WO2003100122A2

WO2003100122A2 - Method and device for plasma treating workpieces

Info

Publication number: WO2003100122A2
Application number: PCT/EP2003/005519
Authority: WO
Inventors: Stephan Behle; Andreas LÜTTRINGHAUS-HENKEL; Gregor Arnold; Matthias Bicker; Jürgen Klein; Marten Walther; Hartmut Bauch; Michael Litzenberg; Frank Lewin; Hartwig Müller; Klaus Vogel
Original assignee: Schott Ag
Priority date: 2002-05-24
Filing date: 2003-05-26
Publication date: 2003-12-04
Also published as: AU2003237688A1; EP1537254A1

Description

Method and device for the plasma treatment of workpieces

description

The invention relates to a method for the plasma treatment of workpieces, in which the workpiece is inserted into an at least partially evacuable plasma chamber of a treatment station and in which at least a part of the workpiece supports the handling of the workpieces

Treatment station is moved relative to at least one other part.

The invention further relates to a device for plasma treatment of workpieces, which has at least one evacuable plasma chamber for receiving the workpieces and in which the plasma chamber is arranged in the region of a treatment station, and in which the plasma chamber is delimited by a chamber floor, a chamber cover and a lateral chamber wall is.

The invention also relates to a method for plasma treatment of workpieces, in which the workpiece is inserted into an at least partially evacuable plasma chamber of a treatment station and in which the workpiece is positioned within the treatment station by a holding element.

Such methods and devices are, for example used to provide plastics with surface coatings. In particular, such methods and devices are already known for coating the inner or outer surfaces of containers which are intended for packaging liquids. Devices for plasma sterilization are also known.

PCT-WO 95/22413 describes a plasma chamber for internally coating PET bottles. The bottles to be coated are lifted into a plasma chamber by a movable base and connected to an adapter in the area of a bottle mouth. The bottle interior can be evacuated through the adapter. In addition, through the adapter a hollow lance into the interior of the

Bottles introduced to supply process gas. The plasma is ignited using a microwave.

From this publication it is also known to arrange a plurality of plasma chambers on a rotating wheel. This supports a high production rate of bottles per unit of time.

In EP-OS 10 10 773 a feed device is explained in order to evacuate a bottle interior and to supply it with process gas. PCT-WO 01/31680 describes a plasma chamber into which the bottles are introduced from a movable lid which was previously connected to a mouth area of the bottles.

PCT-WO 00/58631 also already shows the arrangement of plasma stations on a rotating wheel and, for such an arrangement, describes a group assignment of vacuum pumps and plasma stations in order to provide a favorable evacuation of the chambers and the interior of the bottles support. In addition, the coating of several containers in a common plasma station or a common cavity is mentioned.

Another arrangement for performing a

Internal coating of bottles is described in PCT-WO 99/17334. In particular, an arrangement of a microwave generator above the plasma chamber and a vacuum and operating medium feed through a floor of the plasma chamber are described here.

In the vast majority of those known, container layers made of silicon oxides with the general chemical formula SiO _x , produced by the plasma, are used to improve the barrier properties of the thermoplastic material. Such barrier layers prevent penetration of oxygen into the packaged liquids and escape of carbon dioxide in the case of liquids containing CO ₂ . In addition, the barrier layers produced in this way can also

Portions of carbon, hydrogen and nitrogen may be included.

The previously known methods and devices are not yet sufficiently suitable for one

To be used in mass production, in which both a low coating price per workpiece and a high production speed must be achieved.

The object of the present invention is therefore a

To specify methods of the type mentioned in the introduction such that handling of the workpieces to be treated is supported at high speed and with great reliability. This object is achieved in that a sleeve-shaped chamber wall is positioned relative to a chamber bottom and relative to a chamber cover.

Another object of the present invention is to construct a device of the type mentioned in the introduction in such a way that simple movement kinematics of the workpieces to be treated are supported.

This object is achieved in that the

Chamber wall is sleeve-shaped and is arranged to be movable both relative to the chamber bottom and relative to the chamber cover.

The arrangement of the sleeve-shaped chamber wall, which can be positioned relative to the chamber bottom and the chamber lid, makes it possible to transport the workpieces to be treated at an essentially constant height level. This saves the time for a height positioning of the workpieces to be carried out in accordance with the prior art and the design effort required for this. The chamber bottom, as well as the chamber cover remain arranged at the same height level, so that with structurally simple means in the area of the chamber cover, a microwave generator for igniting the plasma and in

Area of the chamber floor supply devices for the vacuum and the process gas can be arranged. All equipment supplies and energy supplies can thus be made via fixed lines and couplings or flexible lines that are critical with regard to their service life are avoided.

The procedural sequence in the handling of the workpieces is carried out in such a way that the displaceable sleeve is first displaced in such a way that an insertion of the coating workpiece into the chamber.

After inserting the workpiece, the sleeve-shaped chamber wall is moved into the working position and after sufficient evacuation and supply of the process gas, the plasma coating or another plasma treatment can be carried out after a microwave ignition. After completion of the treatment, the sleeve-shaped chamber wall is moved again and the treated workpiece can be removed and a new workpiece to be treated can be inserted.

A favorable introduction of gravity is supported in that the positioning is carried out in a vertical direction.

A supply of equipment and an energy supply with a simple structural design is supported in that the chamber bottom and the chamber cover are left in a static position relative to a station frame of the plasma station.

When coating hollow workpieces, which are arranged with their mouths facing downward, it proves to be advantageous that an evacuation of a cavity of the

Plasma station takes place through the chamber floor. A simple implementation in terms of device technology is also supported in that process gas is supplied through the chamber floor.

A quick and uniform distribution of the process gas in an interior of the workpiece can be achieved in that the process gas is fed through an lance into an interior of the workpiece. To avoid the penetration of an ambient pressure into the evacuated plasma chamber, it is proposed that the chamber wall be sealed relative to the chamber floor.

A low-wear implementation of a large number of opening and closing processes of the plasma chamber is supported in that the seal is carried out by a seal connected to the chamber wall. Alternatively, the seal can also be arranged in the area of the chamber bottom.

To ensure adequate sealing of the plasma chamber, it is also proposed that the chamber wall be sealed relative to the chamber cover.

Even with the upper sealing of the plasma chamber, high sealing quality and low wear can be achieved in that the sealing is carried out by a seal arranged in the area of the chamber cover.

A further improved sealing quality can be achieved in that the sealing is carried out between an inner flange of the chamber wall and a flange of the chamber cover.

To support controllable ignition of the plasma, it is proposed that microwaves generated by a microwave generator be introduced into the cavity in the area of the chamber cover.

An adaptation of the microwave supply to the specific conditions of use is facilitated in that the microwave generator is connected from a coupling channel to the Interior of the cavity is connected.

A typical application is that a workpiece is treated from a thermoplastic.

In particular, it is contemplated that an interior of the workpiece is treated.

An extensive field of application is opened up by treating a container as a workpiece.

In particular, it is thought that a beverage bottle is treated as a workpiece.

A high production rate with great reliability and high product quality can be achieved by transferring the plasma station from a rotating plasma wheel from an input position to an output position.

An increase in production capacity with only a slightly increased expenditure on equipment can be achieved by providing several cavities from one plasma station.

In the case of a simultaneous coating of several workpieces, particular consideration is given to positioning a chamber wall which is provided for providing at least two cavities.

A typical application is defined in that a plasma coating is carried out as the plasma treatment.

In particular, it is contemplated that the plasma treatment is carried out using a low pressure plasma. When coating plastic workpieces, it proves advantageous that plasma polymerization is carried out.

A good surface adhesion is supported in that ^'may be deposited by the plasma at least partially organic substances.

Particularly advantageous use properties

Workpieces for packaging food can be achieved in that at least some inorganic substances are deposited by the plasma.

In the treatment of packaging, particular consideration is given to the fact that a plasma is used to deposit a substance to improve the barrier properties of the workpiece.

To support a high quality of use, it is proposed that an adhesion promoter is additionally deposited to improve the adhesion of the substance on a surface of the workpiece.

High productivity can be supported by treating at least two workpieces simultaneously in a common cavity.

Another area of application is that plasma sterilization is carried out as the plasma treatment.

It is also contemplated that a surface activation of the workpiece is carried out as a plasma treatment.

The object of the present invention to construct a device of the type mentioned in the introduction such that a simple kinematics of movement of the workpieces to be treated is also achieved according to the invention in that a sleeve-like sealing element is arranged in the region of the chamber bottom, which is arranged movably relative to the chamber bottom.

The positionable arrangement of the sleeve-shaped sealing element relative to the chamber bottom and the holding element makes it possible to transport the workpieces to be treated at an essentially constant height level. This saves the time for a height positioning of the workpieces to be carried out in accordance with the prior art and the design effort required for this.

The procedural sequence for handling the workpieces is such that ^' for the insertion of the workpieces into the plasma chamber, the sealing element was at least sunk into the chamber floor to such an extent that the workpieces can be transferred to the holding element. After the workpieces have been positioned by the holding element within the plasma chamber, the sealing element is raised at a predeterminable point in time and thereby the interior of the workpiece is sealed relative to the interior of the plasma chamber.

Such sealing can take place both at the beginning of the evacuation process and after a part evacuation has already been carried out. Sealing only after partial evacuation has the advantage that an ^' interior of the workpiece and the further interior of the plasma chamber can initially be evacuated together and that in a second evacuation step after sealing the interior of the workpiece, the negative pressure in the region of the interior of the workpiece differs to the Vacuum in the further interior of the plasma chamber can be specified. In particular, it is contemplated to specify the negative pressure in the interior of the workpiece deeper than in the further interior of the plasma chamber. Favorable gravity introduction is also supported according to this embodiment of the invention in that the positioning is carried out in a vertical direction.

A plasma treatment of workpieces with a circular mouth section is supported in that a sealing element with an annular cross-sectional area is positioned.

A high positioning accuracy is supported in that the workpiece is laterally supported by a mounting flange of the sealing element.

In particular, self-centering when the sealing element and the workpiece are brought together can be achieved in that a mouth region of the workpiece is supported by the mounting flange.

An active positioning of the sealing element in only one direction can be achieved in that the

Sealing element is pressed by a compression spring in a direction facing away from the plasma chamber.

To support a safe operation even when exposed to external forces, it is proposed that a

Stroke range of the sealing element is limited by at least two stops.

A particularly simple positioning of the sealing element can be carried out by mechanically positioning the sealing element. In addition, it is contemplated that the sealing element is positioned pneumatically.

A structural simplification of the plasma station can be achieved in that the sealing element performs a valve function for the controllable connection and separation of the interior of the workpiece and the further interior of the plasma chamber.

To support a compensation of positioning tolerances, it is proposed that the mounting flange be provided with an internal chamfer.

An effective seal is supported in that the sealing element has an annular seal arranged facing the plasma chamber.

To avoid separate mechanical drive devices, it is proposed that the sealing element be coupled to a lance slide.

A very compact embodiment can be achieved in that the sealing element is coupled to a lance for supplying process gas.

In particular, it is contemplated that the lance for positioning the sealing element is provided with a push plate.

A positioning of the sealing element that is independent of a positioning of the lance can be achieved if the pneumatic positioning device has an overpressure control. To avoid a separate supply of excess pressure, it is also possible for the pneumatic positioning device to have a vacuum control.

A simple control of the plasma chamber for specifying different negative pressures within the workpiece and within the plasma chamber outside the workpiece is proposed that the sealing element is designed for controllable connection and separation of an interior of the plasma chamber with a vacuum source.

According to yet another embodiment of the invention, handling of the workpieces to be treated is further supported at high speed and with great reliability, in that the workpiece is acted upon by at least two clamping elements of the holding element that can be positioned relative to one another such that the workpiece is received by a clamping space between the clamping elements.

A simple movement kinematics of the workpieces to be treated is made possible according to this embodiment in that the holding element has at least two clamping elements which can be positioned relative to one another and which are arranged relative to one another with a distance providing a clamping space for receiving the workpiece. By fixing the workpieces between the positionable clamping elements of the holding element, it is possible to transport the workpieces to be treated at an essentially constant height level.

The procedural sequence for handling the workpieces is such that an opening of the plasma chamber is first made for inserting the workpieces into the plasma chamber at least to the extent that the workpieces can be transferred to the holding element. In particular, it is contemplated to carry out the transfer such that the workpieces are transferred from a transfer element to the holding element, so that no independent movement drive is required for the holding element. After the workpieces have been positioned by the holding element within the plasma chamber, the sealing element is raised at a predeterminable point in time and thereby the interior of the workpiece is sealed relative to the interior of the plasma chamber.

Such sealing can take place both at the beginning of the evacuation process and after a part evacuation has already been carried out. A seal only after a partial evacuation has the advantage that an interior of the workpiece and the further interior of the plasma chamber can initially be evacuated together and that in a second evacuation step after sealing the interior of the workpiece, the negative pressure in the area of the interior of the workpiece is different Vacuum in the further interior of the plasma chamber can be specified. In particular, it is contemplated to specify the negative pressure in the interior of the workpiece lower than in the further interior of the plasma chamber.

After the machining process has been carried out and the ambient pressure within the plasma chamber and within the workpiece has been reached again, the workpiece is transferred from the holding element to a further transfer element. The transfer process is preferably carried out in such a way that the transfer element approaches the holding element, takes over the workpiece and then transports the workpiece away. A favorable introduction of gravity is supported in that the positioning of the clamping elements is carried out in a horizontal direction.

A simple implementation of transfer operations is supported in that the workpiece is positioned by pliers-like holding arms.

A simple opening and closing of the holding element is supported in that the workpiece is positioned by pivotably mounted holding arms.

In order to specify an automatic taking of a holder positioning, it is proposed that the holding arms of springs be pressed into a locking position.

Inserting the workpiece into the holding element is supported in that the holding arms are pressed apart when the workpiece is inserted into the clamping space.

To facilitate removal of the workpiece from the holding element, it is proposed that the holding arms be pressed apart when the workpiece is pulled out of the clamping space. In particular, it is thought to cause the spreading apart by direct contact between the workpiece and the holding arms. To avoid uncontrolled movement of the holding element in a closed state of the plasma chamber, it is proposed that locking elements for fixing the holding arms be positioned together with the chamber wall.

A very secure fixation of the workpiece can be achieved in that a stop element for fixing the at about the same height level as the holding arms Workpiece is arranged.

For applications in the field of packaging for liquids, it proves particularly advantageous that the workpiece is fixed in a mouth area by the holding arms.

A resilient provision of the spring forces can take place in that the spring tensions are provided by leg springs. Alternatively, the spring forces can also be generated by compression springs.

To prevent an undesired change in the positioning of the workpiece within the plasma chamber, it is proposed that the holding arms be provided with locking webs in the area of their extension facing away from the fixing projections.

A simple mechanical implementation can be achieved in that the locking webs of locking elements can be fixed.

To support permanent operability, also taking structural tolerances into account, it is proposed that the locking elements be made of a hardened material.

A further improvement in the positioning reliability of the workpiece can be brought about in that the holding element is provided with a stop element for the workpiece.

For a plasma treatment of bottle-like workpieces, it proves to be particularly advantageous that the stop element and the fixing projections are at a height level for loading a bottle-shaped one Workpiece are arranged between the support ring and the shoulder area.

In order to provide a supply of equipment to the treatment station with a compact structure, short process downtimes and great reliability, according to yet another embodiment of the invention, a connection of the chamber to at least one equipment supply is controlled by a valve block with at least two valves arranged near a chamber floor.

In order to support a simple supply of operating medium to the plasma chamber with a compact construction, it is provided that a valve block with at least two valves for controlling a connection of the plasma chamber to at least one operating medium supply is arranged in an area of the chamber floor facing away from the plasma chamber.

The arrangement of the valve block with the valves in the region of the chamber base provides a very compact structural unit which supports a spatially sealed arrangement of several plasma chambers next to one another and which facilitates both assembly and subsequent service work. In addition, are provided by the respective valves to the plasma chamber very short connecting channels that lead to a shortening of the process downtimes, as well as the connecting channels have to be evacuated, for example, at a vacuum supply, resulting in a corresponding ^'time.

To support a plasma treatment of workpieces, it proves particularly advantageous that a vacuum is controlled via at least one of the valves.

A quick evacuation process with a compact design is supported by the fact that at least two valves be used to connect at least two different vacuum levels.

A gradual pressure reduction is supported in that a first vacuum stage is supplied via a primary vacuum valve.

Deformations of the workpiece due to internal and external pressure differences are avoided in that an interior of the workpiece and a further interior of the

Treatment station at least temporarily connected to the vacuum supply.

To achieve a relatively low vacuum quickly, it proves to be advantageous that the interior of the workpiece and the further interior of the plasma chamber are connected at least temporarily at the same time to a vacuum supply with a lower pressure than the first vacuum supply.

To carry out an inner coating of full workpieces, it is proposed that the interior of the workpiece be connected to at least one of the vacuum supplies for a longer period of time.

To enable problem-free opening of the plasma chamber, it is provided that at least a portion of the plasma chamber is temporarily connected to an ambient pressure via the valve block. A deformation of the workpieces due to too large

Pressure differences can be avoided in that at least a partial area of the interior of the workpiece is temporarily connected to an ambient pressure via the valve block. A simple process gas supply is supported in that plasma gas of at least one predefinable composition is connected to an operating medium supply via at least one process gas valve.

A very compact construction is provided in that the valve block is arranged vertically below the chamber floor.

