DE10225985A1 - Method and device for the plasma treatment of workpieces - Google Patents

Abstract

The method and the device are used for the plasma treatment of workpieces. The workpiece is inserted into an at least partially evacuable chamber of a treatment station and the workpiece is positioned within the treatment station by a holding element. At least one operating device is at least partially acted upon by a conveyor device which is moved together with the treatment station on a closed and rotating transport path.

Description

The invention relates to a method for plasma treatment of workpieces in which the workpiece is at least in one partially evacuable plasma chamber Treatment station is used and in which the Workpiece within the treatment station of one Holding element is positioned.

The invention also relates to a device for Plasma treatment of workpieces that have at least one evacuable plasma chamber for receiving the workpieces and in which the plasma chamber in the area of a Treatment station is arranged, as well as at which the Plasma chamber from a chamber floor, a chamber lid and a lateral chamber wall is limited and at least one holding element for positioning the Has workpiece.

Such methods and devices are, for example used to make plastics with surface coatings Mistake. In particular, there are already such Methods and devices known to make inner or outer To coat surfaces of containers used for Packing of liquids are provided. About that devices for plasma sterilization are also known.

In PCT-WO 95/22413 a plasma chamber is used Inside coating of bottles made of PET described. The too coating bottles are made by a movable Floor lifted into a plasma chamber and in the area a bottle mouth with an adapter brought. Evacuation can occur through the adapter of the bottle interior. In addition, by a hollow lance into the interior of the adapter Bottles introduced to supply process gas. An ignition of the plasma is done using a microwave.

From this publication it is already known a plurality of plasma chambers on a rotating wheel to arrange. This will result in a high production rate of Bottles supported per unit of time.

In EP-OS 10 10 773 a feed device explained to evacuate a bottle interior and with To supply process gas. In PCT-WO 01/31680 a Plasma chamber described, in which the bottles of one movable lid that was previously introduced with a Mouth area of the bottles was connected.

PCT-WO 00/58631 also already shows the arrangement of plasma stations on a rotating wheel and describes a group for such an arrangement Assignment of vacuum pumps and plasma stations to one favorable evacuation of the chambers and the interior of the Support bottles. In addition, the Coating of several containers in one Plasma station or a common cavity mentioned.

Another arrangement for performing a Internal coating of bottles is described in PCT-WO 99/17334 described. In particular, an arrangement of a Microwave generator above the plasma chamber and a Vacuum and equipment supply through a bottom of the Plasma chamber described through.

In the vast majority of the known methods, container layers made of silicon oxides with the general chemical formula SiO _x are used to improve the barrier properties of the thermoplastic plastic material. In addition, portions of carbon, hydrogen and nitrogen can also be contained in the barrier layers produced in this way. Barrier layers of this type prevent oxygen from entering the packaged liquids and escape of carbon dioxide in the case of liquids containing CO ₂ .

The previously known methods and devices are still not adequate for one Mass production to be used in both low coating price per workpiece as well as a high one Production speed must be achieved.

The object of the present invention is therefore a To specify methods of the type mentioned in the introduction, that a supply of resources to the treatment station compact design, short process idle times and large Reliability is supported.

This object is achieved in that at least one resource at least partially from a conveyor is acted on together with the treatment station on a closed and circulating transport route is moved.

Another object of the present invention is a Device of the type mentioned in the introduction construct a resource supply to the Plasma chamber is supported with a compact structure.

This object is achieved in that the Plasma chamber and at least one conveyor for one Equipment on a rotating support device are arranged.

Due to the common arrangement of the plasma chamber and the Conveyor for the equipment on one revolving support device, it is possible that Operating resources in the required form in immediate Provide proximity to the plasma chamber. It will a compact structure supports, moreover, can very short connecting lines are used. Flow losses along long lines are about also due to the spatial density relative to each other Arrangement of the conveyor and the plasma chamber avoided so that short process idle times are possible become.

A quick achievement of those for plasma treatment necessary physical conditions supports that a negative pressure from the conveyor is produced.

A quick evacuation is also possible supports that from at least two funding agencies at least two different negative pressures are generated

A good compromise between a small one too transporting weight and a low deceleration Provision of resources is provided by that for at least one conveyor of at least an external preliminary stage a preconditioned one Operating resources are provided.

A combination of stationary and moving components can be done in that the equipment via a Swivel coupling directed into the area of the conveyor becomes.

This creates an advantageous center of gravity achieved that the conveyor of the resources of a height level of the conveyor to a higher one Level of the plasma station transported.

For connecting a plurality of plasma stations suggested that at least two plasma stations over a distributor with at least one common Conveyor are connected.

An equipment feed with short Connecting lines can be achieved in that at least one item of equipment from at least one Distributor at the level of a chamber base Plasma station is distributed.

