DE10360993A1 - Verfahren und Struktur für einen Piezoelektrisch betätigten Festkörperteil-Drückermodus-Flüssigmetallschalter - Google Patents

Verfahren und Struktur für einen Piezoelektrisch betätigten Festkörperteil-Drückermodus-Flüssigmetallschalter Download PDF

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Publication number
DE10360993A1
DE10360993A1 DE10360993A DE10360993A DE10360993A1 DE 10360993 A1 DE10360993 A1 DE 10360993A1 DE 10360993 A DE10360993 A DE 10360993A DE 10360993 A DE10360993 A DE 10360993A DE 10360993 A1 DE10360993 A1 DE 10360993A1
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DE
Germany
Prior art keywords
liquid metal
coupled
switch
structure according
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE10360993A
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German (de)
English (en)
Inventor
Marvin Glenn Woodland Park Wong
Arthur Colorado Springs Fong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
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Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of DE10360993A1 publication Critical patent/DE10360993A1/de
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H29/28—Switches having at least one liquid contact with level of surface of contact liquid displaced by fluid pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H29/00—Switches having at least one liquid contact
    • H01H2029/008—Switches having at least one liquid contact using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H57/00—Electrostrictive relays; Piezoelectric relays
    • H01H2057/006—Micromechanical piezoelectric relay

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Contacts (AREA)
DE10360993A 2003-04-14 2003-12-23 Verfahren und Struktur für einen Piezoelektrisch betätigten Festkörperteil-Drückermodus-Flüssigmetallschalter Withdrawn DE10360993A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/412869 2003-04-14
US10/412,869 US6768068B1 (en) 2003-04-14 2003-04-14 Method and structure for a slug pusher-mode piezoelectrically actuated liquid metal switch

Publications (1)

Publication Number Publication Date
DE10360993A1 true DE10360993A1 (de) 2004-12-02

Family

ID=32298250

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10360993A Withdrawn DE10360993A1 (de) 2003-04-14 2003-12-23 Verfahren und Struktur für einen Piezoelektrisch betätigten Festkörperteil-Drückermodus-Flüssigmetallschalter

Country Status (5)

Country Link
US (1) US6768068B1 (enExample)
JP (1) JP2004319495A (enExample)
DE (1) DE10360993A1 (enExample)
GB (1) GB2400749B (enExample)
TW (1) TW200426870A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6946775B2 (en) * 2003-04-14 2005-09-20 Agilent Technologies, Inc. Method and structure for a slug assisted longitudinal piezoelectrically actuated liquid metal optical switch
US6879089B2 (en) * 2003-04-14 2005-04-12 Agilent Technologies, Inc. Damped longitudinal mode optical latching relay
US6876130B2 (en) * 2003-04-14 2005-04-05 Agilent Technologies, Inc. Damped longitudinal mode latching relay
US7012354B2 (en) * 2003-04-14 2006-03-14 Agilent Technologies, Inc. Method and structure for a pusher-mode piezoelectrically actuated liquid metal switch
US6891315B2 (en) * 2003-04-14 2005-05-10 Agilent Technologies, Inc. Shear mode liquid metal switch
CN100417970C (zh) * 2004-09-20 2008-09-10 中国科学院光电技术研究所 一种微液滴驱动连续镜面能动变形反射镜
US7132614B2 (en) * 2004-11-24 2006-11-07 Agilent Technologies, Inc. Liquid metal switch employing electrowetting for actuation and architectures for implementing same
US7518474B1 (en) 2006-02-06 2009-04-14 The United Sates Of America As Represented By The Secretary Of The Army Piezoelectric in-line RF MEMS switch and method of fabrication
US7532093B1 (en) 2006-02-06 2009-05-12 The United States Of America As Represented By The Secretary Of The Army RF MEMS series switch using piezoelectric actuation and method of fabrication
CN113323848A (zh) * 2021-06-02 2021-08-31 北京机械设备研究所 基于压电薄膜的液态金属驱动装置、控制方法及制造方法

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Also Published As

Publication number Publication date
JP2004319495A (ja) 2004-11-11
GB0407192D0 (en) 2004-05-05
TW200426870A (en) 2004-12-01
US6768068B1 (en) 2004-07-27
GB2400749B (en) 2006-06-14
GB2400749A (en) 2004-10-20

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