JPWO2021106301A5 - - Google Patents
Download PDFInfo
- Publication number
- JPWO2021106301A5 JPWO2021106301A5 JP2021561168A JP2021561168A JPWO2021106301A5 JP WO2021106301 A5 JPWO2021106301 A5 JP WO2021106301A5 JP 2021561168 A JP2021561168 A JP 2021561168A JP 2021561168 A JP2021561168 A JP 2021561168A JP WO2021106301 A5 JPWO2021106301 A5 JP WO2021106301A5
- Authority
- JP
- Japan
- Prior art keywords
- thickness direction
- end surface
- main
- main surface
- frame body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019215163 | 2019-11-28 | ||
| JP2019215163 | 2019-11-28 | ||
| PCT/JP2020/033359 WO2021106301A1 (ja) | 2019-11-28 | 2020-09-03 | アクチュエータ、および、流体制御装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2021106301A1 JPWO2021106301A1 (https=) | 2021-06-03 |
| JPWO2021106301A5 true JPWO2021106301A5 (https=) | 2022-06-20 |
| JP7276505B2 JP7276505B2 (ja) | 2023-05-18 |
Family
ID=76130455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021561168A Active JP7276505B2 (ja) | 2019-11-28 | 2020-09-03 | アクチュエータ、および、流体制御装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20220252063A1 (https=) |
| JP (1) | JP7276505B2 (https=) |
| CN (1) | CN114746650B (https=) |
| DE (1) | DE112020005210B4 (https=) |
| GB (1) | GB2603711B (https=) |
| WO (1) | WO2021106301A1 (https=) |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112007000722B4 (de) * | 2006-03-29 | 2013-07-04 | Murata Manufacturing Co., Ltd. | Mikropumpe |
| JP4936221B2 (ja) * | 2007-06-08 | 2012-05-23 | セイコーエプソン株式会社 | メサ型圧電振動片、メサ型圧電振動デバイス、発振器、及び電子機器 |
| DE102007061920A1 (de) * | 2007-12-21 | 2009-06-25 | Paritec Gmbh | Kammer, Pumpe mit Kammer und Verfahren zur Herstellung von Kammern |
| JP2011027057A (ja) * | 2009-07-28 | 2011-02-10 | Tdk Corp | 圧電ポンプ及びその駆動方法 |
| JP5528404B2 (ja) * | 2011-09-06 | 2014-06-25 | 株式会社村田製作所 | 流体制御装置 |
| JP5682513B2 (ja) * | 2011-09-06 | 2015-03-11 | 株式会社村田製作所 | 流体制御装置 |
| JP5928160B2 (ja) * | 2012-05-29 | 2016-06-01 | オムロンヘルスケア株式会社 | 圧電ポンプおよびこれを備えた血圧情報測定装置 |
| WO2015125843A1 (ja) * | 2014-02-21 | 2015-08-27 | 株式会社村田製作所 | 流体制御装置およびポンプ |
| JP6269907B1 (ja) * | 2016-07-29 | 2018-01-31 | 株式会社村田製作所 | バルブ、気体制御装置 |
| CN107795472B (zh) * | 2016-09-05 | 2019-04-05 | 研能科技股份有限公司 | 流体控制装置 |
| TWI634264B (zh) * | 2017-01-13 | 2018-09-01 | 研能科技股份有限公司 | 空氣馬達 |
| CN207135005U (zh) * | 2017-05-12 | 2018-03-23 | 研能科技股份有限公司 | 压电致动器和压电致动板 |
| CN113261308B (zh) * | 2018-12-19 | 2023-06-27 | 株式会社村田制作所 | 压电换能器 |
| JP7270657B2 (ja) * | 2019-02-04 | 2023-05-10 | 富士フイルム株式会社 | 細胞培養装置、細胞培養方法、及び生産物の製造方法 |
-
2020
- 2020-09-03 JP JP2021561168A patent/JP7276505B2/ja active Active
- 2020-09-03 WO PCT/JP2020/033359 patent/WO2021106301A1/ja not_active Ceased
- 2020-09-03 CN CN202080082107.9A patent/CN114746650B/zh active Active
- 2020-09-03 DE DE112020005210.9T patent/DE112020005210B4/de active Active
- 2020-09-03 GB GB2205821.8A patent/GB2603711B/en active Active
-
2022
- 2022-04-27 US US17/660,882 patent/US20220252063A1/en active Pending