DE112009001233T5 - Begasungssysteme und Verfahren zur Herstellung von blasenfreien Lösungen von Gas in Flüssigkeit - Google Patents
Begasungssysteme und Verfahren zur Herstellung von blasenfreien Lösungen von Gas in Flüssigkeit Download PDFInfo
- Publication number
- DE112009001233T5 DE112009001233T5 DE112009001233T DE112009001233T DE112009001233T5 DE 112009001233 T5 DE112009001233 T5 DE 112009001233T5 DE 112009001233 T DE112009001233 T DE 112009001233T DE 112009001233 T DE112009001233 T DE 112009001233T DE 112009001233 T5 DE112009001233 T5 DE 112009001233T5
- Authority
- DE
- Germany
- Prior art keywords
- gas
- liquid
- contactor
- contact side
- feed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/2319—Methods of introducing gases into liquid media
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/231—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids by bubbling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/29—Mixing systems, i.e. flow charts or diagrams
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/21—Measuring
- B01F35/213—Measuring of the properties of the mixtures, e.g. temperature, density or colour
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/20—Mixing gases with liquids
- B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
- B01F23/231—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids by bubbling
- B01F23/23105—Arrangement or manipulation of the gas bubbling devices
- B01F23/2312—Diffusers
- B01F23/23124—Diffusers consisting of flexible porous or perforated material, e.g. fabric
- B01F23/231244—Dissolving, hollow fiber membranes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Degasification And Air Bubble Elimination (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Accessories For Mixers (AREA)
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US5422308P | 2008-05-19 | 2008-05-19 | |
| US61/054,223 | 2008-05-19 | ||
| US8253508P | 2008-07-22 | 2008-07-22 | |
| US61/082,535 | 2008-07-22 | ||
| US9523008P | 2008-09-08 | 2008-09-08 | |
| US61/095,230 | 2008-09-08 | ||
| US10150108P | 2008-09-30 | 2008-09-30 | |
| US61/101,501 | 2008-09-30 | ||
| PCT/US2009/044343 WO2009143056A1 (en) | 2008-05-19 | 2009-05-18 | Gasification systems and methods for making bubble free solutions of gas in liquid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE112009001233T5 true DE112009001233T5 (de) | 2011-07-21 |
Family
ID=41340494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112009001233T Withdrawn DE112009001233T5 (de) | 2008-05-19 | 2009-05-18 | Begasungssysteme und Verfahren zur Herstellung von blasenfreien Lösungen von Gas in Flüssigkeit |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US8844909B2 (https=) |
| JP (1) | JP2011520609A (https=) |
| KR (1) | KR20110008319A (https=) |
| CN (2) | CN104722239A (https=) |
| DE (1) | DE112009001233T5 (https=) |
| TW (1) | TW201004707A (https=) |
| WO (1) | WO2009143056A1 (https=) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010234298A (ja) * | 2009-03-31 | 2010-10-21 | Kurita Water Ind Ltd | ガス溶解水供給装置及びガス溶解水の製造方法 |
| US8438969B2 (en) * | 2010-05-06 | 2013-05-14 | Dr Pepper/Seven Up, Inc. | Apparatus and method for dissolving gases in a beverage |
| US9403102B2 (en) * | 2012-02-13 | 2016-08-02 | United Technologies Corporation | Heat exchange system configured with a membrane contactor |
| JP5914037B2 (ja) * | 2012-02-23 | 2016-05-11 | 東京エレクトロン株式会社 | 冷却システム、冷却システムを備える基板処理装置及び冷却方法 |
| CN102692926B (zh) * | 2012-06-05 | 2014-10-22 | 哈尔滨工程大学 | 基于tms320c6713的船舶航向模糊pid融合控制器及控制方法 |
| GB2506689A (en) * | 2012-10-08 | 2014-04-09 | Odour Services Internat Ltd | Air pollution control apparatus and method of use |
| EP2961269B1 (en) * | 2013-02-28 | 2021-09-15 | Hemanext Inc. | Gas depletion device for blood products |
