EP1468436B1 - Mikro-elektromechanisches system und verfahren zu dessen herstellung - Google Patents
Mikro-elektromechanisches system und verfahren zu dessen herstellung Download PDFInfo
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- EP1468436B1 EP1468436B1 EP02796487A EP02796487A EP1468436B1 EP 1468436 B1 EP1468436 B1 EP 1468436B1 EP 02796487 A EP02796487 A EP 02796487A EP 02796487 A EP02796487 A EP 02796487A EP 1468436 B1 EP1468436 B1 EP 1468436B1
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- European Patent Office
- Prior art keywords
- micro
- face
- substrate
- electromechanical system
- movable part
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
- H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
- H01H1/20—Bridging contacts
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H1/00—Contacts
- H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
- H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
Definitions
- micro-electro-mechanical system micro electro-mechanical system, MEMS
- a micromechanical switch which a flat carrier substrate, one on the carrier substrate fixed contact piece, a movable electrode and a fixed with the Carrier substrate connected counter electrode comprises.
- the movable electrode has a free end and a fixed, connected to the carrier substrate The End.
- the movable electrode and the counter electrode face each other Surfaces on.
- the movable electrode bent, that is elastically deformed, that the free end of the movable electrode of the counter electrode and thereby also approximates the contact piece until it comes to contact between the free end the movable electrode and the contact piece comes.
- the movement of the free end of the movable electrode takes place laterally, that is parallel to the sheet carrier substrate.
- the electrostatic forces of attraction between the facing each other Surfaces of the movable electrode and the counter electrode is through the application of a voltage between the movable electrode and the Counter electrode generated.
- a voltage between the movable electrode and the Counter electrode generated.
- stoppers are introduced into the counter electrode, over the protrude the surface of the counter electrode facing the movable electrode and not at the same potential as the counter electrode.
- springs may be provided, which on the Counter electrode opposite side of the movable electrode attached are and the movement of the movable electrode in the direction of the counter electrode limit.
- the counter electrode facing surface of the movable electrode with be provided an electrically insulating layer.
- the force thus decreases linearly with the surface, square with the stress and inversely proportional to the square of the distance.
- a sacrificial shift process is applied, which is the free end of the mobile Electrode separates from the carrier substrate.
- DE 42 05 029 C1 shows an electrostatically operated microelectromechanical Relay working horizontally. That means the switching movement this relay is substantially perpendicular to a carrier substrate. From a silicon substrate is a tongue-shaped electrode with contact piece etched. The substrate is then coated with a counter substrate a counter electrode and a mating contact applied to the electrode with the counter electrode encloses a wedge-shaped gap. By Applying a switching voltage between the electrode and the counter electrode these are movable towards each other, creating an electrically conductive Achieve connection between contact and mating contact. Size Contact forces can be achieved by relatively wide electrodes.
- the bistable Mechanism By applying a perpendicular to the spring tongues and parallel to the carrier substrate directed force is the bistable Mechanism between the two stable states back and forth switchable, wherein the respective mirror-image to the initial position end position finally reached by a snap of the mechanism independently becomes.
- MEMS microelectromechanical system
- Improved switchability for example, can mean a shift Already at lower switching voltages can be triggered.
- New functionalities For example, the realization of closed without voltage Terminals or of micro-relays with both open without voltage as well as dead terminals mean.
- micro actuators can be new or be realized easier or in an improved form.
- the second micro-element has a first fixedly connected to the substrate End and a movable part, wherein in the working position of the first micro-element of the movable part of the second micro-element by electrostatic forces between the first micro-element and the second micro-element from a switch-off position into a switch-on position is movable, and wherein the two micro-elements in the area of the body, at the said smaller distance between the two micro-elements is present, have contact points and formed electrically non-conductive are.
- the fact that there are points of contact means that the mentioned lower Distance is zero.
- Electrode gaps result in improved switchability. A switching of the actuator at very low switching voltages is possible.
- the first micro-element is designed such that there is a matched counter electrode, that of the shape of the second micro-element is adapted: the adapted counterelectrode is shaped in such a way that in the on position of the second micro-element, the adapted Counter electrode and the second micro-element in the range of said Overlap contact areas over a large area.
- the switch-on position of the second micro-element thus nestle the adapted counter electrode and the second micro-element to each other. This will be a Maximizing the areas reached, between which the electrostatic Attractions act, resulting in greater electrostatic attractions and thus has an improved switchability result. A switching of the actuator at very low switching voltages is possible.
- said adapted Counter electrode additionally has a second section opposite the section of the counterelectrode which conforms to the second microelement stepped back. In the switch-on position of the second micro-element close this second section of the adapted Counter electrode and the second micro-element a gap.
- the force that can be selected in this way can be, for example a contact force of the second micro-element on one or two electrical Be contacts that the second micro-element in its on position contacted, creating a secure electrical contact can be made.
- a changeover relay realized.
- the movable part of the second micro-element by switching the first micro-element from the initial position to the working position elastically deformable. Thereby it is possible to realize dead-ended connections.
- the inventive method includes after the structuring of two Micro-elements with facing surfaces switching the bistable switchable micro-element.
- This can be new or improved MEMS, such as those mentioned above, are produced.
- Fig. 1 shows a schematic plan view of a first according to the invention microelectromechanical system (MEMS). It includes a first micro-element 1 and a second micro-element 2, both of which are rigid with one Substrate S are connected.
- MEMS microelectromechanical system
- the substrate S is a wafer of monocrystalline silicon in which one of the two largest surfaces forms a major surface of the substrate. In Fig. 1, this major surface is in the plane of the paper.
- ionic charges DRIE, dry reactive ion etching
- sacrificial layer technology the first micro-element 1 and the second micro-element 2 from the Substrate S shaped.
- the structuring method DRIE has the property of a material-removing To be a method; it is an etching process. It also has the property good for creating narrow but deep channels, columns or Being suitable trenches, whereby the DRIE awarded a preferred direction which can be the direction of the preferred material removal indicates and is thus perpendicular to the main surface of the substrate. Perpendicular again to this preferred direction is the width of a DRIE trench down, ie narrow trenches limited.
- micro-elements 1,2 are formed from the substrate can, is known in the art and can, for example, the said Publication DE 198 00 189 A1 are taken, the thereby incorporated with their entire disclosure content in the description becomes.
- DRIE generated microelements typically have side surfaces, which are aligned almost perpendicular to the main surface of the substrate S, or in other words: (local) surface normal vectors of the side surfaces run virtually parallel to the main surface of the substrate S.
- microelements are essentially in the shape of a straight one (right - angled) prism whose base is parallel to the main surface of the Substrates S is aligned.
- the height of such Micro-element very large compared to the (narrowest) width of such a micro-element.
- the first micro-element and the second micro-element are of this type.
- the first micro-element 1 is a bistable elastic MEMS mechanism as described in the cited publication J. Qiu et al., "A Centrally-Clamped Parallel-Beam Bistable MEMS Mechanism ", Proc. Of MEMS 2001, Interlaken, Switzerland, Jan. 20-22, 2001. Details too Embodiments, characteristics and for the production of such Micro-element can be found in this publication, which thereby incorporated with their entire disclosure content in the description becomes.
- the first micro-element 1 is at a first end 6 and a second end 7 fixed on the substrate S. In between, this points first micro-element 1 two parallel, cosinusoidal curved Spring tongues, which in the middle 8 between the two ends 6,7 with each other are connected. Considering their small width and big ones Height (perpendicular to the substrate main surface) you can use these spring tongues also as a parallel membrane.
- the first micro-element 1 is bistable between an initial position A and a working position B switchable (the latter shown in phantom in Fig. 1). That is, the micro-element 1 has two mechanically stable states or positions A and B, between which it is applied by applying a lateral, So substrate-parallel force is reciprocable; the movement takes place substantially laterally. Possible intermediate positions are not stable, but lead independently to a rapid transition into one of the two stable states A or B. The transition takes place by preferably elastic deformation of the first micro-element 1.
- the first micro-element 1 consists here only of a switching part 5, through which it is bistable switchable.
- the first micro-element 1 has on the second micro-element 2 facing Page on a formed by DRIE side surface, the first Surface 3a is called.
- This first surface 3a has a first coating 3b, which is electrically insulating and whose outer, that is from the surface facing away from the first surface 3a, the first surface 3 of the first Micro-element 1 forms.
- the first coating 3b will typically produced by oxidation of the silicon.
- the second micro-element 2 has a first fixed end 10 on which it is set on the substrate S, and a movable part 11; it is arranged adjacent to the first micro-element 1.
- the second micro-element 2 On the side of the second micro-element facing the first micro-element 1 is, the second micro-element 2 has a DRIE formed side surface referred to as the second surface 4a.
- This second surface 4a has a second coating 4b, which is electrically insulating and whose outer, so facing away from the second surface 4a surface second surface 4 of the second micro-element 2 forms.
- the first surface 3 and the second surface 4 are facing surfaces, as well as the first surface 3a and the second surface 4a facing each other are.
- the second coating 4b also typically becomes oxidized of silicon.
