DE1211721B - Verfahren und Vorrichtung zum AEndern der Dicke von Festkoerpern - Google Patents
Verfahren und Vorrichtung zum AEndern der Dicke von FestkoerpernInfo
- Publication number
- DE1211721B DE1211721B DEP25085A DEP0025085A DE1211721B DE 1211721 B DE1211721 B DE 1211721B DE P25085 A DEP25085 A DE P25085A DE P0025085 A DEP0025085 A DE P0025085A DE 1211721 B DE1211721 B DE 1211721B
- Authority
- DE
- Germany
- Prior art keywords
- thickness
- voltage
- solid
- processing
- electrical quantity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 49
- 239000007787 solid Substances 0.000 title claims description 38
- 239000003990 capacitor Substances 0.000 claims description 40
- 238000005530 etching Methods 0.000 claims description 33
- 238000012545 processing Methods 0.000 claims description 27
- 230000008859 change Effects 0.000 claims description 20
- 238000003754 machining Methods 0.000 claims description 20
- 238000003860 storage Methods 0.000 claims description 18
- 239000000523 sample Substances 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 15
- 230000006870 function Effects 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 8
- 230000005855 radiation Effects 0.000 claims description 7
- 238000010079 rubber tapping Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 3
- 238000004804 winding Methods 0.000 description 20
- 230000008569 process Effects 0.000 description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 230000010355 oscillation Effects 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/12—Etching of semiconducting materials
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/14—Etching locally
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Weting (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US815938A US3042603A (en) | 1959-05-26 | 1959-05-26 | Thickness modifying apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1211721B true DE1211721B (de) | 1966-03-03 |
Family
ID=25219234
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEP25085A Pending DE1211721B (de) | 1959-05-26 | 1960-05-27 | Verfahren und Vorrichtung zum AEndern der Dicke von Festkoerpern |
Country Status (5)
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3377263A (en) * | 1964-09-14 | 1968-04-09 | Philco Ford Corp | Electrical system for etching a tunnel diode |
| DE2936247A1 (de) * | 1979-09-07 | 1981-03-19 | Siemens AG, 1000 Berlin und 8000 München | Einrichtung zum galvanischen abscheiden einer metallischen schicht mit vorgegebener schichtstaerke |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1131213A (fr) * | 1955-09-09 | 1957-02-19 | Csf | Procédé et appareil de contrôle de l'épaisseur d'un échantillon de semi-conducteur au cours d'une attaque électrolytique |
| DE1027035B (de) * | 1956-04-05 | 1958-03-27 | Gerhard Wollank Dipl Phys | Verfahren zur Verbesserung der Herstellung duenner Draehte durch elektrolytisches AEtzen |
| DE1029485B (de) * | 1956-08-27 | 1958-05-08 | Telefunken Gmbh | Verfahren zum Anbringen eines Zuleitungsdrahtes an der Oberflaeche eines halbleitenden Koerpers |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2199396A (en) * | 1934-09-27 | 1940-05-07 | Dubilier William | System for controlling knitting |
| US2312357A (en) * | 1940-03-02 | 1943-03-02 | American Can Co | Sorting machine |
| US2793345A (en) * | 1953-10-29 | 1957-05-21 | United States Steel Corp | Apparatus for measuring the thickness of a coating applied to a moving strip |
| US2846346A (en) * | 1954-03-26 | 1958-08-05 | Philco Corp | Semiconductor device |
| US2875140A (en) * | 1954-04-21 | 1959-02-24 | Philco Corp | Method and apparatus for producing semiconductive structures |
| US2726202A (en) * | 1955-06-06 | 1955-12-06 | Robotron Corp | Method for plating by condenser discharge |
| US2784154A (en) * | 1956-03-30 | 1957-03-05 | Westinghouse Electric Corp | Electrolytic wire reducing apparatus and method |
| US2886026A (en) * | 1957-08-20 | 1959-05-12 | Texas Instruments Inc | Method of and apparatus for cutting a semiconductor crystal |
-
1959
- 1959-05-26 US US815938A patent/US3042603A/en not_active Expired - Lifetime
-
1960
- 1960-04-25 NL NL250856A patent/NL113711C/nl active
- 1960-05-10 FR FR826764A patent/FR1256781A/fr not_active Expired
- 1960-05-26 GB GB18652/60A patent/GB951256A/en not_active Expired
- 1960-05-27 DE DEP25085A patent/DE1211721B/de active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1131213A (fr) * | 1955-09-09 | 1957-02-19 | Csf | Procédé et appareil de contrôle de l'épaisseur d'un échantillon de semi-conducteur au cours d'une attaque électrolytique |
| DE1027035B (de) * | 1956-04-05 | 1958-03-27 | Gerhard Wollank Dipl Phys | Verfahren zur Verbesserung der Herstellung duenner Draehte durch elektrolytisches AEtzen |
| DE1029485B (de) * | 1956-08-27 | 1958-05-08 | Telefunken Gmbh | Verfahren zum Anbringen eines Zuleitungsdrahtes an der Oberflaeche eines halbleitenden Koerpers |
Also Published As
| Publication number | Publication date |
|---|---|
| GB951256A (en) | 1964-03-04 |
| NL113711C (US07223432-20070529-C00017.png) | 1967-06-15 |
| FR1256781A (fr) | 1961-03-24 |
| NL250856A (US07223432-20070529-C00017.png) | 1967-01-16 |
| US3042603A (en) | 1962-07-03 |
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