GB2603711B - Actuator and fluid control device - Google Patents

Actuator and fluid control device Download PDF

Info

Publication number
GB2603711B
GB2603711B GB2205821.8A GB202205821A GB2603711B GB 2603711 B GB2603711 B GB 2603711B GB 202205821 A GB202205821 A GB 202205821A GB 2603711 B GB2603711 B GB 2603711B
Authority
GB
United Kingdom
Prior art keywords
actuator
control device
fluid control
fluid
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB2205821.8A
Other languages
English (en)
Other versions
GB2603711A (en
GB202205821D0 (en
Inventor
Kawabata Yutoku
Tanaka Nobuhira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of GB202205821D0 publication Critical patent/GB202205821D0/en
Publication of GB2603711A publication Critical patent/GB2603711A/en
Application granted granted Critical
Publication of GB2603711B publication Critical patent/GB2603711B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/32—Arched structures; Vaulted structures; Folded structures
    • E04B2001/3223—Theorical polygonal geometry therefor
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/32—Arched structures; Vaulted structures; Folded structures
    • E04B2001/3258—Arched structures; Vaulted structures; Folded structures comprised entirely of a single self-supporting panel
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04B—GENERAL BUILDING CONSTRUCTIONS; WALLS, e.g. PARTITIONS; ROOFS; FLOORS; CEILINGS; INSULATION OR OTHER PROTECTION OF BUILDINGS
    • E04B1/00—Constructions in general; Structures which are not restricted either to walls, e.g. partitions, or floors or ceilings or roofs
    • E04B1/32—Arched structures; Vaulted structures; Folded structures
    • E04B2001/327—Arched structures; Vaulted structures; Folded structures comprised of a number of panels or blocs connected together forming a self-supporting structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Fuel-Injection Apparatus (AREA)
GB2205821.8A 2019-11-28 2020-09-03 Actuator and fluid control device Active GB2603711B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019215163 2019-11-28
PCT/JP2020/033359 WO2021106301A1 (ja) 2019-11-28 2020-09-03 アクチュエータ、および、流体制御装置

Publications (3)

Publication Number Publication Date
GB202205821D0 GB202205821D0 (en) 2022-06-08
GB2603711A GB2603711A (en) 2022-08-10
GB2603711B true GB2603711B (en) 2023-06-21

Family

ID=76130455

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2205821.8A Active GB2603711B (en) 2019-11-28 2020-09-03 Actuator and fluid control device

Country Status (6)

Country Link
US (1) US20220252063A1 (https=)
JP (1) JP7276505B2 (https=)
CN (1) CN114746650B (https=)
DE (1) DE112020005210B4 (https=)
GB (1) GB2603711B (https=)
WO (1) WO2021106301A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011027057A (ja) * 2009-07-28 2011-02-10 Tdk Corp 圧電ポンプ及びその駆動方法
JP2013057247A (ja) * 2011-09-06 2013-03-28 Murata Mfg Co Ltd 流体制御装置
WO2015125843A1 (ja) * 2014-02-21 2015-08-27 株式会社村田製作所 流体制御装置およびポンプ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112007000722B4 (de) * 2006-03-29 2013-07-04 Murata Manufacturing Co., Ltd. Mikropumpe
JP4936221B2 (ja) * 2007-06-08 2012-05-23 セイコーエプソン株式会社 メサ型圧電振動片、メサ型圧電振動デバイス、発振器、及び電子機器
DE102007061920A1 (de) * 2007-12-21 2009-06-25 Paritec Gmbh Kammer, Pumpe mit Kammer und Verfahren zur Herstellung von Kammern
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
JP5928160B2 (ja) * 2012-05-29 2016-06-01 オムロンヘルスケア株式会社 圧電ポンプおよびこれを備えた血圧情報測定装置
JP6269907B1 (ja) * 2016-07-29 2018-01-31 株式会社村田製作所 バルブ、気体制御装置
CN107795472B (zh) * 2016-09-05 2019-04-05 研能科技股份有限公司 流体控制装置
TWI634264B (zh) * 2017-01-13 2018-09-01 研能科技股份有限公司 空氣馬達
CN207135005U (zh) * 2017-05-12 2018-03-23 研能科技股份有限公司 压电致动器和压电致动板
CN113261308B (zh) * 2018-12-19 2023-06-27 株式会社村田制作所 压电换能器
JP7270657B2 (ja) * 2019-02-04 2023-05-10 富士フイルム株式会社 細胞培養装置、細胞培養方法、及び生産物の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011027057A (ja) * 2009-07-28 2011-02-10 Tdk Corp 圧電ポンプ及びその駆動方法
JP2013057247A (ja) * 2011-09-06 2013-03-28 Murata Mfg Co Ltd 流体制御装置
WO2015125843A1 (ja) * 2014-02-21 2015-08-27 株式会社村田製作所 流体制御装置およびポンプ

Also Published As

Publication number Publication date
CN114746650A (zh) 2022-07-12
DE112020005210T5 (de) 2022-07-28
US20220252063A1 (en) 2022-08-11
WO2021106301A1 (ja) 2021-06-03
JP7276505B2 (ja) 2023-05-18
JPWO2021106301A1 (https=) 2021-06-03
GB2603711A (en) 2022-08-10
DE112020005210B4 (de) 2025-05-22
CN114746650B (zh) 2024-06-07
GB202205821D0 (en) 2022-06-08

Similar Documents

Publication Publication Date Title
GB2619646B (en) Flow control device
GB201911646D0 (en) Flow control devices and methods
GB2585497B (en) Fluid control device
IL255284A0 (en) Integrated fluid control valve and valve actuator assembly
GB2582518B (en) Pump and fluid control device
EP3534047A4 (en) VALVE AND FLUID CONTROL DEVICE
GB202008666D0 (en) Fluid control device
IL279612A (en) Fluid control device
IL280735A (en) Fluid control device
SG11202100877QA (en) Actuator, valve device, and fluid control apparatus
SG11202103535VA (en) Fluid control device
IL268254A (en) Flow control accessory
GB202016757D0 (en) Flow control device
GB202008992D0 (en) Flow control device
EP3882472A4 (en) FLUID CONTROL DEVICE
GB2603711B (en) Actuator and fluid control device
GB2606964B (en) Fluid control device
PL4330777T3 (pl) Urządzenie sterujące zaworem
GB2587615B (en) Flow control device
GB2587398B (en) Flow control device
GB202008177D0 (en) Fluid control device
EP4067712A4 (en) ACTUATOR AND FLUID CONTROL DEVICE
EP3877080A4 (en) FLOW CONTROL DEVICE
PL3690293T3 (pl) Blok i sterujące płynem urządzenie
GB2598356B (en) Fluid control device

Legal Events

Date Code Title Description
789A Request for publication of translation (sect. 89(a)/1977)

Ref document number: 2021106301

Country of ref document: WO