EP1537253A1

EP1537253A1 - Device and method for treating workpieces

Info

Publication number: EP1537253A1
Application number: EP03735458A
Authority: EP
Inventors: Stephan Behle; Andreas LÜTTRINGHAUS-HENKEL; Gregor Arnold; Matthias Bicker; Jürgen Klein
Original assignee: Schott AG
Current assignee: Schott AG
Priority date: 2002-05-24
Filing date: 2003-05-26
Publication date: 2005-06-08
Also published as: CN1656245A; CN100469943C; WO2003100120A2; US7810448B2; JP2005531688A; US20060099340A1; CA2484023A1; MXPA04011431A; AU2003237678A1

Description

Device and method for treating workpieces

description

Nature of the invention

The invention relates to a device and a method for treating workpieces with fluids in general and for coating hollow bodies in particular.

Background of the Invention

Plastics, in particular transparent plastics, are becoming increasingly important and are replacing glass as the preferred material in many areas.

An example of this are beverage bottles, which a few years ago consisted almost entirely of glass and are now largely made of PET plastic. The reason for this is the enormous weight savings.

Plastic bottles can also have some disadvantages compared to glass bottles, for example, the plastics used, such as PET, are not sufficiently impermeable to gas, so that the shelf life of carbonated beverages is shorter than that of glass bottles, unless special efforts are made. For this reason, the plastic bottles are coated on the inside, which leads to an increase in shelf life.

Since beverage bottles are mass-produced goods, there is enormous cost pressure, so that there is a constant demand for improvements in the coating processes and related devices.

For an efficient coating of PET bottles and other workpieces made of dielectric material, preferably plastics, it is therefore desirable to develop a device and a method which enable very short cycle times and thus high throughput. Typical sample throughputs are in the range of 10,000 bottles per hour.

Such a machine with a conveyor carousel for the treatment of hollow bodies is known from the publication WO 00/58631, in which 20 identical treatment stations are arranged on the conveyor carousel.

The invention defined in the above-mentioned document is based on the problem that with a large

Number of treatment stations there is a risk that two adjacent treatment stations are connected to the same pressure source at the same time.

As a solution in the cited document it is proposed to provide a machine with a first and second pumping phase and a deposition phase, in which the stations for the different phases are pumped in Be connected. It is also assumed that the weight and volume of the pumps prevent them from being carried on the carousel. The pumps are therefore stationary and a rotating connection or distributor is used to connect the pumps to the stations.

Furthermore, the 20 stations are divided into two groups, each group being assigned to an independent and equivalent pressure source or the groups being differentiated according to which pumps they are connected to. By means of the rotating distributor, it is determined at which times of the rotary movement of the conveyor carousel a specific pump is connected to a specific treatment station, for which purpose the distributor contains a rotating ring with 20 openings and a fixed ring with 3 slots each for the two groups , To take advantage of this arrangement, the machine is designed so that two stations in the same group are not connected to the corresponding pump at the same time.

Accordingly, the invention described defines as its subject matter a machine capable of containing a large number of stations and at the same time guaranteeing that a pressure source is only connected to at most one treatment station at a time.

However, this machine has a number of serious disadvantages.

First of all, the parallel connection of several pumps is disadvantageous, since multiple pipe routing is necessary. Furthermore, the stationary arrangement of the pumps is disadvantageous since the distances from the stations to the pump are relatively long and therefore the pump output is reduced.

However, the use of the rotatable distributor is particularly disadvantageous. Such distributors are extremely difficult to seal and are susceptible to interference from foreign bodies. In addition, the distributor does not allow any variation of the process flow due to the fixed opening arrangement, so that this is an inflexible concept.

But not only the process running on the above-mentioned device, but also the amorphous carbon coating in need of improvement, since this is colored in an undesirable manner. There is also a risk that the carbon layer will flake off when the bottle is deformed.

General description of the invention

The object of the invention is therefore to provide a device and a method for treating workpieces which avoid or at least reduce the disadvantages of known devices or methods.

Another object of the invention is to provide a device and a method for treating workpieces which work reliably and ensure high throughput.

Another object of the invention is to provide an apparatus and a method for treating workpieces who are flexibly adaptable to the needs of the user or the desired process flow.

A still further object of the invention is to provide an apparatus and a method for treating workpieces, which ensures an improved fluid supply, which in particular allows low-interruption operation.

Yet another object of the invention is one

To provide a device and a method for the treatment of workpieces with which an improved coating, in particular with regard to coloring and adhesion can be achieved.

The object of the invention is already achieved in a surprisingly simple manner by the subject matter of the independent claims. Advantageous developments of the invention are defined in the subclaims.

According to a preferred embodiment of the invention, a device for treating workpieces, in particular for internally coating hollow bodies, is provided. Workpieces to be coated are in particular plastic containers, e.g. Beverage bottles.

The device according to the invention comprises at least one treatment device, preferably a plurality of identical treatment devices, each of which is set up to receive at least one workpiece or a plastic bottle, and a fluid supply device which supplies the treatment device with at least one process fluid the coating supplies.

The device further comprises at least one fluid control device, in particular a first valve arrangement with a plurality of valves, the fluid supply to the treatment devices being controllable by means of the first valve arrangement, in particular by means of the valves.

The control of the fluid or is advantageous

Gas supply is highly flexible and variably programmable using the first valve arrangement. As a result, the timing or the process sequence, which the device defines, can be changed and easily adapted to different requirements. Furthermore, the invention enables short switching times and thus a quick change in the process parameters.

Furthermore, the device according to the invention works reliably and with a high throughput.

In addition, the invention permits efficient and thus long-term cost-effective treatment or coating of the workpieces of excellent quality.

A plurality of, in particular identical, treatment devices is preferably provided and the first valve arrangement comprises a plurality of, in particular identical, valve groups, each treatment device being assigned a separate valve group. The valve groups preferably each comprise a plurality of possibly identical valves. As a result, each treatment device or its fluid supply can advantageously be controlled independently of the other treatment devices via the valve group assigned to it.

According to a preferred development of the device according to the invention, it defines a plurality of, in particular different, process phases, each of which is treated by the treatment devices. More precisely, each treatment facility runs through all of them in succession

Process phases, so that in particular at least two or all treatment devices are in different process phases at at least one or at any time.