In particular, it is also contemplated that a supply of the Resources from the distributor towards the Plasma stations above and straight from the distributor connecting leads running radially outwards is carried out.

A compact distribution of different resources is supported by the fact that at least two Resources on different distribution levels to the Plasma stations are directed.

When using rotating support devices it proves to be particularly advantageous that the Conveyors in the area of the support device such be arranged that a substantially balanced Weight distribution is provided.

A combination of a favorable weight distribution as well good accessibility can thereby be provided be that along a circumference of the support alternating conveyors and distribution cabinets for electrical connections are positioned.

A mechanically very stable arrangement that is also a exactly reproducible implementation of all Process steps supported can be achieved that the conveyor together with the plasma station on a rotating plasma wheel as a carrying device is positioned.

A typical application is that a workpiece is treated from a thermoplastic.

In particular, it is thought that an interior of the Workpiece is treated.

This makes it an extensive area of application concluded that a container is treated as a workpiece.

In particular, it is thought that as a workpiece a bottle of beverage is being treated.

A high production rate with great reliability and high product quality can be achieved in that the at least one plasma station from a rotating one Plasma wheel from input positioning to one Output positioning is transferred.

An increase in production capacity at only slightly increased equipment costs can be achieved by a plasma station multiple cavities are provided.

A mechanically highly resilient embodiment is provided that the conveyors of a wheel ring-like plasma wheel can be transported.

A typical application is defined as: Plasma treatment a plasma coating is carried out.

In particular, it is thought that the plasma treatment performed using a low pressure plasma becomes.

When coating plastic workpieces it proves advantageous that a Plasma polymerization is carried out.

A good surface adhesion is supported by the fact that through the plasma at least partially organic substances be deposited.

Particularly advantageous use properties This allows workpieces for packaging food be achieved by the plasma at least in part inorganic substances are separated.

When it comes to the treatment of packaging, this is particularly important thought that through the plasma a substance for Improvement of the barrier properties of the workpiece is deposited.

To support a high quality of use proposed that in addition an adhesion promoter to Improving adherence of the substance on one Surface of the workpiece is deposited.

High productivity can be supported that at least two workpieces in a common cavity be treated at the same time.

Another area of application is that as Plasma treatment performed a plasma sterilization becomes.

It is also contemplated that as a plasma treatment Surface activation of the workpiece is carried out.

This enables a compact and heavy-duty construction achieved that the plasma wheel with a support ring is provided, which is a substantially c-shaped Has vertical profile.

This creates a particularly low arrangement of the center of gravity achieved that the conveyor on a base leg the support ring is arranged.

A modular basic construction with good accessibility of the individual functional components provided that the plasma stations on a End legs of the support ring are arranged.

Exemplary embodiments of the invention are shown in the drawings shown schematically. Show it:

Fig. 1 is a schematic diagram of a plurality of plasma chambers, which are arranged on a rotating plasma wheel and in which the plasma wheel is coupled to input and output wheels.

Fig. 2 shows an arrangement similar to Fig. 1, wherein the plasma station are each equipped with two plasma chambers,

Fig. 3 is a perspective view of a plasma wheel having a plurality of plasma chambers,

Fig. 4 is a perspective view of a plasma station with a cavity,

Fig. 5 is a front view of the device of FIG. 4 with a closed plasma chamber,

Fig. 6 shows a cross section according to section line VI-VI in Fig. 5,

Fig. 7 is a view corresponding to Fig. 5 with an open plasma chamber,

Fig. 8 is a vertical section according to section line VIII-VIII in Fig. 7,

Fig. 9 is an enlarged representation of the plasma chamber, to be coated bottle according to Fig. 6

Figure 10 has. A perspective view of a supporting means disposed on a rotating plasma resources pumps and also arranged on the plasma wheel plasma stations each with two plasma chambers,

Fig. 11 shows a further representation of a plasma wheel similar to FIG. 10 shown without cabinets and in a partially transparent view,

Fig. 12 shows the plasma wheel according to FIG. 11, in a partially assembled state

Fig. 13 shows the plasma wheel of FIG. 11 with only one plasma station mounted,

Fig. 14, the plasma wheel according to FIG. 13, in a different perspective view and with shown external conveyors for equipment

Fig. 15 is a schematic diagram of another plasma wheel, are arranged at the conveying means for operating means in an upper region in the vertical direction and

Fig. 16 is a partial view of another construction of a plasma wheel, which is rotatably suspended and positioned at the conveying devices for equipment in the vertical direction above the plasma stations.

From the illustration in FIG. 1, a plasma module (1) can be seen which is provided with a rotating plasma wheel (2). A plurality of plasma stations ( 3 ) are arranged along a circumference of the plasma wheel ( 2 ). The plasma stations ( 3 ) are provided with cavities ( 4 ) or plasma chambers ( 17 ) for receiving workpieces ( 5 ) to be treated.

