DE112013005039B4 - Optischer Sensor - Google Patents

Optischer Sensor Download PDF

Info

Publication number
DE112013005039B4
DE112013005039B4 DE112013005039.0T DE112013005039T DE112013005039B4 DE 112013005039 B4 DE112013005039 B4 DE 112013005039B4 DE 112013005039 T DE112013005039 T DE 112013005039T DE 112013005039 B4 DE112013005039 B4 DE 112013005039B4
Authority
DE
Germany
Prior art keywords
light
section
sensor
light receiving
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE112013005039.0T
Other languages
German (de)
English (en)
Other versions
DE112013005039T5 (de
Inventor
Makiko Sugiura
Takahiko Yoshida
Kiyoshi Otsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of DE112013005039T5 publication Critical patent/DE112013005039T5/de
Application granted granted Critical
Publication of DE112013005039B4 publication Critical patent/DE112013005039B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/06—Restricting the angle of incident light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0204—Compact construction
    • G01J1/0209—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0271—Housings; Attachments or accessories for photometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0437—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0462—Slit arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0488—Optical or mechanical part supplementary adjustable parts with spectral filtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4228—Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01W—METEOROLOGY
    • G01W1/00—Meteorology
    • G01W1/12—Sunshine duration recorders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01W—METEOROLOGY
    • G01W1/00—Meteorology
    • G01W1/14—Rainfall or precipitation gauges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/10—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/221—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F55/00—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/331—Coatings for devices having potential barriers for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/407—Optical elements or arrangements indirectly associated with the devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/413—Optical elements or arrangements directly associated or integrated with the devices, e.g. back reflectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60S—SERVICING, CLEANING, REPAIRING, SUPPORTING, LIFTING, OR MANOEUVRING OF VEHICLES, NOT OTHERWISE PROVIDED FOR
    • B60S1/00—Cleaning of vehicles
    • B60S1/02—Cleaning windscreens, windows or optical devices
    • B60S1/04—Wipers or the like, e.g. scrapers
    • B60S1/06—Wipers or the like, e.g. scrapers characterised by the drive
    • B60S1/08—Wipers or the like, e.g. scrapers characterised by the drive electrically driven
    • B60S1/0818—Wipers or the like, e.g. scrapers characterised by the drive electrically driven including control systems responsive to external conditions, e.g. by detection of moisture, dirt or the like
    • B60S1/0822—Wipers or the like, e.g. scrapers characterised by the drive electrically driven including control systems responsive to external conditions, e.g. by detection of moisture, dirt or the like characterized by the arrangement or type of detection means
    • B60S1/0833—Optical rain sensor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Environmental Sciences (AREA)
  • Ecology (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Atmospheric Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Hydrology & Water Resources (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Pathology (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Light Receiving Elements (AREA)
DE112013005039.0T 2012-09-07 2013-09-05 Optischer Sensor Expired - Fee Related DE112013005039B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012-197339 2012-09-07
JP2012197339A JP5907011B2 (ja) 2012-09-07 2012-09-07 光センサ
PCT/JP2013/005270 WO2014038206A1 (ja) 2012-09-07 2013-09-05 光センサ

Publications (2)

Publication Number Publication Date
DE112013005039T5 DE112013005039T5 (de) 2015-07-30
DE112013005039B4 true DE112013005039B4 (de) 2022-07-21

Family

ID=50236835

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112013005039.0T Expired - Fee Related DE112013005039B4 (de) 2012-09-07 2013-09-05 Optischer Sensor

Country Status (5)

Country Link
US (1) US9166081B2 (enExample)
JP (1) JP5907011B2 (enExample)
CN (1) CN104508438B (enExample)
DE (1) DE112013005039B4 (enExample)
WO (1) WO2014038206A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3211453A1 (en) * 2016-02-26 2017-08-30 ams AG Optical proximity sensor arrangement and method for producing an optical proximity sensor arrangement
US10718603B2 (en) * 2016-10-13 2020-07-21 Six Degrees Space Ltd Method and apparatus for indoor positioning
CN106686215B (zh) * 2016-12-06 2022-03-25 Oppo广东移动通信有限公司 传感器组件以及移动终端
TWI637502B (zh) * 2017-12-05 2018-10-01 義明科技股份有限公司 光學感測裝置以及光學感測模組
JP2024124181A (ja) * 2023-03-02 2024-09-12 ローム株式会社 光検出装置および光検出システム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006040790A1 (de) 2006-08-31 2008-03-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Reflexkoppler mit integriertem organischen Lichtemitter
JP2011203247A (ja) 2010-03-05 2011-10-13 Seiko Epson Corp 光学センサー及び電子機器
WO2012032753A1 (ja) 2010-09-10 2012-03-15 株式会社デンソー 光センサ

