ATE474943T1 - ROTARY MACHINE FOR CVD COATINGS - Google Patents
ROTARY MACHINE FOR CVD COATINGSInfo
- Publication number
- ATE474943T1 ATE474943T1 AT03755134T AT03755134T ATE474943T1 AT E474943 T1 ATE474943 T1 AT E474943T1 AT 03755134 T AT03755134 T AT 03755134T AT 03755134 T AT03755134 T AT 03755134T AT E474943 T1 ATE474943 T1 AT E474943T1
- Authority
- AT
- Austria
- Prior art keywords
- rotary machine
- cvd coatings
- cvd
- coatings
- rotary
- Prior art date
Links
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10223288 | 2002-05-24 | ||
DE10224395A DE10224395A1 (en) | 2002-05-24 | 2002-06-01 | Method and device for the plasma treatment of workpieces |
DE10225607A DE10225607A1 (en) | 2002-05-24 | 2002-06-07 | Method and device for the plasma treatment of workpieces |
DE10225985A DE10225985A1 (en) | 2002-05-24 | 2002-06-11 | Method and device for the plasma treatment of workpieces |
DE2002153512 DE10253512A1 (en) | 2002-11-16 | 2002-11-16 | Device for treating workpieces, especially hollow bodies, comprises treatment unit for receiving the workpieces, fluid supply unit which supplies fluid to the treatment unit and fluid control unit for controlling the fluid supply |
DE2002153513 DE10253513B4 (en) | 2002-11-16 | 2002-11-16 | Multi-station coating device and process for plasma coating |
PCT/EP2003/005499 WO2003100129A1 (en) | 2002-05-24 | 2003-05-26 | Rotary machine for cvd coatings |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE474943T1 true ATE474943T1 (en) | 2010-08-15 |
Family
ID=42371931
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03755134T ATE474943T1 (en) | 2002-05-24 | 2003-05-26 | ROTARY MACHINE FOR CVD COATINGS |
Country Status (2)
Country | Link |
---|---|
AT (1) | ATE474943T1 (en) |
DE (1) | DE50312906D1 (en) |
-
2003
- 2003-05-26 DE DE50312906T patent/DE50312906D1/en not_active Expired - Lifetime
- 2003-05-26 AT AT03755134T patent/ATE474943T1/en active
Also Published As
Publication number | Publication date |
---|---|
DE50312906D1 (en) | 2010-09-02 |
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