DE112020005210B4 - Aktuator mit größerer Dicke des Verbindungskörpers als der ersten Hauptplatine und Fluidsteuerungsvorrichtung - Google Patents

Aktuator mit größerer Dicke des Verbindungskörpers als der ersten Hauptplatine und Fluidsteuerungsvorrichtung Download PDF

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Publication number
DE112020005210B4
DE112020005210B4 DE112020005210.9T DE112020005210T DE112020005210B4 DE 112020005210 B4 DE112020005210 B4 DE 112020005210B4 DE 112020005210 T DE112020005210 T DE 112020005210T DE 112020005210 B4 DE112020005210 B4 DE 112020005210B4
Authority
DE
Germany
Prior art keywords
main plate
main
actuator
frame body
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE112020005210.9T
Other languages
German (de)
English (en)
Other versions
DE112020005210T5 (de
Inventor
Yutoku KAWABATA
Nobuhira TANAKA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of DE112020005210T5 publication Critical patent/DE112020005210T5/de
Application granted granted Critical
Publication of DE112020005210B4 publication Critical patent/DE112020005210B4/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/32—Arched structures; Vaulted structures; Folded structures
    • E04B2001/3223—Theorical polygonal geometry therefor
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/32—Arched structures; Vaulted structures; Folded structures
    • E04B2001/3258—Arched structures; Vaulted structures; Folded structures comprised entirely of a single self-supporting panel
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/32—Arched structures; Vaulted structures; Folded structures
    • E04B2001/327—Arched structures; Vaulted structures; Folded structures comprised of a number of panels or blocs connected together forming a self-supporting structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Fuel-Injection Apparatus (AREA)
DE112020005210.9T 2019-11-28 2020-09-03 Aktuator mit größerer Dicke des Verbindungskörpers als der ersten Hauptplatine und Fluidsteuerungsvorrichtung Active DE112020005210B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-215163 2019-11-28
JP2019215163 2019-11-28
PCT/JP2020/033359 WO2021106301A1 (ja) 2019-11-28 2020-09-03 アクチュエータ、および、流体制御装置

Publications (2)

Publication Number Publication Date
DE112020005210T5 DE112020005210T5 (de) 2022-07-28
DE112020005210B4 true DE112020005210B4 (de) 2025-05-22

Family

ID=76130455

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112020005210.9T Active DE112020005210B4 (de) 2019-11-28 2020-09-03 Aktuator mit größerer Dicke des Verbindungskörpers als der ersten Hauptplatine und Fluidsteuerungsvorrichtung

Country Status (6)

Country Link
US (1) US20220252063A1 (https=)
JP (1) JP7276505B2 (https=)
CN (1) CN114746650B (https=)
DE (1) DE112020005210B4 (https=)
GB (1) GB2603711B (https=)
WO (1) WO2021106301A1 (https=)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112007000722T5 (de) * 2006-03-29 2009-04-30 Murata Manufacturing Co. Ltd., Nagaokakyo-shi Mikropumpe
EP2568177A1 (en) * 2011-09-06 2013-03-13 Murata Manufacturing Co., Ltd. Fluid control device
EP2568174A1 (en) * 2011-09-06 2013-03-13 Murata Manufacturing Co., Ltd. Fluid control device
EP3109472A1 (en) * 2014-02-21 2016-12-28 Murata Manufacturing Co., Ltd. Fluid control device and pump
CN207135005U (zh) * 2017-05-12 2018-03-23 研能科技股份有限公司 压电致动器和压电致动板
US20190170133A1 (en) * 2016-07-29 2019-06-06 Murata Manufacturing Co., Ltd. Valve and gas control device
DE112019006369T5 (de) * 2018-12-19 2021-09-02 Murata Manufacturing Co., Ltd. Piezoelektrischer Wandler

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4936221B2 (ja) * 2007-06-08 2012-05-23 セイコーエプソン株式会社 メサ型圧電振動片、メサ型圧電振動デバイス、発振器、及び電子機器
DE102007061920A1 (de) * 2007-12-21 2009-06-25 Paritec Gmbh Kammer, Pumpe mit Kammer und Verfahren zur Herstellung von Kammern
JP2011027057A (ja) * 2009-07-28 2011-02-10 Tdk Corp 圧電ポンプ及びその駆動方法
JP5928160B2 (ja) * 2012-05-29 2016-06-01 オムロンヘルスケア株式会社 圧電ポンプおよびこれを備えた血圧情報測定装置
CN107795472B (zh) * 2016-09-05 2019-04-05 研能科技股份有限公司 流体控制装置
TWI634264B (zh) * 2017-01-13 2018-09-01 研能科技股份有限公司 空氣馬達
JP7270657B2 (ja) * 2019-02-04 2023-05-10 富士フイルム株式会社 細胞培養装置、細胞培養方法、及び生産物の製造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112007000722T5 (de) * 2006-03-29 2009-04-30 Murata Manufacturing Co. Ltd., Nagaokakyo-shi Mikropumpe
EP2568177A1 (en) * 2011-09-06 2013-03-13 Murata Manufacturing Co., Ltd. Fluid control device
EP2568174A1 (en) * 2011-09-06 2013-03-13 Murata Manufacturing Co., Ltd. Fluid control device
EP3109472A1 (en) * 2014-02-21 2016-12-28 Murata Manufacturing Co., Ltd. Fluid control device and pump
US20190170133A1 (en) * 2016-07-29 2019-06-06 Murata Manufacturing Co., Ltd. Valve and gas control device
CN207135005U (zh) * 2017-05-12 2018-03-23 研能科技股份有限公司 压电致动器和压电致动板
DE112019006369T5 (de) * 2018-12-19 2021-09-02 Murata Manufacturing Co., Ltd. Piezoelektrischer Wandler

Also Published As

Publication number Publication date
CN114746650A (zh) 2022-07-12
DE112020005210T5 (de) 2022-07-28
US20220252063A1 (en) 2022-08-11
WO2021106301A1 (ja) 2021-06-03
JP7276505B2 (ja) 2023-05-18
JPWO2021106301A1 (https=) 2021-06-03
GB2603711A (en) 2022-08-10
GB2603711B (en) 2023-06-21
CN114746650B (zh) 2024-06-07
GB202205821D0 (en) 2022-06-08

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