DE112013002556B4 - Spektralsensor - Google Patents

Spektralsensor Download PDF

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Publication number
DE112013002556B4
DE112013002556B4 DE112013002556.6T DE112013002556T DE112013002556B4 DE 112013002556 B4 DE112013002556 B4 DE 112013002556B4 DE 112013002556 T DE112013002556 T DE 112013002556T DE 112013002556 B4 DE112013002556 B4 DE 112013002556B4
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DE
Germany
Prior art keywords
light
layer
receiving surface
filter unit
interference filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
DE112013002556.6T
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German (de)
English (en)
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DE112013002556T5 (de
Inventor
c/o Hamamatsu Photonics K.K. Shibayama Katsumi
c/o Hamamatsu Photonics K.K. Kasahara Takashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
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Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Publication of DE112013002556T5 publication Critical patent/DE112013002556T5/de
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0256—Compact construction
    • G01J3/0259—Monolithic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0262—Constructional arrangements for removing stray light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE112013002556.6T 2012-05-18 2013-05-08 Spektralsensor Active DE112013002556B4 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2012114341 2012-05-18
JPJP2012114341 2012-05-18
JP2012114341A JP5988690B2 (ja) 2012-05-18 2012-05-18 分光センサ
PCT/JP2013/062915 WO2013172230A1 (ja) 2012-05-18 2013-05-08 分光センサ

Publications (2)

Publication Number Publication Date
DE112013002556T5 DE112013002556T5 (de) 2015-01-29
DE112013002556B4 true DE112013002556B4 (de) 2023-03-30

Family

ID=49583637

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112013002556.6T Active DE112013002556B4 (de) 2012-05-18 2013-05-08 Spektralsensor

Country Status (4)

Country Link
US (1) US9846076B2 (https=)
JP (1) JP5988690B2 (https=)
DE (1) DE112013002556B4 (https=)
WO (1) WO2013172230A1 (https=)

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WO2015116756A1 (en) 2014-01-31 2015-08-06 Jds Uniphase Corporation An optical filter and spectrometer
US10048127B2 (en) 2015-08-05 2018-08-14 Viavi Solutions Inc. Optical filter and spectrometer
EP3324161B1 (de) * 2016-11-18 2020-06-17 Espros Photonics AG Spektrometer und verfahren zur justierung eines filterarrays
DE102016223917B4 (de) * 2016-12-01 2019-12-05 Robert Bosch Gmbh Interferometerbauelement und Verfahren zum Herstellen eines Interferometerbauelements
DE102017201129A1 (de) * 2017-01-25 2018-07-26 Robert Bosch Gmbh Bauelement zum Begrenzen eines Einfallswinkels von Licht, Mikrospektrometer und Verfahren zum Herstellen des Bauelements
DE102017205212A1 (de) 2017-03-28 2018-10-04 Carl Zeiss Smt Gmbh Verfahren zum Detektieren von Partikeln an der Oberfläche eines Objekts, Wafer und Maskenblank
US10699691B1 (en) * 2017-06-29 2020-06-30 Amazon Technologies, Inc. Active noise cancellation for bone conduction speaker of a head-mounted wearable device
US10817700B2 (en) 2017-12-18 2020-10-27 China Wafer Level Csp Co., Ltd. Optical fingerprint recognition chip package and packaging method
DE102018202777A1 (de) * 2018-02-23 2019-08-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Farbsensor mit Mikrolinsen umfassenden winkelselektiven Strukturen
JP2019174151A (ja) * 2018-03-27 2019-10-10 株式会社島津製作所 分光器
US10770489B2 (en) 2018-03-30 2020-09-08 Vishay Intertechnology, Inc. Optoelectronic device arranged as a multi-spectral light sensor having a photodiode array with aligned light blocking layers and N-well regions
USD907085S1 (en) * 2018-05-01 2021-01-05 Hamamatsu Photonics K.K. Laser beam reflector
JP1680755S (https=) 2018-05-01 2021-03-08
JP1625495S (https=) 2018-05-01 2019-03-18
JP1680386S (https=) * 2018-05-01 2021-03-01
USD903614S1 (en) 2018-05-01 2020-12-01 Hamamatsu Photonics K.K. Laser beam reflector
JP1680385S (https=) * 2018-05-01 2021-03-01
JP1680387S (https=) * 2018-05-01 2021-03-01
JP1625135S (https=) * 2018-05-01 2019-03-18
JP1680388S (https=) * 2018-05-01 2021-03-01
JP1680507S (https=) 2018-05-01 2021-03-08
JP1639597S (https=) * 2018-05-01 2019-08-19

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Publication number Priority date Publication date Assignee Title
US5784507A (en) 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
JPH06129908A (ja) 1992-10-15 1994-05-13 Hamamatsu Photonics Kk 分光イメージングセンサ
JP2011203247A (ja) 2010-03-05 2011-10-13 Seiko Epson Corp 光学センサー及び電子機器
DE102010031206A1 (de) 2010-07-09 2012-01-12 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Abstimmbares Fabry-Pérot-Filter und Verfahren zu seiner Herstellung

Also Published As

Publication number Publication date
CN104303032A (zh) 2015-01-21
DE112013002556T5 (de) 2015-01-29
US20150153224A1 (en) 2015-06-04
JP5988690B2 (ja) 2016-09-07
JP2013242179A (ja) 2013-12-05
US9846076B2 (en) 2017-12-19
WO2013172230A1 (ja) 2013-11-21

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