- the first micro-element 1 in the initial position A and the second micro-element 2 in an off position A ' is the first micro-element 1 in the initial position A and the second micro-element 2 in an off position A '. Since the areas 3a and 4a mittes DRIE are formed, they have a distance from each other, at least is as large as a minimum distance given by DRIE. With the Distance of the surfaces from each other is meant the distance that such two Have points that are closest to each other, with the one Point on the first surface 3a and the other point on the second surface 4a lies. The distance is thus the width of the trench between the first Surface 3a and the second surface 4a at its narrowest point. In Fig. 1 is this point at a corner of the first fixed end 10 of the second micro-element 2 and near the first end 6 of the first micro-element 1 at the membrane of the first micro-element 1, which has the first surface 3a.
- the initial position A of the first micro-element 1 is a production-related Initial position.
- the arrangement of the first micro-element 1 and of the second micro-element 2 is selected such that after switching of the first micro-element 1 from the initial position A to the working position B is the distance of the first surface 3a from the second surface 4a smaller than the one mentioned, by the manufacturing method (for example DRIE) given minimum distance.
- the distance is even zero, that is, in working position A, the first micro-element touch 1 and the second micro-element 2.
- In the working position A can a intended interaction of the first micro-element 1 with the second micro-element 2 within the MEMS.
- the MEMS in Fig. 1 represents a microactuator, that of the first micro-element 1 and the second micro-element 2, together with the substrate S. is formed.
- the second micro-element 2 acts as a movable, electrostatically switchable electrode and the bistable switchable first micro-element 1 as an associated electrostatic counter electrode.
- the first Micro-element 1 is in working position A.
- the operation of the microactuator when it is in working position B is essentially known from the prior art: On the first fixed End 6 of the first micro-element 1 is a contacting electrode C, and at the first fixed end 10 of the second micro-element 2 a contacting electrode C 'is provided. These contacting electrodes C, C 'serve to apply switching voltages to the microelements 1,2, through which the micro-elements electrostatically charge, so that electrostatic forces between the micro-elements 1 and 2 Act.
- the material from which the micro-elements are made be sufficiently conductive, which, for example, by appropriate doping of silicon is achieved.
- the electrostatic force decreases inversely proportional to the distance.
- the MEMS according to the invention Fig. 1 thus has the great advantage, even with smaller switching voltages to be switchable than they would be needed for a MEMS whose spacing between electrode and counter electrode greater than or equal to that through the Structuring method given minimum distance.
- the micro-actuator in Fig. 1 for example, as an optical micro-switch be used by passing a Lichstrahl to be switched or interrupted by the movable part 11 of the second micro-element 2 is, depending on whether the second micro-element 2 in the off position A 'or in the switch-on position B' is located.
- the redirecting a light beam with the micro-actuator in Fig. 1 possible, for example if in the movable part 11 of the second micro-element 2 a is arranged reflective area (not shown).
- the switch-on position B ' is, by definition, present when appropriate switching voltages are applied; otherwise the switch-off position A 'is present.
- the bistable switchable first micro-element 1 is called an electrostatic Electrode or counter electrode used.
- Fig. 2 shows a MEMS which largely corresponds to the MEMS of Fig. 1; Indeed is the first micro-element 1 constructed differently.
- the first micro-element 1 is here as another lateral, bistable and preferably elastic switchable mechanism formed.
- the first micro-element 1 is also here at a first end 6 and a second end 7 on the substrate S set.
- a curved Spring tongue which has the shape of a vibration belly.
- this spring tongue In view of its small width and its high height (perpendicular to the Substrate main surface) can also be this spring tongue as a membrane describe.
- the first micro-element 1 In the initial position A, ie in the state in which the first micro-element 1, the first micro-element 1 describes a symmetrical antinode, in working position B an asymmetric Antinode (the latter in Fig. 2 drawn by dashed lines).
- asymmetric antinode represents the second stable position of the first Micro-element 1 is and is due to the fact that one with the Substrate S firmly connected stop the first micro-element 1 in the working position B touches and to the corresponding deformation of the first Micro-element 1 leads.
- This stop is here by a corresponding formed and arranged first fixed end 10 of the second micro-element 2 formed.
- the corresponding touch point is conveniently to the right of a link leading from the second end 7 extends to the first end 6 of the first micro-element 1 when the symmetrical antinode in the initial position A to the left of this Link is arranged.
- the value of a parallel to this link guided position coordinate of the point of contact is not 0.5 (no asymmetric antinode) and is preferably between 0.52 and 0.92 of the length of the link; he is here about 0.84.
- the stop can also by a correspondingly shaped first End 6 or second end 7 of the first micro-element 1 are formed or as a separately on the substrate S fixed stop (which then to be considered as belonging to the first micro-element 1).
- the bistable micro-element 1 generated in the initial position A (structured), the distance between first micro-element 1 and the second micro-element 2 at least as big is like a minimum distance given by the structuring method (between these micro-elements 1,2).
- the MEMS becomes the first after application of coatings 3b, 4b Micro-element 1 switched from the initial position A in the working position B, wherein in the working position B, the distance between the two Micro-elements 1.2 is smaller than the said minimum distance.
- FIG. 3 shows a MEMS according to the invention, which largely corresponds to that in FIG. 1 corresponds to the embodiment shown; however, here is the first one Micro-element 1 not only from a switching part 5, but additionally includes another electrode 9.
- the electrode 9 has an elongated part, the first surface 3a, the first coating 3b and the first surface 3 of the first micro-element 1 includes. This part is by means of another elongate member which is approximately perpendicular to the said aligned is, with the switching part 5 in the middle 8 between the ends 6,7 of the first Micro-element 1 connected.
- the electrode 9 Since the electrode 9 is fixed to the switching part 5, it moves with the Switching part 5 with when from the initial position A to the working position B (and possibly back again) is switched. Are by applying appropriate Switching voltages electrostatic forces of attraction between the first Micro-element 1 (of course in the working position A) and the second micro-element 2 generates, the movable part 11 of the second micro-element 2 elastically deformed and approaches the electrode 9: It is from the switch-off position A 'is switched to the switch-on position B'.
- the shape of the Electrode 9, and in particular the shape of the first surface 3, is preferably shaped such that the first surface 3 and the second Touch surface 4 fully in the switch-on position.
- Fig. 4 shows a MEMS, which represents a micro-relay.
- the embodiment corresponds largely to that of FIG. 3. It also includes a (adapted) Electrode 9 and a cosinus formed bistable elastic switchable micro-element 1.
- the second micro-element 2 or more precisely: the movable part 11 of the second micro-element 2, a Contact area 16, which is electrically conductive.
- the Contact area 16 in the region of that end of the movable part 11th of the second micro-element 2, which is not at the first fixed end 10 of the second micro-element 2 is adjacent.
- the contact region 16 forms a part of a side surface of the second micro-element 2 and is preferably formed as a coating by means of vapor deposition or Sputtering techniques is applied to the second micro-element 2.
- the MEMS comprises two fixed on the substrate S, electrically conductive fixed contacts 17,18.
- the arrangement of the fixed contacts 17,18 and the contact region 16 is selected such that when concerns appropriate Switching voltages on the first micro-element 1 and the second micro-element 2 (ie in the switch-on position B 'of the second micro-element 2) the contact region 16 is an electrically conductive connection between the Fixed contact 17 and the fixed contact 18 generated. In the off state A 'is this is not the case. So there is an electrostatic micro-relay, through which by means of the switching voltages formed by the fixed contacts 17,18 Connection can be switched.
- the contact region 16 in FIG. 4 is on the side of the second microelement 2, which faces the first micro-element 1, So on the side that includes the surface 4.
- the fixed contacts 17,18 are in that region of the substrate S which is located on the the first micro-element 1 side facing away from the second micro-element 2 lies.
- the contact area 16 will then be corresponding to that Side of the movable part 11 of the second micro-element 2, which faces away from the first micro-element 1.
- the relay can be switched by means of repelling electrostatic forces.
- this micro-relay or the in Fig. 4 shown micro-relay without (matched) electrode 9 build (analogous to the structure in Fig. 1).
- Fig. 5 shows an inventive micro-changeover relay. It contains all the features of such a MEMS, as related to Fig. 4 has been described.
- the MEMS includes but one more third micro-element 1 'and two further fixed contacts 17', 18 '; and the second micro-element 2 has a further electrically conductive contact area 16 ', which on one side of the movable part 11 of the second Micro-element 2 is arranged, which is opposite to the side which the Contact area 16 has.
- the third micro-element 1 'and the others Fixed contacts 17 ', 18' are with respect to the elongated movable Part 11 of the second micro-element 2 arranged in mirror image to the first micro-element 1 and the fixed contacts 17,18.
- the arrangement needs not exactly mirror image; it is enough if the third micro-element 1 'in a region of the substrate S connected to the substrate is, on the side facing away from the first micro-element 1 side of the second Micro-element (2) is located and the other fixed contacts 17 ', 18' in a range of the substrate S are connected to the substrate on the den Fix contacts 17,18 opposite side of the second micro-element 2 is located.