The workpieces ( 5 ) to be treated are fed to the plasma module ( 1 ) in the area of an input ( 6 ) and forwarded via a separating wheel ( 7 ) to a transfer wheel ( 8 ) which is equipped with positionable support arms ( 9 ). The support arms ( 9 ) are arranged pivotably relative to a base ( 10 ) of the upper transfer wheel ( 8 ), so that a change in the distance of the workpieces ( 5 ) can be carried out relative to one another. As a result, the workpieces ( 5 ) are transferred from the transfer wheel ( 8 ) to an input wheel ( 11 ) with a greater distance between the workpieces ( 5 ) relative to one another relative to the separating wheel ( 7 ).

The input wheel ( 11 ) transfers the workpieces ( 5 ) to be treated to the plasma wheel ( 2 ). After the treatment has been carried out, the treated workpieces ( 5 ) are removed from the area of the plasma wheel ( 2 ) by an output wheel ( 12 ) and transferred to the area of an output section ( 13 ).

In the embodiment according to FIG. 2, the plasma stations ( 3 ) are each equipped with two cavities ( 4 ) or plasma chambers ( 17 ). As a result, two workpieces ( 5 ) can be treated at the same time. Basically, it is possible to make the cavities ( 4 ) completely separate from one another, but in principle it is also possible to delimit only partial areas from one another in a common cavity space in such a way that an optimal coating of all workpieces ( 5 ) is ensured. In particular, it is contemplated here to separate the partial cavities from one another at least by means of separate microwave couplings.

Fig. 3 shows a perspective view of a plasma module ( 1 ) with a partially constructed plasma wheel ( 2 ). The plasma stations ( 3 ) are arranged on a support ring ( 14 ) which is designed as part of a rotary connection and is mounted in the area of a machine base ( 15 ). The plasma stations ( 3 ) each have a station frame ( 16 ) which holds plasma chambers ( 17 ). The plasma chambers ( 17 ) have cylindrical chamber walls ( 18 ) and microwave generators ( 19 ).

A rotary distributor ( 20 ) is arranged in a center of the plasma wheel ( 2 ), via which the plasma stations ( 3 ) are supplied with operating resources and energy. Ring lines ( 21 ) can be used in particular for the distribution of operating resources.

The workpieces ( 5 ) to be treated are shown below the cylindrical chamber walls ( 18 ). Lower parts of the plasma chambers ( 17 ) are not shown for the sake of simplicity.

Fig. 4 shows a plasma station ( 3 ) in perspective. It can be seen that the station frame ( 16 ) is provided with guide rods ( 23 ) on which a carriage ( 24 ) for holding the cylindrical chamber wall ( 18 ) is guided. Fig. 4 shows the carriage ( 24 ) with the chamber wall ( 18 ) in a raised state, so that the workpiece ( 5 ) is released.

The microwave generator ( 19 ) is arranged in the upper region of the plasma station ( 3 ). The microwave generator ( 19 ) is connected via a deflection ( 25 ) and an adapter ( 26 ) to a coupling channel ( 27 ) which opens into the plasma chamber ( 17 ). In principle, the microwave generator ( 19 ) can be coupled both directly in the area of the chamber cover ( 31 ) and via a spacer element to the chamber cover ( 31 ) with a predeterminable distance to the chamber cover ( 31 ) and thus in a larger surrounding area of the chamber cover ( 31 ) , The adapter ( 26 ) has the function of a transition element and the coupling channel ( 27 ) is designed as a coaxial conductor. A quartz glass window is arranged in the region of a junction of the coupling channel ( 27 ) in the chamber cover ( 31 ). The deflection ( 25 ) is designed as a waveguide.

The workpiece ( 5 ) is positioned in the area of a sealing element ( 28 ) which is arranged in the area of a chamber base ( 29 ). The chamber base ( 29 ) is designed as part of a chamber base ( 30 ). To facilitate adjustment, it is possible to fix the chamber base ( 30 ) in the area of the guide rods ( 23 ). Another variant is to attach the chamber base ( 30 ) directly to the station frame ( 16 ). With such an arrangement, it is also possible, for example, to design the guide rods ( 23 ) in two parts in the vertical direction.

FIG. 5 shows a front view of the plasma station ( 3 ) according to FIG. 3 in a closed state of the plasma chamber ( 17 ). The carriage ( 24 ) with the cylindrical chamber wall ( 18 ) is lowered compared to the positioning in FIG. 4, so that the chamber wall ( 18 ) has moved against the chamber bottom ( 29 ). The plasma coating can be carried out in this positioning state.

FIG. 6 shows the arrangement according to FIG. 5 in a vertical sectional view. It can be seen in particular that the coupling channel ( 27 ) opens into a chamber cover ( 31 ) which has a laterally projecting flange ( 32 ). A seal ( 33 ) is arranged in the area of the flange ( 32 ) and is acted upon by an inner flange ( 34 ) of the chamber wall ( 18 ). In a lowered state of the chamber wall (18) therethrough, a seal is made of the chamber wall (18) relative to the chamber lid (31). A further seal ( 35 ) is arranged in a lower region of the chamber wall ( 18 ) in order to ensure a seal here also relative to the chamber bottom ( 29 ).

In the positioning shown in FIG. 6, the chamber wall ( 18 ) encloses the cavity ( 4 ), so that both an interior of the cavity ( 4 ) and an interior of the workpiece ( 5 ) can be evacuated. To support a supply of process gas, a hollow lance ( 36 ) is arranged in the area of the chamber base ( 30 ) and can be moved into the interior of the workpiece ( 5 ). The lance ( 36 ) is positioned by a lance slide ( 37 ) which can be positioned along the guide rods ( 23 ). A process gas channel ( 38 ) runs inside the lance slide ( 37 ) and, in the raised position shown in FIG. 6, is coupled to a gas connection ( 39 ) of the chamber base ( 30 ). This arrangement avoids hose-like connecting elements on the lance slide ( 37 ).

Fig. 7 and Fig. 8 show the arrangement of FIG. 5 and FIG 6 in a raised state of the chamber wall (18).. In this position of the chamber wall ( 18 ), it is possible to remove the treated workpiece ( 5 ) from the area of the plasma station ( 3 ) and to insert a new workpiece ( 5 ) to be treated. As an alternative to the positioning of the chamber wall ( 18 ) shown in the drawings in an open state of the plasma chamber ( 17 ) achieved by displacement upwards, it is also possible to carry out the opening process by displacing a structurally modified sleeve-shaped chamber wall downwards in the vertical direction.

In the exemplary embodiment shown, the coupling channel ( 27 ) has a cylindrical design and is arranged essentially coaxially with the chamber wall ( 18 ).

FIG. 9 shows the vertical section according to FIG. 6 in an enlarged partial illustration in the vicinity of the chamber wall ( 18 ). In particular, the overlap of the inner flange ( 34 ) of the chamber wall ( 18 ) over the flange ( 32 ) of the chamber cover ( 31 ) and the holding of the workpiece ( 5 ) by the holding element ( 28 ). In addition, it can be seen that the lance ( 36 ) is guided through a recess ( 40 ) in the holding element ( 28 ).

FIG. 10 shows a plasma module ( 1 ) modified from the representation in FIG. 3. The plasma wheel ( 2 ) is designed here for a circumferential transport of plasma stations ( 3 ), which are each provided with two plasma chambers ( 17 ). For each of the plasma chambers ( 17 ), each of the plasma stations ( 3 ) has two microwave generators ( 19 ), two deflections ( 25 ) and two adapters ( 26 ) which the microwaves for igniting the plasma via coupling channels ( 27 ) into the assigned plasma chambers ( 17 ) initiate. The support ring ( 14 ) of the plasma wheel ( 2 ) has a vertical cross-section with a c-shaped profile with a base leg ( 41 ), a spacer leg ( 42 ) and an end leg ( 43 ). The spacer leg ( 42 ) extends essentially in a vertical direction, the base leg and the end leg ( 43 ) are arranged essentially horizontally. The base leg ( 41 ) and the end leg ( 43 ) extend from the spacer leg ( 42 ) in a radially outward direction.

The plasma stations ( 3 ) are arranged in the vertical direction above the end leg ( 42 ). In the embodiment according to FIG. 10, conveyor devices ( 44 ) for an item of equipment are arranged on the base leg ( 41 ). The equipment is fed to the plasma stations ( 3 ). In the exemplary embodiment shown, the conveying device ( 44 ) is implemented as a vacuum pump. In addition to the conveyor devices ( 44 ), distribution cabinets ( 45 ) for an electrical supply to the plasma stations ( 3 ) are also arranged on the base leg ( 41 ). The arrangement of the conveying devices ( 44 ) and the distribution cabinets ( 45 ) takes place within the receiving space provided by the c-shaped profile of the support ring ( 14 ).

When the plasma wheel ( 2 ) rotates, the arrangement ( 44 ) and the distribution cabinets ( 45 ) rotate together with the plasma stations ( 3 ) as a result of the arrangement explained, and there is also no relative movement between these assemblies. Corresponding connecting lines can thus be implemented in a simple manner.

FIG. 11 shows a slightly modified plasma module ( 1 ) compared to the representation in FIG. 10 in a different representation and with a partially changed illustration of the individual parts. The microwave generators ( 19 ) are positioned differently from the illustration in FIG. 10. In addition, between the lance carriage ( 37 ) and the plasma chambers ( 17 ), the chamber bases ( 30 ) are shown in FIG. 11, in the area of which, in particular, control valves for supplying operating fluid to the plasma stations ( 3 ) can be arranged.

The distribution cabinets ( 45 ) are not shown in Fig. 11, so that a view into the center of the plasma wheel ( 2 ) is possible. It can be seen that a rotary coupling ( 46 ) is arranged approximately at a height level of the conveying devices ( 44 ). The rotary coupling ( 46 ) serves to connect the conveying devices ( 44 ) to external conveying devices ( 47 ). When the plasma stations ( 3 ) are operated with three different negative pressures, namely a first negative pressure, a second negative pressure lower than the first negative pressure and a process negative pressure, the rotary coupling ( 46 ) is implemented as a three-way vacuum rotary introduction. The rotary coupling ( 46 ) can be connected to the external conveying devices ( 47 ) in a simple manner via connecting pipes ( 48 ), some of which run below the machine base ( 15 ). For this purpose, the machine base ( 15 ) has stand elements ( 49 ) which provide a mounting space below the machine base ( 15 ) in that the machine base ( 15 ) is arranged at a vertical distance from an installation surface.

The rotary coupling ( 46 ) is connected via lines ( 50 ) to the respectively assigned conveying devices ( 44 ). The spacer leg ( 42 ) is shown partially transparently in the illustration in FIG. 11, so that the course of the lines ( 50 ) can be seen.

FIG. 12 shows the arrangement according to FIG. 11 in a partially assembled state. In particular, it can be seen that a distributor ( 51 ) is arranged at a height similar to the height of the plasma chambers ( 17 ). In the exemplary embodiment shown, the distributor ( 51 ) is implemented as a three-way distributor. For this purpose, the distributor ( 51 ) has three distribution segments arranged one above the other in the vertical direction. The distribution segments are each connected to the plasma chambers ( 17 ) via connecting lines ( 52 ). In the exemplary embodiment shown, two operating means are fed to the distributor ( 51 ) via a conveyor device ( 44 ). For this purpose, the conveyor devices ( 44 ) are connected to the distributor ( 51 ) via coupling lines ( 53 ). Another operating medium is fed to the distributor ( 51 ) via a riser ( 54 ) directly from the rotary coupling ( 46 ).

FIG. 13 shows the arrangement according to FIG. 12 with only one illustrated plasma station ( 3 ) for further clarification. In particular, the arrangement of the three segments of the distributor ( 51 ) one above the other in the vertical direction and the course of the connecting lines ( 48 ) between the distributor ( 51 ) and the chamber base ( 30 ) can be seen here. The connecting lines ( 52 ) are led directly to valves arranged in the area of the chamber base ( 30 ). In particular, FIG. 13 also illustrates that in the exemplary embodiment shown, the distributor ( 51 ) is carried by the lines ( 52 , 53 ). This ensures good accessibility. But it is also possible to use additional support elements.

FIG. 14 shows the arrangement according to FIG. 13 in a different perspective view and with assigned six external conveying devices ( 47 ). Two vacuum conveying devices ( 47 ) are assigned to each vacuum level. In the exemplary embodiment shown, the conveying devices ( 47 ) provide a negative pressure in the range from approximately 30 mbar to 50 mbar for the first negative pressure stage. This negative pressure is fed to the plasma stations ( 3 ) in the illustrated embodiment without additional conveying devices ( 44 ) on the plasma wheel ( 2 ) directly via the rotary coupling ( 46 ). The negative pressures for the other external conveying devices ( 47 ) are specified as a function of the respective process requirements. In particular, a pressure range of approximately 1 mbar to 10 mbar is envisaged. Rotary vane pumps, Roots pumps or constructions combined from these pump types can be used as conveying devices ( 44 , 47 ). According to a preferred embodiment, Roots pumps are used as conveying devices ( 44 ) arranged on the plasma wheel ( 2 ) and rotary vane pumps as external conveying devices ( 47 ).

In order to reduce unnecessarily long connecting pipes ( 48 ), particular attention is given to positioning the external conveying devices ( 47 ) adjacent to the plasma module ( 1 ). For example, a special pre-stage module can be used for this. The required external conveying devices ( 47 ) can be arranged within such a preliminary stage module and the preliminary stage module can be equipped with standardized connections for connection to the plasma module ( 1 ). This greatly simplifies both assembly and later commissioning.

In the embodiment according to FIG. 14, the two external conveying devices ( 47 ) for the first vacuum stage are connected in parallel relative to one another. The other external conveying devices ( 47 ) for the second vacuum stage, which operates at a lower pressure level relative to the first vacuum stage, and the third vacuum stage for maintaining the vacuum while the treatment is being carried out, are connected in series. This takes into account the fact that it is primarily important to pump out a relatively large volume when generating the relatively higher negative pressure, but in the case of the two further negative pressure levels working at lower pressure levels relative to the first negative pressure level, the desired low pressure is primarily to be achieved, which is due to the series connection is supported.

Fig. 15 shows an embodiment in which the conveyors (44) are arranged at a higher level than the plasma stations (3). Although this leads to a higher center of gravity of the plasma wheel ( 2 ), very good accessibility of the conveyor devices ( 44 ) is provided for this, both during assembly and during subsequent service work. In such an embodiment, coupling to the external conveyor devices ( 47 ) is preferably carried out via connecting pipes ( 48 ) which are initially laid above the plasma module ( 1 ) and are connected to the external conveyor devices ( 47 ) via vertical lines ( 55 ). By arranging the conveyor devices ( 44 ) above the plasma stations ( 3 ), the plasma stations ( 3 ) can be arranged relatively low, so that the workpieces ( 5 ) to be coated can also be input and output at a relatively low height level.

Fig. 16 shows another embodiment of the plasma module (1). The plasma wheel ( 2 ) is suspended here in a support frame ( 56 ). In contrast to the embodiments already explained, a rotary bearing ( 57 ) of the plasma wheel ( 2 ) is not located below the plasma wheel ( 2 ) in the vertical direction, but above the plasma wheel ( 2 ) in the vertical direction. The structure of the plasma station ( 3 ) can basically be retained compared to the other embodiments. Fig. 16 shows the plasma station (3) only in a partial representation without chamber base (30) and without the lance slide (37) with associated components.

In an embodiment according to FIG. 16, a relatively low arrangement of the plasma chambers ( 17 ) can also be maintained when using conveyor devices ( 44 ) arranged on the plasma wheel ( 2 ). In the illustrated embodiment, three conveyor devices ( 44 ) are positioned on the plasma wheel ( 2 ). Relative to a rotary bearing ( 57 ) held by the support frame ( 56 ), the plasma stations ( 3 ) are arranged below the rotary bearing ( 57 ) and the conveyor devices ( 44 ) above the rotary bearing ( 57 ). This high arrangement of the rotary bearing ( 57 ) makes it possible to provide a high level of structural stability despite the high arrangement of the conveying devices ( 44 ).

A typical treatment process is explained below using the example of a coating process and carried out in such a way that the workpiece ( 5 ) is first transported to the plasma wheel ( 2 ) using the input wheel ( 11 ) and that the sleeve-like chamber wall ( 18 ) is inserted in a pushed-up state of the workpiece ( 5 ) into the plasma station ( 3 ). After the insertion process has been completed, the chamber wall ( 18 ) is lowered into its sealed position and, at the same time, both the cavity ( 4 ) and an interior of the workpiece ( 5 ) are evacuated at the same time.

After sufficient evacuation of the interior of the cavity ( 4 ), the lance ( 36 ) is inserted into the interior of the workpiece ( 5 ) and the sealing of the interior of the workpiece ( 5 ) from the interior of the workpiece ( 5 ) is sealed off by a displacement of the sealing element ( 28 ). 4 ) performed. It is also possible to move the lance ( 36 ) into the workpiece ( 5 ) synchronously with the beginning of the evacuation of the interior of the cavity. The pressure in the interior of the workpiece ( 5 ) is then further reduced. In addition, the positioning movement of the lance ( 36 ) is at least partially already carried out parallel to the positioning of the chamber wall ( 18 ). After reaching a sufficiently low vacuum, process gas is introduced into the interior of the workpiece ( 5 ) and the plasma is ignited with the aid of the microwave generator ( 19 ).

In particular, it is intended to use the plasma to deposit both an adhesion promoter on an inner surface of the workpiece ( 5 ) and the actual barrier layer made of silicon oxides. The adhesion promoter can be applied, for example, in a two-stage process before the barrier layer is applied, but it is also conceivable, in a continuous process, to produce at least part of the barrier layer at the same time as the application of at least part of the adhesion promoter.

The interior of the plasma chamber ( 17 ) and the interior of the workpiece ( 5 ) are first evacuated together to a pressure level of approximately 20 mbar to 50 mbar. The pressure in the interior of the workpiece ( 5 ) is then further reduced to approximately 0.1 mbar. A vacuum of about 0.3 mbar is maintained while the treatment process is being carried out.

After the coating process has been completed, the lance ( 36 ) is removed from the interior of the workpiece ( 5 ) and the plasma chamber ( 17 ) and the interior of the workpiece ( 5 ) are ventilated. After reaching the ambient pressure within the cavity ( 4 ), the chamber wall ( 18 ) is raised again in order to remove the coated workpiece ( 5 ) and to enter a new workpiece ( 5 ) to be coated. To enable the workpiece ( 5 ) to be positioned laterally, the sealing element ( 28 ) is moved back into the chamber base ( 3 ) at least in some areas.