Each process phase is assigned a predetermined state of the first valve arrangement, the state for each phase being variably adjustable by means of a recipe. A recipe is understood to mean a, in particular predetermined, process sequence via the control. Advantageously, freely adjustable parameters, e.g. Switching times, switching angles and / or switching times etc. achieve greater flexibility.

The recipe, the assignment to the process phases and / or the duration of the process phases for different workpieces, e.g. different bottle volumes and geometries set differently, which makes the invention even more flexible.

In particular, each process phase is temporally correlated with a predetermined state of the valve group permanently assigned to the respective treatment device. In other words, the process phases become everyone Treatment device controlled by the associated valve group or the respective process phase of each treatment device is defined by the state of the associated valve group.

This further improves the precision, speed and flexibility of the device.

The first valve arrangement, in particular each valve group or the valves, can preferably be controlled by means of control signals, preferably independently of one another. The valve arrangement or the valve block or the valves are controlled in particular electrically, pneumatically and / or hydraulically etc., which has a positive effect on the control times and thus on the process speed.

According to a preferred embodiment of the invention, the device defines at least two or more process phases, the workpiece being coated with a first or second coating during at least a first and a second process or coating phase. The first and second coating in particular comprise different materials.

Preferably at least one of the

Treatment devices, in particular each, are each assigned at least one orifice plate with a predetermined opening, preferably of the same size, for reducing the pressure in the fluid supply. The orifice defines a predetermined flow rate at a defined pre-pressure. This is an extremely simple and inexpensive way of reducing pressure. According to an advantageous and therefore preferred development of the invention, the device comprises a

Fluid distribution device, by means of which the fluid is distributed to the treatment devices and / or a flow quantity setting means, e.g. a mass flow controller, which in the fluid flow direction before the

Fluid distribution device is arranged. The fluid or gas flow can thus be set centrally for all treatment facilities.

This is advantageous in terms of costs, because despite the high number of reactors, the gas flow through each individual reactor does not have to be set by a separate mass flow controller or molecular flow controller, but only a mass flow controller is provided for each process gas.

Nevertheless, the invention allows a quick change of at least one of the following process parameters: - Composition of the process fluid or a precursor

- precursor concentration,

- total gas flow and

- Pressure in the treatment facilities.

There is also a change of at least one or more

Process parameters in the treatment facilities can be set independently of one another and / or at a freely selectable point in time.

The fluid supply device preferably provides a number of different fluids, in particular process gases, in particular each valve group for each Fluid has a separate valve and / or a separate orifice for each treatment device. This means in particular that the different fluids are fed to the treatment devices in separate feed lines and the fluid flows can be controlled independently of one another.

Two- or multi-layer systems are advantageous for the coating of plastics in order to meet the requirements placed on the layer-substrate composite. For example, a first organic

Adhesion promoter layer deposited, on which further functional layers, in particular a barrier layer, are applied in one or more further steps, which differ in at least one physical or chemical property, such as, for example, the composition, density, roughness, morphology, growth mode, reflection / transmission, barrier effect.

The adhesion promoter layer increases the adhesion and prevents or at least prevents undesired peeling off of the layers. Furthermore, the combination of the two layers, in a synergetic manner, has the effect that the adhesion promoter layer further enhances the barrier effect.

A two- or multi-component coating as provided by the invention is therefore particularly advantageous in the case of workpieces in the form of plastic beverage bottles, since the shelf life of the beverage can be extended and at the same time an undesired entry of the layer material into the beverage is avoided.

For a quick coating of plastic containers, when using a CVD process, especially PECVD, preferably PICVD, a gas generation process with the fluid supply device and a coating process advantageous, which provides at least two different gases or gas mixtures.

In a particularly advantageous embodiment of the invention, at least one, or even better, each of the treatment devices comprises at least two or more treatment stations or reactors, which are each designed to hold a workpiece and which are in particular constructed in parallel and symmetrically and are thus switched and connected to the process stages at the same time Set the same process parameters in the treatment stations. In other words, the treatment stations and thus the respectively picked workpieces of a specific treatment device pass through the process phases in such a way that the respective treatment stations are in the same process phase at least at one point in time, in particular at each point in time.

The treatment places are therefore preferably divided into two or more groups, with each group in particular being assigned to exactly one treatment device and the treatment places being connected in such a way that at least the evacuation of the treatment places of the same group or treatment device is synchronous, so that at least two treatment places, in particular the treatment places the same group are at least temporarily connected to the same pump at the same time.

The treatment places are assigned to a respective treatment device of the same valve group. A number of two, one, has proven particularly useful Multiples of two, in particular four, six, eight or more treatment stations or reactors per treatment facility.

By interconnecting a plurality of identical treatment places in one

Treatment device can increase the throughput of the device considerably with little additional effort.

The process gases are in particular evenly distributed over several or all reactors, preferably 10 to 100 pieces. Preferably the individual reactors either have separate gas feeds or the reactor groups, e.g. Double reactors supplied with the process gases.

The device preferably defines a treatment cycle with a plurality of process phases, the treatment cycle being carried out by at least one or each treatment device with a time delay to the other treatment devices. Likewise, at least one or each valve group passes through a predetermined cycle of states, with each process phase of a respective treatment device relating to a specific, but. controllable state of its associated valve group is correlated.

Each treatment device preferably runs through the identical treatment cycle, in particular at least with regard to the sequence, timing, duration and / or time interval of the phases.

The device according to the invention is in particular a continuous or rotary machine and comprises a static one and a movable section or rotor. The treatment devices are preferably arranged on the movable section or the rotor and move or rotate with the latter. Each treatment device assumes a plurality of positions or angular positions during the treatment cycle, each position being correlated to a predetermined process phase. In other words, the process phases are synchronized with the positions or angular positions, this synchronization also being controllable. For this purpose, the valve groups are preferably controlled synchronously with the angular position of the rotor.

The first valve arrangement is particularly preferably attached to the movable section or rotor so that it also moves or rotates. This allows a simple fluid feedthrough to be used.

An embodiment of the invention is particularly advantageous in which a pump device is provided for at least temporarily evacuating the treatment devices with at least one pump, e.g. a root pump.

As a result, the pump device can be connected to the treatment devices in a fixed manner or without a rotating distributor, and the phase-by-step evacuation, the treatment devices, more precisely the beginning and / or the end of the evacuation phases, is controlled, possibly regulated, by an evacuation control device. This is particularly advantageous in the case of the rotary system.

The evacuation control device controls the association between the treatment devices and the pump device and preferably comprises a second valve arrangement, so that the evacuation is controlled via valves. The second or pump-side valve arrangement is preferably also subdivided into valve groups such that each treatment device is assigned a valve group, in particular one valve of the valve groups being assigned to a delivery device or vacuum pump in order to achieve independent control of the assignment of the individual vacuum pumps. The valves are preferably of the same type as the valves of the first or fluid supply-side valve arrangement.

By means of the pump device

Treatment devices are preferably evacuated cyclically and the control by means of the evacuation control device takes place via e.g. changeable control signals. Thus, the evacuation and / or the fluid supply are preferably variable and / or individually controllable with respect to the respective treatment devices.

The pump device preferably comprises at least two pumps, which are assigned to different pressure ranges and effect a cascaded or step-by-step evacuation. In particular, each treatment device is first connected to a first pump and evacuated to a first pressure value, in order subsequently to be separated from the first pump and connected to a second pump and to be evacuated by the second pump to a second, lower pressure value.

According to a preferred embodiment, each treatment device passes through several different process phases during the rotation of the rotor, the pump device comprises at least one first and second pump stage, which are assigned to different pressure ranges and the corresponding treatment device is successively evacuated by means of the first and second pump stage. Furthermore, at least a third and / or fourth is the

Process phases each have a coating phase, during which the corresponding treatment device is evacuated by means of the pump device, in particular by means of a third or fourth pump stage, while at the same time a process gas for plasma coating is supplied.

It is particularly advantageous if the first and second pump stages each consist of exactly one first and second vacuum pump, respectively, so that all treatment devices are connected to the first vacuum pump in their first pumping phase and to the second vacuum pump in their second pumping phase and are evacuated.

This advantageously reduces the number of cost-intensive vacuum pumps, e.g. large-volume root pumps kept as low as possible.

Furthermore, the pump device is preferably arranged or fastened in a rotating manner on or on the rotor.

At first glance it may seem disadvantageous to mount the heavy pumps on the rotor. But it is precisely through the combination with a reduced number of vacuum pumps that this apparent disadvantage is surprisingly and synergistically turned into an advantage by the relatively low weight load, since it is based on a rotating sealing connection or a pump-side rotary valve bushing, which the Treatment devices in connection with the pump device can be dispensed with, since such closures are difficult to seal.

In addition, the first and second are preferred

Treatment station of the respective treatment facility is simultaneously connected to the pump stage associated with the respective process or pumping phase and evacuated. This is because the inventors have found that it is advantageous to evacuate several treatment stations or stations at the same time with the same pump, since the process flow can be improved and an increased throughput can be achieved in this way.

Parameter changes with regard to the

Treatment facilities at different times and / or with respect to the treatment places of a particular treatment facility take place simultaneously. The parameter changes are switched cyclically with respect to the rotation of the rotor or at equal time intervals.

Furthermore, different process parameters are set simultaneously in at least two reactors. Furthermore, there is at least one treatment device in each of the first and second coating phases in essentially each rotor position, so that the treatment devices are subdivided into a first and a second process group with a first and a second parameter setting at all times. The number of reactors with the first parameter setting is preferably less than or equal to the number of reactors with the second parameter setting that the second coating phase takes just as long or longer than the first.

This concept is particularly advantageous for rotary devices, but can also be used in batch plants in which individual reactor groups are supplied with process gas with a time delay. The advantage for batch systems is that a lower total flow for the entire device and thus also a lower suction capacity for the vacuum pumps is required than when the gases are simultaneously introduced into all treatment facilities or a completely synchronized process.

The two successive coating phases preferably differ in at least one of the following parameters:

- different concentrations of the process fluid,

- Different pressures of the process fluid,

- Different flow quantity of the process fluid,

- Different precursors for the coatings.

It is particularly advantageous to start and end the pumping phase for the first and second treatment stations of a treatment facility at the same time, since this also contributes to process economy.

In contrast to the pump device, the fluid supply device is preferably arranged on the static section of the device, so that fluid storage containers or bottles can advantageously be changed without having to stop the rotor.

The fluid supply device preferably comprises at least two fluid supply devices with different fluid base materials for producing the at least two coatings, so that the first and second layers with the first and second fluid are applied during two different process or coating phases. The workpieces are coated with chemical vapor deposition (CVD), in particular plasma-enhanced CVD (plasma enhanced CVD, PECVD) or CVD with pulsed plasma (plasma impulse CVD / PICVD).

The fluid is preferably supplied to the treatment devices via a rotatable sealing connection in the fluid supply, by means of which the fluid supply device is connected to the treatment devices, if necessary indirectly, with the interposition of further devices, in particular the first valve arrangement, the fluid in particular when the device is operating at the outlet of the connection is continuously removable for the treatment facilities.

With regard to the direction of fluid flow, the flow amount setting means are arranged downstream of the fluid supply device, downstream of the flow amount setting means there is a separate mixing device for mixing the fluid from the fluid supply device with at least one additional fluid for each fluid supply device, the connection is arranged downstream of the mixing device, and the fluid distribution device is downstream of the connection, the orifices are arranged downstream of the fluid distribution device and / or the valve groups are each arranged downstream of the associated orifices. The screens are preferably located and / or valves close to the respective reactor, for example at a distance of <50 cm, <30 cm or <15 cm and / or arranged on the rotor.

The process flow according to a preferred embodiment is as follows, each treatment device, or its treatment places, going through a treatment cycle which comprises at least the following process phases, preferably in this order: equipping and closing the treatment device,

Evacuating the treatment device with a first pump stage up to a first pressure value,

Evacuating the treatment device with a second pump stage up to a second pressure value which is lower than the first pressure value,

Coating the workpiece in the treatment device with a first coating material,

Coating the workpiece in the treatment device with a second coating material, venting the treatment device

- Open the treatment facility and remove the workpiece.

Advantageous embodiments of the fluid supply to the device are explained in more detail below.

According to a preferred development of the invention, the device comprises a fluid supply device which comprises a first fluid supply device for a first fluid base material, a fluid supply for a first mixed fluid, a mixing device by means of which the first fluid base material and the first mixed fluid are mixed fluid-tight first line which connects the first fluid supply device to the mixing device, a fluid-tight second line which connects the fluid supply for the first mixed fluid to the mixing device, and a first flow quantity setting means in the first line, in particular upstream of the mixing device, by means of which the flow quantity of the first fluid base is adjustable includes.

The first fluid base material is particularly preferably liquid in the first fluid storage device. In this case, the first line is heated in order to vaporize the first fluid base material, so that the first fluid base material and the first mixed fluid are both miscible in the gaseous state on the mixing device. A process fluid which is gaseous at room temperature is thus provided at the outlet of the mixing device.

The fluid supply device preferably also has a second flow quantity setting means, which is arranged in the second line, in particular upstream of the mixing device and by means of which the flow quantity of the first mixed fluid is set.

The fluid supply device preferably also comprises a second fluid supply device, which is constructed like the first fluid supply device, and the first and second fluid supply devices contain different fluid base materials. This will e.g. for coating with two different ones

Two different process gases are made available to the treatment facilities simultaneously via two separate lines. The process gases are preferably mixtures of firstly a metal- or silicon-containing and / or hydrocarbon-containing fluid and secondly at least one further fluid which contains oxygen, nitrogen, argon and / or helium. An HMDSθ / θ ₂ mixture from the first and an HMDSN / θ ₂ mixture from the second fluid supply device are particularly preferred.

The first and / or second further preferably comprise

Fluid supply device each have two redundant containers with the same fluid base material. As a result, the storage containers can be exchanged even without stopping the operation of the device, so that a production shutdown can be avoided. The redundant containers are connected to one another in particular upstream of the first flow quantity setting means and can be separated therefrom with a valve in each case.

The device preferably also comprises one

Flushing device for purging the treatment devices or reactors with a purge gas, preferably oxygen, nitrogen and / or dried air. It is preferred to rinse after the second layer has been applied, before or after and / or continuously after the aeration. Unused gas is thus advantageously removed, so that undesirable reactions with the atmospheric humidity can be avoided or reduced. Furthermore, the absorption of the process gases on a surface of the workpiece is reduced. In a preferred embodiment, all are rinsed

Treatment facilities at different times, preferably cyclically or at the same time intervals. The invention is explained in more detail below on the basis of exemplary embodiments and with reference to the drawings, the same and similar elements being provided with the same reference symbols and the features of different embodiments being able to be combined with one another.

Brief description of the figures.

Fig. La-lh is a schematic representation of a first

Embodiment of the device according to the invention in different rotor positions according to an exemplary process sequence,

2a-2b is a tabular overview of the process flow of the device from Fig. La-lh,

Fig. 3 is a schematic representation of the device from Fig. La-lh. Fig. 4 ^'is an enlarged section X from Fig. 3 and

5 shows a further enlarged detail from FIG. 3 with the fluid supply device 80.

Detailed description of the invention

FIG. 1 a shows a schematic illustration of a rotor 32 of a device 30 according to the invention.

There are twelve treatment devices on the rotor 32, which are symbolized by the circles. Each treatment facility comprises two treatment stations or reactors, which are numbered from 1 to 24. The treatment facilities are evenly distributed, i.e. with an angular distance of 30 °.

There are also eight process phases, namely:

a start phase S, a first pump phase PI, a second pump phase PII, a first coating phase BI, a second coating phase BII, a ventilation phase V, a final phase E, and an auxiliary phase A

shown.

FIG. 1 a shows a temporal state in which the treatment places 1 and 2 are in the star phase S. As a result, the respective process phases or process steps of the other treatment facilities or

Treatment places specified. Treatment places 3 and 4 are in the first pumping phase PI, treatment places 5 and 6 in the second pumping phase PII, treatment places 7 and 8 in the first coating phase BI, treatment places 9 to 16 in the second

Coating phase BII, the treatment places 17 to 20 in the ventilation phase V, the treatment places 21 and 22 in the final phase E and the treatment places 23 and 24 in the auxiliary phase A.

During operation, the rotor rotates so that each treatment facility runs through the entire cycle of the stationary process phases. Fig. Lb shows the rotor in one order 30 ° later state compared to Fig. La. Accordingly, treatment places 1 and 2 are now in the first pumping phase PI. Referring to FIGS. 1c to 1h, a further rotated state of the rotor is shown, the reactors 1 and 2 each being in a further process phase. FIGS. 1 a to 1 h thus show a complete treatment cycle, the illustration of the states in which the process phase of reactors 1 and 2 does not change not being shown.

The individual process phases are explained below with reference to FIG. In this state of the rotor, the treatment device with the reactors 1 and 2 is in the start phase S, in which the treatment device is opened. Furthermore, the two are in one insertion process

Reactors 1 and 2 are simultaneously and identically equipped with a PET bottle and closed again.

In the first pumping phase PI, the two reactors 3 and 4 are simultaneously connected to a first pump stage in order to be evacuated to a first pressure value.

In the second pumping phase PII, the two reactors 5 and

6 simultaneously connected to a second pump stage in order to be evacuated to a lower second pressure value. Thus, the treatment devices are evacuated gradually and therefore very effectively by means of the first and second pumping stages.

In the first coating phase BI, the two PET bottles located in the reactors 7 and 8 are coated from the inside with a first coating, more precisely an SiO _x C _y adhesive layer. For this purpose, a mixture of hexa-methyl-disiloxane (HMDSO) and oxygen is used as the process gas. This mixture is introduced into the two reactors 7 and 8 simultaneously. Reactors 7 and 8 are in the first

Coating phase BI supplied with a first process gas and evacuated in flow through a third vacuum pump.

The second coating phase BII takes up four 30 ° sectors of the treatment cycle, since the coating should take place four times as long as the first coating phase BI. Accordingly, four treatment devices or plasma stations, more precisely the reactors 9 to 16, are simultaneously in the second coating phase BII, in which they are supplied with a second process gas and are evacuated together by a fourth vacuum pump in flow mode. There is therefore a different number of treatment devices in the first and second coating phases, in particular at all times.

In the second coating phase BII, a glass-like silicon oxide or SiO _x barrier layer is deposited. It is colorless transparent. A mixed gas of hexa-methyl-disilazane (HMDSN) and oxygen is introduced into the reactors to produce the barrier layer.