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06177416A (ja) * 1992-12-07 1994-06-24 Nippondenso Co Ltd 光センサー
DE4406398A1 (de) 1994-02-26 1995-08-31 Bosch Gmbh Robert Regensensor
US5428215A (en) * 1994-05-27 1995-06-27 Her Majesty The Queen In Right Of Canada, As Represented By Minister Of National Defence Of Her Majesty's Canadian Government Digital high angular resolution laser irradiation detector (HARLID)
DE19933642A1 (de) * 1999-07-17 2001-03-08 Bosch Gmbh Robert Lichtempfindliche Sensoreinheit, insbesondere zum automatischen Schalten von Beleuchtungseinrichtungen
JP2004198214A (ja) * 2002-12-18 2004-07-15 Denso Corp 雨滴および光検出装置
JP2005233728A (ja) * 2004-02-18 2005-09-02 Denso Corp 光センサ装置
JP4772585B2 (ja) 2006-05-10 2011-09-14 浜松ホトニクス株式会社 光検出器
JP5300344B2 (ja) * 2007-07-06 2013-09-25 キヤノン株式会社 光検出素子及び撮像素子、光検出方法及び撮像方法
JP4621270B2 (ja) 2007-07-13 2011-01-26 キヤノン株式会社 光学フィルタ
KR20100098658A (ko) * 2007-12-25 2010-09-08 세이코 인스트루 가부시키가이샤 광 검출 장치, 및 화상 표시 장치
KR101776955B1 (ko) * 2009-02-10 2017-09-08 소니 주식회사 고체 촬상 장치와 그 제조 방법, 및 전자 기기
JP4973692B2 (ja) * 2009-05-27 2012-07-11 株式会社デンソー 移動体用光センサ装置
JP5077780B2 (ja) * 2009-07-06 2012-11-21 株式会社デンソー 光検出装置
JP2011061133A (ja) * 2009-09-14 2011-03-24 Zycube:Kk 半導体イメージセンサとその製造法
US8492699B2 (en) * 2009-09-22 2013-07-23 Intersil Americas Inc. Photodetectors useful as ambient light sensors having an optical filter rejecting a portion of infrared light
JP5118715B2 (ja) * 2010-03-11 2013-01-16 株式会社東芝 固体撮像装置
EP2400559A1 (de) * 2010-06-22 2011-12-28 SMA Solar Technology AG Einstrahlungssensor für solare Lichtintensität
JP5375840B2 (ja) * 2011-01-06 2013-12-25 株式会社デンソー 光センサ
CN201804019U (zh) * 2010-09-24 2011-04-20 浙江美佳机电科技有限公司 太阳能风光雨传感器
JP2012222742A (ja) * 2011-04-13 2012-11-12 Sony Corp 撮像素子および撮像装置
JP5760811B2 (ja) * 2011-07-28 2015-08-12 ソニー株式会社 固体撮像素子および撮像システム
JP6029266B2 (ja) * 2011-08-09 2016-11-24 キヤノン株式会社 撮像装置、撮像システムおよび撮像装置の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006040790A1 (de) 2006-08-31 2008-03-27 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Reflexkoppler mit integriertem organischen Lichtemitter
JP2011203247A (ja) 2010-03-05 2011-10-13 Seiko Epson Corp 光学センサー及び電子機器
WO2012032753A1 (ja) 2010-09-10 2012-03-15 株式会社デンソー 光センサ

Also Published As

Publication number Publication date
CN104508438A (zh) 2015-04-08
DE112013005039T5 (de) 2015-07-30
US9166081B2 (en) 2015-10-20
JP5907011B2 (ja) 2016-04-20
WO2014038206A1 (ja) 2014-03-13
JP2014052302A (ja) 2014-03-20
CN104508438B (zh) 2016-07-13
US20150179830A1 (en) 2015-06-25

Similar Documents

Publication Publication Date Title
DE102006039071B4 (de) Optisches Filter und Verfahren zu seiner Herstellung
DE112013005039B4 (de) Optischer Sensor
DE112016000297B4 (de) Anzeigekörper und Artikel
DE3140217C2 (enExample)
DE69432364T2 (de) Pyroelektrischer Infrarotsensor
US10566365B2 (en) Image sensor
DE112012005324B4 (de) Integrierte Schaltung und Verfahren zum Detektieren eines Winkels von einfallendem Licht
DE102009021440B4 (de) Spektroskopiemodul und Verfahren zum Herstellen desselben
DE3220560C2 (enExample)
DE112017002541T5 (de) Festkörper-bildgebungseinrichtung und bildsensor
DE102009021437A1 (de) Spektroskopiemodul
DE3003467C2 (enExample)
DE112011101148T5 (de) Spektrometermodul
DE102009021438A1 (de) Spektroskopiemodul
DE102009021436A1 (de) Spektroskopiemodul
DE202019103346U1 (de) Beleuchtungsvorrichtung mit LED und Gitter
DE202014000488U1 (de) Berührungsempfindliches Bedienfeld
EP3204739B1 (de) Vorrichtung zur spektrometrischen erfassung von licht mit einer photodiode, die monolithisch in die schichtstruktur eines wellenlängenselektiven filters integriert ist
DE102015222961A1 (de) Infrarotsensor und Infrarotsensorfeld
DE102016208841B4 (de) Farbsensor mit winkelselektiven Strukturen
DE3441498C2 (enExample)
DE69123206T2 (de) Auflösungsgerät
EP2181313A2 (de) Sonnensensor zur erfassung der einfallsrichtung und der intensität von sonnenstrahlung
DE102018202777A1 (de) Farbsensor mit Mikrolinsen umfassenden winkelselektiven Strukturen
DE19518303C2 (de) Optische Linsen-/Detektoranordnung

Legal Events

Date Code Title Description
R409 Internal rectification of the legal status completed
R409 Internal rectification of the legal status completed
R012 Request for examination validly filed
R016 Response to examination communication
R079 Amendment of ipc main class

Free format text: PREVIOUS MAIN CLASS: G01J0001060000

Ipc: G01J0001040000

R018 Grant decision by examination section/examining division
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee