DE1096539B - Ionen-Vakuumpumpe mit zerstaeubender Kathode - Google Patents
Ionen-Vakuumpumpe mit zerstaeubender KathodeInfo
- Publication number
- DE1096539B DE1096539B DEV16934A DEV0016934A DE1096539B DE 1096539 B DE1096539 B DE 1096539B DE V16934 A DEV16934 A DE V16934A DE V0016934 A DEV0016934 A DE V0016934A DE 1096539 B DE1096539 B DE 1096539B
- Authority
- DE
- Germany
- Prior art keywords
- pump
- plates
- cathode
- magnetic field
- permanent magnets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 7
- 238000005086 pumping Methods 0.000 claims description 7
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 238000003466 welding Methods 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- 229910000831 Steel Inorganic materials 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 4
- 239000001307 helium Substances 0.000 claims description 4
- 229910052734 helium Inorganic materials 0.000 claims description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 4
- 239000010959 steel Substances 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 238000005452 bending Methods 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 230000000712 assembly Effects 0.000 claims 2
- 238000000429 assembly Methods 0.000 claims 2
- 101150090724 3 gene Proteins 0.000 claims 1
- NPXOKRUENSOPAO-UHFFFAOYSA-N Raney nickel Chemical compound [Al].[Ni] NPXOKRUENSOPAO-UHFFFAOYSA-N 0.000 claims 1
- 230000006790 cellular biosynthetic process Effects 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000000889 atomisation Methods 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
- Particle Accelerators (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US752591A US2983433A (en) | 1958-08-01 | 1958-08-01 | Getter ion vacuum pump apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1096539B true DE1096539B (de) | 1961-01-05 |
Family
ID=25026948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEV16934A Pending DE1096539B (de) | 1958-08-01 | 1959-07-20 | Ionen-Vakuumpumpe mit zerstaeubender Kathode |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US2983433A (enrdf_load_stackoverflow) |
| CH (1) | CH382364A (enrdf_load_stackoverflow) |
| DE (1) | DE1096539B (enrdf_load_stackoverflow) |
| FR (1) | FR1230921A (enrdf_load_stackoverflow) |
| GB (2) | GB910608A (enrdf_load_stackoverflow) |
| NL (2) | NL111716C (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1194093B (de) | 1960-03-24 | 1965-06-03 | Varian Associates | Mit Kathodenzerstaeubung arbeitende Ionen-Vakuumpumpe |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3117247A (en) * | 1961-05-29 | 1964-01-07 | Varian Associates | Vacuum pump |
| US3216652A (en) * | 1962-09-10 | 1965-11-09 | Hughes Aircraft Co | Ionic vacuum pump |
| US3228589A (en) * | 1963-10-16 | 1966-01-11 | Gen Electric | Ion pump having encapsulated internal magnet assemblies |
| US3236442A (en) * | 1964-01-20 | 1966-02-22 | Morris Associates | Ionic vacuum pump |
| DE1302292B (enrdf_load_stackoverflow) * | 1964-03-10 | Varian Associates | ||
| US3376455A (en) * | 1966-02-28 | 1968-04-02 | Varian Associates | Ionic vacuum pump having multiple externally mounted magnetic circuits |
| WO1996018204A1 (en) * | 1994-12-05 | 1996-06-13 | Color Planar Displays, Inc. | Support structure for flat panel displays |
| US5655886A (en) * | 1995-06-06 | 1997-08-12 | Color Planar Displays, Inc. | Vacuum maintenance device for high vacuum chambers |
| US6616417B2 (en) * | 2000-03-13 | 2003-09-09 | Ulvac, Inc. | Spatter ion pump |
| US10665437B2 (en) | 2015-02-10 | 2020-05-26 | Hamilton Sundstrand Corporation | System and method for enhanced ion pump lifespan |
| US10460917B2 (en) * | 2016-05-26 | 2019-10-29 | AOSense, Inc. | Miniature ion pump |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2636664A (en) * | 1949-01-28 | 1953-04-28 | Hertzler Elmer Afton | High vacuum pumping method, apparatus, and techniques |
| US2726805A (en) * | 1953-01-29 | 1955-12-13 | Ernest O Lawrence | Ion pump |
-
0
- NL NL302901D patent/NL302901A/xx unknown
- GB GB910607D patent/GB910607A/en active Active
- NL NL111716D patent/NL111716C/xx active
-
1958
- 1958-08-01 US US752591A patent/US2983433A/en not_active Expired - Lifetime
-
1959
- 1959-07-20 DE DEV16934A patent/DE1096539B/de active Pending
- 1959-07-22 FR FR800820A patent/FR1230921A/fr not_active Expired
- 1959-07-23 GB GB3148/61A patent/GB910608A/en not_active Expired
- 1959-07-24 CH CH7619059A patent/CH382364A/de unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1194093B (de) | 1960-03-24 | 1965-06-03 | Varian Associates | Mit Kathodenzerstaeubung arbeitende Ionen-Vakuumpumpe |
Also Published As
| Publication number | Publication date |
|---|---|
| GB910607A (enrdf_load_stackoverflow) | |
| US2983433A (en) | 1961-05-09 |
| GB910608A (en) | 1962-11-14 |
| NL111716C (enrdf_load_stackoverflow) | |
| NL302901A (enrdf_load_stackoverflow) | |
| CH382364A (de) | 1964-09-30 |
| FR1230921A (fr) | 1960-09-21 |
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