DE102013001948A8 - Oberflächenformmessverfahren und -vorrichtung, Computerprogramm, computerlesbares nichtflüchtiges Speichermedium. optisches Element und dessen Herstellungsverfahren - Google Patents

Oberflächenformmessverfahren und -vorrichtung, Computerprogramm, computerlesbares nichtflüchtiges Speichermedium. optisches Element und dessen Herstellungsverfahren Download PDF

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Publication number
DE102013001948A8
DE102013001948A8 DE102013001948A DE102013001948A DE102013001948A8 DE 102013001948 A8 DE102013001948 A8 DE 102013001948A8 DE 102013001948 A DE102013001948 A DE 102013001948A DE 102013001948 A DE102013001948 A DE 102013001948A DE 102013001948 A8 DE102013001948 A8 DE 102013001948A8
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Germany
Prior art keywords
manufacturing
storage medium
optical element
surface shape
volatile storage
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DE102013001948A
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English (en)
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DE102013001948B4 (de
DE102013001948A1 (de
Inventor
Yuki YONETANI
Yasunori Furukawa
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Publication of DE102013001948A1 publication Critical patent/DE102013001948A1/de
Publication of DE102013001948A8 publication Critical patent/DE102013001948A8/de
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Publication of DE102013001948B4 publication Critical patent/DE102013001948B4/de
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/005—Testing of reflective surfaces, e.g. mirrors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE102013001948.6A 2012-02-07 2013-02-04 Oberflächenformmessverfahren und -vorrichtung, Computerprogramm, computerlesbares nichtflüchtiges Speichermedium sowie Fertigungsverfahren eines optischen Elements Active DE102013001948B4 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-023974 2012-02-07
JP2012023974A JP5971965B2 (ja) 2012-02-07 2012-02-07 面形状計測方法、面形状計測装置、プログラム、および、光学素子の製造方法

Publications (3)

Publication Number Publication Date
DE102013001948A1 DE102013001948A1 (de) 2013-08-08
DE102013001948A8 true DE102013001948A8 (de) 2013-11-21
DE102013001948B4 DE102013001948B4 (de) 2015-08-06

Family

ID=48794727

Family Applications (1)

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DE102013001948.6A Active DE102013001948B4 (de) 2012-02-07 2013-02-04 Oberflächenformmessverfahren und -vorrichtung, Computerprogramm, computerlesbares nichtflüchtiges Speichermedium sowie Fertigungsverfahren eines optischen Elements

Country Status (3)

Country Link
US (1) US9239964B2 (de)
JP (1) JP5971965B2 (de)
DE (1) DE102013001948B4 (de)

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JP6494205B2 (ja) * 2013-07-31 2019-04-03 キヤノン株式会社 波面計測方法、形状計測方法、光学素子の製造方法、光学機器の製造方法、プログラム、波面計測装置
KR101552652B1 (ko) * 2013-11-26 2015-09-14 한국표준과학연구원 1차 미분 측정기의 동작 방법
FR3019409B1 (fr) * 2014-03-27 2017-08-11 Centre Nat Rech Scient Installation concentratrice de rayonnement cosmique equipee d'un systeme de controle de surface optique reflechissante
JP6532347B2 (ja) * 2014-08-14 2019-06-19 キヤノン株式会社 形状計測方法および形状計測装置
CN104200215A (zh) * 2014-08-27 2014-12-10 中国工程物理研究院激光聚变研究中心 一种大口径光学元件表面灰尘与麻点识别方法
JP6438251B2 (ja) * 2014-09-19 2018-12-12 キヤノン株式会社 算出方法、プログラム、情報処理装置及び計測装置
JP6418886B2 (ja) * 2014-10-15 2018-11-07 キヤノン株式会社 スロープデータ処理方法、スロープデータ処理装置および計測装置
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JP6685741B2 (ja) 2015-02-16 2020-04-22 キヤノン株式会社 形状計測方法、形状計測装置、プログラム、記録媒体及び光学素子の製造方法
JP6558975B2 (ja) * 2015-06-22 2019-08-14 キヤノン株式会社 形状計測方法、形状計測装置および形状計測プログラム

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CN103003662B (zh) * 2010-07-15 2015-06-24 佳能株式会社 用于测量被检表面的形状的测量方法、测量设备和光学元件的制造方法

Also Published As

Publication number Publication date
DE102013001948B4 (de) 2015-08-06
JP5971965B2 (ja) 2016-08-17
US9239964B2 (en) 2016-01-19
JP2013160680A (ja) 2013-08-19
DE102013001948A1 (de) 2013-08-08
US20130202215A1 (en) 2013-08-08

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