With regard to the layer composition, reference is made to application DE 102 58 681.0, filed on December 13, 2002 by the same applicant, the content of which is hereby fully incorporated by reference into the subject matter of this disclosure. The coating in the first and second coating phases BI, BII is carried out using PICVD. In this exemplary embodiment, the PICVD method is only used for the inner coating of the bottles, but can also be used for an outer coating. A great advantage of the PICVD process is an additional one

Process flexibility that makes it possible to adapt the barrier layer even more specifically to the needs of the customer. In addition, the pulsing of the plasma results in an optimal conversion of the process gas used, since gaseous by-products formed during the reaction are effectively pumped out in pulse pauses. The deposited layers are also characterized by great homogeneity and high chemical purity. In addition, the thermal load on the PET bottles is reduced.

The double coating achieves excellent adhesion of the coating system and a high barrier improvement value (BIF) at the same time. For 0 ₂ a BIF of about 10 to 30 and for C0 ₂ of about 4 to 7 is achieved. In addition to the CO ₂ exit from the bottle, the 0 ₂ entry into the bottle and the acetaldehyde exit from the PET into the drink can also be reduced.

In the aeration phase V, the reactors 17 to 20 are aerated. After that. the reactors 21 and 22 are opened in the final phase E and the coated bottles are removed.

The auxiliary phase A, in which the reactors 23 and 24 are located, is not required for the coating process in this embodiment. Figures 2a to 2b show in a tabular overview divided into 5 ° angle steps the sequence of the process phases S, PI, PII, BI, BII, V and A of all 24 reactors.

3, a schematic representation of the structure of the device 30 according to the invention is shown.

The coating device 30 comprises the rotor 32 and a stationary fluid supply device 80. The dashed line L schematically represents the rotor or the plasma wheel 32, so that those components which are shown within the line L are arranged on or on the rotor 32 and with it co-rotate.

Twelve treatment devices 101 to 112 are arranged on the rotor 32, of which only the four treatment devices 101, 102, 111, 112 are shown in FIG. 3 for the sake of clarity.

Each treatment device 101 to 112 comprises two treatment stations or reactors for receiving a PET bottle to be coated. The treatment device 101 comprises the treatment places 1 and 2, the treatment device 102 the treatment places 3 and 4 etc. up to the treatment device 112, which comprises the treatment places 23 and 24.

The inside of the PET bottles is coated using the PICVD technology, which is known to the person skilled in the art. The same high-frequency source and the coating are assigned to the two reactors of a treatment facility in the two reactors takes place simultaneously and in an identical manner, the two reactors each comprising separate chambers or vacuum chambers.

The respective first reactors therefore preferably form

1, 3, 5, ..., 23 of the treatment devices 101 to 112 a first group of treatment stations and the respective second reactors 2, 4, 6, ..., 24 of the

Treatment facilities 101 to 112, a second group of treatment stations, each having a reactor of the first and the second group are assigned to each other in pairs (1 and 2; 3 and 4; 5 and 6; ...; 23 and 24) and the two reactors each Couple are assigned to the same vacuum pumps and / or run through the treatment process synchronously.

The treatment devices 101 to 112 are assigned a fluid-tight fluid or gas control device 40, which in this example comprises a plurality of valves and orifices.

The gas supply to the treatment devices is timed by means of the gas control device 40. The gas control device 40 comprises a first valve arrangement 50, each with a valve group 501 to 512 for each treatment device 101 to 112. The parallel valve groups 501 to 512 each comprise three electrically controlled valves 501a to 512a, 501b to 512b and 512a to 512c, each of which a fixed aperture is connected upstream. Thus, the division or allocation of the process gases to the treatment facilities takes place via the valves 501a / b to 512a / b. Basically, instead of the valve arrangement 40, a rotating rotary leadthrough or rotary coupling can also be used, in which in particular channels are provided, by means of which the cyclical gas changes are realized. However, control via valves is more flexible and

Treatment facilities can thus even be controlled separately and / or differently.

With reference to FIG. 4, which shows parts of the fluid control in greater detail than FIG. 3, in FIG

The gas control-side valve control is explained below using the example of the first valve group 501. The remaining valve groups 502 to 512 and the corresponding further components upstream and downstream of each valve group are of identical design.

The first valve group 501 comprises three electro-pneumatic valves 501a, 501b, 501c connected in parallel. The first valve 501a supplies the treatment device 101 with the first process gas, the second valve 501b with the second process gas and the third valve 501c with a purge gas SG.

The supply of the operating resources or gases (purge gas, first and / or second process gas) can be selected independently of one another and at any time or can be variably controlled.

The valves each have a short switching time of

<500 ms, preferably <100 ms. Furthermore, the valves are preferably at a distance of the treatment devices

<50 cm immediately adjacent. As a result, coating parameters such as the precursor concentration, the total flow, the pressure and / or the process gas or Precursor can be controlled or changed. At least a 95 percent mixture change can be achieved in less than 200 ms.

A fixed orifice 601a, 601b, 601c is connected upstream of the valves 501a, 501b, 501c, so that each treatment device is assigned a pair of valves and orifices.

The hole diameter of the panels is small against the

Line diameter, so that the supply line resistance is negligible and the gas flow is essentially determined by the orifice plates. For this purpose, the hole diameter is approximately 0.1 mm to 5 mm, preferably 0.2 mm to 2 mm, particularly preferably in the range of 1 mm. This results in a pre-defined pressure in an equilibrium state on both sides of the orifice. This solution with orifices is considerably less expensive than the use of a large number of mass or molecular flow controllers at this point.

The orifices distribute the fluids evenly or symmetrically across all reactors. For example, a total flow of 9600 sccm for 24 reactors is evenly divided to 400 sccm per reactor.

Furthermore, the orifices have a relative deviation of <20%, preferably <10%, so that the process gases are distributed evenly over the treatment devices.

The gas supply is from the fluid or

Gas supply device 80, which provides the two different process gases via two separate supply lines or operating medium supply lines 42a, 42b posed. The two process gases and the purge gas SG are continuously fed to the rotor 32 via a rotary union 82.

The gas supply device 80, which is shown in detail in FIG. 5, comprises a first and second fluid or gas supply device 80a, 80b, which are constructed identically. The only difference between the two gas supply devices 80a, 80b is that two different fluids

Basic materials (precursor) are provided. The two gas supply devices 80a, 80b thus provide at least two process gases or gas mixtures with different compositions, flows and / or pressures for the at least two successive or merging coating phases BI and BII, the first and the second process gas using the first process gas the second coating is made. Advantageously, the gas exchange between the two process gases or gas mixtures can be switched over quickly, which among other things allows precise control of the concentration of the gas mixtures.

The first gas supply device 80a comprises a fluid supply device 81a with two fluid containers or

Barrels 84a, 85a, both having an identical first precursor, in this example HMDSO. The redundant design of the two containers 84a, 85a allows the replacement of one of the two containers while the treatment continues.

The HMDSO from one of the two containers 84a, 85a is sent via a first line section 86a or 87a, a first Flow amount setting means or mass flow controller 88a (so-called mass flow controller) supplied. The flow quantity of the first fluid base material is controlled by means of the preferably thermal or pressure-based mass flow controller 88a.

Furthermore, the first gas supply device comprises a feed line 90a, via which gaseous oxygen (0 ₂ ) is made available. The flow amount of oxygen is determined by means of a second flow adjustment device or mass flow

Controllers 92a controlled. This means that only one mass flow controller is required for each process gas component.

The mixing ratios, flows and / or concentrations of the process gases can be set independently of one another via the mass flow controllers 88a, 88b, 92a, 92b.

The first fluid base material and the oxygen are supplied via two line sections 94a and 96a to a first mixing device 98a and mixed to form the first process gas, which is then provided via line 42a on the rotary union 82 and is supplied to the treatment devices.

The line sections between the two fluid containers 84a, 85a and the first mixing device 98a are heated to approximately 40 ° C. in order to evaporate the first fluid base material, which is liquid in the two containers 84a, 85a. After mixing with the oxygen downstream of the first mixing device 98a, the gas mixture or first process gas is gaseous even at room temperature. Advantageously, only a relatively short section of the fluid lines is thus heated. In particular, it is not necessary Heating lines on the rotor, since the first process gas is gaseous at room temperature, which simplifies the device inexpensively and still avoids condensation.

Referring to Fig. 5, the heated ones

Line sections 86a, 87a, 94a, 86b, 87b and 94b are shaded. In particular, an independently controllable heating device 186a and 187a is provided for the line sections 86a and 87a of the redundant fluid containers 84a and 85a, so that even one

Changing the fluid container prevents condensation. Furthermore, an independent heating device 194a is provided for the common line section 94a.

The second gas supply device 80b is structurally identical to the first fluid supply device 80a. Corresponding components are provided with the same reference numbers and the addition "b" instead of "a". The two containers 84b, 85b contain HMDSN as the second precursor.

Different mixing ratios are preferably set via the mass flow controllers 88a, 92a, 88b, 92b by the two or optionally further fluid supply devices 81a, 81b. For example, can also be used to set different HMDSO concentrations with the same fluid base material, which e.g. can be advantageous for a two-layer system.

On the pump side, the treatment devices 101 to 112 are assigned an evacuation control device with a second valve arrangement 70, by means of which the phase-wise evacuation of the treatment devices 101 to 112 or the reactors 1 to 24 is controlled. The second valve arrangement 70 comprises for each treatment device 101 to 112 a valve group 701 to 712, each with a first and a second electrically controlled valve for successive two-stage evacuation by means of a first and a second vacuum pump 72, 74.

The vacuum pumps 72, 74 are designed as root pumps and are attached to the rotor 32. This advantageously eliminates a rotary feedthrough on the pump side. A control valve 76, 78, for example a flapper valve, is connected upstream of the two root pumps 72, 74, which form the pump device 71. The gas pressure for the respective process gas is controlled or regulated by means of the flapper valves.

The gas supply-side and pump-side valve control of the device is explained in more detail below with reference to FIGS. 1 a to 1 h, 2 a, 2 b and 3.

In the start phase S, all valves of the first and second valve arrangements 50, 70 are closed when the treatment devices 101 to 112 are each equipped with two PET bottles and then closed.

At the beginning of the first pumping phase PI, the first valve 701a to 712a of the valve groups 701 to 712 is opened, so that each treatment device is connected to the first root pump 72 and is evacuated.

During the transition from the first pumping phase PI to the second pumping phase PII, the first valve 701a to 712a of the valve groups 701 to 712 closes and essentially simultaneously opens the second valve 701b to 712b of the valve groups 701 to 712 in order to connect the treatment devices 101 to 112 to the second root pump 74, so that the treatment devices are evacuated in the second pumping phase PII.

A gas ballast valve 73 or 75 is connected upstream of the root pumps 72, 74 (only shown in FIG. 4), by means of which the process gas concentration in the exhaust gas can be reduced. This is particularly advantageous in the case of explosive gas mixtures, since in particular unused process gas is diluted and the explosion limit can thus be safely undershot.

At the beginning of the first coating phase BI opening the valves 501a to 512a of the first valve arrangement 50 so that the first process gas of HMDSO and 0 ₂ flows and in the treatment devices 101 to 112, the PET bottles are coated PICVD accordance with an organic adhesive layer.

When changing from the first coating phase BI to the second coating phase BII, the valves 501a to 512a close and substantially simultaneously the valves 501b to 512b open to the treatment devices with the second

Supply process gas from HMDSN and 0 ₂ , whereby the PET bottles are coated with an inorganic barrier layer PICVD.

At least two of the valve groups 501 to 512 are particularly preferably switched synchronously, the associated treatment devices changing from one to another process phase and such that one Treatment device changes to the previous process phase of another treatment device. For example, the treatment device 101 with the stations 1 and 2 changes from the second coating phase BII to the ventilation phase V and synchronously, that is to say the changes simultaneously

Treatment device 109 with the stations 17 and 18 in the second ventilation phase BII.

During the first and second coating phases BI and BII, the treatment devices preferably remain connected to the second root pump 74 in order to enable the PICVD coating in flow mode.

In the subsequent ventilation phase V, all valves of the valve arrangements 50, 70 are closed and the

Treatment devices 101 to 112, optionally aerated with nitrogen or dried air.

It is obvious to the person skilled in the art that the above-described embodiments are to be understood as examples and the invention is not restricted to them, but can be varied in many ways without departing from the spirit of the invention.

Claims

claims

1. Device (30) for treating workpieces, in particular hollow bodies, comprising at least one treatment device (101) for receiving at least one workpiece, a fluid supply device (80) which supplies the treatment device with fluid and at least one fluid control device (40) by means of which the Fluid supply to the treatment device (101) is controllable.

2. The device (30) according to claim 1, wherein the fluid control device comprises a first valve arrangement (50).

3. Device (30) according to one of the preceding claims, comprising a plurality of treatment devices (101-112), the fluid control device (40) comprising a plurality of valve groups (501-512) and a valve group being assigned to each treatment device.

4. Device (30) according to one of the preceding claims, which a plurality of process phases (S, PI, PII, BI,

BII, V, E, A) are defined and each process phase is assigned a predetermined state of the fluid control device (50), which can be variably adjusted in particular for each phase using a recipe.

The device (30) according to claim 4, wherein each treatment device (101-112)

Passes through process phases and every process phase (S, PI, PII, BI, BII, V, E, A) is correlated with a predetermined state of the valve group (501-5'12) associated with the respective treatment device.

6. Device (30) according to one of the preceding claims, wherein the fluid control device (40) is controllable by means of control signals.

7. Device (30) according to one of the preceding claims, wherein the device defines at least a first and second process phase (BI, BII), wherein the workpiece is coated with a first and second coating during the first and second process phase.

8. The device (30) according to one of the preceding claims, wherein each treatment device (101-112) is assigned at least one aperture (601a-612a) with a predetermined, equally large opening.

9. Device (30) according to one of the preceding claims, comprising at least one control valve (76, 78), by means of which the process pressure is adjustable and controllable.

10. Device (30) according to one of the preceding claims, comprising a fluid distribution device (42a, 42b), by means of which the fluid can be distributed to the treatment devices (101-112) and a flow quantity setting means (88a, 92a), preferably a thermal or pressure-based mass flow controller which is arranged in the fluid flow direction upstream of the fluid distribution device.

11. The device (30) according to any one of the preceding claims, wherein the fluid supply device (80) a plurality of fluids, preferably mixtures of first a metal or silicon-containing or hydrocarbon-containing fluid and second at least one further fluid, the oxygen, nitrogen, argon or contains helium, particularly preferably HMDS0 / 0 ₂ , HMDSN / 0 ₂ , and each valve group (501-512) has a valve (501a-512b) for each fluid. '

12. The device (30) according to one of the preceding claims, wherein at least one of the treatment devices (101-112) comprises at least two treatment stations (1-24), which are constructed in parallel and symmetrically and are switched simultaneously to the process stages.

13. The device (30) according to one of the preceding claims, which defines a treatment cycle with a plurality of process phases (S, PI, PII, BI, BII, V, E, A), the treatment cycle of each treatment device (101-112) delayed and preferably periodically to the other treatment facilities.

14. The device (30) according to one of the preceding claims, which defines a treatment cycle with a plurality of process phases (S, PI, PII, BI, BII, V, E, A), wherein each treatment device (101-112) has the identical treatment cycle passes.

15. The device (30) according to any one of the preceding claims, defining a continuous system, which one Treatment cycle defined with a plurality of process phases, wherein the device (30) comprises a static and a movable section (80, 32), the treatment devices (101-112) are arranged on the movable section (32) and each

Treatment device occupies a plurality of positions during the treatment cycle, each position being assigned a predetermined process phase (S, PI, PII, BI, BII, V, E, A), which can be variably adjusted for each phase by a prescription.

16. The device (30) according to one of the preceding claims, in which the recipe, the assignment to the process phases and the duration of the process phases can be set differently.

17. The device (30) according to one of the preceding claims, defining a rotary system (30), in which the movable section comprises a rotor (32)

18. The device (30) according to claim 17, wherein each angular range of the rotor (32) is assigned a predetermined process phase (S, PI, PII, BI, BII, V, E, A) which can be defined variably by a recipe.

19. The device (30) according to claim 17 or 18, wherein the fluid control device (40) is at least partially arranged on the rotor (32) and rotate with it.

20. The device (30) according to any one of claims 17 to 19, wherein the valve groups (501-512) in synchronism with Angular division of the rotor (32) are controllable.

21. Device (30) according to one of claims 17 to 20, comprising a pump device (72, 74) with at least one pump which is arranged on the rotor (32).

22. The apparatus (30) according to claim 21, wherein treatment devices (101-112) can be evacuated cyclically by means of the pump device (72, 74) and the evacuation is controlled by means of valves (70).

23. Device (30) according to one of the preceding claims, wherein the fluid supply device (80) comprises at least two fluid supply devices (84a, 84b) with the same or different fluid base materials.

24. The device (30) according to one of the preceding claims, in which different mixing ratios for the same or different fluid base materials can be set.

25. The device (30) according to any one of the preceding claims, wherein the fluid is supplied to the treatment devices (101-112) via a rotatable sealing connection (82).

26. The device (30) according to claim 25, wherein the rotatably sealing connection (82) is designed such that the fluid at the outlet of the connection can be removed continuously for the treatment devices during operation of the device.

27. The device (30) according to any one of the preceding claims, wherein the workpieces can be coated by means of CVD, in particular PECVD or PICVD.

28. Device (30) according to one of the preceding claims, wherein at least one of the following points applies with respect to the fluid flow direction:

the flow quantity setting means (88a, 88b) are arranged downstream of the fluid supply device (81a,, 81b),

- Downstream of the flow quantity setting means (88a, 88b), a mixing device (98a, 98b) is arranged for each fluid supply device (81a, 81b) for mixing the fluid from the fluid supply device with another fluid,

- The connection (82) is arranged downstream of the mixing device,

- The fluid distribution device (42a, 42b) is arranged downstream of the connection (82), - The orifices (601a-612c) are downstream of the

Fluid distribution device (42a, 42b) arranged,

- The valve groups (501a-512c) are each arranged downstream of the associated orifices.

29. Device (30) for the treatment of workpieces, in particular hollow bodies, in particular according to one of the preceding claims, comprising at least one treatment device (101-112) for receiving at least one workpiece, a pump device (72, 74) for evacuating the treatment device at least in phases and at least one evacuation control device (70), by means of which the evacuation of the treatment device (101-112) can be controlled.

30. Device (30) for the treatment of workpieces, in particular hollow bodies, in particular according to one of the preceding claims, comprising at least one treatment device (101-112) for receiving at least one workpiece, a fluid supply device (80) which supplies the treatment device with fluid, wherein the device (30) defines at least one first and second coating phase (BI, BII) during operation and the workpiece can be coated with a first and second material in the first and second coating phases.

31. Device (30) for treating workpieces, in particular hollow bodies, in particular according to one of the preceding claims, comprising at least one

Treatment device (101-112) for receiving at least one workpiece and a pump device (72, 74) for at least partially evacuating the

Treatment device, wherein the device (30) a treatment cycle with a plurality of process phases (S, PI, PII, BI, BII,

V, E, A) defines the device (30) comprises a static (80) and ^'a movable portion (32), the treatment device (101-112) is arranged on the movable portion and the pump means (72, 74) on the mobile

Section (32) is arranged.

32. Device (30) for treating workpieces, in particular hollow bodies, in particular according to one of the preceding claims, comprising a plurality of treatment devices (101-112) for receiving at least one workpiece each, the device (30) having a treatment cycle with a plurality of process phases (S, PI, PII, BI, BII, V, E, A) and each treatment device (101-112) goes through a treatment cycle that is at least identical in terms of time.

33. Device (30) for treating workpieces, in particular hollow bodies, in particular according to one of the preceding claims, comprising a plurality of treatment devices (101-112), wherein the device (30) a treatment cycle with a plurality of process phases (S, PI , PII, BI, BII, V, E, A), at least one process phase comprises an evacuation phase (E) and the treatment devices (101-112) each have at least two treatment stations (1-24) for receiving one workpiece each.

34. Device (30) for the treatment of workpieces, in particular hollow bodies, in particular according to one of the preceding claims, comprising at least one treatment device (101-112) for

Holding at least one workpiece, a pump device (72, 74) for evacuating the treatment device at least in phases and a flushing device (42c) for flushing the at least one treatment device with a flushing fluid.

35. Fluid supply device (80) for a device (30) for treating workpieces, in particular according to one of the preceding claims, with a first fluid supply device, the first fluid supply device comprising a first fluid supply device (81a) for a first fluid base material, a fluid supply (90a) for a first mixed fluid (0 ₂ ), a mixing device (98a) by means of which the first fluid base material and the first mixed fluid are mixed, a fluid-tight first line (94a) which connects the first fluid supply device (81a) to the mixing device (98a), one fluid-tight second line (96a), which connects the fluid supply (90a) for the first mixed fluid to the mixing device (98a), and a first flow quantity setting means (88a) by means of which the flow quantity of the first fluid base material can be set.

36. The fluid supply device (80) according to claim 35, wherein the first fluid base is liquid in the first fluid supply device, the first line (94a) can be heated in order to vaporize the first fluid base, so that the first fluid at the mixing device (98a) The base material and the first mixed fluid are both miscible in the gaseous state, with a process fluid at the outlet of the mixing device (98a) is provided, which is gaseous at room temperature.

37. Fluid supply device (80) according to one of the preceding claims, comprising a second flow quantity setting means (92a) by means of which the flow quantity of the first mixed fluid is adjustable.

38. Fluid supply device (80) according to one of the preceding claims, wherein the first fluid supply device (81a) comprises two containers (84a, 85a) with the same fluid base material.

39. Fluid supply device (80) according to one of the preceding claims, comprising a second fluid supply device (80b), which is constructed like the first fluid supply device (80a), and wherein the first and second fluid supply device contain the same or different fluid base materials and simultaneously via two separate lines (42a, 42b) two different process gases, ie in particular gases from different raw materials and / or gases with different concentrations for which

Treatment facilities (101-112) are provided.

40. Use of the fluid supply device (80) according to one of the preceding claims for fluid supply to a coating device, in particular one

Device (30) according to one of the preceding claims.

41. Method for operating a device (30) for treating workpieces, in particular according to one of the preceding claims, wherein a plurality of treatment devices (101-112) are each equipped with at least one workpiece to be treated, the treatment devices by means of a fluid supply device (80 ) are supplied with fluid and the fluid supply to the treatment devices is controlled by means of at least one fluid control device (40).

42. The method of claim 41, wherein each treatment device (101-112) has one

Undergoes a treatment cycle that includes at least the following process phases:

Fitting and closing the treatment device (S), evacuating the treatment device with a first pump stage up to a first pressure value (PI), evacuating the treatment device with a second pump stage up to a second pressure value (PII), which is lower than the first pressure value, coating of the workpiece in the

Treatment device with a first coating material (BI),

Coating the workpiece in the treatment device with a second coating material (BII),

Ventilate the treatment device (V) Open the treatment device and remove the workpiece (E).

43. The method according to any one of the preceding claims, in which at least two of the

Treatment facilities (101-112) in different

Process phases are located and / or in which at least one of the process parameters

Pressure, total flow and concentration between these two treatment facilities (101-112) is set differently.

44. The method according to any one of the preceding claims, wherein at least two of the valve groups (501-512) are switched synchronously, the associated treatment devices changing from one process phase to another and in particular a treatment device changing to the previous process phase of another treatment device.

45. Workpiece, in particular hollow body, producible by means of the device and / or with the method according to one of the preceding claims.

46. rotary device (30) for coating workpieces, in particular plastic hollow bodies, in particular according to one of the preceding claims, comprising a rotor (32) with a plurality of treatment devices (101-112), each of which is set up for receiving a workpiece, wherein each treatment device (101-112) during the rotation of the rotor (32) several different process phases (S, PI, PII, BI, BII, V, E, A) and wherein the workpiece is coated during at least one process phase, a pump device (72, 74) with which the treatment devices for the process phase of the coating can be evacuated, the pump device comprising at least a first and second pump stage (72, 74) Which are assigned to different pressure ranges and the treatment devices (101-112) are connected to the first pumping stage (72) in a first pumping phase (PI) and to the second pumping stage (74) during a subsequent second pumping phase ^' (PII) , whereby a step-by-step evacuation is made possible, characterized in that the first pumping stage only consist of exactly one first vacuum pump (72) and the second pumping stage only consist of exactly one second vacuum pump (74), so that all treatment devices (101-112) are in their first pumping phase (PI) with the first vacuum pump (72) and in its second pumping phase (PII) with the second vacuum pump pe (74) are connected and evacuated.

47. Rotary device (30) according to claim 46, wherein the pumping device (72, 74) is arranged co-rotating on the rotor.

48. rotary device (30) according to claim 46 or 47, wherein each treatment device (101-112) comprises at least a first and second treatment place (1-24) for receiving a first and second hollow plastic body, respectively, the first and second treatment place are simultaneously connected to the pump stage (72, 74) associated with the respective pumping phase (PI, PII) and are evacuated.

49. Rotary device (30) according to claim 48, wherein the pumping phase or phases (PI, PII) for the first and second plastic hollow body begins or begin and ends or ends at the same time.