DE102016201718B4 - Pumpe mit polygonförmigem Piezo-Membranwandler - Google Patents

Pumpe mit polygonförmigem Piezo-Membranwandler Download PDF

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Publication number
DE102016201718B4
DE102016201718B4 DE102016201718.7A DE102016201718A DE102016201718B4 DE 102016201718 B4 DE102016201718 B4 DE 102016201718B4 DE 102016201718 A DE102016201718 A DE 102016201718A DE 102016201718 B4 DE102016201718 B4 DE 102016201718B4
Authority
DE
Germany
Prior art keywords
pump
piezo
piezo element
diaphragm
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102016201718.7A
Other languages
German (de)
English (en)
Other versions
DE102016201718A1 (de
Inventor
Waltraud HELL
Yücel Congar
Martin Wackerle
Klaus Heinrich
Martin Richter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to DE102016201718.7A priority Critical patent/DE102016201718B4/de
Priority to US15/419,015 priority patent/US11131299B2/en
Priority to JP2017014407A priority patent/JP6797703B2/ja
Priority to CN201710064243.5A priority patent/CN107035667B/zh
Publication of DE102016201718A1 publication Critical patent/DE102016201718A1/de
Priority to JP2019076645A priority patent/JP2019132278A/ja
Application granted granted Critical
Publication of DE102016201718B4 publication Critical patent/DE102016201718B4/de
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Anticipated expiration legal-status Critical

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/071—Mounting of piezoelectric or electrostrictive parts together with semiconductor elements, or other circuit elements, on a common substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H10N30/2048—Membrane type having non-planar shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Reciprocating Pumps (AREA)
DE102016201718.7A 2016-02-04 2016-02-04 Pumpe mit polygonförmigem Piezo-Membranwandler Active DE102016201718B4 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE102016201718.7A DE102016201718B4 (de) 2016-02-04 2016-02-04 Pumpe mit polygonförmigem Piezo-Membranwandler
US15/419,015 US11131299B2 (en) 2016-02-04 2017-01-30 Pump comprising a polygon-shaped piezo diaphragm transducer
JP2017014407A JP6797703B2 (ja) 2016-02-04 2017-01-30 多角形形状圧電ダイアフラムトランスジューサを備えるポンプ
CN201710064243.5A CN107035667B (zh) 2016-02-04 2017-02-04 包括多边形压电薄膜传感器的泵
JP2019076645A JP2019132278A (ja) 2016-02-04 2019-04-12 多角形形状圧電ダイアフラムトランスジューサを備えるポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102016201718.7A DE102016201718B4 (de) 2016-02-04 2016-02-04 Pumpe mit polygonförmigem Piezo-Membranwandler

Publications (2)

Publication Number Publication Date
DE102016201718A1 DE102016201718A1 (de) 2017-08-10
DE102016201718B4 true DE102016201718B4 (de) 2022-02-17

Family

ID=59382470

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102016201718.7A Active DE102016201718B4 (de) 2016-02-04 2016-02-04 Pumpe mit polygonförmigem Piezo-Membranwandler

Country Status (4)

