GB910608A - Sputter ion vacuum pump apparatus - Google Patents

Sputter ion vacuum pump apparatus

Info

Publication number
GB910608A
GB910608A GB3148/61A GB314861A GB910608A GB 910608 A GB910608 A GB 910608A GB 3148/61 A GB3148/61 A GB 3148/61A GB 314861 A GB314861 A GB 314861A GB 910608 A GB910608 A GB 910608A
Authority
GB
United Kingdom
Prior art keywords
cathode plates
vacuum pump
anode
canister
pump apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3148/61A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB910608A publication Critical patent/GB910608A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Particle Accelerators (AREA)
GB3148/61A 1958-08-01 1959-07-23 Sputter ion vacuum pump apparatus Expired GB910608A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US752591A US2983433A (en) 1958-08-01 1958-08-01 Getter ion vacuum pump apparatus

Publications (1)

Publication Number Publication Date
GB910608A true GB910608A (en) 1962-11-14

Family

ID=25026948

Family Applications (2)

Application Number Title Priority Date Filing Date
GB910607D Active GB910607A (enrdf_load_stackoverflow) 1958-08-01
GB3148/61A Expired GB910608A (en) 1958-08-01 1959-07-23 Sputter ion vacuum pump apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB910607D Active GB910607A (enrdf_load_stackoverflow) 1958-08-01

Country Status (6)

Country Link
US (1) US2983433A (enrdf_load_stackoverflow)
CH (1) CH382364A (enrdf_load_stackoverflow)
DE (1) DE1096539B (enrdf_load_stackoverflow)
FR (1) FR1230921A (enrdf_load_stackoverflow)
GB (2) GB910608A (enrdf_load_stackoverflow)
NL (2) NL302901A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125283A (en) 1960-03-24 1964-03-17 Vacuum pump
US3117247A (en) * 1961-05-29 1964-01-07 Varian Associates Vacuum pump
US3216652A (en) * 1962-09-10 1965-11-09 Hughes Aircraft Co Ionic vacuum pump
US3228589A (en) * 1963-10-16 1966-01-11 Gen Electric Ion pump having encapsulated internal magnet assemblies
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump
DE1302292B (enrdf_load_stackoverflow) * 1964-03-10 Varian Associates
US3376455A (en) * 1966-02-28 1968-04-02 Varian Associates Ionic vacuum pump having multiple externally mounted magnetic circuits
WO1996018204A1 (en) * 1994-12-05 1996-06-13 Color Planar Displays, Inc. Support structure for flat panel displays
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
CN1366706A (zh) * 2000-03-13 2002-08-28 爱发科股份有限公司 离子溅射泵
US10665437B2 (en) 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2636664A (en) * 1949-01-28 1953-04-28 Hertzler Elmer Afton High vacuum pumping method, apparatus, and techniques
US2726805A (en) * 1953-01-29 1955-12-13 Ernest O Lawrence Ion pump

Also Published As

Publication number Publication date
FR1230921A (fr) 1960-09-21
GB910607A (enrdf_load_stackoverflow)
DE1096539B (de) 1961-01-05
NL302901A (enrdf_load_stackoverflow)
NL111716C (enrdf_load_stackoverflow)
US2983433A (en) 1961-05-09
CH382364A (de) 1964-09-30

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