JP7276505B2 - アクチュエータ、および、流体制御装置 - Google Patents

アクチュエータ、および、流体制御装置 Download PDF

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Publication number
JP7276505B2
JP7276505B2 JP2021561168A JP2021561168A JP7276505B2 JP 7276505 B2 JP7276505 B2 JP 7276505B2 JP 2021561168 A JP2021561168 A JP 2021561168A JP 2021561168 A JP2021561168 A JP 2021561168A JP 7276505 B2 JP7276505 B2 JP 7276505B2
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JP
Japan
Prior art keywords
main plate
main
frame
control device
fluid control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021561168A
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English (en)
Japanese (ja)
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JPWO2021106301A5 (https=
JPWO2021106301A1 (https=
Inventor
友徳 川端
伸拓 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2021106301A1 publication Critical patent/JPWO2021106301A1/ja
Publication of JPWO2021106301A5 publication Critical patent/JPWO2021106301A5/ja
Application granted granted Critical
Publication of JP7276505B2 publication Critical patent/JP7276505B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/32—Arched structures; Vaulted structures; Folded structures
    • E04B2001/3223—Theorical polygonal geometry therefor
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/32—Arched structures; Vaulted structures; Folded structures
    • E04B2001/3258—Arched structures; Vaulted structures; Folded structures comprised entirely of a single self-supporting panel
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/32—Arched structures; Vaulted structures; Folded structures
    • E04B2001/327—Arched structures; Vaulted structures; Folded structures comprised of a number of panels or blocs connected together forming a self-supporting structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Fuel-Injection Apparatus (AREA)
JP2021561168A 2019-11-28 2020-09-03 アクチュエータ、および、流体制御装置 Active JP7276505B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019215163 2019-11-28
JP2019215163 2019-11-28
PCT/JP2020/033359 WO2021106301A1 (ja) 2019-11-28 2020-09-03 アクチュエータ、および、流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2021106301A1 JPWO2021106301A1 (https=) 2021-06-03
JPWO2021106301A5 JPWO2021106301A5 (https=) 2022-06-20
JP7276505B2 true JP7276505B2 (ja) 2023-05-18

Family

ID=76130455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021561168A Active JP7276505B2 (ja) 2019-11-28 2020-09-03 アクチュエータ、および、流体制御装置

Country Status (6)

Country Link
US (1) US20220252063A1 (https=)
JP (1) JP7276505B2 (https=)
CN (1) CN114746650B (https=)
DE (1) DE112020005210B4 (https=)
GB (1) GB2603711B (https=)
WO (1) WO2021106301A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015125843A1 (ja) 2014-02-21 2015-08-27 株式会社村田製作所 流体制御装置およびポンプ

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112007000722B4 (de) * 2006-03-29 2013-07-04 Murata Manufacturing Co., Ltd. Mikropumpe
JP4936221B2 (ja) * 2007-06-08 2012-05-23 セイコーエプソン株式会社 メサ型圧電振動片、メサ型圧電振動デバイス、発振器、及び電子機器
DE102007061920A1 (de) * 2007-12-21 2009-06-25 Paritec Gmbh Kammer, Pumpe mit Kammer und Verfahren zur Herstellung von Kammern
JP2011027057A (ja) * 2009-07-28 2011-02-10 Tdk Corp 圧電ポンプ及びその駆動方法
JP5528404B2 (ja) * 2011-09-06 2014-06-25 株式会社村田製作所 流体制御装置
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP5928160B2 (ja) * 2012-05-29 2016-06-01 オムロンヘルスケア株式会社 圧電ポンプおよびこれを備えた血圧情報測定装置
JP6269907B1 (ja) * 2016-07-29 2018-01-31 株式会社村田製作所 バルブ、気体制御装置
CN107795472B (zh) * 2016-09-05 2019-04-05 研能科技股份有限公司 流体控制装置
TWI634264B (zh) * 2017-01-13 2018-09-01 研能科技股份有限公司 空氣馬達
CN207135005U (zh) * 2017-05-12 2018-03-23 研能科技股份有限公司 压电致动器和压电致动板
CN113261308B (zh) * 2018-12-19 2023-06-27 株式会社村田制作所 压电换能器
JP7270657B2 (ja) * 2019-02-04 2023-05-10 富士フイルム株式会社 細胞培養装置、細胞培養方法、及び生産物の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015125843A1 (ja) 2014-02-21 2015-08-27 株式会社村田製作所 流体制御装置およびポンプ

Also Published As

Publication number Publication date
CN114746650A (zh) 2022-07-12
DE112020005210T5 (de) 2022-07-28
US20220252063A1 (en) 2022-08-11
WO2021106301A1 (ja) 2021-06-03
JPWO2021106301A1 (https=) 2021-06-03
GB2603711A (en) 2022-08-10
GB2603711B (en) 2023-06-21
DE112020005210B4 (de) 2025-05-22
CN114746650B (zh) 2024-06-07
GB202205821D0 (en) 2022-06-08

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