Country Link
US (1) US11131299B2 (https=)
JP (2) JP6797703B2 (https=)
CN (1) CN107035667B (https=)
DE (1) DE102016201718B4 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10231364B2 (en) * 2016-10-24 2019-03-12 Toyota Motor Engineering & Manufacturing North America, Inc. Fluidly cooled power electronics assemblies having a thermo-electric generator
DE102018207858B4 (de) 2018-05-18 2021-06-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Haltevorrichtung zum Herstellen einer Mikropumpe mit mechanisch vorgespanntem Membranaktor
JP7200535B2 (ja) * 2018-08-17 2023-01-10 セイコーエプソン株式会社 構造体、ダイヤフラム式圧縮機、冷却機、プロジェクター及び構造体の製造方法
JP7072492B2 (ja) * 2018-11-22 2022-05-20 京セラ株式会社 アクチュエータ及び触感呈示装置
CN109985796A (zh) * 2019-03-25 2019-07-09 中国船舶重工集团公司第七一五研究所 一种多边形阵元压电复合材料换能器制备方法
DE102019211941B3 (de) * 2019-08-08 2020-10-15 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrostrukturierte fluidflussregelvorrichtung
WO2021108421A1 (en) 2019-11-25 2021-06-03 Aita Bio Inc. Micropump and method of fabricating the same
DE102020209594B3 (de) 2020-07-30 2021-12-30 Festo Se & Co. Kg Fluidgerät
DE102020209593B4 (de) * 2020-07-30 2022-02-17 Festo Se & Co. Kg Fluidgerät
TWI806068B (zh) * 2021-06-11 2023-06-21 研能科技股份有限公司 微機電泵浦
EP4466460A4 (en) * 2022-01-19 2025-09-03 Aita Bio Inc MULTI-CHAMBER MEMS MICROPUMP FOR AN INSULIN DELIVERY DEVICE
CN114640269B (zh) * 2022-04-12 2024-04-30 合肥工业大学 一种基于菱形环和对称同相放大杆的二级驱动压电堆栈泵
US20250109742A1 (en) * 2023-09-28 2025-04-03 Boston Scientific Scimed, Inc. Surface enhancement of a bonding surface in a piezo electric pump/valve
US20250177182A1 (en) * 2023-12-04 2025-06-05 Boston Scientific Scimed, Inc. Formation of a chamber for a fluidic device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19834461A1 (de) 1998-07-30 2000-02-10 Siemens Ag Vielschicht-Piezoaktor
DE69607551T2 (de) 1995-09-27 2000-11-02 Ngk Insulators, Ltd. Piezoeletrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren
DE10238600A1 (de) 2002-08-22 2004-03-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Peristaltische Mikropumpe
WO2011107162A1 (en) 2010-03-05 2011-09-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve

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FR2557732B1 (fr) * 1983-12-28 1986-04-11 Lefevre Rene Procede de realisation de dispositifs piezoelectriques miniatures utilisant un usinage par laser et dispositifs obtenus par ce procede
JPH05272457A (ja) * 1992-01-30 1993-10-19 Terumo Corp マイクロポンプおよびその製造方法
IL106803A (en) * 1993-08-25 1998-02-08 Scitex Corp Ltd Printable inkjet head
US6334761B1 (en) * 2000-03-02 2002-01-01 California Institute Of Technology Check-valved silicon diaphragm pump and method of fabricating the same
JP3629405B2 (ja) * 2000-05-16 2005-03-16 コニカミノルタホールディングス株式会社 マイクロポンプ
EP1435664A1 (en) * 2002-01-21 2004-07-07 Matsushita Electric Industrial Co., Ltd. Semiconductor device
CA2654688C (en) * 2006-12-09 2011-07-26 Murata Manufacturing Co., Ltd. Piezoelectric pump
US8821134B2 (en) * 2009-06-03 2014-09-02 The Technology Partnership Plc Fluid disc pump
EP2542809A1 (en) * 2010-03-05 2013-01-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Valve, layer structure comprising a first and a second valve, micropump and method of producing a valve
JP2013527751A (ja) * 2010-03-15 2013-07-04 ザ ジョンズ ホプキンズ ユニヴァーシティー 物質の非毒性を決定する方法
CN101846653B (zh) * 2010-04-30 2011-09-14 湖北大学 一种多边形电极的压电薄膜体声波传感器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69607551T2 (de) 1995-09-27 2000-11-02 Ngk Insulators, Ltd. Piezoeletrisches/elektrostriktives Dünnfilmelement und Herstellungsverfahren
DE19834461A1 (de) 1998-07-30 2000-02-10 Siemens Ag Vielschicht-Piezoaktor
DE10238600A1 (de) 2002-08-22 2004-03-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Peristaltische Mikropumpe
WO2011107162A1 (en) 2010-03-05 2011-09-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve

Also Published As

Publication number Publication date
US20170226994A1 (en) 2017-08-10
JP2019132278A (ja) 2019-08-08
JP6797703B2 (ja) 2020-12-09
CN107035667B (zh) 2021-08-03
JP2017141824A (ja) 2017-08-17
CN107035667A (zh) 2017-08-11
US11131299B2 (en) 2021-09-28
DE102016201718A1 (de) 2017-08-10

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