GB779347A - Improvements in or relating to etching metals - Google Patents
Improvements in or relating to etching metalsInfo
- Publication number
- GB779347A GB779347A GB2276453A GB2276453A GB779347A GB 779347 A GB779347 A GB 779347A GB 2276453 A GB2276453 A GB 2276453A GB 2276453 A GB2276453 A GB 2276453A GB 779347 A GB779347 A GB 779347A
- Authority
- GB
- United Kingdom
- Prior art keywords
- etched
- magnetic field
- glow discharge
- cathode
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002184 metal Substances 0.000 title abstract 4
- 229910052751 metal Inorganic materials 0.000 title abstract 4
- 238000005530 etching Methods 0.000 title 1
- 150000002739 metals Chemical class 0.000 title 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 229910001369 Brass Inorganic materials 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 239000010951 brass Substances 0.000 abstract 1
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract 1
- 239000001569 carbon dioxide Substances 0.000 abstract 1
- 239000002826 coolant Substances 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000011928 denatured alcohol Substances 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000013021 overheating Methods 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- ing And Chemical Polishing (AREA)
Abstract
779,347. Removing metal by electric discharges. EDWARDS & CO. (LONDON), Ltd., W. Nov. 18, 1954 [Aug. 18, 1953], No. 22764/53. Class 83 (4). The surface of a metal object is etched by making the object the cathode of a cathodic sputtering apparatus and using a magnetic field to permit lowering of the working pressure of the gas in which the glow discharge occurs. The apparatus comprises a sputtering chamber 1 formed by a glass tube connected at one end to a diffusion or other pump and closed at its other end by a plate 4 supporting two insulated aluminium negative electrodes 5 and 6, the former having the specimen 7 to be etched attached thereto and the latter acting as an auxiliary cathode to maintain symmetry of the glow discharge. The anode is constituted by a metal band 8 also supported from the plate 4, disposed between and in spaced relation with the cathodes 5 and 6. The magnetic field is provided by a semi-circular magnet 9 arranged around the chamber 1 so that the direction of the field is normal to both the auxiliary cathode and the specimen surface to be etched and overheating of the latter is prevented by a coolant, which may be solid carbon dioxide in methylated spirit, in a vessel 10 having a copper base carrying a brass rod 12 to which the element 5 is connected. The magnet 9 may be replaced by an electromagnet. Specification 736,512, [Group II], is referred to.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2276453A GB779347A (en) | 1953-08-18 | 1953-08-18 | Improvements in or relating to etching metals |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2276453A GB779347A (en) | 1953-08-18 | 1953-08-18 | Improvements in or relating to etching metals |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB779347A true GB779347A (en) | 1957-07-17 |
Family
ID=10184707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2276453A Expired GB779347A (en) | 1953-08-18 | 1953-08-18 | Improvements in or relating to etching metals |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB779347A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3097154A (en) * | 1959-01-13 | 1963-07-09 | Nuclear Materials & Equipment | Apparatus for method for etching objects |
| US3180751A (en) * | 1961-05-26 | 1965-04-27 | Bausch & Lomb | Method of forming a composite article |
| US3325393A (en) * | 1964-05-28 | 1967-06-13 | Gen Electric | Electrical discharge cleaning and coating process |
| US3351543A (en) * | 1964-05-28 | 1967-11-07 | Gen Electric | Process of coating diamond with an adherent metal coating using cathode sputtering |
| DE3912581A1 (en) * | 1989-04-03 | 1990-10-18 | Toyo Kohan Co Ltd | METHOD AND DEVICE FOR COLD ROLLING COMPOSITE SHEETS |
-
1953
- 1953-08-18 GB GB2276453A patent/GB779347A/en not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3097154A (en) * | 1959-01-13 | 1963-07-09 | Nuclear Materials & Equipment | Apparatus for method for etching objects |
| US3180751A (en) * | 1961-05-26 | 1965-04-27 | Bausch & Lomb | Method of forming a composite article |
| US3325393A (en) * | 1964-05-28 | 1967-06-13 | Gen Electric | Electrical discharge cleaning and coating process |
| US3351543A (en) * | 1964-05-28 | 1967-11-07 | Gen Electric | Process of coating diamond with an adherent metal coating using cathode sputtering |
| DE3912581A1 (en) * | 1989-04-03 | 1990-10-18 | Toyo Kohan Co Ltd | METHOD AND DEVICE FOR COLD ROLLING COMPOSITE SHEETS |
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