CN104508438B - 光传感器 - Google Patents

光传感器 Download PDF

Info

Publication number
CN104508438B
CN104508438B CN201380039851.0A CN201380039851A CN104508438B CN 104508438 B CN104508438 B CN 104508438B CN 201380039851 A CN201380039851 A CN 201380039851A CN 104508438 B CN104508438 B CN 104508438B
Authority
CN
China
Prior art keywords
light
incident
sensor
slit
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201380039851.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN104508438A (zh
Inventor
杉浦真纪子
吉田贵彦
大塚澄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of CN104508438A publication Critical patent/CN104508438A/zh
Application granted granted Critical
Publication of CN104508438B publication Critical patent/CN104508438B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0204—Compact construction
    • G01J1/0209—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0271—Housings; Attachments or accessories for photometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0437—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using masks, aperture plates, spatial light modulators, spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0462—Slit arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0488—Optical or mechanical part supplementary adjustable parts with spectral filtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/06—Restricting the angle of incident light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4228—Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01W—METEOROLOGY
    • G01W1/00—Meteorology
    • G01W1/12—Sunshine duration recorders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01W—METEOROLOGY
    • G01W1/00—Meteorology
    • G01W1/14—Rainfall or precipitation gauges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/10—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H10F30/221—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes the potential barrier being a PN homojunction
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F55/00—Radiation-sensitive semiconductor devices covered by groups H10F10/00, H10F19/00 or H10F30/00 being structurally associated with electric light sources and electrically or optically coupled thereto
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/331—Coatings for devices having potential barriers for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/407—Optical elements or arrangements indirectly associated with the devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/413—Optical elements or arrangements directly associated or integrated with the devices, e.g. back reflectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B60—VEHICLES IN GENERAL
    • B60S—SERVICING, CLEANING, REPAIRING, SUPPORTING, LIFTING, OR MANOEUVRING OF VEHICLES, NOT OTHERWISE PROVIDED FOR
    • B60S1/00—Cleaning of vehicles
    • B60S1/02—Cleaning windscreens, windows or optical devices
    • B60S1/04—Wipers or the like, e.g. scrapers
    • B60S1/06—Wipers or the like, e.g. scrapers characterised by the drive
    • B60S1/08—Wipers or the like, e.g. scrapers characterised by the drive electrically driven
    • B60S1/0818—Wipers or the like, e.g. scrapers characterised by the drive electrically driven including control systems responsive to external conditions, e.g. by detection of moisture, dirt or the like
    • B60S1/0822—Wipers or the like, e.g. scrapers characterised by the drive electrically driven including control systems responsive to external conditions, e.g. by detection of moisture, dirt or the like characterized by the arrangement or type of detection means
    • B60S1/0833—Optical rain sensor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental Sciences (AREA)
  • Ecology (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Atmospheric Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Light Receiving Elements (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Solid State Image Pick-Up Elements (AREA)
CN201380039851.0A 2012-09-07 2013-09-05 光传感器 Expired - Fee Related CN104508438B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012-197339 2012-09-07
JP2012197339A JP5907011B2 (ja) 2012-09-07 2012-09-07 光センサ
PCT/JP2013/005270 WO2014038206A1 (ja) 2012-09-07 2013-09-05 光センサ

Publications (2)

Publication Number Publication Date
CN104508438A CN104508438A (zh) 2015-04-08
CN104508438B true CN104508438B (zh) 2016-07-13

Family

ID=50236835

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380039851.0A Expired - Fee Related CN104508438B (zh) 2012-09-07 2013-09-05 光传感器

Country Status (5)

Country Link
US (1) US9166081B2 (enExample)
JP (1) JP5907011B2 (enExample)
CN (1) CN104508438B (enExample)
DE (1) DE112013005039B4 (enExample)
WO (1) WO2014038206A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3211453A1 (en) * 2016-02-26 2017-08-30 ams AG Optical proximity sensor arrangement and method for producing an optical proximity sensor arrangement
CN109964321A (zh) * 2016-10-13 2019-07-02 六度空间有限责任公司 用于室内定位的方法和设备
CN106686215B (zh) * 2016-12-06 2022-03-25 Oppo广东移动通信有限公司 传感器组件以及移动终端
TWI637502B (zh) * 2017-12-05 2018-10-01 義明科技股份有限公司 光學感測裝置以及光學感測模組
JP2024124181A (ja) * 2023-03-02 2024-09-12 ローム株式会社 光検出装置および光検出システム

