AU2002361920A1 - Micro-electromechanical system and method for production thereof - Google Patents

Micro-electromechanical system and method for production thereof

Info

Publication number
AU2002361920A1
AU2002361920A1 AU2002361920A AU2002361920A AU2002361920A1 AU 2002361920 A1 AU2002361920 A1 AU 2002361920A1 AU 2002361920 A AU2002361920 A AU 2002361920A AU 2002361920 A AU2002361920 A AU 2002361920A AU 2002361920 A1 AU2002361920 A1 AU 2002361920A1
Authority
AU
Australia
Prior art keywords
micro
electromechanical system
production
elements
bistable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002361920A
Inventor
Ralf Strumpler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ABB Research Ltd Switzerland
Original Assignee
ABB Research Ltd Sweden
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US2002/001662 external-priority patent/WO2002058089A1/en
Application filed by ABB Research Ltd Sweden filed Critical ABB Research Ltd Sweden
Publication of AU2002361920A1 publication Critical patent/AU2002361920A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/50—Means for increasing contact pressure, preventing vibration of contacts, holding contacts together after engagement, or biasing contacts to the open position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate

Abstract

The micro-electromechanical system has a substrate (S) and a pair of micro-elements (1,2) having facing surfaces (3a,4a) generated via a structuring method with a minimum separation characteristic. One of the micro-elements is bistable and is switched into a second bistable state in which the separation of the surfaces is less than the minimum separation characteristic. An Independent claim for a manufacturing method for a micro-electromechanical system is also included.
AU2002361920A 2002-01-18 2002-12-23 Micro-electromechanical system and method for production thereof Abandoned AU2002361920A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
PCT/US2002/001662 WO2002058089A1 (en) 2001-01-19 2002-01-18 Bistable actuation techniques, mechanisms, and applications
AU2002236816 2002-01-18
EP02405334A EP1357571A1 (en) 2002-04-24 2002-04-24 Microelectromechanical system and its method of manufacture
EP02405334.0 2002-04-24
PCT/CH2002/000722 WO2003060940A1 (en) 2002-01-18 2002-12-23 Micro-electromechanical system and method for production thereof

Publications (1)

Publication Number Publication Date
AU2002361920A1 true AU2002361920A1 (en) 2003-07-30

Family

ID=28686037

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002361920A Abandoned AU2002361920A1 (en) 2002-01-18 2002-12-23 Micro-electromechanical system and method for production thereof

Country Status (4)

Country Link
EP (2) EP1357571A1 (en)
AT (1) ATE304736T1 (en)
AU (1) AU2002361920A1 (en)
WO (1) WO2003060940A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
JP2008515150A (en) * 2004-09-27 2008-05-08 アイディーシー、エルエルシー MEMS switch with deformable thin film
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
EP1850360A1 (en) 2006-04-26 2007-10-31 Seiko Epson Corporation Microswitch with a first actuated portion and a second contact portion
US7724417B2 (en) 2006-12-19 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US8022896B2 (en) 2007-08-08 2011-09-20 Qualcomm Mems Technologies, Inc. ESD protection for MEMS display panels

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9309327D0 (en) * 1993-05-06 1993-06-23 Smith Charles G Bi-stable memory element
US6168395B1 (en) * 1996-02-10 2001-01-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Bistable microactuator with coupled membranes

Also Published As

Publication number Publication date
EP1468436B1 (en) 2005-09-14
EP1357571A1 (en) 2003-10-29
ATE304736T1 (en) 2005-09-15
EP1468436A1 (en) 2004-10-20
WO2003060940A1 (en) 2003-07-24

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase