DE102022201346A1 - Kunststoffzusammensetzung und bearbeitungsverfahren für ein werkstück - Google Patents
Kunststoffzusammensetzung und bearbeitungsverfahren für ein werkstück Download PDFInfo
- Publication number
- DE102022201346A1 DE102022201346A1 DE102022201346.8A DE102022201346A DE102022201346A1 DE 102022201346 A1 DE102022201346 A1 DE 102022201346A1 DE 102022201346 A DE102022201346 A DE 102022201346A DE 102022201346 A1 DE102022201346 A1 DE 102022201346A1
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- Prior art keywords
- wafer
- workpiece
- plastic composition
- plastic
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68381—Details of chemical or physical process used for separating the auxiliary support from a device or wafer
- H01L2221/68386—Separation by peeling
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polymers & Plastics (AREA)
- Medicinal Chemistry (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Materials Engineering (AREA)
- Toxicology (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Adhesives Or Adhesive Processes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021022961A JP2022125390A (ja) | 2021-02-17 | 2021-02-17 | 樹脂組成物、表面の保護方法、及び、被加工物の加工方法 |
JP2021-022961 | 2021-02-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE102022201346A1 true DE102022201346A1 (de) | 2022-08-18 |
Family
ID=82610836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102022201346.8A Pending DE102022201346A1 (de) | 2021-02-17 | 2022-02-09 | Kunststoffzusammensetzung und bearbeitungsverfahren für ein werkstück |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2022125390A (zh) |
KR (1) | KR20220117814A (zh) |
CN (1) | CN114989333A (zh) |
DE (1) | DE102022201346A1 (zh) |
TW (1) | TW202233699A (zh) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017085122A (ja) | 2016-12-06 | 2017-05-18 | リンテック株式会社 | 表面保護シート |
-
2021
- 2021-02-17 JP JP2021022961A patent/JP2022125390A/ja active Pending
-
2022
- 2022-02-07 KR KR1020220015192A patent/KR20220117814A/ko unknown
- 2022-02-09 DE DE102022201346.8A patent/DE102022201346A1/de active Pending
- 2022-02-09 CN CN202210120859.0A patent/CN114989333A/zh active Pending
- 2022-02-14 TW TW111105183A patent/TW202233699A/zh unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017085122A (ja) | 2016-12-06 | 2017-05-18 | リンテック株式会社 | 表面保護シート |
Also Published As
Publication number | Publication date |
---|---|
JP2022125390A (ja) | 2022-08-29 |
KR20220117814A (ko) | 2022-08-24 |
TW202233699A (zh) | 2022-09-01 |
CN114989333A (zh) | 2022-09-02 |
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