CN121322350A - 流体控制装置 - Google Patents

流体控制装置

Info

Publication number
CN121322350A
CN121322350A CN202511504117.8A CN202511504117A CN121322350A CN 121322350 A CN121322350 A CN 121322350A CN 202511504117 A CN202511504117 A CN 202511504117A CN 121322350 A CN121322350 A CN 121322350A
Authority
CN
China
Prior art keywords
control device
fluid control
opening
pump chamber
main board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202511504117.8A
Other languages
English (en)
Chinese (zh)
Inventor
川端友德
田中伸拓
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN121322350A publication Critical patent/CN121322350A/zh
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
CN202511504117.8A 2020-09-30 2021-07-13 流体控制装置 Pending CN121322350A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2020-164498 2020-09-30
JP2020164498 2020-09-30
CN202180066387.9A CN116324166B (zh) 2020-09-30 2021-07-13 流体控制装置
PCT/JP2021/026240 WO2022070549A1 (ja) 2020-09-30 2021-07-13 流体制御装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN202180066387.9A Division CN116324166B (zh) 2020-09-30 2021-07-13 流体控制装置

Publications (1)

Publication Number Publication Date
CN121322350A true CN121322350A (zh) 2026-01-13

Family

ID=80949808

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202511504117.8A Pending CN121322350A (zh) 2020-09-30 2021-07-13 流体控制装置
CN202180066387.9A Active CN116324166B (zh) 2020-09-30 2021-07-13 流体控制装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202180066387.9A Active CN116324166B (zh) 2020-09-30 2021-07-13 流体控制装置

Country Status (5)

Country Link
US (1) US12276274B2 (https=)
JP (1) JP7616233B2 (https=)
CN (2) CN121322350A (https=)
DE (1) DE112021005156T5 (https=)
WO (1) WO2022070549A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6908175B2 (ja) * 2018-02-16 2021-07-21 株式会社村田製作所 流体制御装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0508194D0 (en) * 2005-04-22 2005-06-01 The Technology Partnership Plc Pump
JP4957501B2 (ja) * 2007-10-16 2012-06-20 株式会社村田製作所 圧電マイクロブロア
DE102008004147A1 (de) * 2008-01-14 2009-07-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikropumpe und Verfahren zum Pumpen eines Fluids
CN103527452A (zh) * 2008-06-03 2014-01-22 株式会社村田制作所 压电微型鼓风机
WO2010004721A1 (ja) * 2008-07-08 2010-01-14 パナソニック株式会社 導電性高分子を用いた流体搬送装置
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP6061054B2 (ja) * 2014-03-07 2017-01-18 株式会社村田製作所 ブロア
WO2016009870A1 (ja) * 2014-07-16 2016-01-21 株式会社村田製作所 流体制御装置
CN206903844U (zh) * 2014-08-20 2018-01-19 株式会社村田制作所 鼓风机
WO2016063710A1 (ja) 2014-10-21 2016-04-28 株式会社村田製作所 バルブ、流体制御装置および血圧計
CN107076137B (zh) * 2014-10-23 2020-06-30 株式会社村田制作所 阀与流体控制装置
CN107532584B (zh) * 2015-05-08 2019-12-27 株式会社村田制作所 泵和流体控制装置
DE112016002205B4 (de) * 2015-06-11 2021-09-16 Murata Manufacturing Co., Ltd. Pumpe
CN107923385B (zh) * 2015-08-31 2020-01-17 株式会社村田制作所 鼓风机
CN105508207B (zh) * 2016-01-20 2019-01-22 吉林大学 一种钹型泵体压电泵
WO2018021514A1 (ja) * 2016-07-29 2018-02-01 株式会社村田製作所 バルブ、気体制御装置
DE112018005660B4 (de) * 2018-01-10 2022-11-03 Murata Manufacturing Co., Ltd. Pumpe und fluidsteuerungsvorrichtung
JPWO2019208016A1 (ja) * 2018-04-24 2021-02-25 株式会社村田製作所 バルブおよびバルブを備える流体制御装置
CN112166251B (zh) 2018-05-31 2024-04-02 株式会社村田制作所 流体控制装置

Also Published As

Publication number Publication date
JP7616233B2 (ja) 2025-01-17
CN116324166B (zh) 2025-11-11
CN116324166A (zh) 2023-06-23
DE112021005156T5 (de) 2023-08-10
US20230235732A1 (en) 2023-07-27
WO2022070549A1 (ja) 2022-04-07
JPWO2022070549A1 (https=) 2022-04-07
US12276274B2 (en) 2025-04-15

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