- the structure of the third micro-element 1 ' corresponds to the structure of the first Micro-element 1.
- the other fixed contacts 17 ', 18' are similar designed as the fixed contacts 17,18.
- the interaction between the third micro-element 1 'and the second micro-element (2) and the other fixed contacts (17 ', 18') corresponds the above-described interaction between the first micro-element 1 and the second micro-element 2 and the fixed contacts 17,18.
- When applying appropriate switching voltages to the third micro-element 1 ' and the second micro-element 2 may be an electrically conductive connection between the other fixed contacts 17 ', 18' through the further contact area 16 'are created.
- FIG. 6 shows a further MEMS according to the invention, which largely corresponds to the MEMS of FIG. 4. It contains the features of the MEMS Fig. 4, for which reference is made to the corresponding part of the description.
- the electrode 9 of the first micro-element 1 is special here educated.
- the electrode 9 has an (optionally stepped) recess on.
- the electrode 9 comprises a gap-forming surface 1 2, which with respect to the first surface 3 of the first micro-element 1 stepped is set back. You can this electrode 9 as a stepped Designate electrode 9.
- This MEMS will be attractive electrostatic Forces to switch from the switch-off position A 'to the switch-on position B' used.
- the length of the gap and the width of the gap ie the Distance between the movable part 11 of the second micro-element 2 and the gap-forming surface 12
- the course of the Width of the gap can be selected.
- the length of the gap by about one order of magnitude, preferably by about two orders of magnitude greater than the width of the gap.
- such a MEMS has the advantage that any problems that may arise when switching from the switch-on position B 'to the switch-off position A', by a slow or poor detachment of the movable part 11th of the second micro-element 2 of the electrode 9 (that is, more precisely: of the first surface 3), for example due to surface effects can occur can be reduced.
- the (air) gap 13 allows a rapid detachment of the movable part 11 of the second micro-element 2 from the electrode 9 when switching from the on position B 'to the off position A ', while still in the on position B' large electrostatic Attractiveness between the first micro-element 1 and the second micro-element 2 act when the gap width accordingly was chosen low.
- a further advantageous embodiment of the invention is shown. It largely corresponds to the embodiment shown in Fig. 6 and will be described starting therefrom.
- the movable part 11 of the second Micro-element 2 is specially designed here. He has a first area 14 and a second region 15, wherein the first region 14 less stiff, so easier deformable, is formed as the second region 15th And the first area is between the fixed first end 10 of the second Micro-element 2 and the second region 15 is arranged.
- the contact area 16 is advantageously arranged in the second region 15, in particular in the Area of the first area 15 opposite end of the second Area 16.
- the second area 15 comprises at least those Area of the movable part 11, in which the movable part 11th and the second micro-element 2 do not face each other. Especially advantageous is a (slight) overlap of the second area 15 with the area of the movable part 11, in which the movable part 11 and the second Micro-element 2 face.
- the second region 15 comprises Advantageously, at least even that portion of the movable Part 11, in which the movable part 11 and the gap-forming surface 12 face each other. Is particularly advantageous in this case, if the second area 15 also a (small) overlap with the first Surface 3 has.
- the greater rigidity of the second region 15 with respect to the first region 14 is achieved in the embodiment of FIG. 7 in that the second region 15 is thicker or wider than the first region 14. It is also possible to make the second region 15 harder to bend make, for example, by applying a coating there; to the Example on a base of the straight prismatic body, the second region 15 forms, or on at least one of the side surfaces. through a corresponding (large, long) trained contact area, the As a coating is formed, this could be achieved.
- Fig. 8 shows a further advantageous embodiment of the invention, namely a changeover relay, which except a Normally Open connection (NO connection) additionally also a Normally Closed connection (NC connection).
- NO connection means that the connection is open when there is no appropriate switching voltage (opened without voltage), as in the above-mentioned embodiments (Fig. 4 to Fig. 7) is the case.
- NC connections which are not required a suitable switching voltage are closed (dead closed), are, however, difficult to realize, and will be in this Embodiment realized.
- here is an NC port in realized by means of DRIE structured MEMS.
- the MEMS in Fig. 8 is a mirror image and includes a first micro-element 1, a third micro-element 1 ', a fourth micro-element 19 and a fifth micro-element 20, all of which are bistable switchable and one Stable initial position A (solid line) and stable working position B (shown in dashed lines). They are here as such formed bistable micro-Elerriente, as described in connection with FIG. 1 are described in more detail (two parallel, cosinus-shaped, connected in their midst Spring tongues). The position in which these micro-elements using DRIE be structured, is the initial position A.
- the first micro-element 1 and the third micro-element 1 ' correspond to each other largely in their Function. They only consist of a switching part 5.
- the fourth micro-element 19 and the fifth micro-element 20 also correspond to each other largely in their function. They each have a contacting electrode D, D '(for applying a signal to be switched, for example one electric current) and an electrically conductive contact electrode 21,22 on.
- the conductivity of the contact electrodes 21,22 is preferably by produces a metallic coating.
- the contact electrodes 21, 22 are elongated, finger-shaped and approximately in the middle 8 between the two Ends of the respective micro-element 19,20 on the respective micro-element 19,20 attached.
- the MEMS still has two with the Substrate S connected Fixelektroden 17,18 on (to create another electric current to be switched).
- the MEMS in Fig. 8 further comprises a second micro-element 2.
- the second micro-element 2 is a monostable micro-element; it thus has only one stable position. It comprises a first fixed end 10 and a second fixed end 10 ', which ends 10, 10' on the substrate S are fixed, and one between these two fixed ends 10,10 ' arranged movable part 11.
- the movable part 11 is as one, preferably Vibration-shaped, curved structure formed at the the two fixed ends 10,10 'of the second micro-element 2 is attached and an electrically conductive contact region 16.
- the mobile one Part 11 further has a second surface 4, which is an optional one second coating 4b is formed, and which second surface 4 a first surface 3 of the first micro-element 1 faces is. The same applies to a fourth surface 4 'of the second micro-element 2 and a third surface 3 'of the third micro-element 1'.
- the second surface 4 is between the first fixed end 10 and the Contact area 16 arranged.
- the fourth surface 4 ' is between the second fixed end 10 'and the contact region 16 are arranged.
- To the structuring of the second micro-element 2 is the movable Part 11 in the switch-off position A ', the stable position of the second Micro-element 2.
- the bistable micro-elements 1,1 ', 19,20 Due to the existence of the already mentioned minimum distance between two are DRIE generated micro-elements or surfaces the bistable micro-elements 1,1 ', 19,20 from the second micro-element 2 spaced with at least such a minimum distance.
- the optional non-conductive coatings 3b, 3b 'of the first or third micro-element 1,1 'and the optional electrically conductive Coatings of the contact electrodes 21, 22 are used in the context of inventive manufacturing method of the MEMS the bistable micro-elements 1,1 ', 19,20 switched from the initial position A in the working position B. This will change the distance between the micro elements or Surfaces smaller than said minimum distance; in Fig. 8 touch even the micro elements. In particular, both contact electrodes touch 21,22 the contact area 16.
- the surfaces 3,4 and the surfaces 3 ', 4' also touch each other. This can already be done by applying relatively low switching voltages between the second micro-element. 2 and the first micro-element 1 and between the second micro-element 2 and the third micro-element 1 'sufficiently large electrostatic Attractive forces between the second micro-element 2 and the Micro-elements 1,1 'are generated, which cause a switching of the second Micro-element 2 from the switch-off position A 'to the switch-on position B' to lead.
- Fig. 9 shows a changeover relay, which except a Normally Open connection (NO connection) additionally also a Normally Closed connection (NC connection).
- NO connection Normally Open connection
- NC connection Normally Closed connection
- the MEMS is very similar in construction that described in Fig. 8; for corresponding features is based on the above Text directed.
- the second micro-element 2 is not monostable here, but bistable executed. In particular, it has a structure with two parallel, cosinusoidal spring tongues connected in their middle, as described in detail in connection with FIG. 1. The two stable positions of the second micro-element 2 are the off position A 'and the switch-on position B'.
- a big advantage of the bistability of the second micro-element 2 is that there is no applied switching voltage required to the second micro-element 2 in the off position A 'or the Hold position B '. After applying a suitable switching voltage and the switching process thereby caused to the other state A ', B' remains the second micro-element 2 automatically in this state FROM'. This allows each of the two pairs of contacts to which one switching signal is applied (Fixelektroden 17,18 or micro-elements 19,20) should be a NO connection or an NC connection.
- the MEMS in Fig. 9 two more bistable switchable micro-elements on: the sixth micro-element 23 and the seventh micro-element 24. These are also here with two parallel, cosinusoid, built in their middle connected spring tongues and each have one (adapted) electrode 9. They are arranged in the region of the substrate S, which is on the side of the second micro-element 2, the Is remote micro-elements 1,1 '.
- the micro-elements 23,24 act in analogous manner with the second micro-element 2 together as the micro-elements 1.1 '.
