DE102022119836A1 - Positioning and sealing device for holding and sealing a workpiece in a plasma chamber of a plasma coating device - Google Patents

Abstract

The invention relates to a positioning and sealing device (28) for holding and sealing a workpiece (5) in a plasma chamber (4) of a plasma coating device (1), with a pliers-like workpiece holder (60) and with a sealing device (50) for sealing between the interior of the workpiece and the chamber (4) surrounding the workpiece (5), the device (28) being arranged in a plasma chamber (4) in the position of use, the sealing device (50) and the workpiece holder (60) relative to one another in a direction of movement are designed to be movable along a movement axis (46) and are arranged between a sealing position in which the workpiece (5) rests with a mouth (32) against a seal (52), and in a rest position in which the workpiece (5) is spaced from the seal (52), the device (28) having a regularly removable element (52, 54, 60) which is releasably connected to the device (28), characterized in that the element (52, 54, 60) is positively connected to the device (28) by means of a latch (68), and this latch (28) is designed to be able to be moved from a locking position to a release position without tools

Description

The invention relates to a positioning and sealing device for holding and sealing a workpiece in a plasma chamber of a plasma coating device according to the preamble of claim 1. Such a device is used in particular for holding and sealing a plastic container, for example a bottle made of PET, for example in devices and processes in which plastic containers are provided with a coating, for example with a barrier layer to improve the barrier properties. In particular, such a positioning and sealing device is used in rotating plasma coating devices, in which several plasma stations are arranged circumferentially on a rotatably mounted plasma wheel, each of which is equipped with such a positioning and sealing device.

Such a generic positioning and sealing device has, for example, on the one hand a pliers-like workpiece holder and on the other hand a sealing device for achieving a seal between the interior of the workpiece and the plasma chamber surrounding the workpiece. Such a seal is necessary, for example, if a different printer is set inside the workpiece, for example inside a plastic container, than in the surrounding plasma chamber. This is known and common for coating processes using a PICVD process, such as in WO 03/100121 A2 or in the WO 03/100125 A1 described.

Such a generic positioning and sealing device is arranged in its position of use or when used in a plasma chamber. If possible, the cavity enclosed by the chamber should not be significantly larger than the workpieces held in the chamber for coating purposes in order to achieve the shortest possible times for setting the required negative pressure conditions and to achieve the most favorable conditions possible for the stable and reproducible generation of the plasma . This applies all the more to coating devices of rotating design, namely in order to achieve the highest possible production output while at the same time achieving high quality and uniformity of the coatings achieved.

So there are spatial limitations and limited space. A requirement is therefore to make such positioning and sealing devices as compact as possible while at the same time ensuring high reliability and precision in holding the workpieces and sealing the workpiece against the surrounding chamber. For this reason, positioning and sealing devices have proven useful, which on the one hand have a pliers-like workpiece holder and, on the other hand, a sealing device for the sealing described. It has also proven useful that the sealing device and the workpiece holder are designed and arranged to be movable relative to one another in a direction of movement along a movement axis. This direction of movement generally corresponds and can be generalized to a longitudinal axis of the plasma chamber and/or the longitudinal axis of the workpiece, e.g. the plastic container, e.g. the bottle made of PET. The relative movement mentioned takes place between a sealing position in which the workpiece rests with a mouth against a seal, and a rest position in which the workpiece is held at a distance from the seal. In this rest position, the workpiece can be removed from the chamber and a new workpiece can be introduced into the chamber, while in the sealing position the negative pressure conditions are set and the coating process is carried out.

With regard to this relative movement, it is possible that the pliers-like workpiece holder, for example, stands still and the sealing device with the seal is guided against the mouth area of the workpiece. Conversely, it is possible for the sealing device with the seal to stand still and the e.g. pliers-like workpiece holder to be moved towards the seal until the desired sealing effect is achieved. In the context of the present invention, a movement of the workpiece holder is preferred for all embodiment variants because this means that fewer seals are required overall. This embodiment is particularly advantageous if the movement of the pliers-like workpiece holder is derived from the opening and closing movement of the chamber wall, for example by appropriate coupling elements for a movement coupling, in that when the chamber is closed, the moving chamber wall presses the workpiece holder and the workpiece held by it, for example against a restoring spring force presses against the seal of the sealing device, and e.g. when opening the chamber, the restoring spring force moves the pliers-like workpiece holder back into the starting position. As a third alternative, it would also be possible for both the sealing device and the workpiece holder to move towards one another. Since this is more structurally complex than the two alternatives mentioned above, this third alternative is not preferred. Regardless of which of the three alternatives mentioned is chosen for the relative movement, the sealing device and the workpiece holder can be arranged on a rotating plasma wheel and rotate together about the plasma wheel axis.

Both the sealing device and the pliers-like workpiece holder, for example, contain components that are subject to wear and that can be damaged, for example, due to the deposition processes carried out in the plasma chamber involving reactive process gases and microwave radiation, as well as due to high currents occurring in the event of short-term short circuits. Over time, deposits build up in the area of the sealing device and the workpiece holder, which are detrimental to reliable function and which are therefore removed, for example, in lye baths, or wear components, damaged components or components that are excessively affected by growing coatings have to be replaced. The seal of the sealing device is particularly stressed and must be replaced relatively frequently, for example after less than 100 hours of production. It should also be borne in mind that both the sealing device and the workpiece holder have workpiece-adapted components, so that, for example, when a product is changed, these product-specific components must also be replaced.

To achieve high production output, a large number of plasma stations, e.g. 24 plasma stations, are arranged on a plasma wheel of a rotating plasma coating device. Each of these plasma stations has a generic positioning and sealing device, on which replacement operations of the type mentioned must be carried out. Manufacturers of corresponding machines, for example, set specifications for maintenance intervals at which certain components, e.g. seals, should be replaced or, for example, cleaning steps or lubrication should be carried out. Machine operation is stopped for replacement processes and maintenance intervals. To ensure that the machine is cost-effective, rest periods of this type should be as short as possible. For this reason, it is desirable to be able to carry out replacement operations and maintenance as quickly as possible.

It is generic and known that an element that is to be removed regularly is detachably connected to the positioning and sealing device. An element that is to be removed in order to gain access to an element that needs to be replaced, e.g. a seal, or to gain access to an element that requires cleaning or lubrication, is considered to be such an element that needs to be removed regularly. An element that needs to be replaced, cleaned or maintained itself is also considered an element that needs to be removed regularly. However, in the generic state of the art, it has so far been provided that tools are to be used for loosening, e.g. screwdrivers or levers.

Such a generic state of the art is shown, for example, by: DE 103 10 470 A1 . Those there, for example, in the 10-12 The workpiece holders shown and the sealing devices shown there each have screw connections, so that for an exchange process, for example to replace a seal, screws must first be loosened and removed with a screwdriver. Another generic state of the art is shown by: DE 102 24 547 A1 , because there too, screws must be loosened using a screwdriver. Finally, it also reveals DE 10 2007 016 029 A1 such a generic state of the art, because there too, screw connections have to be loosened using a screwdriver.

It is considered disadvantageous that several screws have to be loosened using a tool to remove elements, so that overall replacement and maintenance processes are time-consuming. Due to the described cramped conditions in the area of a plasma chamber, handling a tool is also not unproblematic. Special tools are often required. Given the large number of screws that need to be loosened, they occasionally fall to the floor or into the machine. It is also considered disadvantageous that the constructions shown partially and disadvantageously influence the electromagnetic field that is built up within the plasma chamber to generate a plasma. This is partly due to the choice of materials, but also to the arrangement of some components.

It is therefore the object of the present invention to provide a device of the type mentioned in the introduction in such a way that these disadvantages are eliminated and quick replacement is possible with a compact and simple design. Furthermore, advantages should be achieved when carrying out coating processes by achieving a reliable sealing effect and influencing the electromagnetic field as little as possible.

This object is achieved according to the invention by a device with the characterizing features of device claim 1.

Advantageous embodiments of the device are specified in the subclaims.

In contrast to the generic state of the art, the element that is to be removed regularly is positively connected to the element by means of a latch Positioning and sealing device connected, and this latch is designed to be moved from a locking position to a release position without tools. The bolt can therefore be moved into the release position without using a tool and the element can therefore be removed from the device. The latch is designed to be movable. At least it can assume the above-mentioned blocking position and a release position.

It is preferred that in the locked position a holding force holding the bolt in the locked position acts and/or a locking connection is or is established in the locked position, so that the bolt is held and/or locked in the locked position, i.e. cannot accidentally leave the locked position . It is preferred that the latch also establishes the latching connection and not a latching element that is designed independently of the latch is provided. A corresponding latching structure or a corresponding latching element is therefore preferably provided on the bolt. The locking connection and the force holding the bolt must be selected so that the bolt cannot accidentally leave the locked position during production, i.e. it is secured in the locked position against accidental release. It is further preferred that the bar consists of a dielectric material, in particular PEEK (polyetheretherketone), a high-temperature-resistant thermoplastic that is resistant to almost all organic and inorganic chemicals, high-energy electromagnetic waves such as gamma radiation and X-rays, which can be easily injection molded or can be processed using milling processes and which does not negatively influence the electromagnetic field to be created in the plasma chamber. PEEK is also very wear-resistant.

Since the bolt is to be moved out of a locked position without tools, a tool-free bolt actuation is required. An actuator, motor, hydraulic, pneumatic or other type of actuation would be conceivable. However, in the sense of a high level of compactness and simplicity and in the sense of avoiding disruption of the electromagnetic field in the plasma chamber, it is preferred that the latch is operated manually, i.e. a surface for attack this has manual operation. The attack surface is accessible for manual access in both the blocked position and the released position. An operator who is already working at the plasma station for replacement and maintenance can therefore access the latch and move the latch.

Further preferred and generalizable for all embodiment variants, the element to be removed regularly is guided in the direction of the movement axis and, in the released state, is to be moved away from the device at least initially along the movement axis and along the guide until the guide ends. Then the element can, for example, be led out of the plasma station unguided in the radial direction. This also arises from the spatial confinement in the plasma chamber, which means that movements transverse to this axis of movement are often only possible and desired when a movement in the direction of the axis of movement has first taken place until the element has left the area that is controlled by the positioning and sealing device is taken.

The above explanations of the invention and the advantages can be applied to the workpiece holder or to the sealing device or to both. With regard to the sealing device, it is particularly advantageous if the latch is designed as part of a bayonet-like closure. Bayonet-like means that there is a type of locking groove and a locking body guided in this groove. This locking body is moved in the groove, for example until it reaches an end stop, and preferably assumes a locking position there, e.g. B. because this groove has an extension transverse to the groove direction, into which the locking body can engage behind.

A preferred application of such a bayonet-like lock is when a sealing cap of the sealing device holds the seal to the outside and when the cap is removed the seal is freely accessible and replaceable. The seal can then be exposed and replaced by simply turning the seal cap.

Another example of a lock that can be operated without tools is a swivel lock, which is arranged to be rotatable about a bearing pin. For a smooth-running and structurally favorable design, it is advantageous if the pivot bolt has a locking sleeve that surrounds the bearing pin. With regard to production and stability, this locking sleeve is preferably designed in one piece with the swivel lock. Advantages can also be achieved for this locking sleeve through the choice of material, namely in that the locking sleeve, like the entire locking bar, consists of a dielectric material, in particular PEEK.

Such a swivel lock can be used in particular in the pliers-like workpiece holder, which already has bearing pins and swivel axes for pliers arms, so that one of these axes can be used for the swivel lock, in that one of these bearing pins forms the bearing for the swivel lock. Therefore, with advantage suggested that the bearing pin for the pivot bolt is arranged on the workpiece holder.

Securing the locking position can be advantageously achieved, for example, in that the pivot bolt has a locking arm which, in the locking position, encompasses another bearing pin or bearing bolt arranged at a distance from the locking bearing pin by more than 180°. The locking arm can, for example, be provided in addition to a locking member, but both can also be designed integrally, which is considered particularly advantageous.

For reasons of space, it is advantageous for all swivel locks to be swiveled outwards into the release position. The sealing device is arranged inside, against which a workpiece is to be guided.

For replacement or maintenance operations on the sealing device, the entire pliers-like workpiece holder often has to be removed. In this context, it is advantageous if the workpiece holder is positively connected by means of a latch to the bearing pins on which the workpiece holder is supported. As a rule, the non-rotatable mounting is carried out on two bearing bolts, which are rigidly attached to the chamber floor, for example. An exemplary embodiment of how the workpiece holder can be removed quickly is shown in the later figures.

It is further preferred that not only a single bar is used, but that the bars are used in pairs, because this allows favorable symmetry conditions to be achieved.

• 1 eine schematische Aufsicht auf eine Beschichtungsvorrichtung, wie sie im Grundaufbau und grundsätzlich im Stand der Technik bekannt ist;
• 2 eine perspektivische Ansicht auf ein Plasmarad einer Beschichtungsvorrichtung;
• 3 eine perspektivische Ansicht auf eine vereinzelte Plasmastation;
• 4 eine perspektivische Ansicht eines Positionier- und Dichtelementes in einer teilweisen Explosionsdarstellung;
• 5a eine perspektivische Ansicht des Positionier- und Dichtelementes aus 4 im geöffneten und im geschlossenen Zustand der Plasmastation;
• 5b eine Schnittansicht durch das Positionier- und Dichtelement aus 5a im geschlossenen Zustand der Plasmastation;
• 6a eine perspektivische Ansicht einer Halteeinrichtung;
• 6b eine Explosionsdarstellung zur Halteeinrichtung der 6a;
• 7a eine perspektivische Ansicht einer Dichtkassette im verriegelten (untere Abbildung) und im entriegelten Zustand (obere Abbildung);
• 7b eine Schnittansicht durch eine Dichtkassette der 7a im verriegelten Zustand;
• 7c eine Explosionsdarstellung zu den Dichtkassetten der 7a.

The invention will be explained in more detail below using exemplary embodiments which are shown in the figures. Show it:

• 1 a schematic top view of a coating device, such as its basic structure and fundamentally known in the prior art;
• 2 a perspective view of a plasma wheel of a coating device;
• 3 a perspective view of an isolated plasma station;
• 4 a perspective view of a positioning and sealing element in a partial exploded view;
• 5a a perspective view of the positioning and sealing element 4 when the plasma station is open and closed;
• 5b a sectional view through the positioning and sealing element 5a when the plasma station is closed;
• 6a a perspective view of a holding device;
• 6b an exploded view of the holding device 6a ;
• 7a a perspective view of a sealing cassette in the locked (lower illustration) and in the unlocked state (upper illustration);
• 7b a sectional view through a sealing cassette 7a in locked state;
• 7c an exploded view of the sealing cassettes 7a .

From the illustration in 1 An exemplary plasma coating device (1) can be seen, which is provided with a rotating plasma wheel (2). A plurality of plasma stations (3) are arranged along a circumference of the plasma wheel (2). The plasma stations (3) are provided with plasma chambers (4) or cavities for holding workpieces (5) to be treated. Such workpieces (5) can be, for example, containers made of plastic, for example bottles made of plastic, for example bottles made of PET. The workpieces (5) to be treated are fed to the plasma coating device (1) in the area of an input (6) and, if not already separated and/or in a suitable division, forwarded via a separating wheel (7) to a transfer wheel (8). is equipped with positionable, pivotable support arms (9) in the example shown. The support arms (9) are arranged to be pivotable relative to a base (10) of the transfer wheel (8), so that the distance between the workpieces (5) can be changed relative to one another. This results in the workpieces (5) being transferred from the transfer wheel (8) to an input wheel (11) with an increased distance between the workpieces (5) relative to one another relative to the separating wheel (7). The input wheel (11) transfers the workpieces (5) to be treated to the plasma wheel (2). After the treatment has been carried out, the treated workpieces (5) are removed from the area of the plasma wheel (2) by an output wheel (12) and transferred to the area of an output section (13).

It is known and possible for plasma coating devices (1) to be run through in the opposite direction to that described above. It is also known and possible for each plasma station (3) to have more than one cavity (4), for example a double cavity. This allows two or more workpieces (5) to be treated at the same time. Such a double or multiple cavity could, in principle, have cavities that are completely separate from one another However, it is also possible to delimit only partial areas from one another in a common cavity space in such a way that optimal coating of all workpieces (5) held together therein is guaranteed.

2 shows a perspective view of an exemplary plasma coating device (1) with a partially constructed plasma wheel (2). The plasma stations (3) are arranged on a support ring (14), which is designed as part of a rotary connection and is mounted in the area of a machine base (15). The plasma stations (3) each have a station frame (16) which holds plasma chambers (17). The plasma chambers (17) have cylindrical chamber walls (18) and microwave generators (19). A rotary distributor (20) is arranged in a center of the plasma wheel (2), via which the plasma stations (3) are supplied with operating resources and energy. In particular, ring lines (21, 22) can be used to distribute resources. The workpieces (5) to be treated are shown below the cylindrical chamber walls (18). Lower parts of the plasma chambers (17) are not shown for simplicity.

3 shows an exemplary plasma station (3) in a perspective view. It can be seen that the station frame (16) is provided with guide rods (23) on which a slide (24) is guided to hold the cylindrical chamber wall (18). 3 shows the carriage (24) with chamber wall (18) in a raised state so that the workpiece (5) is released.

The microwave generator (19) is arranged in the upper area of the plasma station (3). The microwave generator (19) is connected via a deflection (25) and an adapter (26) to a coupling channel (27) which opens into the plasma chamber (17). In principle, the microwave generator (19) can be located directly in the area of the chamber lid, which is connected to the station frame (16) in a fixed position, and in 3 is covered by the raised chamber wall (18), as well as coupled to the chamber lid via a spacer element at a predeterminable distance from the chamber lid and thus arranged in a larger surrounding area of the chamber lid. The adapter (26) has the function of a transition element and the coupling channel (27) is designed as a coaxial conductor. A quartz glass window is arranged in the area where the coupling channel (27) opens into the chamber cover. The deflection (25) is designed as a waveguide.

The workpiece (5) is positioned in the area of a positioning and sealing element (28) which is arranged in the area of a chamber floor (29). The chamber floor (29) is designed as part of a chamber base (30). To make adjustment easier, it is possible to fix the chamber base (30) in the area of the guide rods (23). Another variant is to attach the chamber base (30) directly to the station frame (16). With such an arrangement, it is also possible, for example, to design the guide rods (23) in two parts in the vertical direction or to omit them and to provide other guide means.

The previous description corresponds to the state of the art, as in the WO 03/100121 A2 or in the WO 03/100125 A1 shown. Further exemplary details of a plasma station (3) are given there. The previous description served to embed the present invention in a technical environment, since the present invention is in that defined by a circle 3 highlighted area plays and concerns a positioning and sealing element (28) with special features. The technical features explained above are therefore to be viewed as optional technical features. In particular, the previous representation was made with regard to workpieces in the form of containers, in particular in the form of bottles, these workpieces being made of a plastic, in particular PET. The further representation also takes place on such containers in the form of bottles, because this is an area of application to which the invention is particularly and preferably aimed. As described in the prior art stated in the introduction to the paragraph, these workpieces are provided with an internal coating to improve barrier properties, for example to reduce or prevent penetration or escape of oxygen and/or carbon dioxide and/or H20. Typically and preferably within the scope of the present invention, the internal coating is plasma-induced as part of PICVD processes known in the prior art. Typical process gases here are HMDSN and/or HDMSO, for example with the addition of argon, oxygen and/or nitrogen. However, the invention is not limited to this, nor to an arrangement of a workpiece upside down. The workpiece could also be arranged with the mouth opening facing upwards. The present invention is also not limited to a specific number of cavities and is independent of the specific appearance of the plasma stations and the coating device.

The positioning and sealing elements described below are examples of claimed positioning and sealing devices.

4 shows a perspective view of a positioning and sealing element (28) in one partial exploded view. When assembled, the positioning and sealing element (28) is held on the common base (40), from which bearing pins (44) extend on both sides of a central through opening (42) in the direction of the station axis (46) shown. The sealing cassette (50), shown as an example of a sealing device, is screwed to the common base (40) using screws (51), while the holding device (60), as an example of a workpiece holder, rests on the two bearing bolts (44). Explanations will be given in later figures regarding the construction of the sealing cassette (50) and the construction of the holding device (60), which together form the positioning and sealing element (28).

The station axis (46) shown coincides with the container axis of the container (5), which is no longer shown, and a movement axis that will be explained later. The bearing bolts (44) also extend in the direction of this station axis (46), namely in a vertical direction. In the upper area of the 4 A chamber wall (18) is indicated, which is movable along the station axis (46). The common base (40), on the other hand, is designed to be immovable in the direction of the station axis (46) and, for example, is rigidly connected to a rotating plasma wheel (2), such as the 2 and 3 explained. The chamber wall (18) can be lowered until the common base (40) is reached and then encloses a cavity in which the container (5) is held by the holding device (60) against a seal provided in the sealing cassette (50). The interior of the container (5) can be brought to a negative pressure by vacuum pumps through the central through opening (42) and a gas lance, not shown, can be led into the container (5) from below in order to supply process gases required for a coating process. Spaced from the central through opening (42), further through holes (43) are provided in the common base (40), via which, for example, there is access to the cavity surrounding the container (5), for example in order to bring this surrounding space to a negative pressure using operatively connected vacuum pumps .

5a shows a perspective view of the positioning and sealing element (28). 4 in the open (left) and in the closed state (right) of the plasma station (3), whereby in the right image depicting the closed plasma station (3), the chamber wall (18), which is actually lowered to the common base (40), has been omitted in order to provide a clear view on the positioning and sealing element (28). 5b shows a sectional view through the positioning and sealing element (28). 5a when the plasma station (3) is closed. In this sectional view, the chamber wall (18) can be seen in the closed state, which encloses the cavity on the inside. In this sectional view of the 5b It can also be seen that the chamber wall (18) has a driver step (18a) in its lower end region, which presses the holding device (60) towards the common base (40). For this purpose, the holding device (60) rests with a guide sleeve (62) on a spring sleeve (64), both of which are mounted on the bearing pin (44), with a spring (66), which also rests on the bearing pin (44), resting on the bottom side supported by a bearing pin flange (68) and is still supported at the top against the spring sleeve (64). The guide sleeve (62) has a driver projection (65) on the outside, which interacts with the driver stage (18a). If the chamber wall (18) is raised in the direction of the station axis (46) shown, the spring (66) pushes the spring sleeve (64) and thereby also the guide sleeve (62) upwards, so that the positioning and sealing element (28) again in the left picture the 5a shown state.

The sectional view of the 5b also shows that a sealing washer ring (52) is clamped between a sealing sleeve (54) which rests in the central passage opening (42) of the common base (40) and a sealing cap (56). In the direction of this sealing ring (52), the sealing sleeve (54) on its upper side and the sealing cap (56) on its underside each have an annular projection opposite one another in order to achieve a high contact pressure and a high sealing effect in this area. The container (5), which is arranged with the mouth opening (32) pointing downwards, is pressed with its mouth edge in a sealing manner against the sealing ring (52). Secured in the vertical direction, the container (5) lies against the holding device (60) with its handling ring (34).

Below are details of the holding device (60) using the 6a and 6b and to the sealing cassette (50) using the 7a-7c and each with reference to the sectional view of 5b explained. 6a shows a perspective view of a holding device (60) and 6b plus an exploded view. 7a shows a perspective view of a sealing cassette (50) in the locked (lower illustration) and in the unlocked state (upper illustration), 7b a sectional view through the sealing cassette (50) in the locked state and 7c an exploded view of the sealing cassette (50).

The holding element (60) is designed like a pliers and has two pivotably mounted holding arms (82). The holding arms (82) can be pivoted on bearing pins relative to the axes of rotation (83). (84). To ensure automatic fixation of the container (5) by the holding element (60), the holding arms (82) are pulled elastically into a respective holding position by rubber rings (85). The rubber rings (85) are clamped between dowel pins (86) arranged on the main body (66) and fastening extensions (87) at the rear end of the holding arms (82), which are secured to the bearing pins (84) by snap rings (89) made of PEEK.

The holding arms (82) are mounted above the main body (66), which is penetrated by the bearing pins (84). Below the main body (66), swivel locks (88) are rotatably mounted on the bearing pins (84), these swivel locks (88) having bearing sleeves (89) at one end.

The holding element (60) is arranged above the chamber floor (29), see 3 and 4 , so that after the chamber wall (18) has been lifted, there is lateral accessibility for transfers to the holding element (60). The workpiece (5) can thereby be transferred to the holding element (60) from outside the plasma station (3), for example from an adjacently arranged input wheel (11).

Out of 6a It can be seen in particular that a free area for receiving the workpiece (5) is arranged between the holding arms (82) and the main body (66), which has an indentation (68) in this area. The holding arms (82) protrude into this area with fixing projections (69), which are provided with external inlet and internal outlet slopes. To further support and fix the workpiece (5), the holding element (60) has a stop contour (70). The stop contour (70) limits the maximum insertion of the workpiece (5) into the indentation. In the locking positioning, the workpiece (5) is pressed against the stop contour (70) by the fixing projections. The stop contour (70) and the fixing projections (69) are arranged at approximately the same height level. The neck ring (34) of the container (5) should lie below these height levels and rest against the stop contour (70) from below.

When the workpieces (5) are inserted into the area of the indentation (68), the workpiece (5) first comes into contact with the outside inlet slopes and pushes the holding arms (82) apart against the forces of the rubber rings (87). After the workpiece (5) has been completely inserted into the area of the indentation (68), the holding arms (82) automatically return to the locking position due to the tensile forces of the rubber rings (87) and press the workpiece (5) against the contact contour (70). The workpiece (5) is thereby fixed within the plasma chamber (17). After the treatment of the workpiece (5) has been completed, the workpiece (5) is gripped by a transfer element and pulled against the inside outlet slopes of the pliers arms (82). The holding arms (82) are thereby moved apart again and release the workpiece (5).

In 5a It can be seen that after inserting a bottle-like workpiece (5), the holding element (60) acts on it with its holding arms (82) between a support ring (34) and a shoulder area (36). In addition, the support ring (34) clamps against the contact contour (70) from below. Holding such a bottle-like workpiece (5) in the neck area shown leads to a very stable fixation of the workpiece (5).

Out of 6a combined with 5b It can be seen that the holding element (60) has a main body (66) from which the holding arms (82) and the other components are supported. The main body (66) rests on the two bearing pins (44), which are connected to the chamber floor (29). For this purpose, the main body (66) has guide sleeves (62) arranged at the ends. These guide sleeves (62) have an opening (63) on the outside that passes through the sleeve wall. When mounted on the bearing pins (44), these openings (63) are at the same level as recesses (71) milled into the outside of the bearing pins (44). These recesses (71) have a larger extent than the aforementioned openings (63) in the bearing sleeves (62). This extension in the direction of the station axis (46) is selected so that the opening (63) is opposite the recess (71) over the entire working stroke of the holding device (60).

As continues in 6a As can be seen, the pivot bolt (88) is arranged on the bearing pin (84) at a height so that the locking body (73) of the pivot bolt (88) can pivot into the opening (63) and reach into the recess (71). The height of the blocking body (73) is selected to be complementary to the height of the opening (63). The depth of the opening (63) and the depth of the locking body (73) are selected so that the locking body (73) can engage in the recess (71) of the bearing pin (44). When the plasma station (3) is open, the top of the locking body (73) rests on the upper contact surface of the recess (71), so that the springs (66) cannot push the holding device (60) any further upwards. Im in 5b In the state of a closed plasma chamber (3) shown, the underside of the blocking body (73) has not quite reached the lower contact surface of the recess (71). This dimensioning of the recess (71) ensures that that the locking body (73) can remain in locking engagement over the working stroke of the holding device (60) and also carries out the working stroke. If the locking body (73) is pivoted radially outwards around the bearing pin (84), the locking engagement in the bearing pin (44) is canceled and the spring (66) can push the holding device (60) upwards or a person can move the main body (66) with all elements arranged on it, lift it upwards from the bearing pins (44) in the direction of the station axis (46) and then remove it radially outwards from the plasma station (3).

In 6a It can also be seen that the pivot bolt (88) has a locking arm (75) that protrudes beyond the locking body (73). Like on the left side of the 6a As can be seen, this arcuate locking arm (75) encompasses the bearing sleeve (62) by more than 180°, so that the pivot bolt (88) is held in a locking manner. The arcuately curved locking arm (75) can, for example, rest against the guide sleeve (62) due to its bending elasticity, for example because the radius of curvature of the locking arm (75) is selected so that it comes to rest behind the 180° wrap. This arcuate locking arm (75) is in the in 6a in the locking position shown on the left side as well as in the release position shown on the right side compared to all other elements of the holding device (60), so that the protruding area, in particular the arcuate locking arm (75), can be attacked with the fingers. By pressing against this locking arm (75), the swivel lock (88) can be swung out of the locking position. The pivot bolt (88) can be pivoted from its release position into the locking position by acting again on the outside of the locking body (73) or on the outside on the locking arm (75).

As can also be seen, the pivot bolt (88) pivots around the outside of the bearing sleeve (62) and engages into this bearing sleeve (62) from the outside. This is preferred over intervention from the inside, since the space required for the sealing cassette (50) on the inside must be taken into account.

In a basic positioning, a distance between the common base (40) and the sealing cassette (50) arranged thereon is predetermined such that the workpiece (5) held by the holding element (60) initially stands above the sealing cassette (50). This allows a workpiece (5) to be inserted and removed. After inserting the workpiece (5) in this way, the distance between the sealing casing (50) and the holding device (60) is reduced, caused by the lowering chamber wall (18), so that the mouth area of the workpiece (5) enters the sealing cap (56). immersed and guided against the sealing ring (52). The positioning movement of the chamber wall (18) determines the working stroke of the holding device (60), which is carried out synchronously with the positioning movement of the chamber wall (18). The chamber wall (18) moves the holding device (60) together with the container (5) in one direction; when the chamber wall (18) moves in the opposite direction, the springs (66) push the holding device (60) with the container (5) back into the starting position back.

The ones in the 7a-7c Sealing cassette (50) shown is screwed to the common base (40) with its base body (80) and by means of screws (51). The sealing sleeve (54), which can be seen as hollow on the inside in the cross-sectional view, extends into the central through opening (42) and rests on its edge with a flange-like extension in the upper sleeve area. On the top of this sealing sleeve (54) there is an annular sealing disk (52), which can be made of a silicone material, for example. The sealing washer (52) is secured at the top by the sealing cap (56).

This sealing cap (56) has on its cylindrical outer surface two locking bodies (58), each spaced apart at a circumferential angle of 180°. These locking bodies (58) work together with two locking blocks (59), which are also screwed to the base body (80) with a circumferential angle offset of 180°. These locking blocks (59) have a mounting structure on their underside, the depth and curvature of which matches a mounting contour (81) provided on the top of the base body (80). When the locking blocks are screwed tight, they align themselves automatically due to the shape complementarity explained. In this assembled state of the locking block (59), in conjunction with the base body (80), it forms a bayonet-like internal groove known from bayonet locks, with which the locking bodies (58) arranged on the outside of the sealing cap (56) cooperate. By placing the sealing cap (56) on the base body (80) and by reaching over the area of the sealing sleeve (54) that protrudes beyond the base body (80), the sealing cap (56) can then be rotated around the station axis (46) and itself until Insert the locking bodies (58) under the locking blocks (59) and interact with the bayonet-like groove until the locking bodies (58) reach an end stop. Shortly before or when this end stop is reached, the locking body (58) engages behind a small counter edge, for example, so that the locking body (58) has reached a locking position on the one hand, but on the other hand also serves as a locking body and has reached a locking position. The sealing cap is in this position (56) secured on the one hand in the axial direction of the station axis (46) and on the other hand locked and secured against turning back from the locking position into the release position. Due to this positive connection, which can be released without tools, the positive connection can be canceled by turning the sealing cap (56) and the locking body (58) can be moved into the release position. As soon as the sealing cap (56) is lifted off, there is free access to the sealing washer ring (52), which can therefore be removed and replaced with a new sealing washer ring. The sealing cap (56) can then be rotated back into the locking position.

The sealing sleeve (54) must be cleared of deposits at longer intervals. For this purpose, too, the sealing cap (56) simply needs to be moved into the release position by turning; the sealing cap (56) can then be removed. The sealing disk ring (52) can then be removed upwards and the sealing sleeve (54) can also be removed upwards from the common base (40) in the direction of the station axis.

Advantageous effects for field generation in the plasma chamber (3) can be achieved through special material selection and through special dimensioning specifications. Advantageously, for example, the sealing cap (56), together with the locking bodies (58) arranged thereon, the locking blocks (59) and the screws holding the locking blocks (59) on the base body (80) are made of a dielectric material, preferably PEEK. As already mentioned, the seal (52) is made of a silicone material. The base body (80) is made of aluminum. Furthermore, it is advantageously provided that the screws that hold this base body to the common base (40) are made of stainless steel, for example V4A stainless steel. It is further advantageously provided that the total of three drill holes in the base body (80) are all open on one side in a common direction, whereby easy loosening of the screws (51) enables the base body (80) to be pulled out laterally as soon as the sealing sleeve (54) has been removed upwards.

With regard to the holding device (60), it is advantageously provided that the main body (66) is made entirely of PEEK. The swivel bolt (88) is also made entirely of PEEK. The same applies to the pivoting tong arms (82) and to the bearing pins (86), which are arranged on the main body (66). On the other hand, the spring sleeve (64) is made of stainless steel, namely V4A. Furthermore, with regard to this spring sleeve (64), it is advantageous if, when the plasma chamber (3) is closed, it is completely immersed in the recess in the common base (40) in which the bearing bolts (44) are located. The upper edge of this spring sleeve (64) is therefore below the upper edge of the common base (40).

QUOTES INCLUDED IN THE DESCRIPTION

This list of documents listed by the applicant was generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• WO 03100121 A2 [0002, 0033]
• WO 03100125 A1 [0002, 0033]
• DE 10310470 A1 [0009]
• DE 10224547 A1 [0009]
• DE 102007016029 A1 [0009]

Claims (7)

Positioning and sealing device (28) for holding and sealing a workpiece (5) in a plasma chamber (4) of a plasma coating device (1), with a pliers-like workpiece holder (60) and with a sealing device (50) for a seal between the inside of the workpiece and the chamber (4) surrounding the workpiece (5), the device (28) being arranged in a plasma chamber (4) in the position of use, the sealing device (50) and the workpiece holder (60) relative to one another in a direction of movement along a movement axis ( 46) are designed to be movable and arranged for a lifting movement between a sealing position in which the workpiece (5) rests with a mouth (32) against a seal (52) and a rest position in which the workpiece (5) is spaced from the seal (52), the device (28) having a regularly removable element (56, 54, 52, 60) which is releasably connected to the device (28), characterized in that the element (56, 54, 60) is positively connected to the device (28) or the chamber (4) by means of a latch (58, 88), and this latch (58, 88) is designed to be able to be moved from a locking position to a release position without tools, the latch (58 , 88) is preferably held in the locking position by a holding force and/or a latching connection holding the latch (58, 88) is established, the latch (58, 88) more preferably itself being the latching means, more preferably that the latch ( 58, 88) consists of a dielectric material, in particular PEEK. Device (28) after Claim 1 , characterized in that the latch (58, 88) can be moved from the locking position to the release position by a rotating or pivoting movement and/or wherein the latch (58, 88) can be operated by an operator in both the locking and locking positions has an attack surface (56, 75) that is accessible in the release position and can be attacked by hand. Device (28) after Claim 2 , characterized in that the latch (58) is designed as part of a bayonet-like closure (58, 59) and is preferably arranged on the sealing device (50), in particular on a sealing cap (56), which holds the seal (52) to the outside and when the cap (56) is removed, the sealing cap preferably consists of a dielectric material, in particular PEEK. Device according to Claim 2 , characterized in that the latch is designed as a pivot bolt (88) and is arranged to be rotatable about a bearing pin (84), in particular wherein the bearing pin (84) forms the shaft for the pivot latch (88), about which the latch (88) can be pivoted , wherein the swivel lock preferably has a locking sleeve (89) surrounding the bearing pin (84), which is preferably made in one piece with the swivel lock (88), preferably consisting of a dielectric material, in particular of PEEK, in particular where the shaft axis is in the direction of movement (46 ) is aligned. Device according to Claim 4 , characterized in that the bearing pin (84) is arranged on the workpiece holder (60), in particular wherein the latch (88) has a latching arm (75) which, in the latching position, supports another bearing pin (72) or bearing bolt (44) by more than 180 °, in particular wherein the pivot bolt (88) is arranged and designed for pivoting outwards for the transition from the locking position to the release position Device according to one of the preceding Claims 4 or 5 , characterized in that the workpiece holder (60) is held in a rotationally fixed manner on two bearing pins (44), in particular displaceable in the direction of movement, in particular spring-loaded, the bearing pin (84) being spaced apart from one of the bearing pins (44) and the pivoting lever (88) in its locking position, a locking member (73) engages in an external recess (71) in the bearing pin (44), wherein in the rest position the locking member (77) rests against an upper stop, the recess (71) preferably being in the direction of movement ( 46) has a larger extent than the locking member (73), the extent of the recess preferably being at least so large that the locking member (73) follows the working stroke of the workpiece holder (60) in the locked state, with the workpiece holder (60) more preferably in its storage area is designed as a bearing sleeve (62), which has an opening (63) on the outside for the passage of the locking member (73) of the pivot lever, the guide sleeve preferably being made of a dielectric material, in particular made of PEEK, Device according to one of the preceding claims, characterized in that at least one pair of latches (58, 88) is provided, which is arranged symmetrically to the station axis (46).

Images