JP7616233B2 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

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Publication number
JP7616233B2
JP7616233B2 JP2022553483A JP2022553483A JP7616233B2 JP 7616233 B2 JP7616233 B2 JP 7616233B2 JP 2022553483 A JP2022553483 A JP 2022553483A JP 2022553483 A JP2022553483 A JP 2022553483A JP 7616233 B2 JP7616233 B2 JP 7616233B2
Authority
JP
Japan
Prior art keywords
main plate
opening
control device
fluid control
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022553483A
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English (en)
Japanese (ja)
Other versions
JPWO2022070549A5 (https=
JPWO2022070549A1 (https=
Inventor
友徳 川端
伸拓 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2022070549A1 publication Critical patent/JPWO2022070549A1/ja
Publication of JPWO2022070549A5 publication Critical patent/JPWO2022070549A5/ja
Application granted granted Critical
Publication of JP7616233B2 publication Critical patent/JP7616233B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2022553483A 2020-09-30 2021-07-13 流体制御装置 Active JP7616233B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020164498 2020-09-30
JP2020164498 2020-09-30
PCT/JP2021/026240 WO2022070549A1 (ja) 2020-09-30 2021-07-13 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2022070549A1 JPWO2022070549A1 (https=) 2022-04-07
JPWO2022070549A5 JPWO2022070549A5 (https=) 2023-05-31
JP7616233B2 true JP7616233B2 (ja) 2025-01-17

Family

ID=80949808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022553483A Active JP7616233B2 (ja) 2020-09-30 2021-07-13 流体制御装置

Country Status (5)

Country Link
US (1) US12276274B2 (https=)
JP (1) JP7616233B2 (https=)
CN (2) CN121322350A (https=)
DE (1) DE112021005156T5 (https=)
WO (1) WO2022070549A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6908175B2 (ja) * 2018-02-16 2021-07-21 株式会社村田製作所 流体制御装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009097393A (ja) 2007-10-16 2009-05-07 Murata Mfg Co Ltd 圧電マイクロブロア
DE102008004147A1 (de) 2008-01-14 2009-07-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikropumpe und Verfahren zum Pumpen eines Fluids
WO2016063710A1 (ja) 2014-10-21 2016-04-28 株式会社村田製作所 バルブ、流体制御装置および血圧計
WO2019208016A1 (ja) 2018-04-24 2019-10-31 株式会社村田製作所 バルブおよびバルブを備える流体制御装置
WO2019230159A1 (ja) 2018-05-31 2019-12-05 株式会社村田製作所 ポンプ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0508194D0 (en) * 2005-04-22 2005-06-01 The Technology Partnership Plc Pump
CN103527452A (zh) * 2008-06-03 2014-01-22 株式会社村田制作所 压电微型鼓风机
WO2010004721A1 (ja) * 2008-07-08 2010-01-14 パナソニック株式会社 導電性高分子を用いた流体搬送装置
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP6061054B2 (ja) * 2014-03-07 2017-01-18 株式会社村田製作所 ブロア
WO2016009870A1 (ja) * 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
CN206903844U (zh) * 2014-08-20 2018-01-19 株式会社村田制作所 鼓风机
CN107076137B (zh) * 2014-10-23 2020-06-30 株式会社村田制作所 阀与流体控制装置
CN107532584B (zh) * 2015-05-08 2019-12-27 株式会社村田制作所 泵和流体控制装置
DE112016002205B4 (de) * 2015-06-11 2021-09-16 Murata Manufacturing Co., Ltd. Pumpe
CN107923385B (zh) * 2015-08-31 2020-01-17 株式会社村田制作所 鼓风机
CN105508207B (zh) * 2016-01-20 2019-01-22 吉林大学 一种钹型泵体压电泵
WO2018021514A1 (ja) * 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置
DE112018005660B4 (de) * 2018-01-10 2022-11-03 Murata Manufacturing Co., Ltd. Pumpe und fluidsteuerungsvorrichtung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009097393A (ja) 2007-10-16 2009-05-07 Murata Mfg Co Ltd 圧電マイクロブロア
DE102008004147A1 (de) 2008-01-14 2009-07-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikropumpe und Verfahren zum Pumpen eines Fluids
WO2016063710A1 (ja) 2014-10-21 2016-04-28 株式会社村田製作所 バルブ、流体制御装置および血圧計
WO2019208016A1 (ja) 2018-04-24 2019-10-31 株式会社村田製作所 バルブおよびバルブを備える流体制御装置
WO2019230159A1 (ja) 2018-05-31 2019-12-05 株式会社村田製作所 ポンプ

Also Published As

Publication number Publication date
CN121322350A (zh) 2026-01-13
CN116324166B (zh) 2025-11-11
CN116324166A (zh) 2023-06-23
DE112021005156T5 (de) 2023-08-10
US20230235732A1 (en) 2023-07-27
WO2022070549A1 (ja) 2022-04-07
JPWO2022070549A1 (https=) 2022-04-07
US12276274B2 (en) 2025-04-15

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