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5428215A (en) * 1994-05-27 1995-06-27 Her Majesty The Queen In Right Of Canada, As Represented By Minister Of National Defence Of Her Majesty's Canadian Government Digital high angular resolution laser irradiation detector (HARLID)
JP2004198214A (ja) * 2002-12-18 2004-07-15 Denso Corp 雨滴および光検出装置
CN101911315A (zh) * 2007-12-25 2010-12-08 精工电子有限公司 光检测装置以及图像显示装置
CN101943601A (zh) * 2009-07-06 2011-01-12 株式会社电装 光检测装置
CN201804019U (zh) * 2010-09-24 2011-04-20 浙江美佳机电科技有限公司 太阳能风光雨传感器
CN102095495A (zh) * 2009-09-22 2011-06-15 英特赛尔美国股份有限公司 用作环境光传感器的光电检测器
US20110220976A1 (en) * 2010-03-11 2011-09-15 Kabushiki Kaisha Toshiba Solid-state imaging device
WO2012032753A1 (ja) * 2010-09-10 2012-03-15 株式会社デンソー 光センサ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06177416A (ja) * 1992-12-07 1994-06-24 Nippondenso Co Ltd 光センサー
DE4406398A1 (de) 1994-02-26 1995-08-31 Bosch Gmbh Robert Regensensor
DE19933642A1 (de) * 1999-07-17 2001-03-08 Bosch Gmbh Robert Lichtempfindliche Sensoreinheit, insbesondere zum automatischen Schalten von Beleuchtungseinrichtungen
JP2005233728A (ja) * 2004-02-18 2005-09-02 Denso Corp 光センサ装置
JP4772585B2 (ja) 2006-05-10 2011-09-14 浜松ホトニクス株式会社 光検出器
DE102006040790B4 (de) 2006-08-31 2012-04-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Reflexkoppler mit integriertem organischen Lichtemitter sowie Verwendung eines solchen Reflexkopplers
JP5300344B2 (ja) * 2007-07-06 2013-09-25 キヤノン株式会社 光検出素子及び撮像素子、光検出方法及び撮像方法
JP4621270B2 (ja) 2007-07-13 2011-01-26 キヤノン株式会社 光学フィルタ
KR101776955B1 (ko) * 2009-02-10 2017-09-08 소니 주식회사 고체 촬상 장치와 그 제조 방법, 및 전자 기기
JP4973692B2 (ja) * 2009-05-27 2012-07-11 株式会社デンソー 移動体用光センサ装置
JP2011061133A (ja) * 2009-09-14 2011-03-24 Zycube:Kk 半導体イメージセンサとその製造法
JP5998426B2 (ja) 2010-03-05 2016-09-28 セイコーエプソン株式会社 光学センサー及び電子機器
EP2400559A1 (de) * 2010-06-22 2011-12-28 SMA Solar Technology AG Einstrahlungssensor für solare Lichtintensität
JP5375840B2 (ja) * 2011-01-06 2013-12-25 株式会社デンソー 光センサ
JP2012222742A (ja) * 2011-04-13 2012-11-12 Sony Corp 撮像素子および撮像装置
JP5760811B2 (ja) * 2011-07-28 2015-08-12 ソニー株式会社 固体撮像素子および撮像システム
JP6029266B2 (ja) * 2011-08-09 2016-11-24 キヤノン株式会社 撮像装置、撮像システムおよび撮像装置の製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5428215A (en) * 1994-05-27 1995-06-27 Her Majesty The Queen In Right Of Canada, As Represented By Minister Of National Defence Of Her Majesty's Canadian Government Digital high angular resolution laser irradiation detector (HARLID)
JP2004198214A (ja) * 2002-12-18 2004-07-15 Denso Corp 雨滴および光検出装置
CN101911315A (zh) * 2007-12-25 2010-12-08 精工电子有限公司 光检测装置以及图像显示装置
CN101943601A (zh) * 2009-07-06 2011-01-12 株式会社电装 光检测装置
CN102095495A (zh) * 2009-09-22 2011-06-15 英特赛尔美国股份有限公司 用作环境光传感器的光电检测器
US20110220976A1 (en) * 2010-03-11 2011-09-15 Kabushiki Kaisha Toshiba Solid-state imaging device
WO2012032753A1 (ja) * 2010-09-10 2012-03-15 株式会社デンソー 光センサ
CN201804019U (zh) * 2010-09-24 2011-04-20 浙江美佳机电科技有限公司 太阳能风光雨传感器

Also Published As

Publication number Publication date
DE112013005039T5 (de) 2015-07-30
JP2014052302A (ja) 2014-03-20
US20150179830A1 (en) 2015-06-25
JP5907011B2 (ja) 2016-04-20
CN104508438A (zh) 2015-04-08
US9166081B2 (en) 2015-10-20
WO2014038206A1 (ja) 2014-03-13
DE112013005039B4 (de) 2022-07-21

Similar Documents

Publication Publication Date Title
US20230319253A1 (en) Optical system for collecting distance information within a field
CN104508438B (zh) 光传感器
CN103196562B (zh) 包括集成至少一个衍射光栅的封装的红外检测器
TW201907140A (zh) 具有亮度增強之光學成像傳輸器
US20090244711A1 (en) Imaging filter
JP2007501391A5 (enExample)
JP2009290414A (ja) 撮像装置
CN112525823A (zh) 光学感测模块
CN108427908B (zh) 指纹辨识系统及感测方法及制造方法
US20120074301A1 (en) Method and apparatus for device with minimized optical cross-talk
JP2019534476A (ja) 光学窓カモフラージュ装置
JP2012137646A5 (enExample)
CN107076665A (zh) 包括光栅结构的光传感器模块和光谱仪
CN109923445B (zh) 具有互补角阻挡区域的光学滤光器
TW201224408A (en) Optical device and electronic apparatus
JP2021005354A (ja) 光学指紋センサー
CN211787124U (zh) 生物识别成像装置和电子装置
KR101710534B1 (ko) 광학식 센서를 위한 광학계 및 이를 포함하는 센서
JP2014052302A5 (enExample)
JP4359659B1 (ja) 受光素子用フィルタおよび受光装置
CN100536155C (zh) Cmos图像传感器及其制造方法
EP3605042B1 (en) Filter assembly, detector, and method of manufacture of a filter assembly
CN108072446B (zh) 光谱仪和用于调整滤光器阵列的方法
JP6273996B2 (ja) ポリクロメータ及びこれを備えた分析装置
CN114008688A (zh) 生物识别成像装置和电子装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160713