation reaction Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000029142 excretion Effects 0.000 description 2
- 238000010574 gas phase reaction Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000284 resting effect Effects 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- 229920000742 Cotton Polymers 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- -1 SiC2 and Si2C Chemical class 0.000 description 1
- KPAMAAOTLJSEAR-UHFFFAOYSA-N [N].O=C=O Chemical compound [N].O=C=O KPAMAAOTLJSEAR-UHFFFAOYSA-N 0.000 description 1
- UMVBXBACMIOFDO-UHFFFAOYSA-N [N].[Si] Chemical compound [N].[Si] UMVBXBACMIOFDO-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 244000052616 bacterial pathogen Species 0.000 description 1
- 239000004566 building material Substances 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000002144 chemical decomposition reaction Methods 0.000 description 1
- 239000000112 cooling gas Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 150000002927 oxygen compounds Chemical class 0.000 description 1
- JTJMJGYZQZDUJJ-UHFFFAOYSA-N phencyclidine Chemical class C1CCCCN1C1(C=2C=CC=CC=2)CCCCC1 JTJMJGYZQZDUJJ-UHFFFAOYSA-N 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002296 pyrolytic carbon Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 238000005092 sublimation method Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000010626 work up procedure Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
- C01B32/956—Silicon carbide
- C01B32/963—Preparation from compounds containing silicon
- C01B32/984—Preparation from elemental silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH653465 | 1965-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1258850B true DE1258850B (de) | 1968-01-18 |
Family
ID=4311102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEL53528A Pending DE1258850B (de) | 1965-05-10 | 1966-05-07 | Verfahren zur Herstellung von reinem Siliciumcarbid |
Country Status (3)
| Country | Link |
|---|---|
| BE (1) | BE680785A (enrdf_load_stackoverflow) |
| DE (1) | DE1258850B (enrdf_load_stackoverflow) |
| NL (1) | NL6606298A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2233151A1 (de) * | 1971-08-13 | 1973-02-22 | Ambac Ind | Steueroszillatorschaltung |
| US4393097A (en) * | 1979-07-24 | 1983-07-12 | Toshio Hirai | Electrically conductive Si3 N4 -C series amorphous material and a method of producing the same |
| EP0111008A4 (en) * | 1982-06-01 | 1984-11-21 | Mitsui Toatsu Chemicals | METHOD OF PRODUCING METAL CARBIDES AND THEIR PRE-PRODUCTS. |
| DE3602647A1 (de) * | 1985-02-02 | 1986-08-07 | Toyota Jidosha K.K., Toyota, Aichi | Herstellung von siliziumkeramik-pulvern |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1302077A (fr) * | 1961-09-26 | 1962-08-24 | Wacker Chemie Gmbh | Procédé de préparation de carbure de silicium très pur |
-
1966
- 1966-05-07 DE DEL53528A patent/DE1258850B/de active Pending
- 1966-05-09 NL NL6606298A patent/NL6606298A/xx unknown
- 1966-05-10 BE BE680785D patent/BE680785A/xx unknown
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1302077A (fr) * | 1961-09-26 | 1962-08-24 | Wacker Chemie Gmbh | Procédé de préparation de carbure de silicium très pur |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2233151A1 (de) * | 1971-08-13 | 1973-02-22 | Ambac Ind | Steueroszillatorschaltung |
| US4393097A (en) * | 1979-07-24 | 1983-07-12 | Toshio Hirai | Electrically conductive Si3 N4 -C series amorphous material and a method of producing the same |
| EP0111008A4 (en) * | 1982-06-01 | 1984-11-21 | Mitsui Toatsu Chemicals | METHOD OF PRODUCING METAL CARBIDES AND THEIR PRE-PRODUCTS. |
| DE3602647A1 (de) * | 1985-02-02 | 1986-08-07 | Toyota Jidosha K.K., Toyota, Aichi | Herstellung von siliziumkeramik-pulvern |
Also Published As
| Publication number | Publication date |
|---|---|
| BE680785A (enrdf_load_stackoverflow) | 1966-10-17 |
| NL6606298A (enrdf_load_stackoverflow) | 1966-11-11 |
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