- the second micro-element 2 has a sixth surface 26a and an eighth surface 26a ', which with a fifth Surface 25a (the sixth micro-element 23) or a seventh Surface 25a '(the seventh micro-element 24) cooperate.
- the second micro-element 2 may be switched from the turn-on state B 'in FIG Off state A 'are switched.
- Fig. 10a shows the MEMS in the state after structuring by means of DRIE: The first micro-element 1 is in the initial position A.
- Fig. 10b shows the MEMS in a state in which the first micro-element 1 is in the working position B, and the second micro-element 2 is in the off state A '.
- Fig. 10c shows the MEMS in a state in which the first micro-element 1 is in the working position B, and the second micro-element 2 in the On state B 'is located.
- the first micro-element 1 after switching from the initial position A in the working position B comes closer than the given by DRIE minimum distance and the second micro-element 2 only (slightly) touched.
- the movable part 11 of the second micro-element 2 is deformed in such a way that the electrically conductive contact region 16 of the second micro-element 2 the fixed contacts 17,18 conductively connects:
- the NC port is closed. It becomes a dead, but detachable contact realized; in a structured using DRIE MEMS.
- By switching the first micro-element 1 from the initial position A in the working position B is a switching operation of the second micro-element 2 caused. Since there is no switching voltage for it, is the second micro-element 2 after this switching operation in the Switch-off position A '.
- one must suitable switching voltage between the first micro-element 1 and the second micro-element 2 are created.
- the NC port is opened, and the second micro element 2 goes into the on state B '(see Fig. 10c).
- the electrode 9 can be formed differently.
- the electrode 9 and the micro-elements Arrange 1.2 to each other such that the points of contact between the two micro-elements 1,2, (when the first micro-element 1 in the working position A and the second micro-element 2 in the off position A 'is) lie substantially on a straight line with the middle 8 in the initial position A and the middle 8 in the working position.
- This can be a achieved low mechanical stress of the first micro-element 1 be, while large contact forces on the fixed contacts 17,18 can be exercised (secure contacts).
- a second pair of fixed contacts 17 ', 18' (not shown in Fig. 10) provide, these fixed contacts 17 ', 18' are to be arranged such that the contact region 16 of the second micro-element 2 these fixed contacts 17 ', 18' electrically conductively interconnects when the second micro-element 2 is in the switch-on position B '.
- the movable part 11 of the second micro-element 2 are formed in two parts (analogous to the Embodiment of Fig. 7).
- FIG. 11a and 11b show a possible embodiment in which the moving parts of the MEMS are substantially horizontally movable.
- Fig. 11a is a sectional side view of that shown in Fig. 11b in plan view MEMS.
- Fig. 11b with Xla-Xla, the line of the section is Fig. 11a shown.
- the MEMS is a micro-relay with an NC connection.
- the first micro-element 1 is here as a schwabungsbauchförmiges bistable formed elastically switchable micro-element, analogous to that in Fig. 2nd shown in the first micro-Efement 1.
- the initial position A is the symmetrical Vibration belly arched away from the substrate S.
- the second end 7 of the first micro-element 1 is formed here like a bridge. Thereby can be arranged below the antinode second micro-element 2 to outside the area between the first end 6 and second end 7 of the first micro-element 1 extend.
- the first solid End 10 of the second micro-element 2 serves as a stop for the Formation of the asymmetric antinode of the first microelement 1 in working position B.
- the movable part 11 of the second micro-element 2 runs initially (after structuring) substantially parallel to the major surface of the Substrate S. After switching the first micro-element 1 from the initial position A in the working position B exerts the first micro-element 1 a Compressive force on the movable part 11 of the second micro-element 2 from.
- the second micro-element 2 is elastically deformed. It gets into his Off position A ', in softer one attached to the movable part 11 movable contact electrode E a fixed on the Sustrat S Fixelektrode 17 touched. This creates an NC connection between the moving Contact electrode E and the Fixelektrode 17. This generation of a NC connection is quite analogous to that in connection with the Fig. 10a to 10c described method.
- the second micro-element 2 goes into the on state B 'over, in which the movable part 11 of the second micro-element 2 is bent away from the substrate and the NC port opened is.
- the contacting electrodes C, C ' serve to apply Switching voltages.
- contacting electrodes D, D ' The contacting electrode D, which is electrically is connected to the movable contact electrode E, here is on the first fixed end 10 of the second micro-element 2 is arranged. With the fixed contact 17 electrically connected contacting electrode D 'is on arranged the substrate S.
- Fig. 11a, b Very advantageous in this embodiment of Fig. 11a, b is that the distance in the opened state between the movable contact electrode E. of the second micro-element 2 and the fixed contact 17 can be selected and manufacturing technology is very well reproducible. The same applies to the next Embodiments discussed above, provided that they are analogous to Fig. 11a, b with a movable contact electrode E performs.
- a MEMS according to the invention is not only, as in the above examples, as Switch or relay executable. There are a variety of micro-actuators feasible. For example, inventive MEMS micro-valves or Represent or operate micro-pumps.
- the substrate S used for producing a MEMS according to the invention is preferably formed fläching. It typically has one Main surface, which is structured to produce the MEMS, wherein the Movement of the moving parts of the MEMS substantially parallel or are movable perpendicular to this main surface.
- this is
- monocrystalline silicon is under mechanical stress standing bistable switchable micro-elements 1,1 ', 2,19,20,23,24 advantageously no or only very slowly taking place Relaxation to be expected.
- an SOI wafer silicon-on-insulator
- silicon oxide layer serves as a sacrificial layer
- the mentioned structuring method is typically a material removal Method, preferably an etching method.
- the LIGA technique or in particular the reactive ion etching and particularly advantageous the ion etching (DRIE) come here in question.
- the DRIE method has the advantage very well suited to the production of areas that (relative to their subordinate vertical height) are closely spaced and practically perpendicular to the main surface of the substrate S run.
- the material Apply are conceivable, for example, when so produced facing each other Surfaces due to the process have a minimum distance. For example using photopolymerization rapid prototyping method.
- Electromagnetically or piezoelectrically actuated actuators will be realized.
- the actuating forces can be repulsive or attractive be.
- a bistable switchable micro-element according to the invention can also be tristable or otherwise multistable switchable. It is for some applications also not necessary that the micro-elements 1,1 ', 19,20,23,24 after the first switching from the initial position A to the working position B are also Mullschalbar in the initial position A are. One can also consider a one-time, for example plastic, deformation. However, the micro-elements 1,1 ', 19,20,23,24 are preferably bistable elastic switchable and switch back to the initial position A.
- bistable micro-elements 1,1 ', 2,19,20,23,24 as the described cosinusoidal or as the described oscillation bulbous Forming micro-elements, these also being modified Form and combined within a MEMS are feasible.
- the micro-elements can optionally be electrically conductive or electrically non-conductive coated.
- a non-conductive coating Preferably, it serves to prevent discharges between each other touching electrostatic electrodes.
- stopper or Springs are used, as they are already quoted from DE 198 00 189 A1 are known.
- the contacting electrodes C, C ', D, D' can be produced in a known manner (for example by sputtering) and for example contactable by bonding.
- the first switching of the first micro-element 1 and also the other bistable switchable micro-elements 1 ', 19,20,23,24 of the initial position A in the working position B as to the manufacturing process of the MEMS is considered.
- This initial switching process can be done mechanically. Preferably, this switching operation but in Frame of a quality or functional test (burn-in) of the MEMS, whereby other units connected to the substrate are also tested or initialized.
- the initial switching process can then preferably by creating an attractive force between the bistable Micro-element 1,1 ', 19,20,23,24 and the second micro-element 2 take place, this force advantageous by applying a switching chip he follows.
- Such a switching voltage is typically higher than one Switching voltage for switching the second micro-element 2 between OFF position A 'and ON position B' is used.
- the linear expansion of the described MEMS is typically between 0.2 mm and 5 mm, preferably 0.8 mm to 2 mm.
- minimum distance minimum trench width
- he has a low dependence on the Depth of the structured trench.
- the depth of the structured trench 300 microns to 550 microns.
- the switching voltages for the described MEMS are typically 10 V to 80 V, preferably 25 V to 50 V.
- electrostatic attractions typically become Switching voltages between 70 V and 300 V, preferably between 100 V. and 200V used.
Description
- auf ein Mikro-elektromechanisches System gemäss dem Oberbegriff des Patentanspruches 1 sowie
- auf ein Verfahren zur Herstellung eines mikro-elektromechanischen Systems gemäss dem Oberbegriff des Patentanspruches 21.
- das erste Mikro-Element und das zweite Mikro-Element mit dem Substrat verbunden sind,
- das erste Mikro-Element eine erste Fläche aufweist und das zweite Mikro-Element eine zweite Fläche aufweist, welche Flächen einander zugewandt sind und durch ein Strukturierungsverfahren erzeugt sind,
- das erste Mikro-Element einen Schaltteil beinhaltet, durch den es bistabil zwischen einer Initialposition und einer Arbeitsposition schaltbar ist, und
- der Abstand zwischen der ersten Fläche und der zweiten Fläche in der Arbeitsposition des ersten Mikro-Elementes kleiner als ein durch das Strukturierungsverfahren erzeugbarer Minimalabstand zwischen der ersten Fläche und der zweiten Fläche ist.
