DE1179184B - Verfahren zum Herstellen von einkristallinen, insbesondere duennen halbleitenden Schichten - Google Patents

Verfahren zum Herstellen von einkristallinen, insbesondere duennen halbleitenden Schichten

Info

Publication number
DE1179184B
DE1179184B DES71475A DES0071475A DE1179184B DE 1179184 B DE1179184 B DE 1179184B DE S71475 A DES71475 A DE S71475A DE S0071475 A DES0071475 A DE S0071475A DE 1179184 B DE1179184 B DE 1179184B
Authority
DE
Germany
Prior art keywords
carrier
semiconductor material
layer
crystal
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DES71475A
Other languages
German (de)
English (en)
Inventor
Dipl-Phys Dr Walter Heywang
Dipl-Phys Dr Guenther Ziegler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL270518D priority Critical patent/NL270518A/xx
Application filed by Siemens AG filed Critical Siemens AG
Priority to DES71475A priority patent/DE1179184B/de
Priority to CH1139761A priority patent/CH412821A/de
Priority to GB42489/61A priority patent/GB940236A/en
Priority to FR880377A priority patent/FR1307108A/fr
Priority to US155649A priority patent/US3160522A/en
Publication of DE1179184B publication Critical patent/DE1179184B/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/04—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method adding crystallising materials or reactants forming it in situ to the melt
    • C30B11/08—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method adding crystallising materials or reactants forming it in situ to the melt every component of the crystal composition being added during the crystallisation
    • C30B11/12—Vaporous components, e.g. vapour-liquid-solid-growth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/071—Heating, selective
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/107—Melt
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/15—Silicon on sapphire SOS

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DES71475A 1960-11-30 1960-11-30 Verfahren zum Herstellen von einkristallinen, insbesondere duennen halbleitenden Schichten Pending DE1179184B (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
NL270518D NL270518A (US20080293856A1-20081127-C00150.png) 1960-11-30
DES71475A DE1179184B (de) 1960-11-30 1960-11-30 Verfahren zum Herstellen von einkristallinen, insbesondere duennen halbleitenden Schichten
CH1139761A CH412821A (de) 1960-11-30 1961-10-02 Verfahren zum Herstellen von einkristallinen, insbesondere dünnen, halbleitenden Schichten
GB42489/61A GB940236A (en) 1960-11-30 1961-11-28 Improvements in or relating to layers of semiconductor material
FR880377A FR1307108A (fr) 1960-11-30 1961-11-29 Procédé pour fabriquer des couches semi-conductrices monocristallines
US155649A US3160522A (en) 1960-11-30 1961-11-29 Method for producting monocrystalline semiconductor layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES71475A DE1179184B (de) 1960-11-30 1960-11-30 Verfahren zum Herstellen von einkristallinen, insbesondere duennen halbleitenden Schichten

Publications (1)

Publication Number Publication Date
DE1179184B true DE1179184B (de) 1964-10-08

Family

ID=7502500

Family Applications (1)

Application Number Title Priority Date Filing Date
DES71475A Pending DE1179184B (de) 1960-11-30 1960-11-30 Verfahren zum Herstellen von einkristallinen, insbesondere duennen halbleitenden Schichten

Country Status (5)

Country Link
US (1) US3160522A (US20080293856A1-20081127-C00150.png)
CH (1) CH412821A (US20080293856A1-20081127-C00150.png)
DE (1) DE1179184B (US20080293856A1-20081127-C00150.png)
GB (1) GB940236A (US20080293856A1-20081127-C00150.png)
NL (1) NL270518A (US20080293856A1-20081127-C00150.png)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1251441B (US20080293856A1-20081127-C00150.png) * 1962-06-20
FR1370724A (fr) * 1963-07-15 1964-08-28 Electronique & Automatisme Sa Procédé de réalisation de couches minces monocristallines
US3336159A (en) * 1963-10-07 1967-08-15 Ncr Co Method for growing single thin film crystals
US3344054A (en) * 1964-03-02 1967-09-26 Schjeldahl Co G T Art of controlling sputtering and metal evaporation by means of a plane acceptor
US3335038A (en) * 1964-03-30 1967-08-08 Ibm Methods of producing single crystals on polycrystalline substrates and devices using same
US3366462A (en) * 1964-11-04 1968-01-30 Siemens Ag Method of producing monocrystalline semiconductor material
DE1297086B (de) * 1965-01-29 1969-06-12 Siemens Ag Verfahren zum Herstellen einer Schicht von einkristallinem Halbleitermaterial
US3433682A (en) * 1965-07-06 1969-03-18 American Standard Inc Silicon coated graphite
US3460240A (en) * 1965-08-24 1969-08-12 Westinghouse Electric Corp Manufacture of semiconductor solar cells
US3420704A (en) * 1966-08-19 1969-01-07 Nasa Depositing semiconductor films utilizing a thermal gradient
US3517198A (en) * 1966-12-01 1970-06-23 Gen Electric Light emitting and absorbing devices
US3469308A (en) * 1967-05-22 1969-09-30 Philco Ford Corp Fabrication of semiconductive devices
US4058418A (en) * 1974-04-01 1977-11-15 Solarex Corporation Fabrication of thin film solar cells utilizing epitaxial deposition onto a liquid surface to obtain lateral growth
US4003770A (en) * 1975-03-24 1977-01-18 Monsanto Research Corporation Plasma spraying process for preparing polycrystalline solar cells
DE2638270C2 (de) * 1976-08-25 1983-01-27 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Verfahren zur Herstellung großflächiger, freitragender Platten aus Silicium
US4400715A (en) * 1980-11-19 1983-08-23 International Business Machines Corporation Thin film semiconductor device and method for manufacture
US4487162A (en) * 1980-11-25 1984-12-11 Cann Gordon L Magnetoplasmadynamic apparatus for the separation and deposition of materials
US4471003A (en) * 1980-11-25 1984-09-11 Cann Gordon L Magnetoplasmadynamic apparatus and process for the separation and deposition of materials
US4853076A (en) * 1983-12-29 1989-08-01 Massachusetts Institute Of Technology Semiconductor thin films
US4737233A (en) * 1984-10-22 1988-04-12 American Telephone And Telegraph Company, At&T Bell Laboratories Method for making semiconductor crystal films
JPH02222134A (ja) * 1989-02-23 1990-09-04 Nobuo Mikoshiba 薄膜形成装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2880117A (en) * 1956-01-20 1959-03-31 Electronique & Automatisme Sa Method of manufacturing semiconducting materials

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE509317A (US20080293856A1-20081127-C00150.png) * 1951-03-07 1900-01-01
NL111118C (US20080293856A1-20081127-C00150.png) * 1954-04-01
US2902350A (en) * 1954-12-21 1959-09-01 Rca Corp Method for single crystal growth
DE1155759B (de) * 1959-06-11 1963-10-17 Siemens Ag Vorrichtung zur Gewinnung reinsten kristallinen Halbleitermaterials fuer elektrotechnische Zwecke
NL252533A (US20080293856A1-20081127-C00150.png) * 1959-06-30 1900-01-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2880117A (en) * 1956-01-20 1959-03-31 Electronique & Automatisme Sa Method of manufacturing semiconducting materials

Also Published As

Publication number Publication date
GB940236A (en) 1963-10-30
NL270518A (US20080293856A1-20081127-C00150.png)
CH412821A (de) 1966-05-15
US3160522A (en) 1964-12-08

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