As an alternative to the described inner coating of workpieces ( 5 ), outer coatings, sterilizations or surface activations can also be carried out.

The chamber wall ( 18 ), the sealing element ( 28 ) and / or the lance ( 36 ) can be positioned using different drive units. In principle, the use of pneumatic drives and / or electrical drives, in particular in one embodiment as a linear motor, is conceivable. In particular, however, it is contemplated to implement curve control to support exact movement coordination by rotating the plasma wheel ( 2 ). The curve control can be carried out, for example, in such a way that control cams are arranged along a circumference of the plasma wheel ( 2 ), along which curve rollers are guided. The cam rollers are coupled to the components to be positioned.

Claims (57)

1. A method for the plasma treatment of workpieces, in which the workpiece is inserted into an at least partially evacuable chamber of a treatment station and in which the workpiece is positioned within the treatment station by a holding element, characterized in that at least one item of equipment is at least partially conveyed by a conveyor ( 44 ) is applied, which is moved together with the treatment station on a closed and circumferential transport route. 2. The method according to claim 1, characterized in that a negative pressure is generated by the conveyor ( 44 ). 3. The method according to claim 1 or 2, characterized in that at least two different negative pressures are generated by at least two conveyor devices ( 44 ) 4. The method according to any one of claims 1 to 3, characterized in that a preconditioned operating medium is provided for at least one conveyor ( 44 ) by at least one external preliminary stage. 5. The method according to any one of claims 1 to 4, characterized in that the operating medium is passed via a rotary coupling ( 46 ) in the region of the conveyor ( 44 ). 6. The method according to any one of claims 1 to 5, characterized in that the conveyor ( 44 ) transports the operating medium from a height level of the conveyor ( 44 ) to a higher level of the plasma station ( 3 ). 7. The method according to any one of claims 1 to 6, characterized in that at least two plasma stations ( 3 ) via a distributor ( 51 ) with at least one common conveyor ( 44 ) are connected. 8. The method according to any one of claims 1 to 7, characterized in that at least one item of equipment from at least one distributor ( 53 ) is distributed at a level of a chamber base ( 30 ) of the plasma station ( 3 ). 9. The method according to any one of claims 1 to 8, characterized in that a supply of the operating medium from the distributor ( 51 ) in the direction of the plasma stations ( 3 ) via straight and starting from the distributor ( 51 ) radially outward connecting lines ( 52 ) becomes. 10. The method according to any one of claims 1 to 9, characterized in that at least two operating resources are routed to the plasma stations ( 3 ) on different distribution levels. 11. The method according to any one of claims 1 to 10, characterized in that the conveyor devices ( 44 ) are arranged in the region of the support device in such a way that a substantially balanced weight distribution is provided. 12. The method according to any one of claims 1 to 11, characterized in that alternating conveyors ( 44 ) and distribution cabinets ( 45 ) for electrical connections are positioned along a circumference of the support device. 13. The method according to any one of claims 1 to 12, characterized in that the conveyor ( 44 ) is positioned together with the plasma station ( 3 ) on a rotating plasma wheel ( 2 ) as a support device. 14. The method according to any one of claims 1 to 13, characterized in that a workpiece ( 5 ) is treated from a thermoplastic. 15. The method according to any one of claims 1 to 14, characterized in that an interior of a hollow workpiece ( 5 ) is treated. 16. The method according to any one of claims 1 to 15, characterized in that a container is treated as the workpiece ( 5 ). 17. The method according to any one of claims 1 to 16, characterized in that a beverage bottle is treated as the workpiece ( 5 ). 18. The method according to any one of claims 1 to 17, characterized in that the at least one plasma station ( 3 ) from a rotating plasma wheel ( 2 ) is transferred from an input position to an output position. 19. The method according to any one of claims 1 to 18, characterized in that a plurality of cavities ( 4 ) are provided by a plasma station ( 3 ). 20. The method according to any one of claims 1 to 19, characterized in that the conveyor devices ( 44 ) are transported by a wheel ring-like plasma wheel ( 2 ). 21. The method according to any one of claims 1 to 20, characterized characterized in that as a plasma treatment Plasma coating is carried out. 22. The method according to any one of claims 1 to 21, characterized characterized in using the plasma treatment a low pressure plasma is carried out. 23. The method according to any one of claims 1 to 22, characterized characterized in that a plasma polymerization was carried out becomes. 24. The method according to any one of claims 1 to 23, characterized characterized in that at least in part by the plasma organic substances are separated. 25. The method according to any one of claims 1 to 23, characterized characterized in that at least in part by the plasma inorganic substances are separated. 26. The method according to any one of claims 1 to 25, characterized in that a substance for improving the barrier properties of the workpiece ( 5 ) is deposited by the plasma. 