DE1044295B - Ionenquelle - Google Patents
IonenquelleInfo
- Publication number
- DE1044295B DE1044295B DEH28747A DEH0028747A DE1044295B DE 1044295 B DE1044295 B DE 1044295B DE H28747 A DEH28747 A DE H28747A DE H0028747 A DEH0028747 A DE H0028747A DE 1044295 B DE1044295 B DE 1044295B
- Authority
- DE
- Germany
- Prior art keywords
- electrode
- tip
- ion
- ion source
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims description 57
- 239000007789 gas Substances 0.000 claims description 34
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 12
- 230000005684 electric field Effects 0.000 claims description 11
- 238000010884 ion-beam technique Methods 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 10
- 229910052763 palladium Inorganic materials 0.000 claims description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 4
- 230000035699 permeability Effects 0.000 claims description 4
- 230000004048 modification Effects 0.000 claims description 3
- 238000012986 modification Methods 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims 3
- 239000011343 solid material Substances 0.000 claims 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 239000010937 tungsten Substances 0.000 claims 2
- 230000003292 diminished effect Effects 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 150000002739 metals Chemical class 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 238000000866 electrolytic etching Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- VKJKEPKFPUWCAS-UHFFFAOYSA-M potassium chlorate Chemical compound [K+].[O-]Cl(=O)=O VKJKEPKFPUWCAS-UHFFFAOYSA-M 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 229910052722 tritium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/08—Ion sources
- H01J2237/0802—Field ionization sources
- H01J2237/0807—Gas field ion sources [GFIS]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US561818A US2809314A (en) | 1956-01-27 | 1956-01-27 | Field emission ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE1044295B true DE1044295B (de) | 1958-11-20 |
Family
ID=24243603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DEH28747A Pending DE1044295B (de) | 1956-01-27 | 1956-12-06 | Ionenquelle |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US2809314A (enrdf_load_stackoverflow) |
| BE (1) | BE553596A (enrdf_load_stackoverflow) |
| CH (1) | CH358515A (enrdf_load_stackoverflow) |
| DE (1) | DE1044295B (enrdf_load_stackoverflow) |
| FR (1) | FR1165210A (enrdf_load_stackoverflow) |
| GB (1) | GB808236A (enrdf_load_stackoverflow) |
| NL (2) | NL102697C (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1244300B (de) * | 1959-10-01 | 1967-07-13 | Atomic Energy Commission | Vorrichtung zum Erzeugen eines Ionenstrahls |
| DE2805273A1 (de) * | 1978-02-08 | 1979-08-09 | Max Planck Gesellschaft | Mit kontaktionisation arbeitende einrichtung zum erzeugen eines strahles beschleunigter ionen |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3104322A (en) * | 1958-02-10 | 1963-09-17 | High Voltage Engineering Corp | Compact neutron source |
| US3071705A (en) * | 1958-10-06 | 1963-01-01 | Grumman Aircraft Engineering C | Electrostatic propulsion means |
| US3117416A (en) * | 1960-06-10 | 1964-01-14 | Itt | Electronic fluid flow control valve |
| US3369148A (en) * | 1961-07-05 | 1968-02-13 | William J. Hitchcock | System for mixing opposite polarity ions on magnetic field axis |
| US3398685A (en) * | 1961-09-11 | 1968-08-27 | Litton Systems Inc | Ion drag pumps |
| US3286187A (en) * | 1961-10-16 | 1966-11-15 | Minnesota Mining & Mfg | Ion source utilizing a spherically converging electric field |
| US3232046A (en) * | 1962-06-06 | 1966-02-01 | Aerospace Corp | Plasma generator and propulsion exhaust system |
| GB1052902A (enrdf_load_stackoverflow) * | 1963-02-19 | |||
| US3239130A (en) * | 1963-07-10 | 1966-03-08 | Cons Vacuum Corp | Gas pumping methods and apparatus |
| FR1454051A (fr) * | 1965-08-20 | 1966-07-22 | Commissariat Energie Atomique | Source d'ions |
| US3345820A (en) * | 1965-10-19 | 1967-10-10 | Hugh L Dryden | Electron bombardment ion engine |
| US3405263A (en) * | 1966-01-14 | 1968-10-08 | Exxon Research Engineering Co | Dual mass spectrometer ion source comprising field ionization and electron bombardment sources and the method of use |
| US3464207A (en) * | 1966-10-10 | 1969-09-02 | American Standard Inc | Quasi-corona-aerodynamic vehicle |
| US3387176A (en) * | 1967-01-05 | 1968-06-04 | Hughes Aircraft Co | Apparatus for passing charged particles through a field free region and neutralizingsaid particles during transit |
| US3530290A (en) * | 1967-09-13 | 1970-09-22 | Exxon Research Engineering Co | Field emission ion source for a mass spectrometer having relatively movable anode and cathode electrodes |
| DE1900569C3 (de) * | 1969-01-07 | 1976-01-08 | Varian Mat Gmbh, 2800 Bremen | Festkörper-Ionenquelle |
| US3852595A (en) * | 1972-09-21 | 1974-12-03 | Stanford Research Inst | Multipoint field ionization source |
| US3958848A (en) * | 1973-07-03 | 1976-05-25 | Heil Hans W | Method of fabricating field desorption ion source |
| DE2333866A1 (de) * | 1973-07-03 | 1975-01-23 | Max Planck Gesellschaft | Felddesorptions-ionenquelle und verfahren zu ihrer herstellung |
| US4121128A (en) * | 1976-03-22 | 1978-10-17 | The United States Of America As Represented By The Secretary Of The Army | Collective ion accelerator with foil-less beam extraction window |
| US4085330A (en) * | 1976-07-08 | 1978-04-18 | Burroughs Corporation | Focused ion beam mask maker |
| US4328667A (en) * | 1979-03-30 | 1982-05-11 | The European Space Research Organisation | Field-emission ion source and ion thruster apparatus comprising such sources |
| JPS6056342A (ja) * | 1983-09-08 | 1985-04-01 | Anelva Corp | イオンビ−ム発生装置 |
| US4638210A (en) * | 1985-04-05 | 1987-01-20 | Hughes Aircraft Company | Liquid metal ion source |
| JPH0831305B2 (ja) * | 1986-09-25 | 1996-03-27 | ソニー株式会社 | イオンビ−ム装置 |
| US5397901A (en) * | 1990-06-12 | 1995-03-14 | American Technologies, Inc. | Forming charges in a fluid and generation of a charged beam |
| US5231824A (en) * | 1991-08-09 | 1993-08-03 | Dick Robert C Van | Ion beam and ion jet stream motor |
| US6145298A (en) * | 1997-05-06 | 2000-11-14 | Sky Station International, Inc. | Atmospheric fueled ion engine |
| US6573642B1 (en) * | 2000-01-26 | 2003-06-03 | Motorola, Inc. | Field emission device and method for the conditioning thereof |
| WO2002086489A1 (en) * | 2001-04-20 | 2002-10-31 | University Of British Columbia | High throughput ion source with multiple ion sprayers and ion lenses |
| WO2010132265A2 (en) | 2009-05-12 | 2010-11-18 | Carl Zeiss Nts, Llc. | Gas delivery in a microscope system |
| CN110707535A (zh) * | 2019-11-19 | 2020-01-17 | 浙江亿东环保科技有限公司 | 一种负氧离子发射窗 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2287620A (en) * | 1939-06-09 | 1942-06-23 | Kallmann Hartmut Israel | Device for irradiating objects with neutrons, especially for depicting them by meansof neutron-radiation |
| GB697105A (en) * | 1950-10-16 | 1953-09-16 | Ass Elect Ind | Improvements relating to high voltage electrostatic apparatus for accelerating charged particles |
-
0
- BE BE553596D patent/BE553596A/xx unknown
- NL NL213062D patent/NL213062A/xx unknown
- NL NL102697D patent/NL102697C/xx active
-
1956
- 1956-01-27 US US561818A patent/US2809314A/en not_active Expired - Lifetime
- 1956-11-23 GB GB35873/56A patent/GB808236A/en not_active Expired
- 1956-12-06 DE DEH28747A patent/DE1044295B/de active Pending
- 1956-12-10 CH CH358515D patent/CH358515A/de unknown
- 1956-12-18 FR FR1165210D patent/FR1165210A/fr not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1244300B (de) * | 1959-10-01 | 1967-07-13 | Atomic Energy Commission | Vorrichtung zum Erzeugen eines Ionenstrahls |
| DE2805273A1 (de) * | 1978-02-08 | 1979-08-09 | Max Planck Gesellschaft | Mit kontaktionisation arbeitende einrichtung zum erzeugen eines strahles beschleunigter ionen |
Also Published As
| Publication number | Publication date |
|---|---|
| NL213062A (enrdf_load_stackoverflow) | |
| NL102697C (enrdf_load_stackoverflow) | |
| CH358515A (de) | 1961-11-30 |
| GB808236A (en) | 1959-01-28 |
| US2809314A (en) | 1957-10-08 |
| FR1165210A (fr) | 1958-10-20 |
| BE553596A (enrdf_load_stackoverflow) |
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