- Fig. 1
- eine schematische Darstellung eines erfindungsgemässen MEMS mit kosinusförmigem bistabilen Element, in Aufsicht;
- Fig. 2
- eine schematische Darstellung eines erfindungsgemässen MEMS mit schwingungsbauchförmigem bistabilen Element, in Aufsicht;
- Fig. 3
- eine schematische Darstellung eines erfindungsgemässen MEMS mit kosinusförmigem bistabilen Element und angepasster Gegenelektrode, in Aufsicht;
- Fig. 4
- eine schematische Darstellung eines erfindungsgemässen Mikro-Relais mit kosinusförmigem bistabilen Element und angepasster Gegenelektrode, in Aufsicht;
- Fig. 5
- eine schematische Darstellung eines erfindungsgemässen Mikro-Wechselschalt-Relais mit zwei kosinusförmigen bistabilen Elementen und angepasster Gegenelektrode, in Aufsicht;
- Fig. 6
- eine schematische Darstellung eines erfindungsgemässen Mikro-Relais mit kosinusförmigem bistabilen Element und gestufter Gegenelektrode, in Aufsicht;
- Fig.7
- eine schematische Darstellung eines erfindungsgemässen Mikro-Relais mit kosinusförmigem bistabilen Element und gestufter Gegenelektrode und zweiteiligem beweglichen Teil des zweiten Mikro-Elementes, in Aufsicht;
- Fig. 8
- eine schematische Darstellung eines erfindungsgemässen Wechselschalt-Relais mit monostabilem zweiten Mikro-Element und NO- und NC-Anschlüssen, in Aufsicht;
- Fig. 9
- eine schematische Darstellung eines erfindungsgemässen Wechselschalt-Relais mit bistabilem zweiten Mikro-Element und NO- und NC-Anschlüssen, in Aufsicht;
- Fig. 10a
- eine schematische Darstellung eines erfindungsgemässen Mikro-Relais mit NC-Anschluss, Zustand: erstes Mikro-Element in Initialposition; in Aufsicht;
- Fig. 10b
- eine schematische Darstellung eines erfindungsgemässen Mikro-Relais mit NC-Anschluss, Zustand: erstes Mikro-Element in Arbeitsposition, zweites Mikro-Element in Ausschaltposition; in Aufsicht;
- Fig. 10c
- eine schematische Darstellung eines erfindungsgemässen Mikro-Relais mit NC-Anschluss, Zustand: erstes Mikro-Element in Arbeitsposition, zweites Mikro-Element in Einschaltposition; in Aufsicht;
- Fig. 11a
- eine schematische Darstellung eines erfindungsgemässen horizontal arbeitenden Mikro-Relais mit NC-Anschluss, geschnittene Seitenansicht;
- Fig. 11b
- eine schematische Darstellung eines erfindungsgemässen horizontal arbeitenden Mikro-Relais mit NC-Anschluss, in Aufsicht;
- Es ist möglich, das MEMS nicht spiegelsymmetrisch aufzubauen.
- Man kann auf die Fixkontakte 17,18 verzichten und hat dann ein NC-Anschluss-Mikro-Relais.
- Man kann auf die Mikro-Elemente 19,20 verzichten und hat dann ein NO-Anschluss-Mikro-Relais.
- Wenn auf die Fixkontakte 17,18 oder auf die Mikro-Elemente 19,20 verzichtet wird, reicht es, wenn der Kontaktbereich 16 des zweiten Mikro-Elementes 2 nur auf einer Seite elektrisch leitfähig ist.
- Man kann die Mikro-Elemente 1,1' mit (angepassten, optional: gestuften) Elektroden 9 versehen (siehe Fig. 3 bis Fig. 7).
- Man kann die Kontaktierungselektroden 21,22 anders ausbilden; oder ganz auf sie verzichten und dann mittels des vorzugsweise elektrisch leitend beschichteten Schaltteils den Kontaktteil 16 des zweiten Mikro-Elementes 2 kontaktieren.
- Es ist möglich, die Mikro-Elemente 1,1' auf der anderen Seite des zweiten Mikro-Elementes 2 anzuordnen, also in dem Bereich des Substrates S, der auf der den Fixkontakten 17,18 abgewandten Seite des zweiten Mikro-Elementes 2 liegt. Dann ist das Mikro-Relais durch elektrostatische Abstossungskäfte schaltbar.
- Es ist auch möglich, das erste Mikro-Element 1 in einem anderen Bereich (des Substrates S, bezüglich des zweiten Mikro-Elementes 2) anzuordnen als das dritte Mikro-Element 1'.
- Man kann auf das dritte Mikro-Element 1' verzichten und nur das erste Mikro-Element 1 als elektrostatische Gegenelektrode zu dem zweiten Mikro-Element 2 als beweglicher Elektrode einsetzen.
- Es ist möglich, das MEMS nicht spiegelsymmetrisch aufzubauen.
- Man kann auf die Fixkontakte 17,18 verzichten.
- Man kann auf die Mikro-Elemente 19,20 verzichten.
- Wenn auf die Fixkontakte 17,18 oder auf die Mikro-Elemente 19,20 verzichtet wird, reicht es, wenn der Kontaktbereich 16 des zweiten Mikro-Elementes 2 nur auf einer Seite elektrisch leitfähig ist.
- Man kann die Mikro-Elemente 1,1' mit (angepassten, optional: gestuften) Elektroden 9 versehen (siehe Fig. 3 bis Fig. 7).
- Man kann die Mikro-Elemente 23,24 ohne angepasste Elektroden 9 einsetzen.
- Man kann die Kontaktierungselektroden der Mikro-Elemente 19,20 anders ausbilden; oder ganz auf sie verzichten und dann mittels des vorzugsweise elektrisch leitend beschichteten Schaltteils den Kontaktteil 16 des zweiten Mikro-Elementes 2 kontaktieren.
- Es ist möglich, das Mikro-Relais durch elektrostatische Abstossungskäfte zu schalten; oder es mittels elektrostatischer Abstossungskäfte und elektrostatischer Anziehungskäfte zu schalten.
- Man kann auf eines, zwei oder drei der Mikro-Elemente 1,1',23,24 verzichten; insbesondere auf die diagonal einander gegenüberleigenden Mikro-Elemente 1,24 oder die Mikro-Elemente 1',23.
- Wenn ein Schaltvorgang durch Zusammenwirken mindestens zweier Mikro-Elemente 1,1',23,24 mit dem zweiten Mikro-Element 2 erzeugt wird, ist es besonders vorteilhaft, wenn mindestens eine der entsprechenden Schaltspannungen mit einer zeitlicher Verzögerung relativ zu mindestens einer der anderen Schaltspannungen angelegt wird. Dadurch kann die Bewegung, welche der bewegliche Teil 11 des zweiten Mikro-Elementes 2 beim Schaltvorgang macht, unterstützt werden. Insbesondere kann der asymmetrischen Bewegung der zwei parallelen, kosinusförmig gekrümmten Federzungen des zweiten Mikro-Elementes 2 Rechnunng getragen werden. Es können auch entsprechend angepasste zeitliche Schaltspannungsprofile benutzt werden.
- Wenn statt eines kosinusförmigen bistabilen zweiten Mikro-Elementes 2 ein schwingungsbauchförmiges eingesetzt wird, werden vorteilhaft die Fixkontakte 17,18 oder das vierte und/oder fünfte Mikro-Element 19,20 derart angeordnet, dass mindestens einer von diesen für die Asymmetrische Ausbildung des Schwingungsbauches sorgt.