| WO2015175790A1 (en) * | 2014-05-15 | 2015-11-19 | Tokyo Electron Limited | Method and apparatus for increased recirculation and filtration in a photoresist dispense system |
| AU2015100137A4 (en) * | 2015-01-12 | 2015-03-05 | Macau University Of Science And Technology | Optimization of Start-up Transient Processes for Dual-Armed Cluster Tools with Wafer Revisiting |
| JP6993626B2 (ja) * | 2015-04-10 | 2022-01-13 | タカラベルモント株式会社 | 炭酸水生成装置 |
| US10792623B2 (en) | 2015-04-13 | 2020-10-06 | Dic Corporation | Device for adjusting specific resistance value and method for adjusting specific resistance value |
| FR3036629B1 (fr) * | 2015-05-29 | 2019-06-21 | Nicolas POURTAUD | Dispositif de regulation de la concentration d'un gaz dans un liquide |
| US10732099B2 (en) * | 2016-01-06 | 2020-08-04 | Tokushima University | Gas analysis device and gas analysis method using laser beam |
| US10228355B2 (en) | 2016-05-06 | 2019-03-12 | Board Of Regents, The University Of Texas System | Volatile eluent preparation |
| CN106474768B (zh) * | 2016-09-12 | 2019-01-29 | 华中科技大学 | 一种高精度耐腐蚀的自动配液换液装置 |
| WO2018085892A1 (en) * | 2016-11-11 | 2018-05-17 | PTI Pacific Pty Ltd | Modular system for gassing and degassing liquids |
| KR102447374B1 (ko) * | 2016-11-11 | 2022-09-23 | 엠케이에스 인스트루먼츠, 인코포레이티드 | 암모니아 가스가 용해되어 있는 탈이온수를 포함하는 전도성 액체를 생성하기 위한 시스템들 및 방법 |
| WO2018183477A1 (en) * | 2017-03-28 | 2018-10-04 | Flow Control Llc. | Gas/liquid infusion system with intelligent level management and adjustable absorption output |
| CN108854609B (zh) * | 2017-05-10 | 2025-08-12 | 青岛经济技术开发区海尔热水器有限公司 | 一种微气泡水生产装置 |
| JP7052423B2 (ja) * | 2018-03-02 | 2022-04-12 | 栗田工業株式会社 | オゾン溶解水の製造装置及びこれを用いたオゾン溶解水の製造方法 |
| WO2020210243A1 (en) * | 2019-04-08 | 2020-10-15 | Mks Instruments, Inc. | Systems and methods for generating a dissolved ammonia solution with reduced dissolved carrier gas and oxygen content |
| JP7240260B2 (ja) * | 2019-06-04 | 2023-03-15 | 株式会社荏原製作所 | ガス溶解液供給装置およびガス溶解液供給方法 |
| CN110773012A (zh) * | 2019-12-02 | 2020-02-11 | 杭州老板电器股份有限公司 | 微纳米气泡制备装置及其制备方法 |
| KR20240124920A (ko) * | 2021-12-14 | 2024-08-19 | 엠케이에스 인스트루먼츠 인코포레이티드 | 용해된 암모니아 전달 시스템 및 사용 방법 |
| CN118893499B (zh) * | 2024-09-12 | 2025-11-14 | 福建理工大学 | 一种基于pid控制气体辅助抛光系统的设计方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6328905B1 (en) | 1999-08-12 | 2001-12-11 | Advanced Micro Devices, Inc. | Residue removal by CO2 water rinse in conjunction with post metal etch plasma strip |
| US6805731B2 (en) | 1999-01-29 | 2004-10-19 | Mykrolis Corporation | Hollow fiber membrane contactor |
| WO2005072487A2 (en) | 2004-01-27 | 2005-08-11 | Entegris, Inc. | Process for removing microbubbles from a liquid |
| WO2006007376A2 (en) | 2004-06-16 | 2006-01-19 | Advanced Technology Materials, Inc. | Liquid delivery system |
| US7264006B2 (en) | 2000-09-01 | 2007-09-04 | Mks Instruments, Inc. | Ozonated water flow and concentration control apparatus and method |
| US7273549B2 (en) | 2004-01-23 | 2007-09-25 | Geoscience Support Services Inc. | Membrane contactor apparatus including a module having hollow fiber membranes |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3751879A (en) * | 1971-04-26 | 1973-08-14 | Instrumentation Specialties Co | Apparatus for reducing the dissolved gas concentration in a liquid |
| DE68926421T2 (de) * | 1988-08-20 | 1996-09-12 | Nitto Denko Corp | Verfahren zur Entfernung von gelösten Gasen aus einer Flüssigkeit |
| US5565149A (en) | 1995-03-15 | 1996-10-15 | Permea, Inc. | Control of dissolved gases in liquids |
| US5766479A (en) * | 1995-08-07 | 1998-06-16 | Zenon Environmental Inc. | Production of high purity water using reverse osmosis |
| JPH10324502A (ja) * | 1997-05-21 | 1998-12-08 | Dainippon Ink & Chem Inc | 超純水の炭酸ガス付加装置及び付加方法 |
| US6982006B1 (en) * | 1999-10-19 | 2006-01-03 | Boyers David G | Method and apparatus for treating a substrate with an ozone-solvent solution |
