FR1230921A - Pompe à vide ionique à crépitement - Google Patents

Pompe à vide ionique à crépitement

Info

Publication number
FR1230921A
FR1230921A FR800820A FR800820A FR1230921A FR 1230921 A FR1230921 A FR 1230921A FR 800820 A FR800820 A FR 800820A FR 800820 A FR800820 A FR 800820A FR 1230921 A FR1230921 A FR 1230921A
Authority
FR
France
Prior art keywords
crackle
vacuum pump
ionic vacuum
ionic
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR800820A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Application granted granted Critical
Publication of FR1230921A publication Critical patent/FR1230921A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
FR800820A 1958-08-01 1959-07-22 Pompe à vide ionique à crépitement Expired FR1230921A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US752591A US2983433A (en) 1958-08-01 1958-08-01 Getter ion vacuum pump apparatus

Publications (1)

Publication Number Publication Date
FR1230921A true FR1230921A (fr) 1960-09-21

Family

ID=25026948

Family Applications (1)

Application Number Title Priority Date Filing Date
FR800820A Expired FR1230921A (fr) 1958-08-01 1959-07-22 Pompe à vide ionique à crépitement

Country Status (6)

Country Link
US (1) US2983433A (enrdf_load_stackoverflow)
CH (1) CH382364A (enrdf_load_stackoverflow)
DE (1) DE1096539B (enrdf_load_stackoverflow)
FR (1) FR1230921A (enrdf_load_stackoverflow)
GB (2) GB910608A (enrdf_load_stackoverflow)
NL (2) NL302901A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125283A (en) * 1960-03-24 1964-03-17 Vacuum pump
US3117247A (en) * 1961-05-29 1964-01-07 Varian Associates Vacuum pump
US3216652A (en) * 1962-09-10 1965-11-09 Hughes Aircraft Co Ionic vacuum pump
US3228589A (en) * 1963-10-16 1966-01-11 Gen Electric Ion pump having encapsulated internal magnet assemblies
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump
DE1302292B (enrdf_load_stackoverflow) * 1964-03-10 Varian Associates
US3376455A (en) * 1966-02-28 1968-04-02 Varian Associates Ionic vacuum pump having multiple externally mounted magnetic circuits
WO1996018204A1 (en) * 1994-12-05 1996-06-13 Color Planar Displays, Inc. Support structure for flat panel displays
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
JP2001332209A (ja) * 2000-03-13 2001-11-30 Ulvac Japan Ltd スパッタイオンポンプ
US10665437B2 (en) 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2636664A (en) * 1949-01-28 1953-04-28 Hertzler Elmer Afton High vacuum pumping method, apparatus, and techniques
US2726805A (en) * 1953-01-29 1955-12-13 Ernest O Lawrence Ion pump

Also Published As

Publication number Publication date
GB910608A (en) 1962-11-14
US2983433A (en) 1961-05-09
NL302901A (enrdf_load_stackoverflow)
GB910607A (enrdf_load_stackoverflow)
DE1096539B (de) 1961-01-05
CH382364A (de) 1964-09-30
NL111716C (enrdf_load_stackoverflow)

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