- 1
- erstes Mikro-Element
- 1'
- drittes Mikro-Element
- 2
- zweites Mikro-Element
- 3
- erste Oberfläche (des ersten Mikro-Elementes); der zweiten Oberfläche zugewandt
- 3a
- erste Fläche (des ersten Mikro-Elementes); der zweiten Fläche zugewandt
- 3b
- erste Beschichtung (der ersten Fläche)
- 3'
- dritte Oberfläche (des dritten Mikro-Elementes); der vierten Oberfläche zugewandt
- 3a'
- dritte Fläche (des dritten Mikro-Elementes); der vierten Fläche zugewandt
- 3b'
- dritte Beschichtung (der dritten Fläche)
- 4
- zweite Oberfläche (des zweiten Mikro-Elementes); der ersten Oberfläche zugewandt
- 4a
- zweite Fläche (des zweiten Mikro-Elementes); der ersten Fläche zugewandt
- 4b
- zweite Beschichtung (der zweiten Fläche)
- 4'
- vierte Oberfläche (des zweiten Mikro-Elementes); der dritten Oberfläche zugewandt
- 4a'
- vierte Fläche (des zweiten Mikro-Elementes); der dritten Fläche zugewandt
- 4b'
- vierte Beschichtung (der vierten Fläche)
- 5
- Schaltteil des ersten Mikro-Elementes
- 6
- erstes Ende des ersten Mikro-Elementes
- 7
- zweites Ende des des ersten Mikro-Elementes
- 8
- Mitte zwischen dem ersten und dem zweiten Ende des ersten Mikro-Elementes
- 9
- (angepasste) Elektrode des ersten Mikro-Elementes
- 10
- erstes festes Ende des zweiten Mikro-Elementes
- 10'
- zweites festes Ende des zweiten Mikro-Elementes
- 11
- beweglicher Teil des zweiten Mikro-Elementes
- 12
- spaltbildende Oberfläche
- 13
- Spalt
- 14
- erster Bereich des beweglichen Teils des zweiten Mikro-Elementes
- 15
- zweiter Bereich des beweglichen Teils des zweiten Mikro-Elementes
- 16,16'
- Kontaktbereich des beweglichen Teils des zweiten Mikro-Elementes
- 17,18
- Fixkontakte
- 17',18'
- Fixkontakte
- 19
- viertes Mikro-Element
- 20
- fünftes Mikro-Element
- 21,22
- Kontaktelektrode
- 23
- sechstes Mikro-Element
- 24
- siebtes Mikro-Element
- 25a
- fünfte Fläche (des sechsten Mikro-Elementes); der sechsten Fläche zugewandt
- 25a'
- siebte Fläche (des siebten Mikro-Elementes); der achten fläche zugewandt
- 26a
- sechste Fläche (des zweiten Mikro-Elementes); der fünften Fläche zugewandt
- 26a'
- achte Fläche (des zweiten Mikro-Elementes); der fünften Fläche zugewandt
- A
- Initialposition
- B
- Arbeitsposition
- A'
- Ausschaltposition (des zweiten Mikro-Elementes)
- B'
- Einschaltposition (des zweiten Mikro-Elementes)
- C,C'
- Kontaktierungselektroden
- D,D'
- Kontaktierungselektroden
- E
- bewegliche Kontaktierungselektrode (des zweiten Mikro-Elementes)
- S
- Substrat
Claims (23)
- Mikro-elektromechanisches System, umfassend ein Substrat (S) sowie ein erstes Mikro-Element (1) und ein zweites Mlkro-Element (2), wobei(a) das erste Mikro-Element (1) und das zweite Mikro-Element (2) mit dem Substrat (S) verbunden sind und(b) das erste Mikro-Element (1) eine erste Fläche (3a) aufweist und das zweite Mikro-Element (2) eine zweite Fläche (4a) aufweist, welche Flächen (3a,4a) einander zugewandt sind und durch ein Strukturierungsverfahren erzeugt sind,
(d) dass das erste Mikro-Element (1) einen Schaltteil (5) beinhaltet, durch den es bistabil zwischen einer Initialposition (A) und einer Arbeitsposition (B) schaltbar ist, wobei
(e) der Abstand zwischen der ersten Fläche (3a) und der zweiten Fläche (4a) in der Arbeitsposition (B) des ersten Mikro-Elementes (1) kleiner als ein durch das Strukturierungsverfahren erzeugbarer Minimalabstand zwischen der ersten Fläche (3a) und der zweiten Fläche (4a) ist. - Mikro-elektromechanisches System gemäss Anpruch 1, dadurch gekennzeichnet,(a) dass das erste Mikro-Element (1) eine erste Oberfläche (3) aufweist, die gleich der ersten Fläche (3a) ist oder, wenn die erste Fläche (3a) mit einer ersten Beschichtung (3b) versehen ist, gleich der Oberfläche dieser Beschichtung (3b) ist, und(b) dass das zweite Mikro-Element (2) eine zweite Oberfläche (4) aufweist, die gleich der zweiten Fläche (4a) ist oder, wenn die zweite Fläche (4a) mit einer zweiten Beschichtung (4b) versehen ist, gleich der Oberfläche dieser Beschichtung (4b) ist.
- Mikro-elektromechanisches System gemäss Anpruch 2, wobei(a) das zweite Mikro-Element (2) ein mit dem Substrat (S) fest verbundenes erstes festes Ende (10) sowie einen beweglichen Teil (11) aufweist, dadurch gekennzeichnet,(b) dass die erste Oberfläche (3) und die zweite Oberfläche (4) elektrisch nichtleitend sind, und(c) dass die erste Oberfläche (3) und die zweite Oberfläche (4) in der Arbeitsposition (B) Berührungsstellen aufweisen, und(d) dass das zweite Mikro-Element (2) dadurch von einer Ausschaltposition (A') in eine Einschaltposition (B') schaltbar ist, dass in der Arbeitsposition (B) des ersten Mikro-Elementes (1) der bewegliche Teil (11) des zweiten Mikro-Elementes (2) durch elektrostatische Kräfte zwischen dem ersten Mikro-Element (1) und dem zweiten Mikro-Element (2) bewegbar ist.
- Mikro-elektromechanisches System gemäss Anpruch 3, dadurch gekennzeichnet,(a) dass das erste Mikro-Elenlent (1) eine Elektrode (9) umfasst, welche Elektrode (9) die erste Oberfläche (3) beinhaltet, und(b) dass die Elektrode (9) und das zweite Mikro-Element (2) derart ausgebildet sind, dass sich in der Einschaltposition (B') des zweiten Mikro-Elementes (2) die erste Oberfläche (3) und die zweite Oberfläche (4) vollflächig berühren.
- Mikro-elektromechanisches System gemäss Anpruch 4, dadurch gekennzeichnet, dass die Elektrode (9) eine spaltbildende Oberfläche (12) aufweist, die derart ausgebildet ist, dass sie stufenartig gegenüber der ersten Oberfläche (3) zurückversetzt ist und mit dem zweiten Mikro-Element (2) einen Spalt (13) einschliesst, wenn sich das erste Mikro-Element (1) in der Arbeitsposition (B) und sich das zweite Mikro-Element (2) in der Einschaltposition (B') befindet.
- Mikro-elektromechanisches System gemäss einem der Anprüche 3 bis 5, dadurch gekennzeichnet, dass der bewegliche Teil (11) des zweite Mikro-Elementes (2) einen ersten Bereich (14) und einen zweiten Bereich (15) aufweist, wobei der erste Bereich (14)zwischen dem zweiten Bereich (15) und dem ersten festen Ende (10) des zweiten Mikro-Elementes (2) angeordnet ist,einen Teil der zweiten Oberfläche (4) umfasst, undweniger steif ausgebildet ist als der zweite Bereich (15).
- Mikro-elektromechanisches System gemäss einem der Anprüche 3 bis 5, dadurch gekennzeichnet,(a) dass das mikro-elektromechanische System zwei fest mit dem Substrat verbundene Fixkontakte (17,18) aufweist, und(b) dass der bewegliche Teil (11) des zweiten Mikro-Elementes (2) einen elektrisch leitfähigen Kontaktbereich (16) aufweist,welcher Kontaktbereich (16) im Bereich eines dem ersten festen Ende (10) des zweiten Mikro-Elementes (2) gegenüberliegenden Endes des zweiten Mikro-Elementes (2) angeordnet ist, unddurch welchen Kontaktbereich (16) in der Einschaltposition (B') des zweiten Mikro-Elementes (2) die beiden Fixkontakte (17,18) leitend miteinander verbunden sind.
- Mikro-elektromechanisches System gemäss Anpruch 7, dadurch gekennzeichnet,(a) dass das mikro-elektromechanische System ein drittes Mikro-Element (1') umfasst,welches bistabil schaltbar ist,welches mit dem Substrat (S) verbunden ist, undwelches in einem Bereich angeordnet ist, der auf der dem ersten Mikro-Element (1) abgewandten Seite des zweiten Mikro-Elementes (2) liegt, und(b) dass das mikro-elektromechanische System zwei weitere Fixkontakte (17',18') aufweist, welche weiteren Fixkontakte (17',18') mit dem Substrat (S) fest verbunden sind und in einem Bereich angeordnet sind, der auf der den Fixkontakten (17,18) abgewandten Seite des zweiten Mikro-Elementes (2) liegt,(c) dass der bewegliche Teil (11) des zweiten Mikro-Elementes (2) einen weiteren elektrisch leitfähigen Kontaktbereich (16') aufweist, welcher im Bereich eines dem ersten festen Ende (10) des zweiten Mikro-Elementes (2) gegenüberliegenden Endes des zweiten Mikro-Elementes (2), auf der dem Kontaktbereich (16) abgewandten Seite des zweiten Mikro-Elementes (2) angeordnet ist, und(d) wobei das dritte Mikro-Element (1') in analoger Weise mit dem zweiten Mikro-Element (2) und mit den weiteren Fixkontakten (17',18') zusammenwirkt wie das erste Mikro-Element (1) mit dem zweiten Mikro-Element (2) und mit den Fixkontakten (17,18) zusammenwirkt.
- Mikro-elektromechanisches System gemäss Anpruch 6 und 7 oder gemäss Anpruch 6 und 8, dadurch gekennzeichnet, dass der Kontaktbereich (16) im zweiten Bereich (15) des beweglichen Teils (11) des zweiten Mikro-Elementes (2) angeordnet ist.
- Mikro-elektromechanisches System gemäss Anpruch 1, dadurch gekennzeichnet,(a) dass das mikro-eiektromechanische System ein drittes Mikro-Element (1') umfasst, dasmit dem Substrat (S) verbunden ist undeine dritte Fläche (3a') aufweist,(b) dass das zweite Mikro-Element (2) einen Schaltteil beinhaltet, welcherein mit dem Substrat (S) fest verbundenes erstes festes Ende (10),ein mit dem Substrat (S) fest verbundenes zweites festes Ende (10'),einen zwischen diesen beiden festen Enden (10,10') angeordneten beweglichen Teil (11) undeine vierte Fläche (4a')(c) durch welchen Schaltteil das zweite Mikro-Element (2) zwischen einer Ausschaltposition (A') und einer Einschaltposition (B') schaltbar ist,
wobei(d) der bewegliche Teil (11) des zweiten Mikro-Elementes (2) einen elektrisch leitfähigen Kontaktbereich (16) umfasst,(e) die zweite Fläche (4a) zwischen dem ersten festen Ende (10) und dem Kontaktbereich (16) angeordnet ist, und(f) die vierte Fläche (4a') zwischen dem zweiten festen Ende (10') und dem Kontaktbereich (16) angeordnet ist,(g) die dritte Fläche (3a') und die vierte Fläche (4a') durch das Strukturierungsverfahren erzeugt sind und einander zugewandt sind, und(h) dass das dritte Mikro-Element (1') einen Schaltteil beinhaltet, durch den es bistabil zwischen einer Initialposition (A) und einer Arbeitsposition (B) schaltbar ist, und(i) dass der Abstand zwischen der dritten Fläche (3a') und der vierten Fläche (4a') in der Arbeitsposition (B) des dritten Mikro-Elementes (1') kleiner als ein durch das Strokturierungsverfahren erzeugbarer Minimalabstand zwischen der dritten Fläche (3a') und der vierten Fläche (4a') ist. - Mikro-elektromechanisches System gemäss Anpruch 10, dadurch gekennzeichnet,(a) dass das dritte Mikro-Element (1') eine dritte Oberfläche (3') aufweist, die gleich der dritten Fläche (3a') ist oder, wenn die dritte Fläche (3a') mit einer dritten Beschichtung (3b') versehen ist, gleich der Oberfläche dieser Beschichtung (3b') ist, und(b) dass das zweite Mikro-Element (2) eine vierte Oberfläche (4') aufweist, die gleich der vierten Fläche (4a') ist oder, wenn die vierte Fläche (4a') mit einer vierten Beschichtung (4b') versehen ist, gleich der Oberfläche dieser Beschichtung (4b') ist.
- Mikro-elektromechanisches System gemäss Anpruch 11, dadurch gekennzeichnet,(a) dass das mikro-elektromechanische System zwei fest mit dem Substrat (S) verbundene Fixkontakte (17,18) beinhaltet,(b) dass das zweite Mikro-Element (2) dadurch von seiner Ausschaltposition (A') in seine Einschaltposition (B') schaltbar ist, dass in der Arbeitsposition (B) des ersten Mikro-Elementes (1) und des dritten Mikro-Elementes (1') der bewegliche Teil (11) des zweiten Mikro-Elementes (2) durch elektrostatische Kräfte zwischen dem ersten Mikro-Element (1) und dem zweiten Mikro-Element (2) und zwischen dem dritten Mikro-Element (1') und dem zweiten Mikro-Element (2) elastisch bewegbar ist, und(c) dass in der Einschaltposition (B') des zweiten Mikro-Elementes (2) die beiden Fixkontakte (17,18) durch den Kontaktbereich (16) leitend miteinander verbunden sind.
- Mikro-elektromechanisches System gemäss Anpruch 12, dadurch gekennzeichnet,(a) dass das mikro-elektromechanische Systemein viertes Mikro-Element (19) undein fünftes Mikro-Element (20)(b) welche Mikro-Elemente (19,20)mit dem Substrat (S) in einem Bereich verbunden sind, der auf der den Fixkontakten (17,18) abgewandten Seite des zweiten Mikro-Elementes (2) liegt,Schaltteile beinhalten, durch die sie bistabil zwischen einer Initialposition (A) und einer Arbeitsposition (B) schaltbar sind, undje eine mit einer elektrisch leitfähigen Beschichtung versehene Kontaktelektrode (21,22) aufweisen, und(c) dass in der Ausschaltposition (A') des zweiten Mikro-Elementes (2) In der Arbeitsposition (B) des vierten Mikro-Elementes (19) und des fünften Mikro-Elementes (20) die beiden Kontaktelektroden (21,22) durch den Kontaktbereich (16) elektrisch leitend miteinander verbunden sind.
- Mikro-elektromechanisches System gemäss einem der Anprüche 10 bis 13, dadurch gekennzeichnet, dass das zweite Mikro-Element (2) bistabil elastisch zwischen seiner Ausschaltposition (A') und seiner Einschaltposition (B') schaltbar ist.
- Mikro-elektromechanisches System gemäss Anpruch 14, dadurch gekennzeichnet,(a) dass das mikro-elektromechanische Systemein sechstes Mikro-Element (23) undein siebtes Mikro-Element (24)(b) welche Mikro-Elemente (23,24)mit dem Substrat (S) verbunden sind,auf der Seite des zweiten Mikro-Elementes (2) angeordnet sind, die der zweiten Oberfläche (4) und vierten Oberfläche (4') abgewandt ist,Schaltteile beinhalten, durch die sie bistabil zwischen einer Initialposition (A) und einer Arbeitsposition (B) schaltbar sind,(c) dass das sechste Mikro-Element (23) eine fünfte Fläche (25a) aufweist,(d) dass das zweite Mikro-Element (2) eine sechste Fläche (26a) umfasst, die auf der der zweiten Oberfläche (4) abgewandten Seite des zweiten Mikro-Elementes (2) zwischen dem ersten festen Ende (10) und dem Kontaktbereich (16) angeordnet ist,(e) wobei die fünfte Fläche (25a) und die sechste Fläche (26a) einander zugewandt sind und durch das Strukturierungsverfahren erzeugt sind,(f) dass das siebte Mikro-Element (24) eine siebte Fläche (25a') aufweist,(g) dass das zweite Mikro-Element (2) eine achte Fläche (26a') umfasst, die auf der vierten Oberfläche (4') abgewandten Seite des zweiten Mikro-Elementes (2) zwischen dem zweiten festen Ende (10') und dem Kontaktbereich (16) angeordnet ist,(h) wobei die siebte Fläche (25a') und die achte Fläche (26a') einander zugewandt sind und durch das Strukturierungsverfahren erzeugt sind, und(i) dass der Abstand zwischen der fünften Fläche (25a) und der sechsten Fläche (26a) in der Arbeitsposition (B) des sechsten Mikro-Elementes (23) kleiner als ein durch das Strukturierungsverfahren erzeugbarer Minimalabstand zwischen der fünften Fläche (25a) und der sechsten Fläche (26a) ist, und(j) dass der Abstand zwischen der siebten Fläche (25a') und der achten Fläche (26a') in der Arbeitsposition (B) des siebten Mikro-Elementes (24) kleiner als ein durch das Strukturierungsverfahren erzeugbarer Minimalabstand zwischen der siebten Fläche (25a') und der achten Fläche (25a') ist, und(k) dass das zweite Mikro-Element (2) dadurch von seiner Einschaltposition (B') in seine Ausschaltposltion (A') schaltbar ist, dass in der Arbeitsposition (B) des sechsten Mikro-Elementes (23) und des siebten Mikro-Elementes (24) der bewegliche Teil (11) des zweiten Mikro-Elementes (2) durch elektrostatische Kräfte zwischen dem sechsten Mikro-Element (23) und dem zweiten Mikro-Element (2) und zwischen dem siebten Mikro-Element (24) und dem zweiten Mikro-Element (2) elastisch bewegbar ist.
- Mikro-elektromechanisches System gemäss einem der Anprüche 14 oder 15, wobei(a) das Substrat (S) als flächig ausgedehnter Festkörper mit einer Hauptfläche ausgebildet ist, und(b) die Mikro-Elemente (1,1',2,19,20,23,24) als gerade prismatische Körper ausgebildet sind, deren Grundflächen parallel zu der Hauptfläche ausgerichtet sind, dadurch gekennzeichnet,(c) dass der bewegliche Teil (11) des zweiten Mikro-Elementes (2)als gerader prismatische Körper ausgebildet ist undlateral beweglich ist, und(d) dass die Grundfläche des den beweglichen Teil (11) bildenden geraden prismatischen Körpersin der Ausschaltposition (A') die Form eines symmetrischen Schwingungsbauches undin der Einschaltposition (B') die Form eines asymmetrischen Schwingungsbauches aufweist,zwei parallele kosinusförmige Linien beschreibt, welche in der Mitte (8) zwischen ihren zwei Enden (6,7) miteinander verbunden sind.
- Mikro-elektromechanisches System gemäss einem der Anprüche 1 bis 16, wobei(a) das Substrat (S) als flächig ausgedehnter Festkörper mit einer Hauptfläche ausgebildet ist, und(b) die Mikro-Elemente (1,1',2,19,20,23,24) als gerade prismatische Körper ausgebildet sind, deren Grundflächen parallel zu der Hauptfläche ausgerichtet sind, dadurch gekennzeichnet,(c) dass mindestens ein bistabil zwischen einer Initialposition (A) und einer Arbeitsposition (B) schaltbares Mikro-Element (1,1',2,19,20,23,24) vorhanden ist, dessen Schaltteilein mit dem Substrat (S) fest verbundenes erstes festes Ende,ein mit dem Substrat (S) fest verbundenes zweites festes Ende undeinen zwischen diesen beiden festen Enden angeordneten beweglichen Teil(d) welcher bewegliche Teilals gerader prismatische Körper ausgebildet ist undlateral beweglich ist, und(e) dass die Grundfläche des den beweglichen Teil bildenden geraden prismatischen Körpersin der Ausschaltposition (A') die Form eines symmetrischen Schwingungsbauches undin der Einschaltposition (B') die Form eines asymmetrischen Schwingungsbauches aufweistzwei parallele kosinusförmige Linien beschreibt, welche in der Mitte zwischen ihren zwei Enden miteinander verbunden sind.
- Mikro-elektromechanisches System gemäss Anpruch 3, dadurch gekennzeichnet, dass
der bewegliche Teil (11) des zweiten Mikro-Elementes (2) durch Schalten des ersten Mikro-Etementes (1) von der Initialposition (A) in der Arbeitsposition (B) elastisch verformbar ist. - Mikro-elektromechanisches System gemäss Anpruch 18, dadurch gekennzeichnet, dass(a) dass das mikro-etektromechanische System zwei fest mit dem Substrat verbundene Fixkontakte (17,18) aufweist, und(b) dass der bewegliche Teil (11) des zweiten Mikro-Elementes (2) einen elektrisch leitfähigen Kontaktbereich (16) aufweist,welcher Kontaktbereich (16) im Bereich eines dem ersten festen Ende (10) des zweiten Mikro-Elementes (2) gegenüberliegenden Endes des zweiten Mikro-Elementes (2) angeordnet ist, unddurch welchen Kontaktbereich (16) in der Ausschaltposition (A') des zweiten Mikro-Elementes (2) die beiden Fixkontakte (17,18) leitend miteinander verbunden sind.
- Mikro-elektromechanisches System gemäss einem der Anprüche 1 bis 9 oder 18 oder 19, wobei(a) das Substrat (S) als flächig ausgedehnter Festkörper mit einer Hauptfläche ausgebildet ist, dadurch gekennzeichnet,(b) dass der Schaltteil (5) des ersten Mikro-Elementes (1) horizontal beweglich ist, und(c) dass der bewegliche Teil (11) des zweiten Mikro-Elementes (2) horizontal beweglich ist.
- Verfahren zur Herstellung eines mikro-elektromechanischen Systems, in welchem Verfahren(a) aus einem Substrat (S) ein erstes mit dem Substrat verbundenes Mikro-Element (1) erzeugt wird, und(b) aus einem Substrat ein zweites mit dem Substrat verbundenes Mikro-Element (2) erzeugt wird, und(c) unter Einsatz eines Strukturierungsverfahrens eine erste Fläche (3a) des ersten Mikro-Elementes (1) und eine zweite Fläche (4a) des zweiten Mikro-Elementes (2) geformt werden, welche Flächen (3a,4a) einander zugewandt und voneinander beabstandet sind,
dadurch gekennzeichnet,(d) dass das zweite Mikro-Element (2) derart geformt wird, dass es einen beweglichen Teil (11) aufweist,(e) dass das erste Mikro-Element (1) derart geformt wird, dasses sich in einer Initialposition (A) befindet,es bistabil von der Initialposition (A) in eine Arbeitsposition (B) schaltbar ist, wobei der Abstand der ersten Fläche (3a) von der zweite Fläche (4a) in der Arbeitsposition (B) kleiner ist als ein durch das Strukturierungsverfahren erzeugbarer Minimalabstand zwischen der ersten Fläche (3a) und der zweite Fläche (4a), und(f) dass nach Formung der ersten Fläche (3a) und der zweiten Fläche (4a) durch das Strukturierungsverfahren das erste Mikro-Element (1) in die Arbeitsposition (B) geschaltet wird. - Herstellungsverfahren nach Anspruch 21, dadurch gekennzeichnet, dass vor dem Umschalten des ersten Mikro-Elementes (1) in die Arbeitsposition (B) die erste Fläche (3a) des ersten Mikro-Elementes (1) mit einer ersten elektrisch leitenden oder elektrisch nichtleitenden Beschichtung (3b) versehen wird,
und/oder
die zweite Fläche (4a) des zweiten Mikro-Elementes (2) mit einer zweiten elektrisch leitenden oder elektrisch nichtleitenden Beschichtung (4b) versehen wird. - Herstellungsverfahren gemäss einem der Ansprüche 21 bis 22, dadurch gekennzeichnet, dass eines der mikro-elektromechanischen Systeme gemäss einem der Ansprüche 1 bis 20 hergestellt wird.
Priority Applications (1)
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EP02796487A EP1468436B1 (de) | 2002-01-18 | 2002-12-23 | Mikro-elektromechanisches system und verfahren zu dessen herstellung |
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US1662 | 2002-01-18 | ||
PCT/US2002/001662 WO2002058089A1 (en) | 2001-01-19 | 2002-01-18 | Bistable actuation techniques, mechanisms, and applications |
WOPCT/US02/01662 | 2002-01-18 | ||
EP02405334A EP1357571A1 (de) | 2002-04-24 | 2002-04-24 | Mikro-elektromechanisches System und Verfahren zu dessen Herstellung |
EP02405334 | 2002-04-24 | ||
EP02796487A EP1468436B1 (de) | 2002-01-18 | 2002-12-23 | Mikro-elektromechanisches system und verfahren zu dessen herstellung |
PCT/CH2002/000722 WO2003060940A1 (de) | 2002-01-18 | 2002-12-23 | Mikro-elektromechanisches system und verfahren zu dessen herstellung |
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EP1468436A1 EP1468436A1 (de) | 2004-10-20 |
EP1468436B1 true EP1468436B1 (de) | 2005-09-14 |
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EP02405334A Withdrawn EP1357571A1 (de) | 2002-01-18 | 2002-04-24 | Mikro-elektromechanisches System und Verfahren zu dessen Herstellung |
EP02796487A Expired - Lifetime EP1468436B1 (de) | 2002-01-18 | 2002-12-23 | Mikro-elektromechanisches system und verfahren zu dessen herstellung |
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EP (2) | EP1357571A1 (de) |
AT (1) | ATE304736T1 (de) |
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KR100703140B1 (ko) | 1998-04-08 | 2007-04-05 | 이리다임 디스플레이 코포레이션 | 간섭 변조기 및 그 제조 방법 |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US7532195B2 (en) | 2004-09-27 | 2009-05-12 | Idc, Llc | Method and system for reducing power consumption in a display |
US7446927B2 (en) | 2004-09-27 | 2008-11-04 | Idc, Llc | MEMS switch with set and latch electrodes |
JP2008515150A (ja) * | 2004-09-27 | 2008-05-08 | アイディーシー、エルエルシー | 変形する薄膜を備えたmemsスイッチ |
US7916980B2 (en) | 2006-01-13 | 2011-03-29 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
EP1850360A1 (de) | 2006-04-26 | 2007-10-31 | Seiko Epson Corporation | Mikroschalter mit einem ersten betätigbaren Teil und mit einem zweiten Kontaktteil |
US7724417B2 (en) | 2006-12-19 | 2010-05-25 | Qualcomm Mems Technologies, Inc. | MEMS switches with deforming membranes |
US8022896B2 (en) | 2007-08-08 | 2011-09-20 | Qualcomm Mems Technologies, Inc. | ESD protection for MEMS display panels |
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GB9309327D0 (en) * | 1993-05-06 | 1993-06-23 | Smith Charles G | Bi-stable memory element |
DE69733125T2 (de) * | 1996-02-10 | 2006-03-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Bistabiler microantrieb mit gekoppelten membranen |
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2002
- 2002-04-24 EP EP02405334A patent/EP1357571A1/de not_active Withdrawn
- 2002-12-23 EP EP02796487A patent/EP1468436B1/de not_active Expired - Lifetime
- 2002-12-23 WO PCT/CH2002/000722 patent/WO2003060940A1/de not_active Application Discontinuation
- 2002-12-23 AU AU2002361920A patent/AU2002361920A1/en not_active Abandoned
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AU2002361920A1 (en) | 2003-07-30 |
ATE304736T1 (de) | 2005-09-15 |
EP1357571A1 (de) | 2003-10-29 |
WO2003060940A1 (de) | 2003-07-24 |
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