27. The method according to claim 26, characterized in that an adhesion promoter is additionally deposited to improve the adherence of the substance on a surface of the workpiece ( 5 ). 28. The method according to any one of claims 1 to 27, characterized in that at least two workpieces ( 5 ) are treated simultaneously in a common cavity. 29. The method according to any one of claims 1 to 20, characterized characterized in that as a plasma treatment Plasma sterilization is carried out. 30. The method according to any one of claims 1 to 20, characterized in that a surface activation of the workpiece ( 5 ) is carried out as a plasma treatment. 31.Device for the plasma treatment of workpieces, which has at least one evacuable plasma chamber for receiving the workpieces and in which the plasma chamber is arranged in the region of a treatment station, and in which the plasma chamber is delimited by a chamber base, a chamber cover and a lateral chamber wall and at least one Holding element for positioning the workpiece, characterized in that the plasma chamber ( 17 ) and at least one conveying device ( 44 ) for an operating medium are arranged on a rotating support device. 32. Apparatus according to claim 31, characterized in that the conveying device ( 44 ) is designed to generate a negative pressure. 33. Apparatus according to claim 31 or 32, characterized in that at least two conveyor devices ( 44 ) are arranged on the support device for generating relatively different negative pressures. 34. Device according to one of claims 31 to 33, characterized in that at least one of the conveyor devices ( 44 ) is connected to at least one external conveyor device ( 47 ) for providing a preconditioned operating medium. 35. Device according to one of claims 31 to 34, characterized in that the conveyor ( 44 ) via a rotary coupling ( 46 ) is connected to an external operating medium supply. 36. Device according to one of claims 31 to 35, characterized in that the conveyor ( 44 ) is arranged at a lower height than the plasma chambers ( 17 ). 37. Device according to one of claims 31 to 36, characterized in that the conveying device ( 44 ) via a distributor ( 51 ) is connected to at least two plasma stations ( 3 ). 38. Device according to one of claims 31 to 37, characterized in that the distributor ( 51 ) is arranged at a level such as a chamber base ( 30 ) of the plasma station ( 3 ). 39. Device according to one of claims 31 to 38, characterized in that the distributor ( 51 ) is connected to the chamber base ( 30 ) via essentially radially outwardly extending connecting lines ( 52 ). 40. Device according to one of claims 31 to 39, characterized in that the distributor ( 51 ) has different distribution levels for the distribution of different operating resources. 41. Device according to one of claims 31 to 40, characterized in that at least two conveyor devices ( 44 ) are arranged substantially balanced on the support device. 42. Device according to one of claims 31 to 41, characterized in that conveying devices ( 44 ) and distribution cabinets ( 45 ) for electrical connections are arranged alternately along a circumference of the carrying device. 43. Device according to one of claims 31 to 42, characterized in that the conveying device ( 44 ) is arranged on a support device designed as a plasma wheel ( 2 ). 44. Device according to one of claims 31 to 43, characterized in that the plasma station ( 3 ) is designed for coating a workpiece ( 5 ) consisting of a thermoplastic material. 45. Device according to one of claims 31 to 44, characterized in that the plasma station ( 3 ) is designed for coating a container-like workpiece ( 5 ). 46. Device according to one of claims 31 to 45, characterized in that the plasma station ( 3 ) is designed for coating an interior of a hollow workpiece ( 5 ). 47. Device according to one of claims 31 to 46, characterized in that the plasma station ( 3 ) is designed for coating a workpiece ( 5 ) designed in the form of a beverage bottle. 48. Device according to one of claims 31 to 47, characterized in that the at least one plasma station ( 3 ) is carried by a rotating plasma wheel ( 2 ). 49. Device according to one of claims 31 to 48, characterized in that a plurality of cavities ( 4 ) are arranged in the region of the plasma station ( 3 ). 50. Device according to one of claims 31 to 49, characterized in that one for providing at least two cavities ( 4 ) provided chamber wall ( 18 ) is arranged positionable. 51. Device according to one of claims 31 to 50, characterized in that the plasma wheel ( 2 ) is designed as a wheel ring. 52. Device according to one of claims 31 to 51, characterized in that the plasma wheel is provided with a support ring (14) (2) having a shaped-c substantially vertical profile. 53. Apparatus according to claim 52, characterized in that the conveying device ( 44 ) is arranged on a base leg ( 41 ) of the support ring ( 14 ). 54. Apparatus according to claim 52 or 53, characterized in that the plasma stations ( 3 ) are arranged on an end leg ( 43 ) of the support ring ( 14 ). 55. Device according to one of claims 31 to 54, characterized in that the conveyor ( 44 ) is arranged at a higher height than the plasma chambers ( 17 ). 56. Device according to one of claims 31 to 55, characterized in that at least two external conveyors ( 47 ) are connected in parallel relative to one another. 57. Device according to one of claims 31 to 55, characterized in that at least two external conveyors ( 47 ) are connected in series relative to each other.