| US6884359B2 (en) * | 2000-09-27 | 2005-04-26 | Dainippon Ink And Chemicals, Inc. | Apparatus and method for controlling resistivity of ultra pure water |
| JP2002233878A (ja) | 2001-02-06 | 2002-08-20 | Roki Techno Co Ltd | 給水配管の殺菌洗浄方法 |
| CN100469425C (zh) | 2001-08-28 | 2009-03-18 | 三菱丽阳株式会社 | 碳酸泉和碳酸水的制造装置及制造方法、及其应用的气体浓度控制方法和膜组件 |
| JP2003154242A (ja) * | 2001-11-26 | 2003-05-27 | Texas Instr Japan Ltd | 流体混合装置 |
| DE60316264T2 (de) * | 2002-03-19 | 2008-05-29 | Entegris, Inc., Chaska | Hohlfasermembrankontaktvorrichtung und -verfahren |
| JP4319445B2 (ja) * | 2002-06-20 | 2009-08-26 | 大日本スクリーン製造株式会社 | 基板処理装置 |
| JP2004130205A (ja) | 2002-10-10 | 2004-04-30 | Fuji Electric Systems Co Ltd | オゾン含有水を用いたろ過膜の逆洗方法および逆洗装置 |
| EP1615713A4 (en) | 2003-04-22 | 2006-11-02 | Entegris Inc | ACCORDION CONSTRUCTION FOR PASSING THROUGH A GASEOUS TRANSFER MEMBRANE |
| JP4330959B2 (ja) * | 2003-09-05 | 2009-09-16 | 株式会社東芝 | 半導体基板の洗浄方法および洗浄装置、半導体基板、ならびに半導体装置 |
| JP4470101B2 (ja) | 2004-03-24 | 2010-06-02 | 栗田工業株式会社 | 窒素溶解超純水の製造方法 |
| CN101484861B (zh) * | 2006-05-05 | 2013-11-06 | 普拉斯科能源Ip控股公司毕尔巴鄂-沙夫豪森分公司 | 气体均化系统 |
| CN101522561A (zh) * | 2006-05-05 | 2009-09-02 | 普拉斯科能源Ip控股公司毕尔巴鄂-沙夫豪森分公司 | 使用等离子体炬热的气体重整系统 |
| JP2007319843A (ja) | 2006-06-05 | 2007-12-13 | Kurita Water Ind Ltd | 気体溶解モジュール |
| US7641795B2 (en) * | 2006-06-05 | 2010-01-05 | Celgard Llc | Membrane contactor |
| KR20090034344A (ko) * | 2006-07-21 | 2009-04-07 | 엔테그리스, 아이엔씨. | 침지액을 조절하기 위한 장치 및 방법 |
| JP4931201B2 (ja) | 2006-10-13 | 2012-05-16 | 独立行政法人産業技術総合研究所 | 極微小気泡を含む水の製造方法および極微小気泡を含む水 |
| EP2104648B1 (en) * | 2006-10-17 | 2013-04-17 | MKS Instruments, Inc. | System and method for carbonation of deionized water |
| JP2008155186A (ja) * | 2006-12-26 | 2008-07-10 | Nomura Micro Sci Co Ltd | オゾン水の製造方法及び製造装置 |
-
2009
- 2009-05-18 JP JP2011510619A patent/JP2011520609A/ja active Pending
- 2009-05-18 DE DE112009001233T patent/DE112009001233T5/de not_active Withdrawn
- 2009-05-18 TW TW98116469A patent/TW201004707A/zh unknown
- 2009-05-18 US US12/993,791 patent/US8844909B2/en not_active Expired - Fee Related
- 2009-05-18 WO PCT/US2009/044343 patent/WO2009143056A1/en not_active Ceased
- 2009-05-18 KR KR1020107027647A patent/KR20110008319A/ko not_active Ceased
- 2009-05-18 CN CN201510020227.7A patent/CN104722239A/zh active Pending
- 2009-05-18 CN CN200980118387.8A patent/CN102036742B/zh not_active Expired - Fee Related
-
2014
- 2014-08-19 US US14/462,950 patent/US20140357734A1/en not_active Abandoned
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6805731B2 (en) | 1999-01-29 | 2004-10-19 | Mykrolis Corporation | Hollow fiber membrane contactor |
| US6328905B1 (en) | 1999-08-12 | 2001-12-11 | Advanced Micro Devices, Inc. | Residue removal by CO2 water rinse in conjunction with post metal etch plasma strip |
| US7264006B2 (en) | 2000-09-01 | 2007-09-04 | Mks Instruments, Inc. | Ozonated water flow and concentration control apparatus and method |
| US7273549B2 (en) | 2004-01-23 | 2007-09-25 | Geoscience Support Services Inc. | Membrane contactor apparatus including a module having hollow fiber membranes |
| WO2005072487A2 (en) | 2004-01-27 | 2005-08-11 | Entegris, Inc. | Process for removing microbubbles from a liquid |
| WO2006007376A2 (en) | 2004-06-16 | 2006-01-19 | Advanced Technology Materials, Inc. | Liquid delivery system |
Non-Patent Citations (1)
| Title |
|---|
| M. Meyer, Pflügers Archive European Journal of Physiology, Seiten 161-165, Bd. 375, Juli 1978 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20140357734A1 (en) | 2014-12-04 |
| US8844909B2 (en) | 2014-09-30 |
| WO2009143056A1 (en) | 2009-11-26 |
| JP2011520609A (ja) | 2011-07-21 |
| TW201004707A (en) | 2010-02-01 |
| KR20110008319A (ko) | 2011-01-26 |
| CN104722239A (zh) | 2015-06-24 |
| US20110180148A1 (en) | 2011-07-28 |
| CN102036742B (zh) | 2015-02-11 |
| CN102036742A (zh) | 2011-04-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |