DE112021005156T5 - Fluidsteuervorrichtung - Google Patents

Fluidsteuervorrichtung Download PDF

Info

Publication number
DE112021005156T5
DE112021005156T5 DE112021005156.3T DE112021005156T DE112021005156T5 DE 112021005156 T5 DE112021005156 T5 DE 112021005156T5 DE 112021005156 T DE112021005156 T DE 112021005156T DE 112021005156 T5 DE112021005156 T5 DE 112021005156T5
Authority
DE
Germany
Prior art keywords
control device
fluid control
main plate
opening
vibrating portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112021005156.3T
Other languages
German (de)
English (en)
Inventor
Yutoku KAWABATA
Nobuhira TANAKA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE112021005156T5 publication Critical patent/DE112021005156T5/de
Pending legal-status Critical Current

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Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
DE112021005156.3T 2020-09-30 2021-07-13 Fluidsteuervorrichtung Pending DE112021005156T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-164498 2020-09-30
JP2020164498 2020-09-30
PCT/JP2021/026240 WO2022070549A1 (ja) 2020-09-30 2021-07-13 流体制御装置

Publications (1)

Publication Number Publication Date
DE112021005156T5 true DE112021005156T5 (de) 2023-08-10

Family

ID=80949808

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112021005156.3T Pending DE112021005156T5 (de) 2020-09-30 2021-07-13 Fluidsteuervorrichtung

Country Status (5)

Country Link
US (1) US12276274B2 (https=)
JP (1) JP7616233B2 (https=)
CN (2) CN121322350A (https=)
DE (1) DE112021005156T5 (https=)
WO (1) WO2022070549A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6908175B2 (ja) * 2018-02-16 2021-07-21 株式会社村田製作所 流体制御装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0508194D0 (en) * 2005-04-22 2005-06-01 The Technology Partnership Plc Pump
JP4957501B2 (ja) * 2007-10-16 2012-06-20 株式会社村田製作所 圧電マイクロブロア
DE102008004147A1 (de) * 2008-01-14 2009-07-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikropumpe und Verfahren zum Pumpen eines Fluids
CN103527452A (zh) * 2008-06-03 2014-01-22 株式会社村田制作所 压电微型鼓风机
WO2010004721A1 (ja) * 2008-07-08 2010-01-14 パナソニック株式会社 導電性高分子を用いた流体搬送装置
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP6061054B2 (ja) * 2014-03-07 2017-01-18 株式会社村田製作所 ブロア
WO2016009870A1 (ja) * 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
CN206903844U (zh) * 2014-08-20 2018-01-19 株式会社村田制作所 鼓风机
WO2016063710A1 (ja) 2014-10-21 2016-04-28 株式会社村田製作所 バルブ、流体制御装置および血圧計
CN107076137B (zh) * 2014-10-23 2020-06-30 株式会社村田制作所 阀与流体控制装置
CN107532584B (zh) * 2015-05-08 2019-12-27 株式会社村田制作所 泵和流体控制装置
DE112016002205B4 (de) * 2015-06-11 2021-09-16 Murata Manufacturing Co., Ltd. Pumpe
CN107923385B (zh) * 2015-08-31 2020-01-17 株式会社村田制作所 鼓风机
CN105508207B (zh) * 2016-01-20 2019-01-22 吉林大学 一种钹型泵体压电泵
WO2018021514A1 (ja) * 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置
DE112018005660B4 (de) * 2018-01-10 2022-11-03 Murata Manufacturing Co., Ltd. Pumpe und fluidsteuerungsvorrichtung
JPWO2019208016A1 (ja) * 2018-04-24 2021-02-25 株式会社村田製作所 バルブおよびバルブを備える流体制御装置
CN112166251B (zh) 2018-05-31 2024-04-02 株式会社村田制作所 流体控制装置

Also Published As

Publication number Publication date
JP7616233B2 (ja) 2025-01-17
CN121322350A (zh) 2026-01-13
CN116324166B (zh) 2025-11-11
CN116324166A (zh) 2023-06-23
US20230235732A1 (en) 2023-07-27
WO2022070549A1 (ja) 2022-04-07
JPWO2022070549A1 (https=) 2022-04-07
US12276274B2 (en) 2025-04-15

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