A low height is supported by the fact that

Valve block is arranged essentially next to the chamber base.

To ensure a simple structural design and simple assembly, it is possible for the valve block to form a common component with the chamber base.

A controllable process gas supply is supported in that at least one of the process gas valves is connected to a coupling element pointing downwards in the vertical direction.

In particular, when using a positionable lance, it proves advantageous that the coupling element is designed as a connection to a lance carriage carrying the lance.

A simple external geometry of the components is supported by the fact that a deflection channel for the plasma gas is arranged in the area of the lance slide, which deflects the plasma gas from the coupling element in the direction of the lance.

This enables a controllability of the valves that can be easily adapted to different application requirements provided that at least one of the valves is designed as an electromagnetically controlled valve.

For the supply of equipment to the treatment station with a compact design, short process downtimes and large

To improve reliability, it is provided according to yet another embodiment of the invention that for the simultaneous supply of at least two chambers with at least one operating medium, a flow of the operating medium is branched into two partial flows at least once.

In a device according to the invention in accordance with this embodiment of the invention, at least two plasma chambers are connected to at least one branch for dividing a flow of an operating medium into at least two partial flows.

The simultaneous supply of several chambers and the branching of at least one flow of equipment provide a very compact unit that supports a spatially dense arrangement of several plasma chambers next to one another and that facilitates both assembly and subsequent service work.

In addition, very short connection channels are provided by the branching, which lead to a shortening of the process idle times, since, for example, the connection channels also have to be evacuated in the case of a vacuum supply, which leads to a corresponding expenditure of time.

A favorable flow guidance is supported in that the branching is carried out in a vertical direction. Another variant is that the branching is carried out in a horizontal direction.

For the supply of equipment to a space of the plasma chamber surrounding the workpiece, it is proposed that at least one equipment from at least one branch is introduced directly into at least two chambers.

For supplying an interior of the workpiece, it is proposed that at least one item of equipment be introduced from at least one branch into the interior of at least two workpieces.

A targeted local input of resources in the

The interior of the workpiece is supported by introducing at least one item of equipment from at least one branch into at least two lances.

For all plasma applications, it proves advantageous that a vacuum supply is distributed from the branch.

When performing plasma coatings, it is provided that a process gas supply is distributed from the branch.

A simple ending to each

Processing process is supported in that a ventilation feed is distributed from the branch.

A further design simplification is supported in that a microwave feed is distributed from the branching. The effort required to ignite the plasma can be reduced by connecting at least one branch to at least one microwave generator.

An effective evacuation of the plasma chambers is supported by the fact that at least one branch is connected to a primary vacuum valve for connecting a first negative pressure.

To avoid deformation of the workpiece, it is proposed that the primary vacuum valve at least temporarily connect both an interior of the workpiece and a further interior of the plasma chamber to a common vacuum supply.

For a quick evacuation with little effort, it proves to be advantageous that at least one branch is connected to a secondary vacuum valve in order to switch on a vacuum that is lower than the first vacuum.

To generate a lower vacuum in the interior of the workpiece relative to the further plasma chamber, it is proposed that the secondary vacuum valve at least temporarily connect only an interior of the workpiece to the vacuum source.

A deformation of a finished workpiece is also avoided in that at least one branch is connected to a workpiece ventilation valve for connecting an interior of the workpiece to an ambient pressure.

To support simple opening of the plasma chamber, it is proposed that at least one branch be connected to a chamber ventilation valve for connecting an interior of the plasma chamber to an ambient pressure. A process gas supply is supported in that at least one branch is connected to a primary process gas valve.

In order to enable a successively sequential supply of differently composed process gases, it is proposed that at least one branch be connected to a secondary process gas valve.

Maintenance of negative pressure during the implementation of the plasma treatment process is supported in that at least one branch is connected to a process vacuum valve.

A partition of an interior of the workpiece from another interior of the plasma chamber is supported in that at least one branch is connected to a chamber vacuum valve.

A compact embodiment can be provided in that at least one branch is arranged in the area of a chamber base of the plasma station.

To support good accessibility, it is particularly contemplated that at least one branch is arranged in the vertical direction below the chamber floor.

A very compact construction can be provided in that at least one branch forms a common component with the chamber base.

It also contributes to a compact construction that at least two of the valves are arranged in the area of a common valve block. A very space-saving construction can be achieved in that at least one of the branches is arranged in the area of the valve block.

In particular, to support simple assembly and simple implementation of service work, it is contemplated that the valve block with the at least two valves and the at least one branch is arranged in the vertical direction below the chamber base.

A further increase in the compactness can be achieved in that the valve block forms a common component with at least one branch.

A control that can be adapted to different application requirements is provided in that at least one of the valves is designed as an electromagnetically controlled valve.

According to a further embodiment of the invention, in order to achieve a compact structure and short process downtimes, it is provided that at least one item of equipment is at least partially acted upon by a conveyor device which is moved together with the treatment station on a closed and rotating transport path.

In the case of a corresponding device, in order to support an operating medium supply to the plasma chamber with a compact construction, the plasma chamber and at least one conveying device for an operating medium are arranged on a rotating carrier device.

Due to the common arrangement of the plasma chamber and the conveyor for the equipment on one circulating support device, it is possible to provide the equipment in the required form in the immediate vicinity of the plasma chamber. This supports a compact structure, and very short connecting lines can also be used.

Flow losses along long lines are also avoided by the spatially dense arrangement of the conveyor and the plasma chamber, so that short process downtimes are made possible.

A rapid achievement of the physical conditions required for the plasma treatment is supported in that a vacuum is generated by the conveyor.

Rapid evacuation is also supported by the fact that at least two conveying devices generate at least two different negative pressures

A good compromise between a low weight to be transported and a low-delay supply of operating equipment is provided by providing preconditioned operating equipment for at least one conveyor device v-o at least one external preliminary stage.

A connection of stationary and moving components can be made in that the operating medium is guided into the area of the conveyor device via a rotary coupling.

An advantageous center of gravity positioning is achieved in that the conveyor device moves the operating medium from one level of the conveyor device to a higher one

" Level of the plasma station transported.

For a connection of a plurality of plasma stations, it is proposed that at least two plasma stations are connected to at least one common conveyor device via a distributor.

A supply of equipment with short connecting lines can be achieved in that at least one equipment is distributed by at least one distributor at a level of a chamber base of the plasma station.

In particular, it is also contemplated that the equipment is supplied from the distributor in the direction of the plasma stations via straight connecting lines running radially outward from the distributor.

A compact distribution of different operating resources is supported in that at least two operating resources are routed to the plasma stations on different distribution levels.

When using rotating support devices, it proves to be particularly advantageous that the

Conveyors are arranged in the area of the support device such that an essentially balanced weight distribution is provided.

A combination of favorable weight distribution and good accessibility can be provided by alternately positioning conveying devices and distribution cabinets for electrical connections along a circumference of the carrying device. A mechanically very stable arrangement, which at the same time supports an exactly reproducible implementation of all process steps, can be achieved in that the conveying device is positioned together with the plasma station on a rotating plasma wheel as a carrying device.

A mechanically highly resilient embodiment is provided in that the conveying devices are transported by a wheel ring-like plasma wheel.

A compact and heavy-duty construction can be achieved in that the plasma wheel is provided with a support ring which has an essentially C-shaped vertical profile.

A particularly low center of gravity is achieved in that the conveyor is arranged on a base leg of the support ring.

A modular basic construction with good accessibility of the individual functional components is provided in that the plasma stations are arranged on an end leg of the support ring.

According to yet another embodiment of the invention, a method for plasma treatment of workpieces is provided, in which the workpieces are inserted into an at least partially evacuable plasma chamber of a treatment station and in which the workpieces are positioned within the treatment station by holding elements.

A corresponding device for the plasma treatment of workpieces accordingly comprises at least one evacuable plasma chamber for receiving the workpieces, in which the plasma chamber in the area of a Treatment station is arranged, and in which the plasma chamber is delimited by a chamber base, a chamber cover and a lateral chamber wall and has at least one holding element for positioning the workpieces.

In order to increase the quantitative production output with good product quality, at least two holding elements are positioned relative to one another in the area of the treatment station by a common carrier.

In a corresponding device according to the invention, at least two holding elements are held by a common carrier in the area of the plasma station.

By jointly positioning the holding elements from a common carrier in the area of the treatment station, it is possible to support an increased production output for each treatment station. In particular, insertion of the workpieces to be processed into the treatment station and removal of the finished workpieces from the treatment station are supported. The common carrier for the holding elements supports an exactly reproducible positioning of the containers within the plasma station as well as the implementation of input and output processes with little expenditure of time and high reliability.

In order to support a rapid execution of transfer processes, it is proposed that at least two holding elements be moved together with the carrier in the direction of a movement which is carried out at least temporarily by the carrier during the execution of a treatment process.

Simultaneous treatment of a larger number of workpieces with a compact construction of the treatment device is supported in that at least two holding elements are moved transversely to the direction of a movement which is at least temporarily carried out by the carrier during the execution of a treatment process relative to one another together with the carrier.

Simultaneous insertion and removal of a large number of workpieces in the treatment station or from the treatment station is made possible in that the carrier is positioned relative to the treatment station.

In particular, it is contemplated that the carrier, loaded with at least one workpiece, is inserted into the treatment station. In order to shorten transfer times, it also proves advantageous that the carrier, loaded with at least one workpiece, is removed from the treatment station.

A continuous execution of transfer processes is supported in that the carrier carries out a rotational movement at least temporarily relative to the treatment station.

A simple kinematics in the implementation of transfer operations can be achieved in that the

Carrier is loaded with workpieces to be treated by a circumferential transfer element.

When using route-like

Transfer devices prove to be advantageous in that the transfer element has the same at least at the time of transfer of a workpiece to the carrier

The speed at which the carrier is moved.

The use of conventional transfer wheels to carry out transfer processes even in plasma stations for the treatment of several workpieces is made possible in that the treatment station is positioned by a clocked moving plasma wheel.

To derive the finished workpieces, it is proposed that at least one unloading station be used to remove finished workpieces from the area of the carrier.

The workpieces to be treated are fed in that at least one loading station is used to feed workpieces to be machined into the area of the carrier.

Very short transfer times can be achieved in that the loading station is designed to feed workpieces to be machined to a carrier separate from the plasma wheel.

Low weights to be transferred when carrying out the

Transfer processes can be achieved by arranging at least one carrier in the area of each plasma station.

A simple implementation of the transfer operations is supported in that at least two holding elements are arranged along a circumference of the carrier.

For the supply of workpieces to carriers rotating together with a plasma wheel, it proves to be advantageous that an input path is provided for the transfer of workpieces to be treated to the carriers.

A kinematically simple execution of the transfer operations is supported by the fact that the input path is centered runs a center of the plasma wheel.

Locally changeable transfer points can be realized in that the input path is arranged in the area of a transfer element.

Simple kinematic boundary conditions when carrying out the transfer operations are provided in that a speed of movement of the transfer element is adapted to a speed of movement of the carrier carried by the plasma wheel.

In order to derive finished workpieces, it is proposed that an output section be provided for removing workpieces to be treated from the supports.

Even when the workpieces are unloaded, it proves to be advantageous that the output path runs centrally to a center of the plasma wheel.

In addition, it is also intended for the unloading process that the output path is arranged in the area of a transfer element.

A convenient material flow during unloading can be achieved in that the transfer element is driven in a rotating manner.

Optimal utilization of the process angle is achieved by arranging the loading station on the one hand and the unloading station on the other hand at two cycle positions with a stationary plasma wheel.

In a clocked mode of operation, a simple constructive implementation is achieved in that the Loading station is designed as a loading wheel.

In a clocked mode of operation, in particular, it is also contemplated that the unloading station is designed as an unloading wheel.

An advantageous kinematics in transfer operations is achieved in that the wheels have a peripheral speed corresponding to a transport speed of the carrier in the area of its current transfer area.

Another mode of operation is defined by the fact that at least two rotations of the plasma wheel are provided for the period between an input of the workpieces into the plasma station and an output of the workpieces.

A material flow at a substantially constant height can be achieved in that the plasma station is guided so that it can be positioned at least partially in the direction of the carrier.

Another embodiment variant is that the carrier is guided so that it can be positioned vertically into the plasma chamber from above.

Finally, it is also contemplated that the carrier is guided so that it can be positioned in the vertical direction from below into the plasma chamber.

According to a further embodiment, it is also within the scope of the invention to specify a method for treating workpieces, in which at least one workpiece is inserted into a treatment station and positioned within the treatment station by a holding element, and in which the treatment station is positioned along a circumferential transport path becomes. Accordingly A device for treating workpieces is provided which has at least one chamber for receiving at least one workpiece and in which the chamber is arranged in the region of a treatment station, and in which the treatment station is arranged so that it can be positioned by a transport element along a circumferential transport path.

It is already known to use methods and devices for treating workpieces in connection with the blow molding production of containers from preforms which have been suitably tempered beforehand. Such preforms typically consist of a thermoplastic material, for example of PET (polyethylene terephthalate). After suitable thermal conditioning, the preforms are converted into containers by the action of blowing pressure, which are used, for example, as bottles for packaging liquids. According to DE-OS 100 33 412, blowing stations are arranged on a rotating blowing wheel. The blowing wheel rotates continuously and the blowing stations arranged on the blowing wheel take up the preforms to be deformed and dispense the finished containers. Blown impellers which are also moved in cycles are also known.

So-called laboratory machines, which typically have a stationary treatment station, are often used to optimize the previously known methods and devices. With the help of such a laboratory machine, the respective

Optimize treatment parameters for the workpieces as there is easy access. A disadvantage of such special laboratory machines lies in the fact that, in terms of design and process engineering, there are significant differences from those operated with much greater power Production machines are available. A transfer of the parameters obtained on the laboratory machines to the production machines therefore usually requires additional adaptation steps.

The object of the present invention is therefore to specify a method of the type mentioned in the introduction in such a way that parameter optimization for a production method is supported.

This object is achieved in that the treatment station along the transport path at least one supply position relative to the transport direction is supplied with at least one operating means by at least one stationary supply device.

Another object of the present invention is to construct a device of the type mentioned in the introduction in such a way that optimization of the process parameters is supported.

This object is achieved in that at least one supply device is arranged along the transport path, the at least one

Coupling element and at least one supply connection for operating the treatment station when the transport element is stationary and that the treatment station is provided with at least one counter-coupling for connection to the coupling of the supply device.

Due to the stationary arrangement of a supply device for the treatment station along the transport path, it is possible to use any treatment station that is provided with suitable mating couplings, is to be positioned adjacent to the supply facility and operated as a laboratory station for process optimization. Through the use of a standard production station for laboratory operation and through the operation of these treatment stations under boundary conditions corresponding to at least very common production conditions, the process optimizations obtained can be transferred to actual series production with little effort. In addition, there is no need for an operator to purchase a separate laboratory machine. Finally, it is possible to cyclically stop the treatment stations used on the production machine in the area of the supply device with little effort and to carry out a function check here.

A typical application is that laboratory operation is performed for a plasma station.

It is also contemplated that a laboratory operation will be carried out for a blowing station.

To support electrical operation of the treatment station, it is proposed that electrical energy be supplied as the operating means.

In plasma applications in particular, it is thought that a vacuum is supplied as the operating medium.

Another variant is that an overpressure is supplied as the operating medium.

To support the implementation of plasma coatings, it is proposed that process gas be supplied as the operating medium. In a laboratory operation of devices which are operated at least partially in a cam-controlled manner in the production operation, it proves to be expedient that mechanical drive energy is supplied as the operating means.

A movement of the mechanical components can be predetermined, for example, by supplying the mechanical drive energy pneumatically.

In addition, it is contemplated that the mechanical drive energy is supplied electro-mechanically.

Precise electrical controllability is supported in that the mechanical drive energy is supplied by a servo motor.

To support a flexible mode of operation, it is proposed that for the optional activation of at least one function module for carrying out a

Production operation or for activating at least one function module to carry out a laboratory operation, a control unit is used.

To support a laboratory operation, it is in particular also contemplated that the control unit is connected to at least one measuring device for monitoring a laboratory operation of the treatment station.

In order to reduce the expenditure on equipment in carrying out the laboratory operation, it is proposed that the control unit activate at least one operating means connection in the laboratory operation, which is also connected to the treatment station when carrying out a production operation, and modify it in relation to a production operation is controlled.

A technical measurement of parameters in the area of the treatment station is supported in that the measuring device has at least one sensor.

According to yet another embodiment of the invention, a method for handling workpieces is provided, in which the workpieces are transported by a rotating coupling wheel and in which at least two workpieces are positioned at least temporarily by a common holding element, the positioning being both a rotational movement relative to a Rotation axis of the coupling wheel as. also includes a rotational movement relative to an axis of rotation extending transversely to the axis of rotation of the coupling wheel.

A corresponding device for handling workpieces, which is designed as a rotating coupling wheel, has at least one holding element for at least temporarily jointly positioning at least two workpieces, the holding element being rotatably mounted relative to the coupling wheel.

Such devices are used for example in the

Manufacture of blow molded containers used to perform a transfer of blown containers from one work station to another work station with high transfer speed. For example, such a coupling wheel is arranged between a rotating blowing wheel and an output section. Such use is described in PCT-WO00 / 48818. In the case of such a container formation by the action of blowing pressure, preforms made of a thermoplastic material, for example preforms made of PET (polyethylene terephthalate), are fed to different processing stations within a blow molding machine. Typically, such a blowing machine has a heating device and a blowing device, in the area of which the pre-tempered preform is expanded into a container by biaxial orientation. The expansion takes place with the aid of compressed air which is introduced into the preform to be expanded. The procedural sequence for such an expansion of the preform is explained in DE-OS 43 40 291.

The basic structure of a blow molding station for container formation is described in DE-OS 42 12 583. Options for tempering the preforms are explained in DE-OS 23 52 926. The preforms and the blown containers can be transported within the blow molding device with the aid of different handling devices. The use of transport mandrels on which the preforms are attached has proven particularly useful. The preforms can also be handled with other support devices. The use of gripping pliers for handling preforms and the use of expanding mandrels that can be inserted into a mouth area of the preform for holding purposes are also available designs.

Different embodiments are known with regard to the blowing stations used. In the case of blowing stations which are arranged on rotating transport wheels, a book-like opening of the mold carriers can often be found. However, it is also possible to use mold carriers which are displaceable relative to one another or guided in a different manner. For the transfer of preforms and containers, curve-controlled transfer wheels are typically used in different machining and processing methods, in which the support arms used are partially pivotable relative to a support structure of the coupling wheel. Due to the pivotability of the transfer arms, a change in the distance of the preforms or containers to be transferred can be predetermined relative to one another. Such pivotable support arms are described for example in DE-OS 38 47 118. The support arms explained here are also designed to be telescopic. The support arms according to PCT-WO 00/48818, however, are arranged relative to each other with fixed angular distances.

When using the known methods and devices in connection with the processing or processing of a large number of workpieces per unit of time, processing stations are used which enable simultaneous processing or processing of several workpieces. The feeding and discharge of the workpieces often leads to complex transfer stations with complicated kinematics of the components used.

Accordingly, it is also an object of the present invention to construct a method of the type mentioned in the introduction in such a way that an improved control option for influencing the transfer process is provided when carrying out a transfer of the workpieces.

This object is achieved in that workpieces are transferred between the holding element and at least one reference station for at least two workpieces to be positioned by the holding element relative to one another at different times. Another object of the present invention is to construct a device of the type mentioned in the introduction in such a way that the transfer of a large number of workpieces per unit of time is supported with a simple construction of a transfer device.

This object is achieved in that the holding element has at least two fixing elements for the workpieces, which are provided with a control that controls the fixing elements at different times relative to each other.

Due to the actuation of the fixing elements arranged in the area of the holding element with a time offset relative to one another, instead of an extended transfer area which is equipped for the simultaneous transfer of several workpieces, it is only possible to provide transfer points at which the workpieces are successively fed to the holding elements or removed from their area become. The time-delayed control of the fixing elements thus enables considerable design simplification and associated cost savings as well as improved reliability due to a reduction in the design complexity.

An exact reproducibility of the movements to be carried out can be supported by the fact that the transfer process is carried out in a curve-controlled manner. An advantageous control of the transfer processes is achieved in that the workpieces are positioned in the area of the holding element by pliers-like fixing elements. To carry out precisely reproducible movements, it also contributes to the fact that the fixing elements are operated in a cam-controlled manner. To support a cheap The effect of gravity is proposed that the coupling wheel be moved about an essentially perpendicular axis of rotation.

A typical handling of container-like workpieces is supported in that the holding element is pivoted about an essentially horizontal axis of rotation.

When handling workpieces with open mouths, it proves particularly advantageous that the holding element is cyclically pivoted back and forth by 180 °.

A structurally simple implementation is supported in that the pivoting movement of the holding element is controlled by a jacket curve positioned on the outside on a base of the coupling wheel.

To specify a defined working position of the fixing elements, it is proposed that the tong arms of the fixing elements be resiliently clamped relative to one another.

An active application of adjustment forces only in the area of intended transfers can be achieved by resiliently clamping the pliers arms in a clamping position provided for fixing the workpiece.

A typical application is that the coupling wheel is used to carry out transfer operations in an environment of at least one plasma station.

In particular, it is contemplated that the plasma station is positioned by a rotating plasma wheel. Another application is that the coupling wheel is used to carry out transfer operations in an environment of at least one blow molding station.

To support high productivity, it is proposed that the plasma station be positioned by a rotating blowing wheel.

A typical field of application is defined in that bottle-like workpieces are positioned by the coupling wheel.

A further increase in productivity can be achieved in that the coupling wheel for carrying out

Transfer processes are used in an environment of a treatment station for the workpieces, at least two workpieces being treated simultaneously in the treatment station.

An optimal kinematic adaptation is achieved in that the holding element is provided with a number of fixing elements which corresponds to the number of workpieces to be treated simultaneously in the area of the treatment station.

Exemplary embodiments of the invention are shown schematically in the drawings. Show it:

Fig. 1 is a schematic diagram of a plurality of Piasmäkammern, which are arranged on a rotating plasma wheel and in which the plasma wheel is coupled to input and output wheels.

Fig. 2 shows an arrangement similar to Fig. 1, in which the plasma station is equipped with two plasma chambers are,

3 is a perspective view of a plasma wheel with a plurality of plasma chambers,

4 is a perspective view of a plasma station with a cavity,

5 shows a front view of the device according to FIG. 4 with the plasma chamber closed,

6 shows a cross section along section line VI-VI in FIG. 5,

7 shows a representation corresponding to FIG. 5 with the plasma chamber open,

8 is a vertical section along section line VIII-VIII in Fig. 7,

9 is an enlarged view of the plasma chamber with the bottle to be coated according to FIGS. 6 and

Fig. 10 is a further enlarged view of a connection element for holding the workpiece in the plasma chamber.

11 shows a schematic illustration of a positioning of a bottle-shaped workpiece within the plasma chamber using a forceps-like holding element and

FIG. 12 shows a representation similar to FIG. 10 with the sleeve-like sealing element lowered compared to FIG. 10. 13 is a plan view of the holding element according to FIG. 11 without showing the workpiece,

14 is a perspective view of the holding element according to FIG. 13 and

15 is a perspective view of the

14 with inserted bottle-like

Workpiece and positioned locking elements.

16 shows a closed plasma chamber in which a valve block with a plurality of valves is arranged below the chamber bottom,

17 shows the arrangement according to FIG. 16 after opening the plasma chamber,

18 shows a representation of a valve block modified with respect to FIG. 16,

Fig. 19 is a vertical section along section line XV-XV in Fig. 18 without showing pliers-like holding elements for the workpieces and

Fig. 20 is a horizontal section along section line XVI-XVI in Fig. 14 also without a pliers-like holding element shown.

21 shows a vertical section through a plasma station with two plasma chambers which are connected to a common operating means feed via a channel-like branching,

Fig. 22 is a vertical section along section line XIII-XIII in Fig. 21 and 23 shows a schematic illustration for a connection of a chamber base provided with branching connection channels to a plurality of valves.

24 is a perspective view of a carrying device which has operating fluid pumps arranged on a rotating plasma wheel and also plasma stations, each with two plasma chambers, arranged on the plasma wheel,

25 shows a further illustration of a plasma wheel similar to FIG. 24 without the illustrated distribution boxes and in a partially transparent illustration,

26 shows the plasma wheel according to FIG. 25 in a partially assembled state,

27 the plasma wheel according to FIG. 25 with only one assembled plasma station,

28 the plasma wheel according to FIG. 27 in a different perspective view and with external conveying devices for operating means shown,

29 shows a schematic illustration of another plasma wheel, in which conveying devices for operating resources are arranged in an upper region in the vertical direction,

30 shows a partial illustration of a further construction of a plasma wheel, which is mounted in a hanging manner and in which conveying devices for operating materials are positioned in the vertical direction above the plasma stations. 31 is a perspective view of a support ring of a plasma wheel, on which a plurality of carriers for positioning several holding elements for bottle-shaped workpieces are arranged,

32 shows a schematic representation of a plasma wheel, in which fully equipped carriers for the workpieces are inserted into the plasma wheel and after the treatment process has been carried out together with the treated ones

Workpieces are removed from the plasma wheel,

FIG. 33 shows an embodiment modified from FIG. 32, in which supports are arranged on the plasma wheel so as to be capable of rotation, which interact with loading and unloading sections which are arranged outside the plasma wheel, FIG.

34 shows a further modified embodiment, in which a pulsed operation of the plasma wheel and a pulsed one

Operation of input wheels and output wheels is provided,

35 is a block diagram illustrating a control structure for selectively activating a production operation or a laboratory operation of the device.

36 is a perspective view of a blow molding station for producing containers from preforms,

37 shows a longitudinal section through a blow mold in which a preform is stretched and expanded,

38 shows a sketch to illustrate a basic structure of a device for blow molding containers

39 shows a modified heating section with increased heating capacity,

40 is a perspective view of a coupling wheel in which four holding elements, each with two fixing elements, are used, and

41 is a plan view in the viewing direction XI in FIG. 10.

1 shows a plasma module (1), which is provided with a rotating plasma wheel (2). A plurality of plasma stations (3) are arranged along a circumference of the plasma wheel (2). The

Plasma stations (3) are provided with cavities (4) or plasma chambers (17) for receiving workpieces (5) to be treated.

To explain the basic construction principle, only one workpiece (5) per plasma station (3) is shown in FIG. 1. The feeds and discharges of the workpieces also only schematically show the handling of individual workpieces (5). In fact, at least two or more workpieces (5) can also be assigned to each plasma station (3).

The workpieces (5) to be treated are fed to the plasma module (1) in the area of an input (6) and forwarded via a separating wheel (7) to a transfer wheel (8) which is equipped with positionable support arms (9). The support arms (9) are arranged pivotably relative to a base (10) of the transfer wheel (8), so that a change in the distance of the workpieces (5) can be carried out relative to one another. As a result, the Workpieces (5) from the transfer wheel (8) to an input wheel (11) with a greater distance between the workpieces (5) relative to one another in relation to the separating wheel (7). The input wheel (11) transfers the workpieces (5) to be treated to the plasma wheel (2). After the treatment has been carried out, the treated workpieces (5) are removed from the area of the plasma wheel (2) by an output wheel (12) and transferred to the area of an output section (13).

In the embodiment according to FIG. 2, the plasma stations (3) are each equipped with two cavities (4) or plasma chambers (17). As a result, two workpieces (5) can be treated simultaneously. Basically, it is possible to make the cavities (4) completely separate from one another, but in principle it is also possible to delimit only partial areas from one another in a common cavity space such that an optimal coating of all workpieces (5) is ensured. In particular, it is contemplated here to separate the partial cavities from one another at least by means of separate microwave couplings.

Fig. 3 shows a perspective view of a plasma module (1) with a partially constructed plasma wheel (2). The plasma stations (3) are arranged on a support ring (14) which is designed as part of a rotary connection and is mounted in the area of a machine base (15). The plasma stations (3) each have a station frame (16) which holds plasma chambers (17). The plasma chambers (17) have cylindrical chamber walls (18) and microwave generators (19).

A rotary distributor (20) is arranged in a center of the plasma wheel (2), via which the plasma stations (3) are supplied with operating resources and energy. Ring lines in particular can be used for the distribution of operating resources (21) can be used.

The workpieces (5) to be treated are shown below the cylindrical chamber walls (18). Lower parts of the plasma chambers (17) are not shown for the sake of simplicity.

Fig. 4 shows a plasma station (3) in perspective. It can be seen that the station frame (16) is provided with guide rods (23) on which a carriage (24) for holding the cylindrical chamber wall (18) is guided. Fig. 4 shows the carriage (24) with the chamber wall (18) in a raised state, so that the workpiece (5) is released.

The microwave generator (19) is arranged in the upper region of the plasma station (3). The

Microwave generator (19) is connected via a deflection (25) and an adapter (26) to a coupling channel (27) which opens into the plasma chamber (17).

In principle, the microwave generator (19) can be coupled both directly in the area of the chamber cover (31) and via a spacer element to the chamber cover (31) with a predeterminable distance to the chamber cover (31) and thus in a larger surrounding area of the chamber cover (31) , The adapter (26) has the function of a transition element and the coupling channel (27) is designed as a coaxial conductor. In the area of an opening of the coupling channel (27) into the chamber cover (31) is a

Quartz glass windows arranged. The deflection (25) is designed as a waveguide.

The workpiece (5) is positioned by a holding element (28) which is located in the area of a chamber base (29) is arranged. According to a development of the invention, the workpiece (5) is positioned in the area of a sealing element (280) which is arranged in the area of a chamber base (29). The holding element (28) can also advantageously be designed as a sealing element (280) or comprise such a sealing element (280).

The chamber base (29) is designed as part of a chamber base (30). To facilitate adjustment, it is possible to fix the chamber base (30) in the area of the guide rods (23). Another variant is to attach the chamber base (30) directly to the station frame (16). With such an arrangement, it is also possible, for example, to design the guide rods (23) in two parts in the vertical direction.

FIG. 5 shows a front view of the plasma station (3) according to FIG. 3 in a closed state of the plasma chamber (17). The carriage (24) with the cylindrical chamber wall (18) is lowered compared to the positioning in FIG. 4, so that the chamber wall (18) has moved against the chamber bottom (29). The plasma coating can be carried out in this positioning state.

Fig. 6 shows the in a vertical sectional view

5. It can be seen in particular that the coupling channel (27) opens into a chamber cover (31) which has a laterally projecting flange (32). In the area of the flange (32) a seal (33) is arranged, which is struck by an inner flange (34) of the chamber wall (18). In a lowered state of the chamber wall (18), the chamber wall (18) is thereby sealed relative to the chamber cover (31). A further seal (35) is arranged in a lower region of the chamber wall (18) in order to seal here too relative to the chamber bottom (29) guarantee .

In the positioning shown in Fig. 6, the chamber wall (18) encloses the cavity (4), so that both an interior of the cavity (4) and an interior of the

Workpiece (5) can be evacuated. To support a supply of process gas, a hollow lance (36) is arranged in the area of the chamber base (30) and can be moved into the interior of the workpiece (5). The lance (36) is positioned by a lance carriage (37) which can be positioned along the guide rods (23). A process gas channel (38) runs inside the lance slide (37) and, in the raised position shown in FIG. 6, is coupled to a gas connection (39) of the chamber base (30). This arrangement avoids hose-like connecting elements on the lance slide (37).

FIGS. 7 and 8 show the arrangement according to FIGS. 5 and 6 in a raised state of the chamber wall (18). In this position of the chamber wall (18), it is possible to remove the treated workpiece (5) from the area of the plasma station (3) and to insert a new workpiece (5) to be treated. As an alternative to the positioning of the

Chamber wall (18) in an open state of the plasma chamber (17) reached by displacement upwards, it is also possible to carry out the opening process by displacing a structurally modified sleeve-shaped chamber wall in the vertical direction downwards.

In the exemplary embodiment shown, the coupling channel (27) has a cylindrical design and is arranged essentially coaxially with the chamber wall (18). FIG. 9 shows the vertical section according to FIG. 6 in an enlarged partial illustration in the vicinity of the chamber wall (18). In particular, the overlap of the inner flange (34) of the chamber wall (18) via the flange (32) of the chamber cover (31) and the holding of the workpiece (5) by the holding element (28) can be seen. In addition, it can be seen that the lance (36) is guided through a recess (40) in the holding element (28).

The fixation of the workpiece (5) by the holding element (28), or • the positioning of the workpiece (5) in the region of the sealing element (280) can be seen in the enlarged illustration in FIG. 10. The holding element (28) is inserted into a guide sleeve (41) which is provided with a spring bummer (42). A compression spring (43) is inserted into the spring chamber (42) and clamps an outer flange (44) of the holding element (28) designed as a sealing element (280) relative to the guide sleeve (41).

In the positioning shown in FIG. 10, a thrust plate (45) mounted on the lance (36) is guided against the outer flange (44) and presses the holding element (28) into its upper end position. In this positioning, an interior of the workpiece (5) is insulated from the interior of the cavity (4). In a lowered state of the lance (36), the compression spring (43) displaces the holding element (28) relative to the guide sleeve (41) in such a way that a connection between the interior of the workpiece (5) and the interior of the cavity (4) is created.

Fig. 11 shows the positioning of the workpiece (5) within the plasma chamber (17) with the aid of a holding element (46). The holding element (46) is like pliers trained and has two pivotally mounted holding arms (47, 48). The holding arms (47, 48) can be pivoted relative to axes of rotation (49, 50). To ensure automatic fixation of the workpiece (5) by the holding element (46), the holding arms (47, 48) of springs (51, 52) are pressed into a respective holding position.

The holding element (46) is arranged above the chamber base (30), so that after lifting the chamber wall (18) there is lateral accessibility of the holding element (46). The workpiece (5) can thereby be transferred from a positioning element to the holding element (46) without a lifting movement of the workpiece (5) in the direction of a longitudinal axis (53) of the cavity.

FIG. 12 shows the arrangement according to FIG. 10 after the chamber wall (18) has been raised and after the sealing element (28) has been lowered. Just as in FIG. 10, the holding element (46) according to FIG. 11 is also not shown in FIG. 11.

12, the sealing element (280) is lowered in such a way that the workpiece (5) can move laterally. This enables lateral insertion before the plasma treatment and removal from the side after the plasma treatment has ended. In the illustrated

In the operating state, the outer flange (44) of the sealing element (28) is guided against an inner web of the chamber base (30). The inner flange (54) together with an inner flange (55) of the guide sleeve (41) defines the range of motion of the sealing element (28). Without an external actuating force, the sealing element (28) with its outer flange (44) is pressed against the inner flange (54) by the compression spring (43).

In order to ensure adequate sealing, the outer flange (44) in the area of the inner flange (55) facing expansion with an annular seal (56). When the sealing element (28) is in a raised state, this seals the outer flange (44) and the inner flange (55). Alternatively, a dynamic seal can also be used, in which the

Sealing takes place radially in the area of an outer circumference and sliding along the seal is carried out during a movement. The sealing element (28) also has an annular seal (57) in the region of its extension facing the workpiece (5). In the case of a bottle-like workpiece (5), this ring seal (57) is guided against an orifice surface (58) of a threaded area (59). For the outer border of the threaded area (59) in a raised state of the sealing element (28), the sealing element (28) ^' also has a ring-like

Mount flange (60), which is provided on the inside with an insertion bevel (61).

The sealing element (280) can in particular be designed such that, in the positioning shown in FIG. 12, after lowering the chamber wall (18), a common evacuation of an interior of the workpiece (5) and the interior of the plasma chamber (17) takes place. After the sealing element (28) has been lifted, the interior of the plasma chamber (17) is sealed off from the vacuum supply by the sealing element (28), but the interior of the workpiece (5) remains connected to the vacuum supply. As a result, different evacuation of the interior of the workpiece (5) and the interior of the plasma chamber (17) can be carried out without an additional control valve.

FIG. 13 shows a top view of the holding element (46) according to FIG. 11 after removal of the workpiece (5). It can be seen in particular that between the holding arms (47, 48) a clamping space (154) for receiving the workpiece (5) is arranged. The holding arms (47, 48) protrude into the clamping space (154) with fixing projections (155, 156). In addition, the holding arms (47, 48) have locking webs (157, 158) which face away from the fixing projections (155, 156) and which are arranged in one by locking elements (159, 160), which can preferably be positioned together with the chamber wall (18) Locking position can be fixed.

To further support and fix the workpiece (5), the holding element (46) has a stop element (161). The stop element (161) limits maximum insertion of the workpiece (5) into the clamping space (154). In the locking position, the workpiece (5) is pressed against the stop element (161) by the fixing projections (155, 156). The stop element (161) and the fixing projections (155, 156) are thereby arranged at approximately the same height level.

FIG. 13 additionally shows the sealing element (280) and the lance (36) at a lower height level than the holding element (46) due to the selected viewing direction with respect to the plane of the drawing.

FIG. 14 shows the holding element (46) according to FIG. 12 in a perspective illustration and without depicting the locking elements (59, 60). It can be seen in particular that the holding element (46) has a base plate (62) from which the holding arms (47, 48) and the further components are carried. The base plate (62) can be mounted in the area of the station frame (16) using spacer elements (63, 64) and connecting elements (65, 66). In particular, it is intended to be mounted on the chamber base (30). Fig. 14 also shows that the fixing projections (55, 56) are each provided with insertion bevels (67) and outlet bevels (68). When the workpieces (5) are inserted into the clamping space (154), the workpiece (5) first comes into contact with the insertion bevels (67) and presses the holding arms (47, 48) apart against the forces of the springs (51, 52). After the workpiece (5) has been completely inserted into the clamping space (154), the holding arms (47, 48) automatically return to the locking position due to the forces of the springs (511 52) and press the workpiece (5) against the stop element (61) , The workpiece (5) is thereby fixed within the plasma chamber (17).

After completion of the treatment of the workpiece (5), the workpiece (5) is gripped by a transfer element and pulled against the outlet bevels (68). The outlet bevel (68) is preferably curved and is designed with a curvature course corresponding to an outer contour of the workpiece (5) in the contact area. The holding arms (47, 48) are thereby brought apart again and release the workpiece (5). In particular, it is contemplated to provide the transfer element with controlled tong arms. The controlled pliers arms enable active gripping of the workpieces (5) and support the application of

Pressure forces and tensile forces on the insertion bevels (67) and the outlet bevels (68). In particular, it is contemplated that the controlled pliers of the transfer elements act on the workpiece (5) at an essentially same height level as the holding arms (47, 48) or at a somewhat lower or higher level. As a result, the introduction of tilting forces into the workpiece (5) is avoided or greatly reduced. FIG. 15 shows the arrangement according to FIG. 14 after inserting a bottle-like workpiece (5) which is acted upon by the holding arms (47, 48) between a support ring (69) and a shoulder region (70). Holding such a bottle-like workpiece (5) in the neck region shown leads to a very stable fixation of the workpiece (5). The locking elements (159, 160) are also shown in FIG. 15. The locking elements

(159, 160) are positioned together with the chamber wall (18). In the arrangement shown, the locking elements (159, 160) block a movement of the holding arms (47, 48), so that an uncontrolled opening of the holding element

(46) is safely prevented.

16 shows in detail a valve block (254) arranged below the chamber base (30). The valve block (254) essentially consists of a block housing which holds a plurality of valves (255). In particular, it is contemplated to use electromagnetically controlled valves (255).

16, the valve block (254) is arranged directly below the chamber base (30). In principle, it is also conceivable to realize the chamber base (30) and the valve block (254) as a single component. The valves (255) are only shown schematically in FIG. 16. In particular, the valve block (254) according to the present embodiment has a primary vacuum valve (256) for supplying a first vacuum level and a secondary vacuum valve

(57) to supply a lower vacuum than the first vacuum level. A process vacuum valve (258) is also arranged to maintain the vacuum synchronously with the supply of the process gas. The process vacuum valve (258) avoids an overflow of extracted process gas in the supply circuits for the primary vacuum and the secondary vacuum.

A chamber vacuum valve (259), which carries out a corresponding shut-off function, is used to support an optional or joint supply of negative pressure to the interior of the workpiece (5) and / or to the further interior of the plasma chamber (17). In particular, it is contemplated to supply the respective supply vacuum directly to the interior of the workpiece (5) via the valves (256, 257, 258) and to control the further interior of the plasma chamber (17) in a controlled manner via the chamber vacuum valve (259).

A workpiece venting valve (260) and a chamber venting valve (261) are used to support a definable and mutually independent venting of both the interior of the workpiece (5) and the further interior of the plasma chamber (17).

A primary process gas valve (262) and a secondary process gas entile (263) are used to support the supply of different process gas compositions. Additional equipment (264, 265) can be used to connect or derive additional equipment.

In the embodiment shown in FIG. 16, a plurality of valves are arranged one below the other in groups. Such an arrangement supports a connection of the valves to the corresponding ones

Equipment sources. Such an arrangement also facilitates the electrical connection of electromagnetically controlled valves. FIG. 17 shows the arrangement according to FIG. 16 after opening the plasma chamber (17) by lifting the chamber wall (18). In this operating state of the plasma station (3), all valves (255) are closed and the lance (36) is retracted into the chamber base (30) and the valve block (254), so that the workpiece (5) can be positioned laterally.

FIG. 18 shows an embodiment of the valve block (254) which is modified compared to FIGS. 16 and 17. The embodiment shown here is particularly advantageous for supplying two plasma chambers (17) with a symmetrical design of the respective feed channels. The process gas valves (262, 263) are not shown in the illustrations from FIGS. 14 to 16. The chamber vacuum valve (259), the workpiece ventilation valve (260) and the chamber ventilation valve (261) are arranged on an essentially identical vertical plane in a region of the valve block (254) facing the plasma chamber (17). The primary vacuum valve (256), the secondary vacuum valve (257) and the process vacuum valve (258) are arranged below this level and in the vertical direction.

19 shows in a further vertical sectional view that actuating elements (269) are used in each case for controlling the valves (255). The control elements (269) can be designed, for example, as electromagnetic coils which, depending on their respective electrical control, arrange the valves (255) in a closed position, an open position or, if appropriate, also in intermediate positions. A chamber connection channel (270) runs within the valve block (254) for a direct connection of at least one of the valves (255) to the interior of the Plasma chamber (17) and a workpiece connection channel (71) for connecting at least one of the valves (255) to an interior of the workpiece (5) to be treated.

Fig. 20 shows a connection of the valves (255). Flexible connecting lines (267) are plugged onto connecting pieces (266) and fixed with hose clips (268). The use of connecting pipes is also possible. The respective selection of the suitable connecting lines (267) is made taking into account the structural boundary conditions.

21 shows a plasma station (3) with two plasma chambers (17) for the simultaneous plasma treatment of two workpieces (5). Each of the plasma chambers (17) is connected via a coupling channel (27) as well as an adapter (26) and a deflection (25) to a microwave generator (19). In principle, it is also conceivable to have a common one for two or more plasma chambers (17)

To use microwave generator (19) and to split the generated microwave radiation via a branch, not shown, to ensure a uniform ignition of the plasma in each of the plasma chambers (17).

Coupling channels (354) open into the plasma chambers (17), each of which is connected to a branch (355) for dividing a quantity of an operating medium supplied into two subsets. If more than two plasma chambers (17) are used, the branch (355) is either provided with a corresponding number of outputs, or a plurality of partial branches are cascaded in a row. The arrangement of the branch (355) shown in FIG. 12 in the immediate vicinity of the plasma chamber (17) leads to very short coupling channels (27). If a vacuum is supplied, this has the advantage that only a relatively small volume of the coupling channels (27) has to be evacuated.

FIG. 22 shows a vertical section through the arrangement according to FIG. 21 with the lance slide (37) additionally drawn in. In the position shown, the plasma chamber (17) is closed and the lance slide (37) is guided against the chamber base (30), so that a flow of process gas into the interior of the workpiece (5) can be controlled.

In the area of the chamber base (30) there are chamber channels (356) for connecting interior spaces of the plasma chambers (17) to the respective supply means and to the

Positioning channel (357) is arranged, within which a coupling tube (358) is guided so as to be longitudinally displaceable and sealed, which provides a connection to the plasma gas channel (38) within the lance slide (37). Regardless of a respective positioning of the lance carriage (37) to Ka mersockel (30), the lance (36) is thereby connected to a process gas supply, so that penetration of ambient air into the process gas supply is avoided.

FIG. 23 shows the arrangement according to FIG. 21 in a highly schematic representation and with an additional representation of valves (359) for controlling an operating medium supply. In the illustrated embodiment, three branches (355) are used due to the circuit arrangement of the coupling channels (354). Quartz glass windows (368) can also be seen for sealing the interior of the plasma chambers (17) relative to the interior of the coupling channels (27) with simultaneous passage for the microwave radiation. According to the present embodiment, a primary vacuum valve (360) for supplying a first vacuum level and a secondary vacuum valve (361) for supplying a lower pressure than the first vacuum level are used. A process vacuum valve (362) is also arranged to maintain the vacuum in synchronism with the supply of the process gas. The process vacuum valve (362) avoids an overflow of extracted process gas into the supply circuits for the primary vacuum and the secondary vacuum.

To support an optional or joint supply of negative pressure to the interior of the workpiece (5) and / or to the further interior of the plasma chamber (17), a

Chamber vacuum valve (363) is used, which performs a corresponding shut-off function. In particular, it is contemplated to supply the respective supply vacuum directly to the interior of the workpiece (5) via the valves (360, 361, 362) and to control the further interior of the plasma chamber (17) in a controlled manner via the chamber vacuum valve (363).

To support a definable and independent ventilation of both the interior of the

Workpiece (5) and the further interior of the plasma chamber (17), a workpiece vent valve (364) and a chamber vent valve (365) are used.

To support a supply of different

Process gas compositions include a primary process gas valve (366) and a secondary process gas valve (367).

In principle, it is possible to use the branches (355) to connect several plasma chambers (17) to common valves (359) to join. Alternatively or additionally, it is possible to connect several cavities within a plasma chamber to common valves (359) via the branches. Finally, as an alternative or in addition to the above variants, it is also contemplated to connect a plurality of interior spaces of workpieces (5) within a common plasma chamber (17) or within a common cavity with common valves (359).

The valves (359) are preferably actuated via a programmable electronic control. First, after closing the plasma chamber (17), the primary vacuum valve (360) is opened and the interior of the workpiece (5) and the interior of the plasma chamber (17) are evacuated at the same time. A pressure level in the range of 20 bar to 50 bar is reached. After the primary vacuum valve (360) has been closed, the secondary vacuum valve (361) is opened and the interior of the workpiece (5) and the interior of the plasma chamber (17) are initially connected simultaneously to a vacuum source with a lower pressure level. After sufficient evacuation of the interior of the plasma chamber (17) surrounding the workpiece (5), the chamber vacuum valve (363) closes and only the interior of the workpiece (5) is evacuated further. A pressure level of about 0.1 mbar is reached.

After the chamber vacuum valve (363) has been closed and the lance (36) has generally already been positioned within the interior of the workpiece (5), the primary process gas valve (366) opens and a process gas of a first composition is supplied. For the process gas supply to the lance (36), the gas connections (39), for example shown in FIG. 6, in the region of the chamber base (30) are designed in such a way that within a bore-like recess, a tubular coupling element is guided displaceably in a longitudinal direction. Sealing can be done using a dynamic ring seal. The tubular connecting element is carried by the lance slide (37) and establishes a connection to the plasma gas channel (38) within the lance slide (37). By a corresponding displacement of the tubular

Connection element within the bore-like recess ensures a connection to the process gas distribution for each positioning of the lance slide (37).

After a sufficient supply of process gas, the microwave generator (19) ignites the plasma in the interior of the workpiece (5). the primary process gas valve (366) and the secondary process gas valve close at a predeterminable point in time

(367) opens to feed one

Process gas of a second composition. At least temporarily, parallel to the opening of the process gas valves (366, 367), the process vacuum valve (362) also opens to a sufficiently low negative pressure in the interior of the workpiece

(5) maintain. Here, a pressure level of about 0.3 mbar proves to be expedient.

After completion of the plasma coating, the workpiece vent valve (364) first opens and connects the interior of the workpiece (5) to an ambient pressure. with a predefinable time delay after opening the workpiece vent valve (364) also opens the chamber vent valve (365) to the interior of the

Raise the plasma chamber (17) completely to the ambient pressure. After at least approximately reaching the ambient pressure within the plasma chamber (17), the plasma chamber (17) can open and the coated workpiece (5) is removed and replaced by a new one to be coated Workpiece (5) replaced.

To remove any residues of the

Plasma treatment method within the workpiece (5), it is possible to remove the workpiece (5) from the

Introduce plasma chamber (17) compressed air into the workpiece (5) and thereby remove any impurities.

The discharge of the compressed air can either take place in an environment of the plasma station (3), but in particular it is also contemplated to activate one of the negative pressure connections at the same time as the pressure is applied and thereby to carry out a defined suction of the contaminants.

Alternatively, it is also thought to carry out the cleaning process exclusively by applying an additional vacuum and the

Carry out cleaning process by inflowing ambient air.

In the case of a compressed air supply, in particular a supply through the lance (36) is envisaged, since this allows the purge air to be introduced into an area of the interior of the workpiece (5) which is arranged facing away from an opening of the workpiece (5). This supports a purge air flow in the direction of the opening of the workpiece (5) and an effective cleaning process is carried out.

FIG. 24 shows a plasma module (1) modified from the representation in FIG. 3. The plasma wheel (2) is designed here for a circumferential transport of plasma stations (3), which are each provided with two plasma chambers (17). For each of the plasma chambers (17), each of the plasma stations (3) has two microwave generators (19), two deflections (25) and two adapters (26) which use microwaves to ignite the plasma via coupling channels (27). Introduce into the assigned plasma chambers (17). The support ring (14) of the plasma wheel (2) has a vertical cross-section with a c-shaped profile with a base leg (441), a spacer leg (442) and an end leg (443). The spacer leg (442) runs essentially in a vertical direction, the base leg and the end leg (443) are arranged essentially horizontally. The base leg (441) and the end leg (443) extend from the spacer leg (442) in a radially outward direction.

The plasma stations (3) are arranged in the vertical direction above the end leg (443). In the embodiment according to FIG. 24, conveyor devices (444) for an operating medium are arranged on the base leg (441). The equipment is fed to the plasma stations (3). In the exemplary embodiment shown, the conveying device (444) is implemented as a vacuum pump. In addition to conveyors (444) are also

Distribution cabinets (445) for an electrical supply to the plasma stations (3) are arranged on the base leg (441). The conveying devices (444) and the distribution cabinets (445) are arranged within the receiving space provided by the c-shaped profile of the support ring (14).

When the plasma wheel (2) rotates, the conveying devices (444) and the distribution cabinets (445) rotate together with the plasma stations (3) due to the arrangement explained, and there is also no relative movement between these assemblies. Corresponding connecting lines can thus be implemented in a simple manner. Fig. 24 shows the plasma station (3) without a mounted chamber base (30). In this way, lances (36) for supplying process gas can be recognized, which are carried and positioned by lance slides (37). The lance slides can be positioned along the guide rods (23).

FIG. 25 shows a slightly modified plasma module (1) compared to the representation in FIG. 24 in a different representation and with a partially changed illustration of the individual parts. The microwave generators (19) are positioned differently from the illustration in FIG. 24. In addition, between the lance carriage (37) and the plasma chambers (17), the chamber bases (30) are shown in FIG. 25, in the area of which, in particular, control valves for supplying the plasma stations (3) with operating equipment can be arranged.

The distribution cabinets (445) are not shown in Fig. 25, so that a view into the center of the plasma wheel (2) is possible. It can be seen that a rotary coupling (446) is arranged approximately at a height level of the conveyor devices (444). The rotary coupling (446) serves to connect the conveying devices (444) to external conveying devices (447). When the plasma stations (3) are operated with three different negative pressures, namely a first negative pressure, a second negative pressure lower than the first negative pressure and a process negative pressure, the rotary coupling (446) is implemented as a three-way vacuum rotary introduction. The rotary coupling (446) can be connected to the external conveying devices (447) in a simple manner via connecting pipes (448), some of which run below the machine base (15). For this purpose, the machine base (15) has stand elements (449) which provide an assembly space below the machine base (15) in that the machine base (15) is arranged at a vertical distance from a dividing surface. The rotary coupling (446) is connected via lines (450) to the respectively assigned conveying devices (444). The spacer leg (442) is shown partially transparently in the illustration in FIG. 25, so that the course of the lines (450) can be seen.

FIG. 26 shows the arrangement according to FIG. 25 in a partially assembled state. In particular, it can be seen that a distributor (451) is arranged at a height level similar to the height level of the plasma chambers (17). In the exemplary embodiment shown, the distributor (451) is implemented as a three-way distributor. For this purpose, the distributor (451) has three distribution segments arranged one above the other in the vertical direction. The distribution segments are each connected to the plasma chambers (17) via connecting lines (452). In the exemplary embodiment shown, two operating means are fed to the distributor (451) in each case via a conveying device (444). For this purpose, the conveyor devices (444) are connected to the distributor (451) via coupling lines (453).

Another operating medium is fed to the distributor (451) via a riser (454) directly from the rotary coupling (446).

FIG. 27 shows the arrangement according to FIG. 26 with only one illustrated plasma station (3) for further clarification. In particular, the arrangement of the three segments of the distributor (451) one above the other in the vertical direction and the course of the connecting lines (448) between the distributor (451) and the chamber base (30) can be seen here. The connecting lines (452) are led directly to valves arranged in the area of the chamber base (30). In particular, FIG. 27 also illustrates that in the exemplary embodiment shown, the distributor (451) is carried by the lines (452, 453). This ensures good accessibility. But it is also possible to use additional support elements.

FIG. 28 shows the arrangement according to FIG. 27 in a different perspective view and with assigned six external conveying devices (447). In this case, two external conveying devices (447) are assigned to each vacuum level. In the exemplary embodiment shown, the conveying devices (447) provide a negative pressure in the range from approximately 30 mbar to 50 mbar for the first negative pressure stage. This negative pressure is fed to the plasma stations (3) in the illustrated embodiment without additional conveying devices (444) on the plasma wheel (2) directly via the rotary coupling (446). The negative pressures for the other external conveyor devices (447) are specified as a function of the respective process requirements. In particular, a pressure range of approximately 1 mbar to 10 mbar is envisaged. Rotary vane pumps, Roots pumps or a combination of these pump types can be used as conveying devices (444, 447). According to a preferred embodiment, Roots pumps are used as conveying devices (444) arranged on the plasma wheel (2) and rotary vane pumps as external conveying devices (447).

In order to reduce unnecessarily long connecting pipes (448), particular consideration is given to positioning the external conveying devices (447) adjacent to the plasma module (1). A special pre-stage module can be used for this purpose, for example. Within such The required external conveyor devices (447) can be arranged in the pre-stage module and the pre-stage module can be equipped with standardized connections for connection to the plasma module (1). This greatly simplifies both assembly and later commissioning.

In the embodiment according to FIG. 28, the two external conveying devices (447) for the first vacuum stage are connected in parallel relative to one another. The other external conveying devices (447) for the second vacuum stage, which operates at a lower pressure level relative to the first vacuum stage, and the third vacuum stage for maintaining the vacuum while the treatment is being carried out, are connected in series. This takes into account that it is primarily important to pump out a relatively large volume when generating the relatively higher negative pressure, but in the case of the two further negative pressure levels working at lower pressure levels relative to the first negative pressure level, the desired low pressure is primarily to be achieved, which is due to the series connection is supported.

Fig. 29 shows an embodiment in which the conveyors (444) are at a higher level than that

Plasma stations (3) are arranged. Although this leads to a higher center of gravity of the plasma wheel (2), it ^'is but provided very good accessibility of the conveyors (444) both during assembly and during later servicing. In such an embodiment, coupling to the external conveyor devices (447) preferably takes place via connecting pipes (448) which are initially laid above the plasma module (1) and are connected to the external conveyor devices (447) via vertical lines (455). Through the Arranging the conveyor devices (444) above the plasma stations (3), the plasma stations (3) can be arranged relatively low, so that the workpieces (5) to be coated can also be input and output at a relatively low height level.

30 shows a further embodiment of the plasma module (1). The plasma wheel (2) is suspended here in a support frame (456). In contrast to the embodiments already explained, a rotary bearing (457) of the plasma wheel (2) is not located below the plasma wheel (2) in the vertical direction, but above the plasma wheel (2) in the vertical direction. The structure of the plasma station (3) can basically be retained compared to the other embodiments. 30 shows the plasma station (3) only in a partial representation without chamber base (30) and without the lance slide (37) with assigned components.

In an embodiment according to FIG. 30, it is also possible to use arranged on the plasma wheel (2)

Conveyors (444) maintain a relatively low arrangement of the plasma chambers (17). In the exemplary embodiment shown, three conveyor devices (444) are positioned on the plasma wheel (2). Relative to a rotary bearing (457) held by the support frame (456)

Plasma stations (3) are arranged below the rotary bearing (457) and the conveying devices (444) above the rotary bearing (457). This high arrangement of the rotary bearing (457) enables a high level of structural stability to be provided despite the high arrangement of the conveyor devices (444).

A typical treatment process is explained below using the example of a coating process and carried out in such a way that the workpiece (5) is first transported to the plasma wheel (2) using the input wheel (11) and that in a pushed-up state of the sleeve-like chamber wall (18) the workpiece (5) is inserted into the plasma station (3).

To insert the workpiece (5), the workpiece (5) is first inserted into the clamping space (154) by a transfer element. After the workpiece (5) has been fixed by the holding arms (47, 48), the controlled holding pliers of the transfer element open and release the workpiece (5).

After completion of the insertion process, the chamber wall (18) is lowered into its sealed position and, at the same time, both the cavity (4) and an interior of the workpiece (5) are evacuated at the same time.

After the interior of the cavity (4) has been sufficiently evacuated, the lance (36) is moved into the interior of the workpiece (5) and the interior of the workpiece (5) is partitioned off from the interior of the cavity (28) by moving the holding element (28). 4) performed. It is also possible to move the lance (36) into the workpiece (5) synchronously with the beginning of the evacuation of the interior of the cavity. The pressure inside the workpiece (5) is then further reduced. In addition, the positioning movement of the lance (36) is at least partially already carried out parallel to the positioning of the chamber wall (18). After reaching a sufficiently low vacuum, process gas is introduced into the interior of the workpiece (5) and the plasma is ignited with the aid of the microwave generator (19). In particular, it is intended to use the plasma to deposit both an adhesion promoter on an inner surface of the workpiece (5) and the actual barrier layer made of silicon oxides. The adhesion promoter can be applied, for example, in a two-stage process as the first stage before the barrier layer is applied in the second stage, but it is also conceivable in a continuous process to add at least part of the barrier layer at the same time as the application of at least part of the adhesion promoter produce.

But it is still conceivable in a continuous

Method of producing at least one part of the barrier layer facing the workpiece (5) as a gradient layer at the same time as applying at least a part of the adhesion promoter. Such a gradient layer can be generated in a simple manner during the duration of an already ignited plasma by changing the composition of the process gas. Such a change in the composition of the process gas can be achieved abruptly by changing valve controls or continuously by changing the mixing ratio of components of the process gas. A typical structure of a gradient layer is such that in a part of the gradient layer facing the workpiece (5) an at least predominant part of the adhesive agent and in a part of the gradient layer facing away from the workpiece (5) at least predominantly a part of the barrier material is contained. A transition of the respective components takes place continuously in at least part of the gradient layer in accordance with a predeterminable gradient course.

The interior of the plasma chamber (17) and the interior of the workpiece (5) are first evacuated together to a pressure level of approximately 20 mbar to 50 mbar. The pressure in the interior of the workpiece (5) is then further reduced to approximately 0.1 mbar while the Treatment process, a negative pressure of about 0.3 mbar is maintained.

After the coating process has been completed, the lance (36) is removed from the interior of the workpiece (5) - and the plasma chamber (17) and the interior of the workpiece (5) are ventilated. After reaching the ambient pressure within the cavity (4), the chamber wall (18) is raised again in order to remove the coated workpiece (5) and to enter a new workpiece (5) to be coated. To enable the workpiece (5) to be positioned laterally, the sealing element (280) is moved back into the chamber base (3) at least in some areas.

To carry out the removal of the workpiece, a transfer element with a controlled pliers is again positioned in the area of the holding element (46) and the controlled pliers of the transfer element access the workpiece (5). The workpiece held in this way is then pulled out of the holding element (46), the holding arms (47, 48) being pressed apart against the forces of the springs (51, 52). To enable the workpiece (5) to be positioned laterally, the sealing element (28) can be moved back into the chamber base (3) at least in some areas.

As an alternative to the interior coating of workpieces (5) described, exterior coatings, sterilizations or surface activations can also be carried out. In such embodiments, the holding element (46) in the case of bottle-like workpieces (5) grips the workpiece (5) preferably in the threaded region or at a short distance from the mouth opening. The chamber wall (18), the holding and sealing element (28, 280) and / or the lance (36) can be positioned using different drive units. Fundamentally, the use of pneumatic drives and / or electric drives, especially in one

Embodiment as a linear motor, conceivable. In particular, however, it is envisaged to implement curve control to support exact movement coordination by rotating the plasma wheel (2). The curve control can for example be carried out in such a way that along a

Circumference of the plasma wheel (2) are arranged along which cam rollers are guided. The cam rollers are coupled to the components to be positioned.

The valves (255) are preferably actuated via a programmable electronic control. First, after closing the plasma chamber (17), the primary vacuum valve (256) is opened and the interior of the workpiece (5) and the interior of the plasma chamber (17) are evacuated at the same time. A pressure level in the range of 20 mbar to 50 mbar is achieved. After the primary vacuum valve (256) has been closed, the secondary vacuum valve (257) is opened and the interior of the workpiece (5) and the interior of the plasma chamber (17) are initially simultaneously connected to a vacuum source with a lower pressure level. After sufficient evacuation of the interior of the plasma chamber (17) surrounding the workpiece (5), the chamber vacuum valve (259) closes and only the interior of the workpiece (5) is evacuated further. A pressure level of about 0.1 mbar is reached.

After the chamber vacuum valve (259) has been closed and the lance has generally been positioned beforehand (36) inside the interior of the workpiece (5) opens the primary process gas valve (262) and a process gas of a first composition is supplied. to

Process gas supply to the lance (36) is particularly thought of, for example, that shown in FIG. 6

To make gas connections (39) in the area of the chamber base (30) in such a way that a tubular coupling element is displaceably guided in a longitudinal direction within a bore-like recess. Sealing can be done using a dynamic ring seal. The tubular

Connection element is carried by the lance slide (37) and establishes a connection to the plasma gas channel (38) within the lance slide (37). A corresponding displacement of the tubular connecting element within the bore-like recess ensures a connection to the process gas distribution for each positioning of the lance slide (37).

After a sufficient supply of process gas, the microwave generator (19) ignites the plasma in the interior of the workpiece (5). at a predeterminable point in time the primary process gas valve (262) closes and the secondary process gas valve (263) opens to supply a process gas of a second composition. The process vacuum valve (258) also opens, at least temporarily in parallel with the opening of the process gas valves (262, 263), in order to maintain a sufficiently low negative pressure in the interior of the workpiece (5). Here, a pressure level of about 0.3 mbar proves to be expedient.

After the plasma coating has been completed, the workpiece vent valve (260) first opens and connects the interior of the workpiece (5) to an ambient pressure. With a definable time delay after opening of the workpiece ventilation valve (260) also opens the chamber ventilation valve (261) in order to raise the interior of the plasma chamber (17) completely to the ambient pressure. After at least approximately reaching the ambient pressure within the plasma chamber (17), the plasma chamber (17) can open and the coated workpiece (5) is removed and replaced by a new workpiece (5) to be coated.

To remove any residues of the

Plasma treatment method within the workpiece (5), it is possible to introduce compressed air into the workpiece (5) before removing the workpiece (5) from the plasma chamber (17) and thereby to remove any impurities. The discharge of the compressed air can either take place in an environment of the plasma station (3), but in particular it is also contemplated to activate one of the negative pressure connections at the same time as the pressure is applied and thereby to carry out a defined suction of the contaminants. Alternatively, it is also considered to carry out the cleaning process exclusively by applying an additional vacuum and to carry out the cleaning process using ambient air flowing in.

In the case of a compressed air supply, in particular a supply through the lance (36) is envisaged, since in this way the purging air can be introduced into an area of the interior of the workpiece (5) that faces away from an opening of the workpiece (5). This supports a purge air flow in the direction of the opening of the workpiece (5) and an effective cleaning process is carried out. Fig. 31 shows a support ring (14) of a further embodiment of the plasma wheel (2). A plurality of carriers (541) are arranged on the support ring (14), each of which positions holding elements (542) for the workpieces (5). In the embodiment shown, the carriers (541) are essentially circularly delimited and six holding elements (542) are arranged in the vicinity of a circumference of the carriers (541). The holding elements (542) are designed for positioning bottle-shaped workpieces (5), the workpieces (5) each with

Mouth openings are arranged vertically downwards.

The carrier (541) with the holding elements (542) and the ^■ workpieces (5) can be of different designs

Plasma stations (3) are used. For example, it is possible to equip the plasma station (3) with only one plasma chamber (17) and to insert all workpieces (5) together into this plasma chamber (17). It is also conceivable to divide a corresponding common plasma chamber (17) into individual cavities (4) or separate plasma chambers (17) in the area of the plasma station (3) for each of the workpieces (5) or for subgroups of the supports (541) positioned workpieces (5).

32 shows a schematic illustration of a plasma wheel (2) with a plurality of carriers (541). The carriers (541) are completely loaded with the workpieces (5) to be treated in the area of a loading station (543) and a carrier (541) equipped with the workpieces (5) is transferred to the plasma wheel (2). After completion of the treatment process and a corresponding rotational movement of the plasma wheel (2), the carrier (541) equipped with the workpieces (5) is removed from the plasma wheel (2) and into the area of an unloading station (544) transferred.

After the finished workpieces (5) have been removed, the carrier (541) can again be fitted with workpieces (5) in the area of the loading station (543) and attached to the

Plasma wheel (2) to be handed over. In particular, in such an embodiment, it is contemplated to use at least one carrier (541) more than can be arranged simultaneously in the region of the plasma wheel (2). As a result, immediately after a carrier (541) to be unloaded has been removed, a carrier fully equipped with workpieces (5) can be transferred back to the plasma wheel (2).

With regard to the material flow of the workpieces (5), different variants are conceivable. For example, it is possible to always convey the workpieces (5) on a substantially horizontal transport path. Both loading of the carriers (541) in the area of the loading station (543),. machining of the workpieces (5) in the region of the plasma wheel (2) and unloading of the carriers (541) in the region of the unloading station (544) would be carried out at an essentially constant height level. However, it is also possible, for example, to carry out lifting movements of the carrier (541) on the plasma wheel (2), in the area of the loading station (543) and / or in the region of the unloading station (544), the carrier (541) carrying the workpieces (5 ) or without the workpieces (5) is positioned in an upward or downward direction. Such a procedure is particularly advantageous if the carrier (541) is to be lifted into the plasma chamber (17) or lowered into the plasma chamber (17) together with the workpieces (5) to be machined.

FIG. 33 shows an embodiment modified from the representation in FIG. 32. The beams (541) are here arranged stationary in the area of the plasma wheel (2) and rotatably supported relative to the plasma wheel (2) via rotary bearings (545). In particular, it is contemplated to support the carriers (541) in the area of the plasma wheel (2) in such a way that rotational movements can be carried out.

As with the embodiment in Fig. 32 is also in the

33 especially thought that the plasma wheel (2) carries out a continuous rotary movement with a constant rotational speed. To support such an operating mode, the loading station (543) is formed from a transfer element (546) and a loading wheel (547). In the embodiment shown, the workpieces (5) to be machined reach the area of the loading wheel (547) via an input path (548) and are transferred by this to the transfer element (546).

In the embodiment shown, the transfer element (546) has a circumferential transfer element (549), which can be implemented, for example, like a chain. The loading wheel (547) initially transfers the workpieces (5) to be machined to the transfer element (549) in the area of a transfer position (550). The loading wheel (547) and the transfer element (549) are expediently moved in the same direction and at the same peripheral speed in the area of the transfer position (550) in order to be able to carry out the transfer process continuously.

A transfer path (551) is provided for transferring the workpieces (5) from the transfer element (549) to the carrier (541), which essentially has a curvature corresponding to the movement path of a part of the carrier (552) facing away from a center point (552) of the plasma wheel (2). 541) runs. This takes into account the fact that between the carrier (541) and the Transfer element (549) is not a fixed transfer position, but that the transfer position changes due to the rotation of the plasma wheel (2).

With a sufficiently fast rotational movement of the carrier (541) and a corresponding rotational speed of the transfer element (549), a relatively short dimensioning of the transfer path (551) can be carried out and a relatively short period of time can thus be implemented for the transfer process.

After completion of the treatment process of the workpieces (5) and a corresponding rotational movement of the plasma wheel (2), the carrier (541) reaches the area of a transfer element (553) which, together with an unloading wheel (554), forms the unloading station (544). Similar to the transfer element (546), the transfer element (553) also has a transfer element (555) which, for example, can be chain-like and can be driven in rotation. The implementation of the transfer process of the coated

Workpieces (5) from the carrier (541) to the transfer element (555) and from the transfer element (555) to the unloading wheel (554) and from this to an output section (556) are carried out analogously to the input, only in the reverse order of the transfer processes to be carried out. A transfer section (557) of the transfer element (555) also runs with a curvature corresponding to the transfer section (551) of the transfer element (549).

FIG. 34 shows a variant in which the plasma wheel (2) is operated in cycles. This enables direct loading of the carriers (541) using the loading wheel (547) and direct unloading of the carriers (541) using the unloading wheel (554), since there are fixed input and output positions. At all Embodiments may, alternatively to the illustrated Beladerädern (547) and Entladerädern (554), other peripheral or even alternating back and forth motion transfer elements (549, 555) may be used ^'. However, the wheels shown have advantages both in terms of mechanical stability and in terms of the exact reproducibility of the movements carried out.

^' According to one of those shown in the drawings

In another embodiment which deviates from embodiments, it is possible to use at least two carriers (541) per plasma station (3). For example, for a plasma station (3) for the treatment of six workpieces (5), it is conceivable to position three workpieces (5) each by means of a common carrier (541) and thus to use two carriers (541) per plasma station (3).

A constructive structure of the carrier (541) can depend on the given constructive

Boundary conditions take place. For example, it is possible to design the carrier (541) like a plate and to provide it with suitable recesses, for example for the lances (36) and the sealing elements (28). It is also conceivable to construct the carrier (541) in a ring-like manner or one

To choose the construction in such a way that, starting from a central area, outward-pointing spoke-like support segments are used.

In order to supply the necessary operating resources, in particular negative pressure and process gas,. Canal branches can be arranged in the area of the chamber base (30), which make it possible to supply several plasma chambers (17) or cavities (4) with common control valves. The arrangement of several workpieces (5) in the area of a common plasma station (3) explained in the exemplary embodiments makes it possible, on the one hand, to achieve an increased production output. Another variant consists in treating different workpieces (5) simultaneously on a common machine.

For example, it is possible to provide successive supports (541) with different workpieces (5) in each direction and to insert them in appropriately adapted plasma stations (3). In the area of assigned input devices and output devices, the different workpieces (5) to be treated would then be fed alternately in groups and separated again from one another in the area of the output device. In principle, it is also possible to provide a correspondingly mixed arrangement of different workpieces (5) on a common carrier (541), if suitable

Input and output facilities are provided. A user therefore does not need several machines to process different products or is relieved of complex machine conversions.

It is also contemplated to perform a functional grouping of pumps that are used to generate the required negative pressures. For example, it is possible to use pumps of the same type and to alternately connect successive plasma stations (3) to the respective pumps in the direction of movement. As a result, the individual plasma station (3) remains connected to an associated pump for longer and switching times are saved. With simultaneous treatment of differently shaped workpieces (5) or workpieces (5) with different sizes relative to each other, it is also possible to connect the respective plasma stations (3) or the associated plasma chambers (17) with different pumps in order to provide optimal process conditions adapted to the specific geometry of the workpiece (5). Successive plasma stations (3) can thereby be connected to different pumps in terms of circuitry.

35 shows a schematic block diagram for

Illustration of the process sequence in the case of an optional activation of a control for carrying out a production operation or a laboratory operation. A corresponding control sequence is also implemented in the device according to the invention. 35 shows a control unit (654) which is provided with an input device (655) and a display device (656). Using the input device (655), it is possible to activate different function modules (657). At least one of the function modules (657) is provided for carrying out a production operation; moreover, several different function modules (657) can be selected for carrying out different service programs. At least one of the function modules (657) is configured to carry out a laboratory operation.

The activation of the function module (657) for a laboratory operation of the machine typically takes place after the selected treatment station in the present one

Exemplary embodiment, the selected plasma station (3) at which positioning for laboratory operation has been arranged. At this position, the required external media supplies are connected manually or automatically. It is possible to externally supply all required media supply, but in particular it is also contemplated to use media supplies connected to the treatment station in production operation and only to use a control of the media supplies adapted for laboratory operation. The supply of external operating equipment relates, for example, to the supply of negative pressure, positive pressure, electrical energy, mechanical drive energy or special control sequences for carrying out a laboratory operation.

When activating a laboratory operation for a blow molding machine, particular consideration is given to providing the supply device with a heating device for the preforms. The heating device can be equipped, for example, with infrared radiators or microwave radiators. In the case of such an embodiment, in particular, it is also contemplated to manually position the preforms in the area of the heating device and to automatically transfer them from the heating device to the processing station set in the laboratory.

It is also possible to carry out the laboratory operation for machines for plasma treatment as well as for machines for blow molding, with the normal one

Activate production safety devices to support safe operation. The safety devices can relate, for example, to the monitoring of the correct closing of access doors and the correct implementation of pneumatic connections.

The workpieces (5) are typically inserted manually in laboratory operation, but automation or at least partial automation can also be carried out. 36, a device for blow molding a container (742) essentially consists of a blow molding station (743) which is provided with a blow mold (744) into which a preform (741) can be inserted. The preform (741) can be an injection molded part made of polyethylene terephthalate.

In order to enable the preform (741) to be inserted into the blow mold (744) and to enable the finished container (742) to be removed, the blow mold (744) consists of mold halves (745, 746) and a base part (747) which is provided by a lifting device (748) can be positioned. The preform (741) can be held in the area of the blowing station (743) by a transport mandrel (749) which, together with the preform (741), passes through a plurality of treatment stations within the device. However, it is also possible to insert the preform (741) directly into the blow mold (744), for example using pliers or other handling means.

To enable a compressed air supply line, a connecting piston (750) is arranged below the transport mandrel (749), which supplies compressed air to the preform (741) and at the same time seals against the transport mandrel (749). In the case of a modified construction, it is generally also conceivable to use fixed compressed air supply lines.

The preform (741) is stretched using a stretching rod (751) which is positioned by a cylinder (752). In principle, however, it is also conceivable to perform a mechanical positioning of the stretching rod (751) via cam segments which are acted upon by tapping rollers. The use of curve segments is particularly expedient when a plurality of Blow stations (743) are arranged on a rotating blowing wheel. The use of cylinders (752) is expedient if there are blowing stations (743) arranged in a fixed position.

In the embodiment shown in FIG. 36, the stretching system is designed such that a tandem arrangement of two cylinders (752) is provided. From a primary cylinder (753), the stretching rod (751) is first moved into the area of a bottom (754) of the preform (741) before the actual stretching process begins, during the actual stretching process the primary cylinder (753) is extended together with a stretching rod the carriage (755) carrying the primary cylinder (755) is positioned by a secondary cylinder (756) or via a cam control. In particular, it is contemplated to use the secondary cylinder (756) in a cam-controlled manner in such a way that a current stretching position is specified by a guide roller (757) which slides along a cam track during the execution of the stretching process.

The guide roller (757) is pressed against the guideway by the secondary cylinder (756). The carriage (755) slides along two guide elements (758).

After the mold halves (745, 746) arranged in the region of the supports (759, 760) have been closed, the supports (759, 760) are locked relative to one another with the aid of a locking device (80).

To adapt to different shapes of a mouth section (761) of the preform (741) according to FIG. 37, the use of separate thread inserts (762) is provided in the area of the blow mold (744). 37 shows, in addition to the blown container (742), the preform (741), which is also shown in broken lines, and schematically a developing one Container bladder (763).

Fig. 38 shows the basic structure of a blow molding machine which is provided with a heating section (764) and a rotating blowing wheel (765). Starting from one

Preform entry (766), the preforms (741) are transported by transfer wheels (767, 768, 769) into the area of the heating section (764). Radiant heaters (770) and blowers (771) are arranged along the heating section (764) in order to temper the preforms (741). After the preforms (741) have been adequately tempered, they are transferred to the blowing wheel (765), in the area of which the blowing stations (743) are arranged. The finished blown containers (742) are fed to a delivery section (72) by further transfer wheels.

In order to be able to form a preform (741) into a container (742) in such a way that the container (742) has material properties that ensure a long usability of foodstuffs filled inside the container (742), in particular beverages, special process steps must be carried out the heating and orientation of the preforms (741) are observed. In addition, advantageous effects can be achieved by adhering to special dimensioning regulations.

Different plastics can be used as the thermoplastic material. Are usable, for example PET, PEN or PP.

The preform (741) is expanded during the orientation process by compressed air supply. The compressed air feed is fed into a pre-blowing phase, in the gas, for example ^'compressed air with a low pressure level is divided into a subsequent main blowing phase, in which gas is supplied at a higher pressure level. Compressed air with a pressure in the interval from 10 bar to 25 bar is typically used during the pre-blowing phase and compressed air with a pressure in the interval from 25 bar to 40 bar is fed in during the main blowing phase.

From Fig. 38 it can also be seen that in the embodiment shown, the heating section (764) is formed from a plurality of circumferential transport elements (73) which are strung together and guided along deflection wheels (74). In particular, the chain-like arrangement is intended to span an essentially rectangular basic contour. In the embodiment shown, a single relatively large deflection wheel (74) is used in the area of the heating section (764) facing the transfer wheel (769) and an input wheel (75), and two comparatively smaller deflection wheels (76) are used in the area of adjacent deflections , In principle, however, any other guides are also conceivable.

In order to enable the transfer wheel (769) and the input wheel (75) to be arranged as closely as possible relative to one another, the arrangement shown proves to be particularly expedient since three deflection wheels (74, 76) are positioned in the area of the corresponding extension of the heating section (764), and in each case the smaller deflection wheels (76) in the area of the transition to the linear courses of the heating section (764) and the larger deflection wheel (74) in the immediate transfer area to the transfer wheel (769) and the input wheel (75). As an alternative to using chain-like transport elements (73), it is also possible, for example, to use a rotating stimulating wheel. After the containers (742) have been blown, they are removed from the area of the blowing stations (743) by a removal wheel (77). transported via the transfer wheel (768) and an output wheel (78) to the output section (72).

In the modified heating section (764) shown in FIG. 39, the larger number of radiant heaters (770) allows a larger amount of preforms (741) to be tempered per unit of time. The blowers (771) introduce cooling air into the area of cooling air ducts (79), which are opposite the assigned radiant heaters (770) and discharge the cooling air via outflow openings. By arranging the outflow directions, a flow direction for the cooling air is essentially transverse to one

Transport direction of the preforms (741) realized. The cooling air ducts (79) can provide reflectors for the heating radiation in the area of the surfaces opposite the radiant heaters (770). It is also possible to cool the radiant heaters (770) by means of the cooling air emitted.

Both the devices for plasma treatment of workpieces (5) shown above and the devices for blow molding containers (742) shown in FIGS. 36 to 39 can be equipped with one or more coupling wheels (81) according to FIGS. 40 and 41 be equipped. The use of such coupling wheels (81) is particularly expedient when plasma stations (3) or blowing stations (743) with more than one cavity (4) each are used. The coupling wheels (81) are typically used to rotate workpieces (5) in the vertical direction. When handling containers (742), it is particularly intended to rotate the workpieces (5) or the containers (742) in the vertical direction by one horizontal axis of rotation. Typically, the rotation is carried out by 180 ° in such a way that a mouth which is initially oriented upward is oriented downward or an mouth which initially points downward in the vertical direction after the rotation in the vertical direction points upward.

40 shows the coupling wheel (81), which is rotatably mounted relative to a center line (82) for workpieces (5) or blown containers (742). The rotatable mounting can be implemented in such a way that the coupling wheel (81) is guided in a base (84) via bearings and a shaft (83).

On the outside of the coupling wheel (81) support arms (85) are arranged, which with holding elements (86) for the container

(742) are provided. In the exemplary embodiment shown, the holding elements (86) act on the workpieces (5) designed as containers (742) in the region of the mouth section (761) above a support ring.

The support arms (85) are movably guided relative to a base element (87) of the coupling wheel (81). The support arms (85) are each pivotable about an axis of rotation (88). The axis of rotation (88) runs in the region of a shaft (89) which is guided by bearings (90) in the base element (87) and extends essentially in the horizontal direction. The support arms (85) are coupled to a cam roller (91) in order to specify pivoting movements around the axis of rotation (88).

The cam rollers (91) engage in a cam track (92) which is arranged on the outside of the base (84) as a jacket cam. In the illustrated embodiment, the cam rollers (91) each move an adjusting element (93) in a vertical direction. The control element (93) is with a Coupling element (94) connected, which engages via a rack-like toothing (95) in a gear (96) which rests rigidly on the shaft (89). A stroke movement of the coupling element (94) is thereby transformed into a rotational movement of the shaft (83).

In particular, it is thought to choose the toothing in such a way that a maximum feasible stroke of the cam roller (91) is transformed into a rotation of the shaft (89) by 180 °. The up and down movement of the cam roller (91) is hereby converted into a pivoting movement of the shaft (89) through 180 ° and into a corresponding backward movement.

In the exemplary embodiment according to FIG. 40, the holding element (86) is provided with two pliers-like fixing elements (97), each of which has a container (742) in the region of the

Hold mouth section (761). Each of the fixing elements (97) is equipped with tong arms (98, 99) which are arranged so as to be rotatable around pivot bearings (100, 101). The gun arms (98, 99) are connected to each other by a coupling lever (102). The gun arm (98) has one

Set lever (103), which carries a cam roller (104). Curve segments (105, 106) are used to position the cam rollers (104). The actuating lever (103) preferably causes a symmetrical movement of the two tong arms (98, 99) when working together with the coupling lever (102).

Both cam rollers (104), each associated with a holding element, (86), run through the cam segments (105, 106) one after the other in time. This leads to the fact that

Fixing elements (97) are actuated sequentially in time. For a transfer of workpieces (5) or containers (742) to the holding elements (86), a single transfer position can thus be realized, in the area of which the transfers are carried out one after the other, although the workpieces (5) are transported further by a common holding element (86). The combination of the cam rollers (104) and the cam segments (105, 106) enables simple loading and unloading operations to be carried out despite the groupwise transport of the workpieces (5), as is possible with coupling wheels (81) with support arms (85), which each have only one holding element (86) for loading an individual workpiece (5).

FIG. 41 shows a top view again of the arrangement of the fixing elements (97) and the respective positioning of the fixing elements (97). It can be seen in particular that the tong arms (98, 99) of springs (107) are braced relative to one another. This leads to the fact that the fixing elements (97) assume the respective fixing position without external action. Only when the cam rollers (104) engage in one of the cam segments (105, 106) are the fixing elements (97) opened in a controlled manner in order to carry out a transfer process. The control of the fixing elements (97) even when the workpieces (5) are inserted has the advantage that sliding contact between the workpieces (5) and the fixing elements (97) is avoided. This counteracts the occurrence of abrasion on the workpieces (5).

Fig. 41 also illustrates that the cam rollers (104) are moved one after the other in a rest state on a circle arranged concentrically to the center line (82). This enables the successive staggered positioning using common curve segments (105, 106).

40 and 41 show workpieces (5) or containers (742) in the region of each holding element (86). During actual operation, in the area of the holding element (86) no such workpieces (5) are arranged between the dispensing position in the area of one of the curve segments (105, 106) and the dispensing position in the area of the other of the curve segments (105, 106). However, the present presentation makes it easier to understand the principle of the motion sequences.

Claims

claims

1. Method for plasma treatment of workpieces, in which the workpiece is used in at least one chamber of a treatment station and in which

Support for handling the workpieces, at least part of the treatment station is moved relative to at least one further part, characterized in that a sleeve-shaped chamber wall (18) is positioned relative to a chamber base (29) and relative to a chamber cover (31).

2. The method according to claim 1, characterized in that the positioning is carried out in a vertical direction.

3. The method according to claim 1 or 2, characterized in that the chamber bottom (29) and the chamber cover (31) relative to a station frame (16) of the plasma station (3) in a static

Positioning are left.

4. The method according to any one of claims 1 to 3, characterized in that an evacuation of a cavity (4) of the plasma station (3) through the chamber bottom (29) takes place.

5. The method according to any one of claims 1 to 4, characterized in that process gas is supplied through the chamber bottom (29).

6. The method according to any one of claims 1 to 5, characterized in that the process gas is fed through a lance (36) into an interior of the workpiece (5).

7. Method according to one of claims 1 to 6, characterized in that the chamber wall (18) is sealed relative to the chamber bottom (29).

8. The method according to claim 7, characterized in that the sealing of a with the Kartimerwandung (18) connected seal (35) is carried out.

9. The method according to any one of claims 1 to 8, characterized in that the chamber wall (18) is sealed relative to the chamber cover (31).

10. The method according to claim 9, characterized in that the seal of one in the region of the chamber cover

(31) arranged seal (33) is performed.

11. The method according to claim 9 or 10, characterized in that the seal between an inner flange (34) of the chamber wall (18) and one

Flange (32) of the chamber cover (31) is carried out.

12. The method according to any one of claims 1 to 11, characterized in that in the region of the chamber cover (31) generated by a microwave generator (19)

Microwaves are introduced into the cavity (4).

13. The method according to any one of claims 1 to 12, characterized in that the microwave generator (19) of a coupling channel (27) with the interior of the

Cavity (4) is connected.

14. The method according to any one of claims 1 to 13, characterized in that a workpiece (5) is treated from a thermoplastic.

15. The method according to any one of claims 1 to 14, characterized in that an interior of a hollow workpiece (5) is treated.

16. The method according to any one of claims 1 to 15, characterized in that a container is treated as the workpiece (5).

17. The method according to any one of claims 1 to 16, characterized in that a beverage bottle is treated as the workpiece (5).

18. The method according to any one of claims 1 to 17, characterized in that the at least one plasma station

(3) is transferred from an input position to an output position by a rotating plasma wheel (2).

19. The method according to any one of claims 1 to 18, characterized in that a plurality of cavities (4) are provided by a plasma station (3).

20. The method according to any one of claims 1 to 19, characterized in that a chamber wall (18) provided for providing at least two cavities (4) is positioned.

21. The method according to any one of claims 1 to 20, characterized in that as a plasma treatment

Plasma coating is carried out.

22. The method according to any one of claims 1 to 21, characterized in that the plasma treatment is carried out using a low-pressure plasma.

23. The method according to any one of claims 1 to 22, characterized in that a plasma polymerization is carried out.

24. The method according to any one of claims 1 to 23, characterized in that at least partially organic substances are deposited by the plasma.

25. The method according to any one of claims 1 to 23, characterized in that at least some inorganic substances are deposited by the plasma.

26. The method according to any one of claims 1 to 25, characterized in that a substance for by the plasma

Improvement of the barrier properties of the workpiece (5) is deposited.

27. The method according to claim 26, characterized in that in addition an adhesion promoter to improve adhesion of the substance on a surface of the workpiece. (5) is deposited.

28. The method according to any one of claims 1 to 27, characterized in that at least two workpieces (5) are treated simultaneously in a common cavity.

29. The method according to any one of claims 1 to 20, characterized in that as a plasma treatment

Plasma sterilization is performed.

30. The method according to any one of claims 1 to 20, characterized in that a surface activation of the workpiece (5) as the plasma treatment is carried out.

31. The method according to any one of the preceding claims, in which the workpiece is inserted into an at least partially evacuable chamber of a treatment station and in which the workpiece is positioned within the treatment station by a holding element, characterized in that for sealing an interior of the workpiece (5) a sleeve-like sealing element (280) relative to one

Chamber floor (29) is positioned.

32. The method according to claim 31, characterized in that a sealing element (28) is positioned with an annular cross-sectional area.

33. The method according to any one of claims 31 or 32, characterized in that the workpiece (5) is laterally supported by a mounting flange (60) of the sealing element (280).

34. The method according to claim 33, characterized in that a mouth region of the workpiece (5) is supported by the mounting flange (60).

35. The method according to any one of claims 31 to 34, characterized in that the sealing element (28) is pressed by a compression spring (43) in a direction facing away from the plasma chamber (17).

36. The method according to any one of claims 31 to 35, characterized in that a stroke range of the sealing element (28) is limited by at least two stops.

37. The method according to any one of claims 31 to 36, characterized in that the sealing element (28) is mechanically positioned.

38. The method according to any one of claims 31 to 37, characterized in that the sealing element (28) is positioned pneumatically.

39. The method according to any one of claims 31 to 38, characterized in that the sealing element (28)

Valve function for controllable connection and separation of the interior of the workpiece (5) and the further interior of the plasma chamber (17) exercises.

40. The method according to any one of the preceding claims, wherein the workpiece is positioned within the treatment station by a holding element, characterized in that the workpiece (5) is acted upon by at least two clamping elements of the holding element (46) which can be positioned relative to one another such that the workpiece (5) is received by a clamping space, (154) between the clamping elements.

41. The method according to claim 40, characterized in that the positioning of the clamping elements is carried out in a horizontal direction.

42. The method according to claim 40 or 41, characterized in that the workpiece (5) of pliers-like holding arms (47, 48) is positioned.

43. The method according to claim 42, characterized in that the holding arms (47, 48) are pressed apart when the workpiece (5) is inserted into the clamping jaw (54).

44. The method according to any one of the preceding claims, characterized in that the workpiece (5) is positioned by pivotally mounted holding arms (47, 48).

45. The method according to claim 44, characterized in that the holding arms (47, 48) are pressed by springs into a locking position.

46. The method according to any one of claims 42 to 45, characterized in that the holding arms (47, 48) when the workpiece (5) is pulled out of the clamping space

(54) are pressed apart.

47. The method according to any one of claims 42 to 45, characterized in that locking elements (59, 60) for fixing the holding arms (47, 48) are positioned together with the chamber wall (18).

48. The method according to any one of claims 42 to 47, characterized in that a stop element (61) for fixing the workpiece (5) is arranged at approximately the same height level as the holding arms (47, 48).

49. The method according to any one of claims 42 to 48, characterized in that the workpiece (5) is fixed in a mouth region by the holding arms (47, 48).

50. The method according to any one of the preceding claims, wherein the workpiece is positioned within the treatment station by a holding element, characterized in that a connection to the chamber at least one operating medium supply is controlled by a valve block (255) arranged in the vicinity of a chamber base (29) with at least two valves (256). 5

51. The method according to claim 50, characterized in that a vacuum is controlled via at least one of the valves (255).

L0 52. Method according to claim 50 or 51, characterized in that at least two valves (255) are used to connect at least two different vacuum levels.

L5 53. Method according to one of claims 50 to 52, characterized in that a first vacuum stage is supplied via a primary vacuum valve (256).

54. The method according to any one of claims 50 to 53, characterized in that an interior of the workpiece (5) and a further interior of the treatment station are connected at least temporarily simultaneously to the vacuum supply.

> 5 55. Method according to one of claims 50 to 54, characterized in that the interior of the workpiece (5) and the further interior of the plasma chamber (17) at least temporarily at the same time to a vacuum supply with one compared to the first

10 vacuum supply lower pressure can be connected.

56. The method according to any one of claims 56 to 55, characterized in that the interior of the workpiece (5) 5 to at least one of the for a longer period Vacuum supplies is connected.

57. The method according to any one of claims 50 to 56, characterized in that at least a portion of the plasma chamber (17) temporarily via the valve block

(254) is connected to an ambient pressure.

58. The method according to any one of claims 50 to 57, characterized in that at least a portion of the interior of the workpiece (5) temporarily over the

Valve block (254) is connected to an ambient pressure.

59. The method according to any one of claims 50 to 58, characterized in that plasma gas of at least one predeterminable composition is connected to an operating medium supply via at least one process gas valve (262, 263).

60. The method according to any one of the preceding claims, wherein the workpiece is positioned within the treatment station by a holding element, characterized in that for the simultaneous supply of at least two chambers with at least one operating medium, a flow of the operating medium is branched at least once into at least two partial flows.

61. The method according to claim 60, characterized in that the branching (355) is carried out in a vertical direction.

62. The method according to claim 60, characterized in that the branching (355) is carried out in a horizontal direction.

63. The method according to any one of claims 60 to 62, characterized in that at least one operating medium from at least one branch (355) is introduced directly into at least two chambers.

64. The method according to any one of claims 60 to 63, characterized in that at least one operating medium of at least one branch (355) is introduced into the interior of at least two workpieces (5).

65. The method according to any one of claims 60 to 64, characterized in that at least one operating medium from at least one branch (355) is introduced into at least two lances (36).

66. The method according to any one of claims 60 to 65, characterized in that a vacuum supply is distributed from the branch (355).

67. The method according to any one of claims 60 to 66, characterized in that a process gas supply is distributed from the branch (355).

68. The method according to any one of claims 60 to 67, characterized in that a ventilation feed is distributed from the branch (355).

69. The method according to any one of claims 60 to 68, characterized in that in the region of the chamber cover (31) from a microwave generator (19) microwaves are introduced into the cavity (4).

70. The method according to any one of claims 60 to 69, characterized in that one of the branching (355) Microwave supply is distributed.

71. The method according to any one of the preceding claims, characterized in that at least one operating means is at least partially acted upon by a conveyor (444) which is moved together with the treatment station on a closed and circumferential transport path.

72. The method according to claim 71, characterized in that a negative pressure is generated by the conveyor (444).

73. The method according to claim 71 or 72, characterized in that at least two different negative pressures are generated by at least two conveying devices (444).

74. The method according to any one of claims 71 to 73, characterized in that a preconditioned operating medium is provided for at least one conveyor (444) by at least one external preliminary stage.

75. The method according to any one of claims 71 to 74, characterized in that the operating medium is passed through a rotary coupling (446) in the region of the conveyor (444).

76. The method according to any one of claims 71 to 75, characterized in that the conveyor (444) transports the operating medium from a height level of the conveyor (444) to a higher level of the plasma station (3).

77. The method according to any one of claims 71 to 76, characterized in that at least two plasma stations (3) are connected via a distributor (451) to at least one common conveyor (444).

78. The method according to any one of claims 71 to 77, characterized in that at least one operating medium is distributed by at least one distributor (451) at a level of a chamber base (30) of the plasma station (3).

79. The method according to any one of claims 71 to 78, characterized in that a supply of the operating medium from the distributor (451) in the direction of the

Plasma stations (3) are carried out via straight connecting lines (452) extending radially outwards from the distributor (451).

80. The method according to any one of claims 71 to 79, characterized in that at least two operating resources are routed to the plasma stations (3) on different distribution levels.

81. The method according to any one of claims 71 to 80, characterized in that the conveying devices (444) are arranged in the region of the carrying device in such a way that an essentially balanced weight distribution is provided.

82. The method according to any one of claims 71 to 81, characterized in that alternating conveyor devices (444) and distribution cabinets (445) for electrical connections are positioned along a circumference of the support device.

83. The method according to any one of claims 71 to 82, characterized in that the conveyor (444) is positioned together with the plasma station (3) on a rotating plasma wheel (2) as a carrier.

84. The method according to any one of claims 71 to 83, characterized in that the conveyor devices (444) are transported by a wheel ring-like plasma wheel (2).

85. The method according to any one of the preceding claims, in which the workpieces are inserted into at least one at least partially evacuable chamber of a treatment station and in which the workpieces are positioned within the treatment station by holding elements, characterized in that at least two holding elements (542) in the region of the Treatment station can be positioned relative to each other by a common carrier (541).

86. The method according to claim 85, characterized in that at least two holding elements (542) in the direction of one of the carrier (541) during the implementation of a

Treatment process performed at least temporarily movement relative to each other can be moved together with the carrier (541).

87. The method according to claim 85, characterized in that at least two holding elements (542) are moved transversely to the direction of a movement at least temporarily carried out by the carrier (541) relative to one another during the execution of a treatment process, together with the carrier (541).

88. The method according to any one of claims 85 to 87, characterized in that the carrier (541) is positioned relative to the treatment station.

89. The method according to any one of claims 85 to 88, characterized in that the carrier (541) loaded with at least one workpiece (5) is inserted into the treatment station.

90. The method according to any one of claims 85 to 89, characterized in that the carrier (541) loaded with at least one workpiece (5) is removed from the treatment station.

91. The method according to any one of claims 85 to 90, characterized in that the carrier (541) performs at least temporarily a rotational movement relative to the treatment station.

92. The method according to any one of claims 85 to 91, characterized in that the carrier (541) from a circumferential transfer element (549) is equipped with workpieces (5) to be treated.

93. The method according to any one of claims 85 to 92, characterized in that the transfer element (549) is moved at least at the time of transfer of a workpiece (5) to the carrier (541) at the same speed as the carrier (541).

94. The method according to any one of claims 85 to 93, characterized in that the treatment station is positioned by a clocked plasma wheel (2).

95. Method for the treatment of workpieces, in particular according to one of the preceding claims, in which at least one workpiece is inserted into a treatment station and positioned within the treatment station by a holding element, and in which the treatment station is positioned along a circumferential transport path, characterized in that the treatment station along the transport route at at least one

Supply positioning relative to the transport direction is supplied with at least one operating medium by at least one stationary supply device.

96. The method according to claim 95, characterized in that a laboratory operation for a plasma station (3) is carried out.

97. The method according to claim 95, characterized in that a laboratory operation is carried out for a blowing station.

98. The method according to any one of claims 95 to 98, characterized in that electrical as the operating means

Energy is supplied.

99. The method according to any one of claims 95 to 98, characterized in that a vacuum is supplied as the operating medium.

100. The method according to any one of claims 95 to 99, characterized in that an excess pressure is supplied as the operating medium.

101. Procedure according to a. of claims 95 to 100, characterized in that process gas is supplied as the operating medium.

102. The method according to any one of claims 95 to 101, characterized in that mechanical drive energy is supplied as the operating medium.

103. The method according to claim 102, characterized in that the mechanical drive energy is supplied pneumatically.

104. The method according to claim 102, characterized in that the mechanical drive energy is supplied electro-mechanically.

105. The method according to claim 104, characterized in that the mechanical drive energy is supplied by a servo motor.

106. The method according to any one of claims 95 to 105, characterized in that for the optional activation of at least one function module (657) for carrying out a production operation or

Activation of at least one function module (657) for carrying out a laboratory operation using a control unit (654).

107. The method according to claim 106, characterized in that the control unit (654) is connected to at least one measuring device for monitoring a laboratory operation of the treatment station.

108. The method according to any one of claims 95 to 107, characterized in that the control unit (654) activates at least one operating means connection also connected to the treatment station during the execution of a production operation in the laboratory operation and is controlled in a modified manner compared to a production operation.

109.Device for the plasma treatment of workpieces, which has at least one evacuable plasma chamber for receiving the workpieces and in which the plasma chamber is arranged in the region of a treatment station, and in which the plasma chamber is delimited by a chamber bottom, a chamber cover and a lateral chamber wall, characterized that the chamber wall (18) is sleeve-shaped and is arranged both relative to the chamber base (29) and relative to the chamber cover (31).

110. Apparatus according to claim 109, characterized in that the chamber wall (18) can be positioned in a vertical direction.

111. Apparatus according to claim 109 or 110, characterized in that the chamber base (29) and the

Chamber covers (31) are arranged in a static position relative to a station frame (16) of the plasma station (3).

112. Device according to one of claims 109 to 111, characterized in that at least one vacuum channel is arranged in the chamber base (29) for evacuating a cavity (4) of the plasma station (3).

113. Device according to one of claims 109 to 112, characterized in that at least one channel for supplying process gas is arranged in the chamber base (29).

114. Device according to one of claims 109 to 113, characterized in that a lance (36) is arranged such that it can be positioned relative to the chamber floor (29) for supplying process gas into an interior of the workpiece (5).

115. Device according to one of claims 109 to 114, characterized in that the chamber wall (18) is sealed relative to the chamber bottom (29).

116. Apparatus according to claim 115, characterized in that a seal (35) is arranged for sealing in the region of the chamber wall (18).

117. Device according to one of claims 109 to 116, characterized in that the chamber wall (18) is sealed relative to the chamber cover (31).

118. Device according to claim 117, characterized in that a seal (33) is arranged for sealing in the region of the chamber cover (31).

119. Apparatus according to claim 117 or 118, characterized in that the seal (33) between an inner flange (34) of the chamber wall (18) and one

Flange (32) of the chamber cover (31) is arranged.

120. Device according to one of claims 109 to 119, characterized in that in the area of the chamber cover (31) a microwave generator (19) is arranged.

121. Device according to one of claims 109 to 120, characterized in that the microwave generator (19) is connected by a coupling channel (27) to the interior of the cavity (4).

122. Device according to one of claims 109 to 121, characterized in that the plasma station (3) for coating a workpiece (5) is made of a thermoplastic material.

123. Device according to one of claims 109 to 122, characterized in that the plasma station (3) is designed for coating a container-like workpiece (5).

124. Device according to one of claims 109 to 123, characterized in that the plasma station (3) for coating an interior of a hollow body

Workpiece (5) is formed.

125. Device according to one of claims 109 to 124, characterized in that the plasma station (3) 'for coating a workpiece (5) in the form of a

Beverage bottle is formed.

126. Device according to one of claims 109 to 125, characterized in that the at least one plasma station (3) is carried by a rotating plasma wheel (2).

127. Device according to one of claims 109 to 126, characterized in that a plurality of cavities (4) are arranged in the region of the plasma station (3) are.

128. Device according to one of claims 109 to 127, characterized in that one provided for providing at least two cavities (4)

Chamber wall (18) is arranged positionable.

129. Device according to one of claims 109 to 128, which has at least one holding element for positioning the workpiece, characterized in that a sleeve-like sealing element (280) is arranged in the region of the chamber bottom (29), which is arranged movably relative to the chamber bottom (29) is.

130. Apparatus according to claim 129, characterized in that the sealing element (28) has an annular cross-sectional area.

131. Device according to one of claims 129 or 130, characterized in that the sealing element (280) is provided with a mounting flange (60) arranged facing the plasma chamber (17).

132. Apparatus according to claim 131, characterized in that the border flange (60) for lateral

Enclosure of at least part of a mouth area of the workpiece (5) is formed.

133. Apparatus according to claim 131 or 132, characterized in that the mounting flange (60) is provided with an inside chamfer (61).

134. Device according to one of claims 129 to 134, characterized in that the sealing element (280) has an annular seal (57) arranged facing the plasma chamber.

135. Device according to one of claims 129 to 134, characterized in that the sealing element (280) is braced by a compression spring (43) relative to an outer guide sleeve (41).

136. Device according to one of claims 129 to 135, characterized in that a positioning path of the

Sealing element (280) is limited by at least two stops.

137. Device according to one of the preceding claims, which has at least one holding element for positioning the workpiece, characterized in that the holding element (46) has at least two clamping elements which can be positioned relative to one another and which have a distance to the receptacle which provides a clamping space (54) of the workpiece

(5) are arranged.

138. Apparatus according to claim 137, characterized in that the clamping elements can be positioned in a horizontal direction.

139. Apparatus according to claim 137 or 138, characterized in that the clamping elements are provided by holding arms (47, 48) arranged in pliers.

140. Device according to one of claims 137 to 139, characterized in that the holding arms (47, 48) are arranged pivotably relative to axes of rotation (49, 50).

141. Device according to one of claims 137 to 140, characterized in that the holding arms (47, 48) are provided with a spring tension in the direction of a locking position.

142. Apparatus according to claim 141, characterized in that the spring tension of leg springs (51, 52) are provided.

143. Device according to one of claims 122-3 to 122-6, characterized in that the holding arms (47, 48) have fixing projections (155, 156) which are each provided with an insertion bevel (67).

144. Device according to one of claims 122-3 to 122-7, characterized in that the holding arms (47, 48) have fixing projections (155, 156) which are each provided with an outlet bevel (68).

145. Device according to one of claims 139 to 144, characterized in that the holding arms (47, 48) are provided with locking webs (157, 158) in the region of their extension facing away from the fixing projections (55, 56).

146. Apparatus according to claim 145, characterized in that the locking webs (57, 58) of locking elements (59, 60) can be fixed.

147. Apparatus according to claim 146, characterized in that the locking elements (59, 60) can be positioned by the chamber wall (18).

148. Device according to one of claims 137 to 147, characterized in that the holding element (46) is provided with a stop element (61) for the workpiece (5).

149. Device according to one of claims 137 to 148, wherein the holding arms (47, 48) have fixing projections (155, 156), each with a

Outlet chamfer (68) are provided and the holding element (46) is provided with a stop element (61) for the workpiece (5), characterized in that the fixing projections (55, 56) and the stop element (61) are at approximately the same height level are arranged.

150. Device according to one of claims 137 to 149, characterized in that the stop element (61) and the fixing projections (55, 56) are arranged at a height level to act on a mouth region of a bottle-shaped workpiece (5).

151. Device according to one of claims 137 to 150, characterized in that the stop element (61) and the fixing projections (55, 56) on one

Height level for loading a bottle-shaped workpiece (5) between the support ring (69) and the shoulder area (70) are arranged.

152. Device according to one of the preceding claims, which has at least one holding element for positioning the workpiece, characterized in that a valve block (254) with at least two valves (56) is arranged in a region of the chamber base (29) which is arranged facing away from the plasma chamber (17). to control a Connection of the plasma chamber (17) to at least one equipment supply is arranged.

153. Apparatus according to claim 152, characterized in that at least one of the valves (255) is designed to hold negative pressure.

154. Apparatus according to claim 152 or 153, characterized in that the valve block (254) for connecting at least two different ones

Suppress is formed.

155. Device according to one of claims 152 to 154, characterized in that the valve block (254) is a primary vacuum valve (56) for connecting a first

Has negative pressure.

156. Apparatus according to claim 155, characterized in that the primary vacuum valve (56) at least temporarily connects both an interior of the workpiece (5) and a further interior of the plasma chamber (17) to a common vacuum supply.

157. Device according to one of claims 152 to 156, characterized in that the valve block (254)

Secondary vacuum valve (257) for switching on a lower vacuum relative to the first negative pressure.

158. Apparatus according to claim 157, characterized in that the secondary vacuum valve (257) connects at least temporarily only an interior of the workpiece (5) with the vacuum source.

159. Device according to one of claims 152 to 158, characterized in that the valve block (254) has a workpiece ventilation valve (260) for connecting an interior of the workpiece (5) to an ambient pressure.

160. Device according to one of claims 152 to 159, characterized in that the valve block (254) is a chamber ventilation valve (261) for connecting an interior of the plasma chamber (17) to a

Has ambient pressure.

161. Device according to one of claims 152 to 160, characterized in that the valve block (254) at least. has a process gas valve (262, 263).

162. Device according to one of claims 152 to 161, characterized in that the valve block (254) is arranged in the vertical direction below the chamber bottom (29).

163. Device according to one of claims 152 to 162, characterized in that the valve block (254) is arranged essentially next to the chamber base (30).

164. Device according to one of claims 152 to 163, characterized in that the valve block (254) forms a common component with the chamber base (30).

165. Apparatus according to any one of ^• claims 152-164, characterized in that at least one of the process gas valves (262, 263) to a in the vertical direction oriented bottom coupling element connected.

166. Apparatus according to claim 165, characterized in that the coupling element is designed as a connection to a lance carriage (37) carrying the lance (36).

167. Device according to claim 165 or 166, characterized in that a deflection channel for the plasma gas is arranged in the area of the lance slide (37), which directs the plasma gas from the coupling element in the direction of the lance (36).

168. Device according to one of claims 152 to 167, characterized in that at least one of the

Valves (255) is designed as an electromagnetically controlled valve.

169. Device according to one of the preceding claims, which has at least one holding element for positioning the workpiece, characterized in that at least two plasma chambers (17) are connected to at least one branch (355) for dividing a flow of an operating medium into at least two partial flows.

170. Apparatus according to claim 169, characterized in that the branch (355) extends in a vertical direction.

171. Apparatus according to claim 169, characterized in that the branch (355) extends in a horizontal direction.

172. Device according to one of claims 169 to 171, characterized in that at least one branch (355) is connected directly to interiors of at least two plasma chambers (17).

173. Device according to one of claims 169 to 172, characterized in that at least one branch (355) is connected to a coupling channel (354) for connecting interiors of at least two workpieces (5).

174. Device according to one of claims 169 to 174, characterized in that at least one branch (355) is connected to at least two lances (36).

175. Device according to one of claims 169 to 174, characterized in that at least one branch (355) is connected to at least one vacuum supply.

176. Device according to one of claims 169 to 175, characterized in that at least one branch (355) is connected to at least one process gas supply.

177. Device according to one of claims 169 to 177, characterized in that at least one branch (355) is connected to at least one ventilation feed.

178. Device according to one of claims 169 to 177, characterized in that a microwave generator (19) is arranged in the region of the chamber cover (31).

179. Device according to one of claims 169 to 178, characterized in that at least one branch (355) is connected to at least one microwave generator (19).

180. Device according to one of claims 169 to 179, characterized in that at least one branch (355) is connected to a primary vacuum valve (360) for switching on a first negative pressure.

181. Apparatus according to claim 180, characterized in that the primary vacuum valve (360) at least temporarily connects both an interior of the workpiece (5) and a further interior of the plasma chamber (17) to a common vacuum supply.

182. Device according to one of claims 169 to 181, characterized in that at least one

Branch (355) is connected to a secondary vacuum valve (361) for switching on a vacuum that is lower than the first vacuum.

183. Device according to one of claims 169 to 182, characterized in that the secondary vacuum valve (361) connects at least temporarily only an interior of the workpiece (5) with the vacuum source.

184. Device according to one of claims 169 to 183, characterized in that at least one branch (355) is connected to a workpiece ventilation valve (364) for connecting an interior of the workpiece (5) to an ambient pressure.

185. Device according to one of claims 169 to 184, characterized in that at least one branch (355) is connected to a chamber vent valve (361) for connecting an interior of the plasma chamber (17) to an ambient pressure.

186. Device according to one of claims 169 to 185, characterized in that at least one branch (355) is connected to a primary process gas valve (366).

187. Device according to one of claims 169 to 186, characterized in that at least one branch (355) is connected to a secondary process gas valve (367).

188. Device according to one of claims 169 to 187, characterized in that at least one branch (355) is connected to a process vacuum valve (362).

189. Device according to one of claims 169 to 188, characterized in that at least one branch (355) is connected to a chamber vacuum valve (363).

190. Device according to one of claims 169 to 189, characterized in that at least one branch (355) is arranged in the region of a chamber base (30) of the plasma station (3).

191. Device according to one of claims 169 to 190, characterized in that at least one branch (355) in the vertical direction below the Chamber floor (29) is arranged.

192. Device according to one of claims 169 to 192, characterized in that at least one branch (355) forms a common component with the chamber base (30).

193. Device according to one of claims 169 to 192, characterized in that at least two of the valves (359) in the region of a common

Valve block are arranged.

194.- Device according to one of claims 169 to 193, characterized in that at least one of the branches (355) is arranged in the region of the valve block.

195. Apparatus according to claim 193 or 194, characterized in that the valve block with the at least two valves (359) and the at least one

Branch (355) is arranged in the vertical direction below the chamber base (30).

196. Device according to one of claims 169 to 195, characterized in that the valve block with at least one branch (355) forms a common component.

197. Device according to one of claims 169 to 196, characterized in that at least one of the

Valves (359) is designed as an electromagnetically controlled valve.

198. Device according to one of the preceding claims, characterized in that the plasma chamber (17) and at least one conveying device (444) for an item of equipment is arranged on a rotating support device.

199. Apparatus according to claim 198, characterized in that the conveying device (444) is designed to generate a negative pressure.

200. Apparatus according to claim 198 or 199, characterized in that at least two conveying devices (444) are arranged on the support device for generating negative pressures which are different from one another.

201. Device according to one of claims 198 to 200, characterized in that at least one of the conveyor devices (444) is connected to at least one external conveyor device (447) for providing a preconditioned operating medium.

202. Device according to one of claims 198 to 201, characterized in that the conveyor

(444) is connected to an external equipment supply via a rotary coupling (446).

203. Device according to one of claims 198 to 202, characterized in that the conveyor

(444) is arranged at a lower level than the plasma chambers (17).

204. Device according to one of claims 198 to 203, characterized in that the conveying device

(444) is connected via a distributor (451) to at least two plasma stations (3).

205. Device according to one of claims 198 to 204, characterized in that the distributor (451) is arranged at a height level like a chamber base (30) of the plasma station (3).

206. Device according to one of claims 198 to 205, characterized in that the distributor (451) is connected to the chamber base (30) via essentially radially outwardly extending connecting lines (452).

207. Device according to one of claims 198 to 206, characterized in that the distributor (451) has different distribution levels for distributing different operating resources.

208. Device according to one of claims 198 to 207, characterized in that at least two conveyor devices (444) are arranged substantially balanced on the support device.

209. Device according to one of claims 198 to 208, characterized in that conveying means (ingen (444) and distribution cabinets (445) for electrical connections are arranged alternately along a circumference of the carrying device.

210. Device according to one of claims 198 to 209, characterized in that the conveyor

(444) is arranged on a support device designed as a plasma wheel (2).

211- Device according to one of claims 198 to 210, characterized in that the plasma wheel (2) as one Wheel ring is formed.

212. Device according to one of the preceding claims, which has at least one evacuable plasma chamber for receiving the workpieces and in which the

Plasma chamber is arranged in the area of a treatment station, and in which the plasma chamber is delimited by a chamber floor, a chamber cover and a lateral chamber wall and has holding elements for positioning the workpieces, characterized in that at least two holding elements (542). are held in the area of the plasma chamber (17) by a common carrier (541).

213. Apparatus according to claim 212, characterized in that at least two holding elements (542) are arranged offset relative to one another in the direction of a movement orientation of the treatment station.

214. Apparatus according to claim 212, characterized in that at least two holding elements (542) are arranged offset relative to one another transversely to the direction of a movement orientation of the treatment station.

215. Device according to one of claims 212 to 214, characterized in that the carrier (541) is guided so that it can be positioned relative to the treatment station.

216. Device according to one of claims 212 to 215, characterized in that at least one unloading station (544) is used to remove finished workpieces (5) from the area of the carrier (541).

217. Device according to one of claims 212 to 216. characterized in that at least one loading station (543) is used for feeding workpieces (5) to be machined into the region of the carrier (541).

218. Device according to one of claims 212 to 217, characterized in that the loading station (543) is designed for feeding workpieces to be machined (5) to a carrier (541) separate from the plasma wheel (2).

219. Device according to one of claims 212 to 218, characterized in that a transfer device for feeding carriers (541) loaded with workpieces (5) into the region of the treatment station is used.

220. Device according to one of claims 212 to 219, characterized in that a transfer station for removing carriers (541) with finished workpieces (5) from the area of the treatment station is used.

221. Device according to one of claims 212 to 220, characterized in that at least one carrier (541) is arranged in the region of each plasma station (3).

222. Device according to one of claims 212 to 221, characterized in that the carrier (541) in the region of the plasma station (3) is rotatably mounted.

223. Device according to one of claims 212 to 222, characterized in that at least two holding elements (542) are arranged along a circumference of the carrier (541).

224. Device according to one of claims 212 to 223, characterized in that an input path (548) is provided for the transfer of workpieces (5) to be treated to the carrier (541).

225. Apparatus according to claim 224, characterized in that the input path (548) runs centrally to a center point (552) of the plasma wheel (2).

226. Apparatus according to claim 224 or 225, characterized in that the input path (548) is arranged in the region of a transfer element (549).

227. Apparatus according to claim 226, characterized in that the transfer element (549) is driven circumferentially.

228. Device according to one of claims 226 to 227, characterized in that a

Movement speed of the transfer element (549) is adapted to a movement speed of the carrier (541) carried by the plasma wheel (2).

229. Device according to one of claims 212 to 228, characterized in that an output section (556) is provided for the removal of workpieces to be treated (5) from the carriers (541).

230. Apparatus according to claim 229, characterized in that the output path (556) runs centrally to a center point (552) of the plasma wheel (2).

231. Apparatus according to claim 229 or 230, characterized in that the output path (556) is arranged in the region of a transfer element (555).

232. Apparatus according to claim 231, characterized in that the transfer element (555) is driven in rotation.

233. Device according to one of claims 226 to 232, characterized in that a movement speed of the transfer element (555) is adapted to a movement speed of the carrier (541) carried by the plasma wheel (2).

234. Device according to one of claims 212 to 233, characterized in that the plasma wheel (2) is cyclically driven with movement phases and rest phases.

235. Device according to one of claims 212 to 234, characterized in that the loading station (543) and on the other hand the unloading station (544) are arranged on two cycle positions with a stationary plasma wheel (2).

236. Apparatus according to claim 235, characterized in that the loading station (543) is designed as a loading wheel (547).

237. Apparatus according to claim 236, characterized in that the unloading station (544) as an unloading wheel (554) is trained.

238. Device according to one of claims 236 to 237, characterized in that the wheels (547, 554) correspond to a peripheral speed

Transport speed of the carrier (541) in the area of its current. Have transfer area.

239. Device according to one of claims 212 to 238, characterized in that for the period between an input of the workpieces (5) into the plasma station (3) and an output of the workpieces (5) at least two rotational rotations of the plasma wheel (2) are provided ,

240. Device according to one of claims 212 to 239, characterized in that the plasma station (3) is guided at least partially positionable in the direction of the carrier (541).

241. Device according to one of claims 212 to 240, characterized in that the carrier (541) is guided so that it can be positioned vertically from above into the plasma chamber (17).

242. Device according to one of claims 212 to 241, characterized in that the carrier (541) is guided so that it can be positioned in the vertical direction from below into the plasma chamber (17).

243. Device according to one of claims 212 to 242, characterized in that in the region of a chamber base (30) of the plasma station (3) at least one branch for the supply of at least one provided by an operating medium source Equipment is arranged.

244. Device for treating workpieces, in particular according to one of the preceding claims, which has at least one chamber for receiving at least one workpiece and in which the chamber is arranged in the region of a treatment station, and in which the treatment station can be positioned by a transport element along a circumferential transport path is arranged, characterized in that at least one supply device is arranged along the transport path, which has at least one coupling element and at least one supply connection for operating the treatment station when the transport element is at a standstill and that the treatment station is provided with at least one mating coupling for connection to the coupling of the supply device ,

245. Apparatus according to claim 244, characterized in that the treatment station is designed as a plasma station (3).

246. Apparatus according to claim 244, characterized in that the treatment station is designed as a blowing station.

247. Device according to one of claims 244 to 246, characterized in that the supply device is designed for supplying electrical energy.

248. Device according to one of claims 244 to 247, characterized in that the supply device is designed for supplying negative pressure.

249. Device according to one of claims 244 to 248, characterized in that the supply device is designed to supply excess pressure.

250. Device according to one of claims 244 to 249, characterized in that the supply device is designed for supplying process gas.

251. Device according to one of claims 244 to 250, characterized in that the supply device is designed for supplying mechanical drive energy.

252. Apparatus claim 251, characterized in that the supply device is designed for the pneumatic supply of mechanical drive energy.

253. Apparatus according to claim 252, characterized in that the supply device is designed for the electromechanical supply of mechanical drive energy.

254. Apparatus according to claim 253, characterized in that the supply device at least one

Has servo drive to provide mechanical drive energy.

255. Device according to one of claims 244 to 254, characterized in that for controlling the

Supply device at least one control unit

(654) is provided which is an input device

(655) for the optional activation of at least one function module (657) for a production plant and at least one function module (657) for one Has laboratory operation.

256. Device according to claim 255, characterized in that the control unit (654) is provided with at least one measuring device for monitoring the treatment station in laboratory operation.

257. Apparatus according to claim 256, characterized in that the measuring device has at least one sensor.

258. Device according to one of claims 244 to 257, characterized in that the control unit (654) both for controlling at least one operating medium supply in the area of

Supply device is designed as well as for controlling at least one operating material supply, which is connected to the treatment station at at least two different positions of the transport element.